JPS53120380A - Measuring method of exposure accuracy of electron ray exposure apparatus - Google Patents
Measuring method of exposure accuracy of electron ray exposure apparatusInfo
- Publication number
- JPS53120380A JPS53120380A JP3569377A JP3569377A JPS53120380A JP S53120380 A JPS53120380 A JP S53120380A JP 3569377 A JP3569377 A JP 3569377A JP 3569377 A JP3569377 A JP 3569377A JP S53120380 A JPS53120380 A JP S53120380A
- Authority
- JP
- Japan
- Prior art keywords
- measuring method
- exposure
- electron ray
- accuracy
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To make psssible easy measurement of exposure accuracy from the results of measurement of spacking between patterns by forming the same pattern in a slightly deviated position through double exposure.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3569377A JPS53120380A (en) | 1977-03-30 | 1977-03-30 | Measuring method of exposure accuracy of electron ray exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3569377A JPS53120380A (en) | 1977-03-30 | 1977-03-30 | Measuring method of exposure accuracy of electron ray exposure apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53120380A true JPS53120380A (en) | 1978-10-20 |
JPS5416192B2 JPS5416192B2 (en) | 1979-06-20 |
Family
ID=12448968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3569377A Granted JPS53120380A (en) | 1977-03-30 | 1977-03-30 | Measuring method of exposure accuracy of electron ray exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120380A (en) |
-
1977
- 1977-03-30 JP JP3569377A patent/JPS53120380A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5416192B2 (en) | 1979-06-20 |
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