JPS53105981A - Etching device - Google Patents
Etching deviceInfo
- Publication number
- JPS53105981A JPS53105981A JP2022077A JP2022077A JPS53105981A JP S53105981 A JPS53105981 A JP S53105981A JP 2022077 A JP2022077 A JP 2022077A JP 2022077 A JP2022077 A JP 2022077A JP S53105981 A JPS53105981 A JP S53105981A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etching device
- unloader
- loader
- integrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To secure an accurate etching for the micro pattern through an integrate a work, by installing the loader, etching mechanism, auxiliary housing mechanism, unloader and external appearance check mechanism onto one unit of the base board.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022077A JPS53105981A (en) | 1977-02-28 | 1977-02-28 | Etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022077A JPS53105981A (en) | 1977-02-28 | 1977-02-28 | Etching device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1233687A Division JPS62271436A (en) | 1987-01-23 | 1987-01-23 | Etching system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53105981A true JPS53105981A (en) | 1978-09-14 |
Family
ID=12021073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022077A Pending JPS53105981A (en) | 1977-02-28 | 1977-02-28 | Etching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53105981A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56103439A (en) * | 1980-01-21 | 1981-08-18 | Mitsubishi Electric Corp | Apparatus for treating semiconductor substrate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4985969A (en) * | 1972-12-20 | 1974-08-17 | ||
JPS5142916A (en) * | 1974-10-09 | 1976-04-12 | Sumitomo Metal Ind |
-
1977
- 1977-02-28 JP JP2022077A patent/JPS53105981A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4985969A (en) * | 1972-12-20 | 1974-08-17 | ||
JPS5142916A (en) * | 1974-10-09 | 1976-04-12 | Sumitomo Metal Ind |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56103439A (en) * | 1980-01-21 | 1981-08-18 | Mitsubishi Electric Corp | Apparatus for treating semiconductor substrate |
JPH0122979B2 (en) * | 1980-01-21 | 1989-04-28 | Mitsubishi Electric Corp |
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