JPS52143754A - Annealing method of compound semiconductor single crystal - Google Patents
Annealing method of compound semiconductor single crystalInfo
- Publication number
- JPS52143754A JPS52143754A JP6017676A JP6017676A JPS52143754A JP S52143754 A JPS52143754 A JP S52143754A JP 6017676 A JP6017676 A JP 6017676A JP 6017676 A JP6017676 A JP 6017676A JP S52143754 A JPS52143754 A JP S52143754A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- annealing method
- single crystal
- semiconductor single
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To achieve the improvement in electrical performance of elements by obtaining a simple annealing method capable of eliminating the internal strain of the GaP crystal of compound semiconductor crystal within a short time without decomposing the ingot of GaP.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6017676A JPS5931855B2 (en) | 1976-05-26 | 1976-05-26 | Annealing method for compound semiconductor single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6017676A JPS5931855B2 (en) | 1976-05-26 | 1976-05-26 | Annealing method for compound semiconductor single crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52143754A true JPS52143754A (en) | 1977-11-30 |
JPS5931855B2 JPS5931855B2 (en) | 1984-08-04 |
Family
ID=13134572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6017676A Expired JPS5931855B2 (en) | 1976-05-26 | 1976-05-26 | Annealing method for compound semiconductor single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5931855B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06196430A (en) * | 1992-12-22 | 1994-07-15 | Showa Denko Kk | Annealing method for inp single crystal |
-
1976
- 1976-05-26 JP JP6017676A patent/JPS5931855B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06196430A (en) * | 1992-12-22 | 1994-07-15 | Showa Denko Kk | Annealing method for inp single crystal |
Also Published As
Publication number | Publication date |
---|---|
JPS5931855B2 (en) | 1984-08-04 |
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