JPS5363866A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5363866A JPS5363866A JP13831576A JP13831576A JPS5363866A JP S5363866 A JPS5363866 A JP S5363866A JP 13831576 A JP13831576 A JP 13831576A JP 13831576 A JP13831576 A JP 13831576A JP S5363866 A JPS5363866 A JP S5363866A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- evenning
- improvement
- achieve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To achieve the improvement in element characteristics by evenning the etching amount of pellet side faces where semiconductor elements are formed.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13831576A JPS5363866A (en) | 1976-11-19 | 1976-11-19 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13831576A JPS5363866A (en) | 1976-11-19 | 1976-11-19 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5363866A true JPS5363866A (en) | 1978-06-07 |
Family
ID=15219010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13831576A Pending JPS5363866A (en) | 1976-11-19 | 1976-11-19 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5363866A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5512710A (en) * | 1978-07-12 | 1980-01-29 | Toshiba Corp | Semiconductor device |
JPS58145175A (en) * | 1982-02-22 | 1983-08-29 | Nec Corp | Manufacture of josephson integrated circuit chip |
-
1976
- 1976-11-19 JP JP13831576A patent/JPS5363866A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5512710A (en) * | 1978-07-12 | 1980-01-29 | Toshiba Corp | Semiconductor device |
JPS58145175A (en) * | 1982-02-22 | 1983-08-29 | Nec Corp | Manufacture of josephson integrated circuit chip |
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