JPS5258355A - X-ray detecting unit for electronic microscope - Google Patents
X-ray detecting unit for electronic microscopeInfo
- Publication number
- JPS5258355A JPS5258355A JP50133844A JP13384475A JPS5258355A JP S5258355 A JPS5258355 A JP S5258355A JP 50133844 A JP50133844 A JP 50133844A JP 13384475 A JP13384475 A JP 13384475A JP S5258355 A JPS5258355 A JP S5258355A
- Authority
- JP
- Japan
- Prior art keywords
- detecting unit
- ray detecting
- electronic microscope
- ray
- test piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To reduce the change in X ray strength, by nearly keeping X ray picking up angle even if test piece is leaned, by arranging X ray detecting unit so that a plane containing the axis of electron beam and the tilt axis of test piece is opposed to the test piece.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50133844A JPS5258355A (en) | 1975-11-07 | 1975-11-07 | X-ray detecting unit for electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50133844A JPS5258355A (en) | 1975-11-07 | 1975-11-07 | X-ray detecting unit for electronic microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5258355A true JPS5258355A (en) | 1977-05-13 |
JPS567260B2 JPS567260B2 (en) | 1981-02-17 |
Family
ID=15114348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50133844A Granted JPS5258355A (en) | 1975-11-07 | 1975-11-07 | X-ray detecting unit for electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258355A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5773858U (en) * | 1980-10-22 | 1982-05-07 | ||
JPS60100038A (en) * | 1983-11-04 | 1985-06-03 | Shimadzu Corp | Surface layer analysis with x-ray microanalyzer |
JPS612249A (en) * | 1984-06-15 | 1986-01-08 | Hitachi Ltd | Scanning-type electron microscope |
US4724320A (en) * | 1984-09-26 | 1988-02-09 | Shozo Ino | Method of observing the arrangement of atoms on a surface and apparatus therefor |
-
1975
- 1975-11-07 JP JP50133844A patent/JPS5258355A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5773858U (en) * | 1980-10-22 | 1982-05-07 | ||
JPS6224933Y2 (en) * | 1980-10-22 | 1987-06-25 | ||
JPS60100038A (en) * | 1983-11-04 | 1985-06-03 | Shimadzu Corp | Surface layer analysis with x-ray microanalyzer |
JPS612249A (en) * | 1984-06-15 | 1986-01-08 | Hitachi Ltd | Scanning-type electron microscope |
US4724320A (en) * | 1984-09-26 | 1988-02-09 | Shozo Ino | Method of observing the arrangement of atoms on a surface and apparatus therefor |
Also Published As
Publication number | Publication date |
---|---|
JPS567260B2 (en) | 1981-02-17 |
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