JPS5240829B1 - - Google Patents

Info

Publication number
JPS5240829B1
JPS5240829B1 JP9913771A JP9913771A JPS5240829B1 JP S5240829 B1 JPS5240829 B1 JP S5240829B1 JP 9913771 A JP9913771 A JP 9913771A JP 9913771 A JP9913771 A JP 9913771A JP S5240829 B1 JPS5240829 B1 JP S5240829B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9913771A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5240829B1 publication Critical patent/JPS5240829B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
JP9913771A 1970-12-09 1971-12-09 Pending JPS5240829B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702060651 DE2060651A1 (en) 1970-12-09 1970-12-09 Process for the production of tubular bodies from semiconductor material

Publications (1)

Publication Number Publication Date
JPS5240829B1 true JPS5240829B1 (en) 1977-10-14

Family

ID=5790480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9913771A Pending JPS5240829B1 (en) 1970-12-09 1971-12-09

Country Status (7)

Country Link
JP (1) JPS5240829B1 (en)
BE (1) BE776465A (en)
DE (1) DE2060651A1 (en)
FR (1) FR2117271A5 (en)
GB (1) GB1337687A (en)
IT (1) IT943708B (en)
NL (1) NL7112809A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60185931U (en) * 1984-05-18 1985-12-10 株式会社　オ−シマ box type study desk

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60185931U (en) * 1984-05-18 1985-12-10 株式会社　オ−シマ box type study desk

Also Published As

Publication number Publication date
NL7112809A (en) 1972-06-13
BE776465A (en) 1972-04-04
DE2060651A1 (en) 1972-06-29
GB1337687A (en) 1973-11-21
IT943708B (en) 1973-04-10
FR2117271A5 (en) 1972-07-21

Similar Documents

Publication Publication Date Title
ATA96471A (en)
AU2044470A (en)
AU1146470A (en)
AU1473870A (en)
FR2117271A5 (en)
AU2130570A (en)
AU2017870A (en)
AU1833270A (en)
AU1716970A (en)
AU2085370A (en)
AU1517670A (en)
AU1326870A (en)
AU1336970A (en)
AU1591370A (en)
AU1872870A (en)
AU2144270A (en)
AU2131570A (en)
AU1328670A (en)
AU2130770A (en)
AU1343870A (en)
AU1277070A (en)
ATA672271A (en)
AU1247570A (en)
AU1581370A (en)
AU1235770A (en)