JPS5224468A - Power semiconductor device - Google Patents

Power semiconductor device

Info

Publication number
JPS5224468A
JPS5224468A JP10017175A JP10017175A JPS5224468A JP S5224468 A JPS5224468 A JP S5224468A JP 10017175 A JP10017175 A JP 10017175A JP 10017175 A JP10017175 A JP 10017175A JP S5224468 A JPS5224468 A JP S5224468A
Authority
JP
Japan
Prior art keywords
semiconductor device
power semiconductor
voidless
defect
thermal stress
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10017175A
Other languages
Japanese (ja)
Inventor
Tetsuo Kosugi
Takeo Yamazaki
Takayuki Wakui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10017175A priority Critical patent/JPS5224468A/en
Publication of JPS5224468A publication Critical patent/JPS5224468A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: A semiconductor device without defect by thermal stress and having voidless stable film.
COPYRIGHT: (C)1977,JPO&Japio
JP10017175A 1975-08-20 1975-08-20 Power semiconductor device Pending JPS5224468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10017175A JPS5224468A (en) 1975-08-20 1975-08-20 Power semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10017175A JPS5224468A (en) 1975-08-20 1975-08-20 Power semiconductor device

Publications (1)

Publication Number Publication Date
JPS5224468A true JPS5224468A (en) 1977-02-23

Family

ID=14266864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10017175A Pending JPS5224468A (en) 1975-08-20 1975-08-20 Power semiconductor device

Country Status (1)

Country Link
JP (1) JPS5224468A (en)

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