JPS5364473A - Production of semiconductor device and its apparatus - Google Patents
Production of semiconductor device and its apparatusInfo
- Publication number
- JPS5364473A JPS5364473A JP13974176A JP13974176A JPS5364473A JP S5364473 A JPS5364473 A JP S5364473A JP 13974176 A JP13974176 A JP 13974176A JP 13974176 A JP13974176 A JP 13974176A JP S5364473 A JPS5364473 A JP S5364473A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- wafer
- rinsing
- disposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To eliminate defectives and improve yield by disposing a wafer after rinsing in heated steam and gradually exposing the wafer to inert gas to subject it to vapor drying.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13974176A JPS5364473A (en) | 1976-11-20 | 1976-11-20 | Production of semiconductor device and its apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13974176A JPS5364473A (en) | 1976-11-20 | 1976-11-20 | Production of semiconductor device and its apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5364473A true JPS5364473A (en) | 1978-06-08 |
Family
ID=15252286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13974176A Pending JPS5364473A (en) | 1976-11-20 | 1976-11-20 | Production of semiconductor device and its apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364473A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850740A (en) * | 1981-09-21 | 1983-03-25 | Hitachi Ltd | Semiconductor treatment apparatus |
JPS59227125A (en) * | 1983-06-09 | 1984-12-20 | Matsushita Electronics Corp | Centrifugal dewatering method for planar solid |
-
1976
- 1976-11-20 JP JP13974176A patent/JPS5364473A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850740A (en) * | 1981-09-21 | 1983-03-25 | Hitachi Ltd | Semiconductor treatment apparatus |
JPS59227125A (en) * | 1983-06-09 | 1984-12-20 | Matsushita Electronics Corp | Centrifugal dewatering method for planar solid |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5212576A (en) | Wafer washing drying device | |
JPS5224478A (en) | Semiconductor device manufacturing process | |
JPS5246784A (en) | Process for production of semiconductor device | |
JPS5364473A (en) | Production of semiconductor device and its apparatus | |
JPS5240059A (en) | Process for production of semiconductor device | |
JPS5260567A (en) | Production of semiconductor device | |
JPS5383467A (en) | Production of semiconductor device | |
JPS5258379A (en) | Production of semiconductor element | |
JPS543473A (en) | Manufacture of semiconductor device | |
JPS5244569A (en) | Process for production of semiconductor element | |
JPS522163A (en) | Wafer cleaning and drying device | |
JPS5384684A (en) | Plasma etching device | |
JPS5377178A (en) | Chuking device of semiconductor element substrate | |
JPS5249781A (en) | Process for production of semiconductor device | |
JPS51123949A (en) | Process for drying and device thereof | |
JPS5325351A (en) | Heat treatment method of semiconductor wafers | |
JPS5434755A (en) | Manufacture of semiconductor device | |
JPS5261956A (en) | Production of semiconductor device | |
JPS51140638A (en) | Positioning method | |
JPS51112292A (en) | Semiconductor device | |
JPS5245272A (en) | Process for washing surface of semiconductor device | |
JPS5273673A (en) | Production of semiconductor device | |
JPS52124869A (en) | Treatment jig for semiconductor wafers | |
JPS5245884A (en) | Process for production of semiconductor device | |
JPS5361267A (en) | Production of semiconductor device |