JPS5343019B2 - - Google Patents
Info
- Publication number
- JPS5343019B2 JPS5343019B2 JP190776A JP190776A JPS5343019B2 JP S5343019 B2 JPS5343019 B2 JP S5343019B2 JP 190776 A JP190776 A JP 190776A JP 190776 A JP190776 A JP 190776A JP S5343019 B2 JPS5343019 B2 JP S5343019B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP190776A JPS5285477A (en) | 1976-01-09 | 1976-01-09 | Wafer carrying container for integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP190776A JPS5285477A (en) | 1976-01-09 | 1976-01-09 | Wafer carrying container for integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5285477A JPS5285477A (en) | 1977-07-15 |
| JPS5343019B2 true JPS5343019B2 (en) | 1978-11-16 |
Family
ID=11514640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP190776A Granted JPS5285477A (en) | 1976-01-09 | 1976-01-09 | Wafer carrying container for integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5285477A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61199578A (en) * | 1985-02-27 | 1986-09-04 | Tokai Rika Co Ltd | Welding monitoring device in arc welding robot |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54134553A (en) * | 1978-04-11 | 1979-10-19 | Mitsubishi Electric Corp | Wafer holding tool |
| JPS5512715A (en) * | 1978-07-13 | 1980-01-29 | Zenkiyou Kasei Kogyo Kk | Container for high purity ic wafer |
| JPS55148416A (en) * | 1979-05-07 | 1980-11-19 | Nec Kyushu Ltd | Magazine for accommodating semiconductor substrate |
| JPS5920628U (en) * | 1982-07-28 | 1984-02-08 | アルゴ工業株式会社 | wafer storage container |
| JPS59123339U (en) * | 1983-02-08 | 1984-08-20 | ホ−ヤ株式会社 | board storage box |
| JPS59146941U (en) * | 1983-03-22 | 1984-10-01 | 沖電気工業株式会社 | Semiconductor cleaning jig |
| JPS59185826U (en) * | 1983-05-11 | 1984-12-10 | クリ−ンサアフエイス技術株式会社 | Case for photomask board |
| US4966284A (en) * | 1987-07-07 | 1990-10-30 | Empak, Inc. | Substrate package |
| JPH02306645A (en) * | 1989-05-22 | 1990-12-20 | Hitachi Electron Eng Co Ltd | Loading method for wafer of inspection device and structure of carrying case table |
| JP2571206Y2 (en) * | 1993-11-10 | 1998-05-18 | 信越ポリマー株式会社 | Wafer storage container |
| JP2888409B2 (en) * | 1993-12-14 | 1999-05-10 | 信越半導体株式会社 | Wafer cleaning tank |
| JP2803567B2 (en) * | 1994-05-11 | 1998-09-24 | 信越半導体株式会社 | Packaging structure for semiconductor wafer storage container |
| TWM510539U (en) * | 2015-03-13 | 2015-10-11 | Entegris Inc | Modified spring cushion for film frame shipper |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49133555U (en) * | 1973-03-19 | 1974-11-16 |
-
1976
- 1976-01-09 JP JP190776A patent/JPS5285477A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61199578A (en) * | 1985-02-27 | 1986-09-04 | Tokai Rika Co Ltd | Welding monitoring device in arc welding robot |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5285477A (en) | 1977-07-15 |