JPS5230173A - Manufacturing method of semiconductor element - Google Patents

Manufacturing method of semiconductor element

Info

Publication number
JPS5230173A
JPS5230173A JP10616275A JP10616275A JPS5230173A JP S5230173 A JPS5230173 A JP S5230173A JP 10616275 A JP10616275 A JP 10616275A JP 10616275 A JP10616275 A JP 10616275A JP S5230173 A JPS5230173 A JP S5230173A
Authority
JP
Japan
Prior art keywords
semiconductor element
manufacturing
semiconductor wafer
planity
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10616275A
Other languages
Japanese (ja)
Other versions
JPS5916403B2 (en
Inventor
Yukio Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10616275A priority Critical patent/JPS5916403B2/en
Publication of JPS5230173A publication Critical patent/JPS5230173A/en
Publication of JPS5916403B2 publication Critical patent/JPS5916403B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To obtain a semiconductor element by etching of the semiconductor wafer to enable desired PN junction with effective planity even for a semiconductor wafer of bad parallelism.
COPYRIGHT: (C)1977,JPO&Japio
JP10616275A 1975-09-02 1975-09-02 Method for manufacturing semiconductor devices Expired JPS5916403B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10616275A JPS5916403B2 (en) 1975-09-02 1975-09-02 Method for manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10616275A JPS5916403B2 (en) 1975-09-02 1975-09-02 Method for manufacturing semiconductor devices

Publications (2)

Publication Number Publication Date
JPS5230173A true JPS5230173A (en) 1977-03-07
JPS5916403B2 JPS5916403B2 (en) 1984-04-16

Family

ID=14426576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10616275A Expired JPS5916403B2 (en) 1975-09-02 1975-09-02 Method for manufacturing semiconductor devices

Country Status (1)

Country Link
JP (1) JPS5916403B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6373901A (en) * 1986-09-16 1988-04-04 株式会社　パテイネ商会 Shoes

Also Published As

Publication number Publication date
JPS5916403B2 (en) 1984-04-16

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