JPS5213775A - Production method of semiconductor device - Google Patents
Production method of semiconductor deviceInfo
- Publication number
- JPS5213775A JPS5213775A JP8914475A JP8914475A JPS5213775A JP S5213775 A JPS5213775 A JP S5213775A JP 8914475 A JP8914475 A JP 8914475A JP 8914475 A JP8914475 A JP 8914475A JP S5213775 A JPS5213775 A JP S5213775A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production method
- oxidation film
- temperature
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: In order to promote the adhesiveness of photo-resist film, through forming a oxidation film with the temperature which does not injure the characteristics of a semiconductor on a oxidation film, which contains phosphorous, being formed with high temperature.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8914475A JPS5213775A (en) | 1975-07-23 | 1975-07-23 | Production method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8914475A JPS5213775A (en) | 1975-07-23 | 1975-07-23 | Production method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5213775A true JPS5213775A (en) | 1977-02-02 |
Family
ID=13962661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8914475A Pending JPS5213775A (en) | 1975-07-23 | 1975-07-23 | Production method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5213775A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5439326A (en) * | 1977-09-02 | 1979-03-26 | Inoue Japax Res Inc | Electrolyte |
-
1975
- 1975-07-23 JP JP8914475A patent/JPS5213775A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5439326A (en) * | 1977-09-02 | 1979-03-26 | Inoue Japax Res Inc | Electrolyte |
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