JPS53148394A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53148394A JPS53148394A JP6355277A JP6355277A JPS53148394A JP S53148394 A JPS53148394 A JP S53148394A JP 6355277 A JP6355277 A JP 6355277A JP 6355277 A JP6355277 A JP 6355277A JP S53148394 A JPS53148394 A JP S53148394A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- manufacture
- semiconductor device
- high concentration
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To manufacture single crystal region with good quality, by laminating epitaxial layer on high concentration impurity layer on a substrate, providing grooves reaching the layer from the surface, and making the high concentration layer into high resistance and oxidizing the side surface of the grooves through the anodic oxidation and heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6355277A JPS53148394A (en) | 1977-05-31 | 1977-05-31 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6355277A JPS53148394A (en) | 1977-05-31 | 1977-05-31 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53148394A true JPS53148394A (en) | 1978-12-23 |
Family
ID=13232494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6355277A Pending JPS53148394A (en) | 1977-05-31 | 1977-05-31 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148394A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4849370A (en) * | 1987-12-21 | 1989-07-18 | Texas Instruments Incorporated | Anodizable strain layer for SOI semiconductor structures |
US5494846A (en) * | 1993-12-17 | 1996-02-27 | Nec Corporation | Method of manufacturing semiconductor device |
US5750432A (en) * | 1995-06-07 | 1998-05-12 | Harris Corporation | Defect control in formation of dielectrically isolated semiconductor device regions |
US5929508A (en) * | 1998-05-21 | 1999-07-27 | Harris Corp | Defect gettering by induced stress |
WO2006006392A1 (en) * | 2004-07-07 | 2006-01-19 | Matsushita Electric Industrial Co., Ltd. | Solid-state image pickup device, manufacturing method thereof and camera using the solid-state image pickup device |
-
1977
- 1977-05-31 JP JP6355277A patent/JPS53148394A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4849370A (en) * | 1987-12-21 | 1989-07-18 | Texas Instruments Incorporated | Anodizable strain layer for SOI semiconductor structures |
US5494846A (en) * | 1993-12-17 | 1996-02-27 | Nec Corporation | Method of manufacturing semiconductor device |
US5750432A (en) * | 1995-06-07 | 1998-05-12 | Harris Corporation | Defect control in formation of dielectrically isolated semiconductor device regions |
US5929508A (en) * | 1998-05-21 | 1999-07-27 | Harris Corp | Defect gettering by induced stress |
WO2006006392A1 (en) * | 2004-07-07 | 2006-01-19 | Matsushita Electric Industrial Co., Ltd. | Solid-state image pickup device, manufacturing method thereof and camera using the solid-state image pickup device |
CN100459141C (en) * | 2004-07-07 | 2009-02-04 | 松下电器产业株式会社 | Solid-state image pickup device, manufacturing method thereof and camera using the solid-state image pickup device |
US7696592B2 (en) | 2004-07-07 | 2010-04-13 | Panasonic Corporation | Solid state imaging apparatus method for fabricating the same and camera using the same |
JP4719149B2 (en) * | 2004-07-07 | 2011-07-06 | パナソニック株式会社 | Solid-state imaging device and camera using the same |
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