JPS5254899A - Ion accelation device - Google Patents
Ion accelation deviceInfo
- Publication number
- JPS5254899A JPS5254899A JP12922075A JP12922075A JPS5254899A JP S5254899 A JPS5254899 A JP S5254899A JP 12922075 A JP12922075 A JP 12922075A JP 12922075 A JP12922075 A JP 12922075A JP S5254899 A JPS5254899 A JP S5254899A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- accelation
- slowing
- slits
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To obtain a group of electrodes by which can be yielded good focusing ion beams and which is easy in combination with the plasma source and in production, by means of constituting the electrode openings of ion drawing, acceleration and slowing-down with slits of concentric circles.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12922075A JPS5820118B2 (en) | 1975-10-29 | 1975-10-29 | ion cassock house |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12922075A JPS5820118B2 (en) | 1975-10-29 | 1975-10-29 | ion cassock house |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5254899A true JPS5254899A (en) | 1977-05-04 |
JPS5820118B2 JPS5820118B2 (en) | 1983-04-21 |
Family
ID=15004100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12922075A Expired JPS5820118B2 (en) | 1975-10-29 | 1975-10-29 | ion cassock house |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5820118B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821949U (en) * | 1981-08-04 | 1983-02-10 | 日新ハイボルテ−ジ株式会社 | ion source device |
JPS60264032A (en) * | 1984-06-11 | 1985-12-27 | Nippon Telegr & Teleph Corp <Ntt> | Microwave ion source |
-
1975
- 1975-10-29 JP JP12922075A patent/JPS5820118B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821949U (en) * | 1981-08-04 | 1983-02-10 | 日新ハイボルテ−ジ株式会社 | ion source device |
JPS6321879Y2 (en) * | 1981-08-04 | 1988-06-16 | ||
JPS60264032A (en) * | 1984-06-11 | 1985-12-27 | Nippon Telegr & Teleph Corp <Ntt> | Microwave ion source |
Also Published As
Publication number | Publication date |
---|---|
JPS5820118B2 (en) | 1983-04-21 |
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