JPS5363866A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5363866A
JPS5363866A JP13831576A JP13831576A JPS5363866A JP S5363866 A JPS5363866 A JP S5363866A JP 13831576 A JP13831576 A JP 13831576A JP 13831576 A JP13831576 A JP 13831576A JP S5363866 A JPS5363866 A JP S5363866A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
evenning
improvement
achieve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13831576A
Other languages
Japanese (ja)
Inventor
Shinaya Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13831576A priority Critical patent/JPS5363866A/en
Publication of JPS5363866A publication Critical patent/JPS5363866A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To achieve the improvement in element characteristics by evenning the etching amount of pellet side faces where semiconductor elements are formed.
COPYRIGHT: (C)1978,JPO&Japio
JP13831576A 1976-11-19 1976-11-19 Production of semiconductor device Pending JPS5363866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13831576A JPS5363866A (en) 1976-11-19 1976-11-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13831576A JPS5363866A (en) 1976-11-19 1976-11-19 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5363866A true JPS5363866A (en) 1978-06-07

Family

ID=15219010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13831576A Pending JPS5363866A (en) 1976-11-19 1976-11-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5363866A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512710A (en) * 1978-07-12 1980-01-29 Toshiba Corp Semiconductor device
JPS58145175A (en) * 1982-02-22 1983-08-29 Nec Corp Manufacture of josephson integrated circuit chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512710A (en) * 1978-07-12 1980-01-29 Toshiba Corp Semiconductor device
JPS58145175A (en) * 1982-02-22 1983-08-29 Nec Corp Manufacture of josephson integrated circuit chip

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