JPS5361278A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5361278A JPS5361278A JP13640976A JP13640976A JPS5361278A JP S5361278 A JPS5361278 A JP S5361278A JP 13640976 A JP13640976 A JP 13640976A JP 13640976 A JP13640976 A JP 13640976A JP S5361278 A JPS5361278 A JP S5361278A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- forming
- marking
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Weting (AREA)
Abstract
PURPOSE: To make marking distinct by forming a mask aligning marking in an oxide film and forming a recessed part in a wafer as well.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13640976A JPS5361278A (en) | 1976-11-15 | 1976-11-15 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13640976A JPS5361278A (en) | 1976-11-15 | 1976-11-15 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5361278A true JPS5361278A (en) | 1978-06-01 |
Family
ID=15174476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13640976A Pending JPS5361278A (en) | 1976-11-15 | 1976-11-15 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5361278A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167329A (en) * | 1980-05-29 | 1981-12-23 | Nec Corp | Piling joint setting mark to be used in fine processing exposure technology |
-
1976
- 1976-11-15 JP JP13640976A patent/JPS5361278A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167329A (en) * | 1980-05-29 | 1981-12-23 | Nec Corp | Piling joint setting mark to be used in fine processing exposure technology |
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