JPS5370666A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5370666A
JPS5370666A JP14673876A JP14673876A JPS5370666A JP S5370666 A JPS5370666 A JP S5370666A JP 14673876 A JP14673876 A JP 14673876A JP 14673876 A JP14673876 A JP 14673876A JP S5370666 A JPS5370666 A JP S5370666A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
mosfets
device suitable
channel doping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14673876A
Other languages
Japanese (ja)
Inventor
Shigero Kuninobu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14673876A priority Critical patent/JPS5370666A/en
Publication of JPS5370666A publication Critical patent/JPS5370666A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To realize the process for production of a semiconductor device suitable for the production of concentration inversion type MOSFETs with channel doping and MOSFETs.
COPYRIGHT: (C)1978,JPO&Japio
JP14673876A 1976-12-06 1976-12-06 Production of semiconductor device Pending JPS5370666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14673876A JPS5370666A (en) 1976-12-06 1976-12-06 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14673876A JPS5370666A (en) 1976-12-06 1976-12-06 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5370666A true JPS5370666A (en) 1978-06-23

Family

ID=15414467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14673876A Pending JPS5370666A (en) 1976-12-06 1976-12-06 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5370666A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6168907B1 (en) 1997-11-06 2001-01-02 Hyundai Electronics Industries Co., Ltd. Method for etching semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6168907B1 (en) 1997-11-06 2001-01-02 Hyundai Electronics Industries Co., Ltd. Method for etching semiconductor device

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