JPS52141173A - Electrode formation method for semiconductor devices - Google Patents

Electrode formation method for semiconductor devices

Info

Publication number
JPS52141173A
JPS52141173A JP5809776A JP5809776A JPS52141173A JP S52141173 A JPS52141173 A JP S52141173A JP 5809776 A JP5809776 A JP 5809776A JP 5809776 A JP5809776 A JP 5809776A JP S52141173 A JPS52141173 A JP S52141173A
Authority
JP
Japan
Prior art keywords
semiconductor devices
formation method
electrode formation
film
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5809776A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5809776A priority Critical patent/JPS52141173A/en
Publication of JPS52141173A publication Critical patent/JPS52141173A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE:Electrodes are formed without deteriorating glass film by evaporating a metal which is unaffected by plating solutions and etching solutions for electrode metals on a semiconductor substrate and using this as an underlaying film for electrodes and a protecting film for the glass film in plating process.
JP5809776A 1976-05-19 1976-05-19 Electrode formation method for semiconductor devices Pending JPS52141173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5809776A JPS52141173A (en) 1976-05-19 1976-05-19 Electrode formation method for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5809776A JPS52141173A (en) 1976-05-19 1976-05-19 Electrode formation method for semiconductor devices

Publications (1)

Publication Number Publication Date
JPS52141173A true JPS52141173A (en) 1977-11-25

Family

ID=13074442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5809776A Pending JPS52141173A (en) 1976-05-19 1976-05-19 Electrode formation method for semiconductor devices

Country Status (1)

Country Link
JP (1) JPS52141173A (en)

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