JPS5285477A - Wafer carrying container for integrated circuit - Google Patents
Wafer carrying container for integrated circuitInfo
- Publication number
- JPS5285477A JPS5285477A JP190776A JP190776A JPS5285477A JP S5285477 A JPS5285477 A JP S5285477A JP 190776 A JP190776 A JP 190776A JP 190776 A JP190776 A JP 190776A JP S5285477 A JPS5285477 A JP S5285477A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- wafer carrying
- carrying container
- container
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP190776A JPS5285477A (en) | 1976-01-09 | 1976-01-09 | Wafer carrying container for integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP190776A JPS5285477A (en) | 1976-01-09 | 1976-01-09 | Wafer carrying container for integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5285477A true JPS5285477A (en) | 1977-07-15 |
JPS5343019B2 JPS5343019B2 (en) | 1978-11-16 |
Family
ID=11514640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP190776A Granted JPS5285477A (en) | 1976-01-09 | 1976-01-09 | Wafer carrying container for integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285477A (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54134553A (en) * | 1978-04-11 | 1979-10-19 | Mitsubishi Electric Corp | Wafer holding tool |
JPS5512715A (en) * | 1978-07-13 | 1980-01-29 | Zenkiyou Kasei Kogyo Kk | Container for high purity ic wafer |
JPS55148416A (en) * | 1979-05-07 | 1980-11-19 | Nec Kyushu Ltd | Magazine for accommodating semiconductor substrate |
JPS5920628U (en) * | 1982-07-28 | 1984-02-08 | アルゴ工業株式会社 | wafer storage container |
JPS59123339U (en) * | 1983-02-08 | 1984-08-20 | ホ−ヤ株式会社 | board storage box |
JPS59146941U (en) * | 1983-03-22 | 1984-10-01 | 沖電気工業株式会社 | Semiconductor cleaning jig |
JPS59185826U (en) * | 1983-05-11 | 1984-12-10 | クリ−ンサアフエイス技術株式会社 | Case for photomask board |
JPH02306645A (en) * | 1989-05-22 | 1990-12-20 | Hitachi Electron Eng Co Ltd | Loading method for wafer of inspection device and structure of carrying case table |
JPH0729841U (en) * | 1993-11-10 | 1995-06-02 | 信越ポリマー株式会社 | Wafer storage container |
JPH07169731A (en) * | 1993-12-14 | 1995-07-04 | Shin Etsu Handotai Co Ltd | Wafer cleaning bath |
JPH07307381A (en) * | 1989-03-31 | 1995-11-21 | Empak Inc | Package for semiconductor wafer, disk or substrate |
JPH07307378A (en) * | 1994-05-11 | 1995-11-21 | Shin Etsu Handotai Co Ltd | Packing structure for semiconductor wafer housing container, and packing method thereof |
CN107534006A (en) * | 2015-03-13 | 2018-01-02 | 恩特格里斯公司 | Modified spring pad for film frame conveyer |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61199578A (en) * | 1985-02-27 | 1986-09-04 | Tokai Rika Co Ltd | Welding monitoring device in arc welding robot |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49133555U (en) * | 1973-03-19 | 1974-11-16 |
-
1976
- 1976-01-09 JP JP190776A patent/JPS5285477A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49133555U (en) * | 1973-03-19 | 1974-11-16 |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526612B2 (en) * | 1978-04-11 | 1980-07-15 | ||
JPS54134553A (en) * | 1978-04-11 | 1979-10-19 | Mitsubishi Electric Corp | Wafer holding tool |
JPS5512715A (en) * | 1978-07-13 | 1980-01-29 | Zenkiyou Kasei Kogyo Kk | Container for high purity ic wafer |
JPS5712525B2 (en) * | 1978-07-13 | 1982-03-11 | ||
JPS55148416A (en) * | 1979-05-07 | 1980-11-19 | Nec Kyushu Ltd | Magazine for accommodating semiconductor substrate |
JPS5920628U (en) * | 1982-07-28 | 1984-02-08 | アルゴ工業株式会社 | wafer storage container |
JPS59123339U (en) * | 1983-02-08 | 1984-08-20 | ホ−ヤ株式会社 | board storage box |
JPS6314462Y2 (en) * | 1983-02-08 | 1988-04-22 | ||
JPH0438518Y2 (en) * | 1983-03-22 | 1992-09-09 | ||
JPS59146941U (en) * | 1983-03-22 | 1984-10-01 | 沖電気工業株式会社 | Semiconductor cleaning jig |
JPS59185826U (en) * | 1983-05-11 | 1984-12-10 | クリ−ンサアフエイス技術株式会社 | Case for photomask board |
JPH07307381A (en) * | 1989-03-31 | 1995-11-21 | Empak Inc | Package for semiconductor wafer, disk or substrate |
JPH02306645A (en) * | 1989-05-22 | 1990-12-20 | Hitachi Electron Eng Co Ltd | Loading method for wafer of inspection device and structure of carrying case table |
JPH0729841U (en) * | 1993-11-10 | 1995-06-02 | 信越ポリマー株式会社 | Wafer storage container |
JPH07169731A (en) * | 1993-12-14 | 1995-07-04 | Shin Etsu Handotai Co Ltd | Wafer cleaning bath |
JPH07307378A (en) * | 1994-05-11 | 1995-11-21 | Shin Etsu Handotai Co Ltd | Packing structure for semiconductor wafer housing container, and packing method thereof |
CN107534006A (en) * | 2015-03-13 | 2018-01-02 | 恩特格里斯公司 | Modified spring pad for film frame conveyer |
JP2018509767A (en) * | 2015-03-13 | 2018-04-05 | インテグリス・インコーポレーテッド | Improved spring cushion for film frame shippers |
CN107534006B (en) * | 2015-03-13 | 2020-11-03 | 恩特格里斯公司 | Improved spring cushion for film frame conveyor |
Also Published As
Publication number | Publication date |
---|---|
JPS5343019B2 (en) | 1978-11-16 |
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