JPS53106680A - Vacuum depoistion apparatus - Google Patents

Vacuum depoistion apparatus

Info

Publication number
JPS53106680A
JPS53106680A JP2158177A JP2158177A JPS53106680A JP S53106680 A JPS53106680 A JP S53106680A JP 2158177 A JP2158177 A JP 2158177A JP 2158177 A JP2158177 A JP 2158177A JP S53106680 A JPS53106680 A JP S53106680A
Authority
JP
Japan
Prior art keywords
vacuum
depoistion
carbon rod
carbon
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2158177A
Other languages
Japanese (ja)
Inventor
Yoshimasa Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2158177A priority Critical patent/JPS53106680A/en
Publication of JPS53106680A publication Critical patent/JPS53106680A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Abstract

PURPOSE:To provide a vacuum deposition apparatus for carbon which is continuously used at a constant electric current by contacting the uncut end of a fine carbon rod of a pair of carbon rods with the other carbon rod on one axle, by pushing the fine carbon rod with a spring placed at the rear end of the fine carbon rod.
JP2158177A 1977-03-02 1977-03-02 Vacuum depoistion apparatus Pending JPS53106680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2158177A JPS53106680A (en) 1977-03-02 1977-03-02 Vacuum depoistion apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2158177A JPS53106680A (en) 1977-03-02 1977-03-02 Vacuum depoistion apparatus

Publications (1)

Publication Number Publication Date
JPS53106680A true JPS53106680A (en) 1978-09-16

Family

ID=12058994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2158177A Pending JPS53106680A (en) 1977-03-02 1977-03-02 Vacuum depoistion apparatus

Country Status (1)

Country Link
JP (1) JPS53106680A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005150118A (en) * 2003-11-18 2005-06-09 Unaxis Balzer Ag Ignition device, electrical arc evaporator and processing method of workpieces
CN110789263A (en) * 2019-11-07 2020-02-14 安徽超文玻璃科技有限公司 Manufacturing process and manufacturing equipment for inner and outer double-layer patterns of glass cup

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005150118A (en) * 2003-11-18 2005-06-09 Unaxis Balzer Ag Ignition device, electrical arc evaporator and processing method of workpieces
CN110789263A (en) * 2019-11-07 2020-02-14 安徽超文玻璃科技有限公司 Manufacturing process and manufacturing equipment for inner and outer double-layer patterns of glass cup

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