JPS5254899A - Ion accelation device - Google Patents

Ion accelation device

Info

Publication number
JPS5254899A
JPS5254899A JP12922075A JP12922075A JPS5254899A JP S5254899 A JPS5254899 A JP S5254899A JP 12922075 A JP12922075 A JP 12922075A JP 12922075 A JP12922075 A JP 12922075A JP S5254899 A JPS5254899 A JP S5254899A
Authority
JP
Japan
Prior art keywords
ion
accelation
slowing
slits
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12922075A
Other languages
Japanese (ja)
Other versions
JPS5820118B2 (en
Inventor
Osami Okada
Taro Momo
Michio Otsuka
Katsumi Tokikuchi
Keizo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12922075A priority Critical patent/JPS5820118B2/en
Publication of JPS5254899A publication Critical patent/JPS5254899A/en
Publication of JPS5820118B2 publication Critical patent/JPS5820118B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To obtain a group of electrodes by which can be yielded good focusing ion beams and which is easy in combination with the plasma source and in production, by means of constituting the electrode openings of ion drawing, acceleration and slowing-down with slits of concentric circles.
COPYRIGHT: (C)1977,JPO&Japio
JP12922075A 1975-10-29 1975-10-29 ion cassock house Expired JPS5820118B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12922075A JPS5820118B2 (en) 1975-10-29 1975-10-29 ion cassock house

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12922075A JPS5820118B2 (en) 1975-10-29 1975-10-29 ion cassock house

Publications (2)

Publication Number Publication Date
JPS5254899A true JPS5254899A (en) 1977-05-04
JPS5820118B2 JPS5820118B2 (en) 1983-04-21

Family

ID=15004100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12922075A Expired JPS5820118B2 (en) 1975-10-29 1975-10-29 ion cassock house

Country Status (1)

Country Link
JP (1) JPS5820118B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821949U (en) * 1981-08-04 1983-02-10 日新ハイボルテ−ジ株式会社 ion source device
JPS60264032A (en) * 1984-06-11 1985-12-27 Nippon Telegr & Teleph Corp <Ntt> Microwave ion source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821949U (en) * 1981-08-04 1983-02-10 日新ハイボルテ−ジ株式会社 ion source device
JPS6321879Y2 (en) * 1981-08-04 1988-06-16
JPS60264032A (en) * 1984-06-11 1985-12-27 Nippon Telegr & Teleph Corp <Ntt> Microwave ion source

Also Published As

Publication number Publication date
JPS5820118B2 (en) 1983-04-21

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