JPS54100767A - Film thickness gauge - Google Patents
Film thickness gaugeInfo
- Publication number
- JPS54100767A JPS54100767A JP691378A JP691378A JPS54100767A JP S54100767 A JPS54100767 A JP S54100767A JP 691378 A JP691378 A JP 691378A JP 691378 A JP691378 A JP 691378A JP S54100767 A JPS54100767 A JP S54100767A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- circuit
- atomic number
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To promptly meter the thickness of a film on a sample by metering the intensity of an electron beam irradiating the sample and the intensity of the reflected electron beam therefrom to obtain the mean atomic number of the sample having a thin film.
CONSTITUTION: A center control circuit 17 controls a sample moving mechanism 16 so that an electron beam from an electron gun 4 may irradiate a Faraday gauge 12 attached to a sample holder 7. The output of the Faraday gauge 12 is stored through an amplifier 13 in a signal converting circuit 11. While maintaining the irradiation current constant, the sample moving mechanism 16 is driven to irradiate an object sample region with the electron beam. The signal converting circuit 11 accomplishes division between the current level of the electron beam reflected from its detector 9 and the current level for sample irradiation stored so that the mean atomic number of the sample is obtained and fed to a film thickness metering circuit 14. In these ways, by introducing the acceleration voltage for sample irradiation and the means atomic number into the circuit 14, the thickness of the thin film 2 of the sample 1 can be obtained and displayed in a display device 15.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53006913A JPS5848842B2 (en) | 1978-01-25 | 1978-01-25 | Film thickness measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53006913A JPS5848842B2 (en) | 1978-01-25 | 1978-01-25 | Film thickness measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54100767A true JPS54100767A (en) | 1979-08-08 |
JPS5848842B2 JPS5848842B2 (en) | 1983-10-31 |
Family
ID=11651468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53006913A Expired JPS5848842B2 (en) | 1978-01-25 | 1978-01-25 | Film thickness measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5848842B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3132248A (en) * | 1961-11-20 | 1964-05-05 | Boeing Co | Beta radiation backscatter gauge |
-
1978
- 1978-01-25 JP JP53006913A patent/JPS5848842B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3132248A (en) * | 1961-11-20 | 1964-05-05 | Boeing Co | Beta radiation backscatter gauge |
Also Published As
Publication number | Publication date |
---|---|
JPS5848842B2 (en) | 1983-10-31 |
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