JPS54100767A - Film thickness gauge - Google Patents

Film thickness gauge

Info

Publication number
JPS54100767A
JPS54100767A JP691378A JP691378A JPS54100767A JP S54100767 A JPS54100767 A JP S54100767A JP 691378 A JP691378 A JP 691378A JP 691378 A JP691378 A JP 691378A JP S54100767 A JPS54100767 A JP S54100767A
Authority
JP
Japan
Prior art keywords
sample
electron beam
circuit
atomic number
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP691378A
Other languages
Japanese (ja)
Other versions
JPS5848842B2 (en
Inventor
Tadashi Watanabe
Jiyun Suzumi
Kiyoshi Harasawa
Yoshiaki Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53006913A priority Critical patent/JPS5848842B2/en
Publication of JPS54100767A publication Critical patent/JPS54100767A/en
Publication of JPS5848842B2 publication Critical patent/JPS5848842B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To promptly meter the thickness of a film on a sample by metering the intensity of an electron beam irradiating the sample and the intensity of the reflected electron beam therefrom to obtain the mean atomic number of the sample having a thin film.
CONSTITUTION: A center control circuit 17 controls a sample moving mechanism 16 so that an electron beam from an electron gun 4 may irradiate a Faraday gauge 12 attached to a sample holder 7. The output of the Faraday gauge 12 is stored through an amplifier 13 in a signal converting circuit 11. While maintaining the irradiation current constant, the sample moving mechanism 16 is driven to irradiate an object sample region with the electron beam. The signal converting circuit 11 accomplishes division between the current level of the electron beam reflected from its detector 9 and the current level for sample irradiation stored so that the mean atomic number of the sample is obtained and fed to a film thickness metering circuit 14. In these ways, by introducing the acceleration voltage for sample irradiation and the means atomic number into the circuit 14, the thickness of the thin film 2 of the sample 1 can be obtained and displayed in a display device 15.
COPYRIGHT: (C)1979,JPO&Japio
JP53006913A 1978-01-25 1978-01-25 Film thickness measuring device Expired JPS5848842B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53006913A JPS5848842B2 (en) 1978-01-25 1978-01-25 Film thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53006913A JPS5848842B2 (en) 1978-01-25 1978-01-25 Film thickness measuring device

Publications (2)

Publication Number Publication Date
JPS54100767A true JPS54100767A (en) 1979-08-08
JPS5848842B2 JPS5848842B2 (en) 1983-10-31

Family

ID=11651468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53006913A Expired JPS5848842B2 (en) 1978-01-25 1978-01-25 Film thickness measuring device

Country Status (1)

Country Link
JP (1) JPS5848842B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3132248A (en) * 1961-11-20 1964-05-05 Boeing Co Beta radiation backscatter gauge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3132248A (en) * 1961-11-20 1964-05-05 Boeing Co Beta radiation backscatter gauge

Also Published As

Publication number Publication date
JPS5848842B2 (en) 1983-10-31

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