JPS5230995A - Laser processing device - Google Patents

Laser processing device

Info

Publication number
JPS5230995A
JPS5230995A JP50105913A JP10591375A JPS5230995A JP S5230995 A JPS5230995 A JP S5230995A JP 50105913 A JP50105913 A JP 50105913A JP 10591375 A JP10591375 A JP 10591375A JP S5230995 A JPS5230995 A JP S5230995A
Authority
JP
Japan
Prior art keywords
laser processing
processing device
pressure
elevate
depressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50105913A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamaguchi
Osami Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50105913A priority Critical patent/JPS5230995A/en
Publication of JPS5230995A publication Critical patent/JPS5230995A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To elevate the processing efficiency by concentrating laser light and subjecting an object to laser processing in a vacuum chamber lower in pressure than the atmospheric pressure while depressing the generation of plasma.
JP50105913A 1975-09-03 1975-09-03 Laser processing device Pending JPS5230995A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50105913A JPS5230995A (en) 1975-09-03 1975-09-03 Laser processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50105913A JPS5230995A (en) 1975-09-03 1975-09-03 Laser processing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP50070802A Division JPS51147097A (en) 1975-06-13 1975-06-13 Laser processing method

Publications (1)

Publication Number Publication Date
JPS5230995A true JPS5230995A (en) 1977-03-09

Family

ID=14420090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50105913A Pending JPS5230995A (en) 1975-09-03 1975-09-03 Laser processing device

Country Status (1)

Country Link
JP (1) JPS5230995A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5061492A (en) * 1973-10-01 1975-05-27
JPS6195794A (en) * 1984-10-18 1986-05-14 Toshiba Corp Laser beam machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5061492A (en) * 1973-10-01 1975-05-27
JPS6195794A (en) * 1984-10-18 1986-05-14 Toshiba Corp Laser beam machine

Similar Documents

Publication Publication Date Title
JPS51121239A (en) An amplification circuit
JPS51140619A (en) Vibration member for acoustic convertor
JPS5441075A (en) Conveying device between atmospheric pressure and vacuum
JPS5230995A (en) Laser processing device
JPS5228095A (en) Laser processing method and device therefor
JPS51147097A (en) Laser processing method
JPS53131300A (en) Production of silicon oxide film
JPS522723A (en) Oscillation plate for speaker
JPS5339274A (en) Vacuum evaporating method for forming aluminum oxide film by means of laser as heat source
JPS5214374A (en) Treatment equpment for ion beam
JPS5440577A (en) Manufacture of thyristor
JPS53135843A (en) Etching process for al and al alloy
JPS56135934A (en) Dry etching device
JPS528594A (en) Device for laser material processing
JPS51140590A (en) Gas supplying device such as gas laser tube and the like
JPS53114744A (en) Etching method
JPS53109880A (en) High speed continuous dry plating appartus
JPS5253779A (en) Outer parts for wristwatch
JPS523984A (en) Safety device for neumatic drive
JPS5267584A (en) Semiconductor diaphragm
JPS5232792A (en) Apparatus for automatically packaging eggs
JPS5227266A (en) Wafer support
JPS52111790A (en) Optical ionization detector
JPS5254899A (en) Ion accelation device
JPS5353292A (en) Composite vibrator