JPS54114173A - Electronic probe device - Google Patents

Electronic probe device

Info

Publication number
JPS54114173A
JPS54114173A JP2173878A JP2173878A JPS54114173A JP S54114173 A JPS54114173 A JP S54114173A JP 2173878 A JP2173878 A JP 2173878A JP 2173878 A JP2173878 A JP 2173878A JP S54114173 A JPS54114173 A JP S54114173A
Authority
JP
Japan
Prior art keywords
slit
power source
converging lens
acceleration voltage
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2173878A
Other languages
English (en)
Other versions
JPS5854463B2 (ja
Inventor
Shojiro Tagata
Ichiro Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53021738A priority Critical patent/JPS5854463B2/ja
Publication of JPS54114173A publication Critical patent/JPS54114173A/ja
Publication of JPS5854463B2 publication Critical patent/JPS5854463B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP53021738A 1978-02-27 1978-02-27 電子プロ−ブ装置 Expired JPS5854463B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53021738A JPS5854463B2 (ja) 1978-02-27 1978-02-27 電子プロ−ブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53021738A JPS5854463B2 (ja) 1978-02-27 1978-02-27 電子プロ−ブ装置

Publications (2)

Publication Number Publication Date
JPS54114173A true JPS54114173A (en) 1979-09-06
JPS5854463B2 JPS5854463B2 (ja) 1983-12-05

Family

ID=12063407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53021738A Expired JPS5854463B2 (ja) 1978-02-27 1978-02-27 電子プロ−ブ装置

Country Status (1)

Country Link
JP (1) JPS5854463B2 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4524277A (en) * 1981-12-18 1985-06-18 Hitachi, Ltd. Charged particle beam apparatus
US4547669A (en) * 1982-09-27 1985-10-15 Jeol Ltd. Electron beam scanning device
JPS6126249U (ja) * 1984-07-24 1986-02-17 日本電子株式会社 最適絞り径指示装置
JPS63108654A (ja) * 1986-10-24 1988-05-13 Hitachi Ltd マイクロ波イオン源
JPH07220668A (ja) * 1994-02-04 1995-08-18 Seiko Instr Inc 走査型電子顕微鏡
JPH10106474A (ja) * 1996-09-30 1998-04-24 Seiko Instr Inc イオンビームによる加工装置
JP2010282977A (ja) * 2010-09-13 2010-12-16 Hitachi High-Technologies Corp 電子線装置およびその制御方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6294148U (ja) * 1985-11-29 1987-06-16

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4524277A (en) * 1981-12-18 1985-06-18 Hitachi, Ltd. Charged particle beam apparatus
US4547669A (en) * 1982-09-27 1985-10-15 Jeol Ltd. Electron beam scanning device
JPS6126249U (ja) * 1984-07-24 1986-02-17 日本電子株式会社 最適絞り径指示装置
JPS63108654A (ja) * 1986-10-24 1988-05-13 Hitachi Ltd マイクロ波イオン源
JPH07220668A (ja) * 1994-02-04 1995-08-18 Seiko Instr Inc 走査型電子顕微鏡
JPH10106474A (ja) * 1996-09-30 1998-04-24 Seiko Instr Inc イオンビームによる加工装置
JP2010282977A (ja) * 2010-09-13 2010-12-16 Hitachi High-Technologies Corp 電子線装置およびその制御方法

Also Published As

Publication number Publication date
JPS5854463B2 (ja) 1983-12-05

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