JPS5285477A - Wafer carrying container for integrated circuit - Google Patents

Wafer carrying container for integrated circuit

Info

Publication number
JPS5285477A
JPS5285477A JP190776A JP190776A JPS5285477A JP S5285477 A JPS5285477 A JP S5285477A JP 190776 A JP190776 A JP 190776A JP 190776 A JP190776 A JP 190776A JP S5285477 A JPS5285477 A JP S5285477A
Authority
JP
Japan
Prior art keywords
integrated circuit
wafer carrying
carrying container
container
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP190776A
Other languages
Japanese (ja)
Other versions
JPS5343019B2 (en
Inventor
Sadaichi Watanabe
Hiroshi Andou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SENKEN KK
Original Assignee
SENKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SENKEN KK filed Critical SENKEN KK
Priority to JP190776A priority Critical patent/JPS5285477A/en
Publication of JPS5285477A publication Critical patent/JPS5285477A/en
Publication of JPS5343019B2 publication Critical patent/JPS5343019B2/ja
Granted legal-status Critical Current

Links

JP190776A 1976-01-09 1976-01-09 Wafer carrying container for integrated circuit Granted JPS5285477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP190776A JPS5285477A (en) 1976-01-09 1976-01-09 Wafer carrying container for integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP190776A JPS5285477A (en) 1976-01-09 1976-01-09 Wafer carrying container for integrated circuit

Publications (2)

Publication Number Publication Date
JPS5285477A true JPS5285477A (en) 1977-07-15
JPS5343019B2 JPS5343019B2 (en) 1978-11-16

Family

ID=11514640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP190776A Granted JPS5285477A (en) 1976-01-09 1976-01-09 Wafer carrying container for integrated circuit

Country Status (1)

Country Link
JP (1) JPS5285477A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54134553A (en) * 1978-04-11 1979-10-19 Mitsubishi Electric Corp Wafer holding tool
JPS5512715A (en) * 1978-07-13 1980-01-29 Zenkiyou Kasei Kogyo Kk Container for high purity ic wafer
JPS55148416A (en) * 1979-05-07 1980-11-19 Nec Kyushu Ltd Magazine for accommodating semiconductor substrate
JPS5920628U (en) * 1982-07-28 1984-02-08 アルゴ工業株式会社 wafer storage container
JPS59123339U (en) * 1983-02-08 1984-08-20 ホ−ヤ株式会社 board storage box
JPS59146941U (en) * 1983-03-22 1984-10-01 沖電気工業株式会社 Semiconductor cleaning jig
JPS59185826U (en) * 1983-05-11 1984-12-10 クリ−ンサアフエイス技術株式会社 Case for photomask board
JPH02306645A (en) * 1989-05-22 1990-12-20 Hitachi Electron Eng Co Ltd Loading method for wafer of inspection device and structure of carrying case table
JPH0729841U (en) * 1993-11-10 1995-06-02 信越ポリマー株式会社 Wafer storage container
JPH07169731A (en) * 1993-12-14 1995-07-04 Shin Etsu Handotai Co Ltd Wafer cleaning bath
JPH07307381A (en) * 1989-03-31 1995-11-21 Empak Inc Package for semiconductor wafer, disk or substrate
JPH07307378A (en) * 1994-05-11 1995-11-21 Shin Etsu Handotai Co Ltd Packing structure for semiconductor wafer housing container, and packing method thereof
CN107534006A (en) * 2015-03-13 2018-01-02 恩特格里斯公司 Modified spring pad for film frame conveyer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199578A (en) * 1985-02-27 1986-09-04 Tokai Rika Co Ltd Welding monitoring device in arc welding robot

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49133555U (en) * 1973-03-19 1974-11-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49133555U (en) * 1973-03-19 1974-11-16

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526612B2 (en) * 1978-04-11 1980-07-15
JPS54134553A (en) * 1978-04-11 1979-10-19 Mitsubishi Electric Corp Wafer holding tool
JPS5512715A (en) * 1978-07-13 1980-01-29 Zenkiyou Kasei Kogyo Kk Container for high purity ic wafer
JPS5712525B2 (en) * 1978-07-13 1982-03-11
JPS55148416A (en) * 1979-05-07 1980-11-19 Nec Kyushu Ltd Magazine for accommodating semiconductor substrate
JPS5920628U (en) * 1982-07-28 1984-02-08 アルゴ工業株式会社 wafer storage container
JPS59123339U (en) * 1983-02-08 1984-08-20 ホ−ヤ株式会社 board storage box
JPS6314462Y2 (en) * 1983-02-08 1988-04-22
JPH0438518Y2 (en) * 1983-03-22 1992-09-09
JPS59146941U (en) * 1983-03-22 1984-10-01 沖電気工業株式会社 Semiconductor cleaning jig
JPS59185826U (en) * 1983-05-11 1984-12-10 クリ−ンサアフエイス技術株式会社 Case for photomask board
JPH07307381A (en) * 1989-03-31 1995-11-21 Empak Inc Package for semiconductor wafer, disk or substrate
JPH02306645A (en) * 1989-05-22 1990-12-20 Hitachi Electron Eng Co Ltd Loading method for wafer of inspection device and structure of carrying case table
JPH0729841U (en) * 1993-11-10 1995-06-02 信越ポリマー株式会社 Wafer storage container
JPH07169731A (en) * 1993-12-14 1995-07-04 Shin Etsu Handotai Co Ltd Wafer cleaning bath
JPH07307378A (en) * 1994-05-11 1995-11-21 Shin Etsu Handotai Co Ltd Packing structure for semiconductor wafer housing container, and packing method thereof
CN107534006A (en) * 2015-03-13 2018-01-02 恩特格里斯公司 Modified spring pad for film frame conveyer
JP2018509767A (en) * 2015-03-13 2018-04-05 インテグリス・インコーポレーテッド Improved spring cushion for film frame shippers
CN107534006B (en) * 2015-03-13 2020-11-03 恩特格里斯公司 Improved spring cushion for film frame conveyor

Also Published As

Publication number Publication date
JPS5343019B2 (en) 1978-11-16

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