JPS54143058A - Electric-field radiation cathode and its manufacture - Google Patents

Electric-field radiation cathode and its manufacture

Info

Publication number
JPS54143058A
JPS54143058A JP5083078A JP5083078A JPS54143058A JP S54143058 A JPS54143058 A JP S54143058A JP 5083078 A JP5083078 A JP 5083078A JP 5083078 A JP5083078 A JP 5083078A JP S54143058 A JPS54143058 A JP S54143058A
Authority
JP
Japan
Prior art keywords
cathode
base body
cathode base
electron
control circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5083078A
Other languages
Japanese (ja)
Inventor
Yoshiyasu Harada
Takeshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP5083078A priority Critical patent/JPS54143058A/en
Publication of JPS54143058A publication Critical patent/JPS54143058A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To realize a cathode which can obtain a large current value by forming several needle-shaped cathodes made of a polymer, whose curvature radius at its tip can be controlled freely, at desired positions on a cathode base body.
CONSTITUTION: In the electronic apparatus with the function of a scanning electron microscope, cathode base body 8 is fitted to stage 7 in sample room 6 and a signal in a scanning-image observation mode is transmitted from control circuit 19 to power supplies 15 to 17. An electron beam from electron gun 2 scans on the surface of cathode base body 8 while forming a spot, so that the scanning image of cathode base body 8 will be obtained on cathode-ray tube 14. Over the observation of the image of the tip of cathode bose body 8, positions where several electron radiation parts should be formed are fixed and the voltage value of deflection power supply 17 equivalent to each position is stored in control circuit 19. Next, control circuit 19 is changed over to the carbon-polymer formation mode. After hydrocarbon is supplied with valve 11 opened, circuit 19 controls the electron beam to irradiate fixed positions on cathode base body 8 with the electron beam for a fixed time, thereby forming several electron radiation parts of a carbon polymer.
COPYRIGHT: (C)1979,JPO&Japio
JP5083078A 1978-04-28 1978-04-28 Electric-field radiation cathode and its manufacture Pending JPS54143058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5083078A JPS54143058A (en) 1978-04-28 1978-04-28 Electric-field radiation cathode and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5083078A JPS54143058A (en) 1978-04-28 1978-04-28 Electric-field radiation cathode and its manufacture

Publications (1)

Publication Number Publication Date
JPS54143058A true JPS54143058A (en) 1979-11-07

Family

ID=12869670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5083078A Pending JPS54143058A (en) 1978-04-28 1978-04-28 Electric-field radiation cathode and its manufacture

Country Status (1)

Country Link
JP (1) JPS54143058A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000500906A (en) * 1995-11-15 2000-01-25 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー Annealed carbon soot field emitter and field emitter cathode made therefrom

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100658A (en) * 1978-01-25 1979-08-08 Jeol Ltd Method and device for manufacturing electric-field radiation cathode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100658A (en) * 1978-01-25 1979-08-08 Jeol Ltd Method and device for manufacturing electric-field radiation cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000500906A (en) * 1995-11-15 2000-01-25 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー Annealed carbon soot field emitter and field emitter cathode made therefrom

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