JPS5718561B2 - - Google Patents
Info
- Publication number
- JPS5718561B2 JPS5718561B2 JP5760078A JP5760078A JPS5718561B2 JP S5718561 B2 JPS5718561 B2 JP S5718561B2 JP 5760078 A JP5760078 A JP 5760078A JP 5760078 A JP5760078 A JP 5760078A JP S5718561 B2 JPS5718561 B2 JP S5718561B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5760078A JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5760078A JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54150161A JPS54150161A (en) | 1979-11-26 |
| JPS5718561B2 true JPS5718561B2 (en) | 1982-04-17 |
Family
ID=13060336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5760078A Granted JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54150161A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1156686B (en) * | 1982-10-18 | 1987-02-04 | Finike Italiana Marposs | HEAD FOR THE CONTROL OF LINEAR DIMENSIONS |
| IN161120B (en) * | 1983-03-30 | 1987-10-03 | Wyler Ag | |
| US4559717A (en) * | 1984-02-21 | 1985-12-24 | The United States Of America As Represented By The Secretary Of Commerce | Flexure hinge |
| US5187876A (en) * | 1989-08-04 | 1993-02-23 | Hatheway Alson E | Precision motion transducer |
| WO2007032026A2 (en) * | 2005-09-14 | 2007-03-22 | Hilaal Alam | An apparatus for moving an object in nanometer and method thereof |
| JP5706216B2 (en) * | 2011-03-31 | 2015-04-22 | 株式会社東京精密 | Touch probe |
| EP3115762A4 (en) | 2014-03-03 | 2018-04-25 | National University Corporation Kagawa University | Tactile sensor and method for evaluating sense of touch |
| JP5736095B1 (en) * | 2015-02-25 | 2015-06-17 | 株式会社東京精密 | Touch probe |
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1978
- 1978-05-17 JP JP5760078A patent/JPS54150161A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54150161A (en) | 1979-11-26 |