JPS5244163A - Process for productin of semiconductor element - Google Patents
Process for productin of semiconductor elementInfo
- Publication number
- JPS5244163A JPS5244163A JP11885175A JP11885175A JPS5244163A JP S5244163 A JPS5244163 A JP S5244163A JP 11885175 A JP11885175 A JP 11885175A JP 11885175 A JP11885175 A JP 11885175A JP S5244163 A JPS5244163 A JP S5244163A
- Authority
- JP
- Japan
- Prior art keywords
- productin
- semiconductor element
- wafer
- repeat
- junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
Abstract
PURPOSE: To repeat impurity diffusion and removal of diffusion layer on the surface of a wafer having been formed with a Pn junction thereby obtaining a desired lifetime.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11885175A JPS5244163A (en) | 1975-10-03 | 1975-10-03 | Process for productin of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11885175A JPS5244163A (en) | 1975-10-03 | 1975-10-03 | Process for productin of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5244163A true JPS5244163A (en) | 1977-04-06 |
Family
ID=14746698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11885175A Pending JPS5244163A (en) | 1975-10-03 | 1975-10-03 | Process for productin of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5244163A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0466014A2 (en) * | 1990-07-05 | 1992-01-15 | Kabushiki Kaisha Toshiba | External gettering during manufacture of semiconductor devices |
US8329563B2 (en) | 2006-02-24 | 2012-12-11 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including a gettering layer and manufacturing method therefor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023978A (en) * | 1973-07-02 | 1975-03-14 |
-
1975
- 1975-10-03 JP JP11885175A patent/JPS5244163A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023978A (en) * | 1973-07-02 | 1975-03-14 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0466014A2 (en) * | 1990-07-05 | 1992-01-15 | Kabushiki Kaisha Toshiba | External gettering during manufacture of semiconductor devices |
JPH04218921A (en) * | 1990-07-05 | 1992-08-10 | Toshiba Corp | Manufacture of semiconductor device |
US8329563B2 (en) | 2006-02-24 | 2012-12-11 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including a gettering layer and manufacturing method therefor |
JP5151975B2 (en) * | 2006-02-24 | 2013-02-27 | 三菱電機株式会社 | Manufacturing method of semiconductor device |
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