JPS5364473A - Production of semiconductor device and its apparatus - Google Patents

Production of semiconductor device and its apparatus

Info

Publication number
JPS5364473A
JPS5364473A JP13974176A JP13974176A JPS5364473A JP S5364473 A JPS5364473 A JP S5364473A JP 13974176 A JP13974176 A JP 13974176A JP 13974176 A JP13974176 A JP 13974176A JP S5364473 A JPS5364473 A JP S5364473A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wafer
rinsing
disposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13974176A
Other languages
Japanese (ja)
Inventor
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP13974176A priority Critical patent/JPS5364473A/en
Publication of JPS5364473A publication Critical patent/JPS5364473A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To eliminate defectives and improve yield by disposing a wafer after rinsing in heated steam and gradually exposing the wafer to inert gas to subject it to vapor drying.
COPYRIGHT: (C)1978,JPO&Japio
JP13974176A 1976-11-20 1976-11-20 Production of semiconductor device and its apparatus Pending JPS5364473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13974176A JPS5364473A (en) 1976-11-20 1976-11-20 Production of semiconductor device and its apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13974176A JPS5364473A (en) 1976-11-20 1976-11-20 Production of semiconductor device and its apparatus

Publications (1)

Publication Number Publication Date
JPS5364473A true JPS5364473A (en) 1978-06-08

Family

ID=15252286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13974176A Pending JPS5364473A (en) 1976-11-20 1976-11-20 Production of semiconductor device and its apparatus

Country Status (1)

Country Link
JP (1) JPS5364473A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850740A (en) * 1981-09-21 1983-03-25 Hitachi Ltd Semiconductor treatment apparatus
JPS59227125A (en) * 1983-06-09 1984-12-20 Matsushita Electronics Corp Centrifugal dewatering method for planar solid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850740A (en) * 1981-09-21 1983-03-25 Hitachi Ltd Semiconductor treatment apparatus
JPS59227125A (en) * 1983-06-09 1984-12-20 Matsushita Electronics Corp Centrifugal dewatering method for planar solid

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