JPS5245268A - Process for production of semiconductor integfrated circuit - Google Patents

Process for production of semiconductor integfrated circuit

Info

Publication number
JPS5245268A
JPS5245268A JP9629776A JP9629776A JPS5245268A JP S5245268 A JPS5245268 A JP S5245268A JP 9629776 A JP9629776 A JP 9629776A JP 9629776 A JP9629776 A JP 9629776A JP S5245268 A JPS5245268 A JP S5245268A
Authority
JP
Japan
Prior art keywords
integfrated
semiconductor
production
circuit
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9629776A
Other languages
Japanese (ja)
Inventor
Kunihiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9629776A priority Critical patent/JPS5245268A/en
Publication of JPS5245268A publication Critical patent/JPS5245268A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To obtain high resistance element which can be used for insulation membrane by forming hybrid membrane of polycrystalline silicon and silicon nitride membrane.
COPYRIGHT: (C)1977,JPO&Japio
JP9629776A 1976-08-11 1976-08-11 Process for production of semiconductor integfrated circuit Pending JPS5245268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9629776A JPS5245268A (en) 1976-08-11 1976-08-11 Process for production of semiconductor integfrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9629776A JPS5245268A (en) 1976-08-11 1976-08-11 Process for production of semiconductor integfrated circuit

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP47098729A Division JPS5232833B2 (en) 1972-10-02 1972-10-02

Publications (1)

Publication Number Publication Date
JPS5245268A true JPS5245268A (en) 1977-04-09

Family

ID=14161096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9629776A Pending JPS5245268A (en) 1976-08-11 1976-08-11 Process for production of semiconductor integfrated circuit

Country Status (1)

Country Link
JP (1) JPS5245268A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175129A (en) * 1991-03-01 1992-12-29 Motorola, Inc. Method of fabricating a semiconductor structure having an improved polysilicon layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3558348A (en) * 1968-04-18 1971-01-26 Bell Telephone Labor Inc Dielectric films for semiconductor devices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3558348A (en) * 1968-04-18 1971-01-26 Bell Telephone Labor Inc Dielectric films for semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175129A (en) * 1991-03-01 1992-12-29 Motorola, Inc. Method of fabricating a semiconductor structure having an improved polysilicon layer

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