JPS54114173A - Electronic probe device - Google Patents
Electronic probe deviceInfo
- Publication number
- JPS54114173A JPS54114173A JP2173878A JP2173878A JPS54114173A JP S54114173 A JPS54114173 A JP S54114173A JP 2173878 A JP2173878 A JP 2173878A JP 2173878 A JP2173878 A JP 2173878A JP S54114173 A JPS54114173 A JP S54114173A
- Authority
- JP
- Japan
- Prior art keywords
- slit
- power source
- converging lens
- acceleration voltage
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53021738A JPS5854463B2 (ja) | 1978-02-27 | 1978-02-27 | 電子プロ−ブ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53021738A JPS5854463B2 (ja) | 1978-02-27 | 1978-02-27 | 電子プロ−ブ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54114173A true JPS54114173A (en) | 1979-09-06 |
JPS5854463B2 JPS5854463B2 (ja) | 1983-12-05 |
Family
ID=12063407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53021738A Expired JPS5854463B2 (ja) | 1978-02-27 | 1978-02-27 | 電子プロ−ブ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5854463B2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4524277A (en) * | 1981-12-18 | 1985-06-18 | Hitachi, Ltd. | Charged particle beam apparatus |
US4547669A (en) * | 1982-09-27 | 1985-10-15 | Jeol Ltd. | Electron beam scanning device |
JPS6126249U (ja) * | 1984-07-24 | 1986-02-17 | 日本電子株式会社 | 最適絞り径指示装置 |
JPS63108654A (ja) * | 1986-10-24 | 1988-05-13 | Hitachi Ltd | マイクロ波イオン源 |
JPH07220668A (ja) * | 1994-02-04 | 1995-08-18 | Seiko Instr Inc | 走査型電子顕微鏡 |
JPH10106474A (ja) * | 1996-09-30 | 1998-04-24 | Seiko Instr Inc | イオンビームによる加工装置 |
JP2010282977A (ja) * | 2010-09-13 | 2010-12-16 | Hitachi High-Technologies Corp | 電子線装置およびその制御方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6294148U (ja) * | 1985-11-29 | 1987-06-16 |
-
1978
- 1978-02-27 JP JP53021738A patent/JPS5854463B2/ja not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4524277A (en) * | 1981-12-18 | 1985-06-18 | Hitachi, Ltd. | Charged particle beam apparatus |
US4547669A (en) * | 1982-09-27 | 1985-10-15 | Jeol Ltd. | Electron beam scanning device |
JPS6126249U (ja) * | 1984-07-24 | 1986-02-17 | 日本電子株式会社 | 最適絞り径指示装置 |
JPS63108654A (ja) * | 1986-10-24 | 1988-05-13 | Hitachi Ltd | マイクロ波イオン源 |
JPH07220668A (ja) * | 1994-02-04 | 1995-08-18 | Seiko Instr Inc | 走査型電子顕微鏡 |
JPH10106474A (ja) * | 1996-09-30 | 1998-04-24 | Seiko Instr Inc | イオンビームによる加工装置 |
JP2010282977A (ja) * | 2010-09-13 | 2010-12-16 | Hitachi High-Technologies Corp | 電子線装置およびその制御方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5854463B2 (ja) | 1983-12-05 |
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