JPS5361278A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5361278A
JPS5361278A JP13640976A JP13640976A JPS5361278A JP S5361278 A JPS5361278 A JP S5361278A JP 13640976 A JP13640976 A JP 13640976A JP 13640976 A JP13640976 A JP 13640976A JP S5361278 A JPS5361278 A JP S5361278A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
forming
marking
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13640976A
Other languages
Japanese (ja)
Inventor
Hatsuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13640976A priority Critical patent/JPS5361278A/en
Publication of JPS5361278A publication Critical patent/JPS5361278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To make marking distinct by forming a mask aligning marking in an oxide film and forming a recessed part in a wafer as well.
COPYRIGHT: (C)1978,JPO&Japio
JP13640976A 1976-11-15 1976-11-15 Production of semiconductor device Pending JPS5361278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13640976A JPS5361278A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13640976A JPS5361278A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5361278A true JPS5361278A (en) 1978-06-01

Family

ID=15174476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13640976A Pending JPS5361278A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5361278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167329A (en) * 1980-05-29 1981-12-23 Nec Corp Piling joint setting mark to be used in fine processing exposure technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167329A (en) * 1980-05-29 1981-12-23 Nec Corp Piling joint setting mark to be used in fine processing exposure technology

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