JPS5230173A - Manufacturing method of semiconductor element - Google Patents
Manufacturing method of semiconductor elementInfo
- Publication number
- JPS5230173A JPS5230173A JP10616275A JP10616275A JPS5230173A JP S5230173 A JPS5230173 A JP S5230173A JP 10616275 A JP10616275 A JP 10616275A JP 10616275 A JP10616275 A JP 10616275A JP S5230173 A JPS5230173 A JP S5230173A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- manufacturing
- semiconductor wafer
- planity
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To obtain a semiconductor element by etching of the semiconductor wafer to enable desired PN junction with effective planity even for a semiconductor wafer of bad parallelism.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10616275A JPS5916403B2 (en) | 1975-09-02 | 1975-09-02 | Method for manufacturing semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10616275A JPS5916403B2 (en) | 1975-09-02 | 1975-09-02 | Method for manufacturing semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5230173A true JPS5230173A (en) | 1977-03-07 |
JPS5916403B2 JPS5916403B2 (en) | 1984-04-16 |
Family
ID=14426576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10616275A Expired JPS5916403B2 (en) | 1975-09-02 | 1975-09-02 | Method for manufacturing semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5916403B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6373901A (en) * | 1986-09-16 | 1988-04-04 | 株式会社 パテイネ商会 | Shoes |
-
1975
- 1975-09-02 JP JP10616275A patent/JPS5916403B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5916403B2 (en) | 1984-04-16 |
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