JPS527096A - Pattern making method - Google Patents

Pattern making method

Info

Publication number
JPS527096A
JPS527096A JP8309375A JP8309375A JPS527096A JP S527096 A JPS527096 A JP S527096A JP 8309375 A JP8309375 A JP 8309375A JP 8309375 A JP8309375 A JP 8309375A JP S527096 A JPS527096 A JP S527096A
Authority
JP
Japan
Prior art keywords
making method
pattern making
pattern
baking
post
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8309375A
Other languages
Japanese (ja)
Other versions
JPS5540179B2 (en
Inventor
Norikazu Tsumita
Masaki Takahashi
Hideki Nishida
Koji Yamada
Yutaka Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8309375A priority Critical patent/JPS527096A/en
Publication of JPS527096A publication Critical patent/JPS527096A/en
Publication of JPS5540179B2 publication Critical patent/JPS5540179B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To provide a pattern making method,which can prevent a pattern from deforming during a process of post-baking in a usual resist pattern formation.
COPYRIGHT: (C)1977,JPO&Japio
JP8309375A 1975-07-08 1975-07-08 Pattern making method Granted JPS527096A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8309375A JPS527096A (en) 1975-07-08 1975-07-08 Pattern making method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8309375A JPS527096A (en) 1975-07-08 1975-07-08 Pattern making method

Publications (2)

Publication Number Publication Date
JPS527096A true JPS527096A (en) 1977-01-19
JPS5540179B2 JPS5540179B2 (en) 1980-10-16

Family

ID=13792554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8309375A Granted JPS527096A (en) 1975-07-08 1975-07-08 Pattern making method

Country Status (1)

Country Link
JP (1) JPS527096A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6019955A (en) * 1983-07-01 1985-02-01 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Fuel injection pump for internal combustion engine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6019955A (en) * 1983-07-01 1985-02-01 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Fuel injection pump for internal combustion engine
JPH0536632B2 (en) * 1983-07-01 1993-05-31 Bosch Gmbh Robert

Also Published As

Publication number Publication date
JPS5540179B2 (en) 1980-10-16

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