JPS52117591A - Semiconductor integrating circuit device - Google Patents
Semiconductor integrating circuit deviceInfo
- Publication number
- JPS52117591A JPS52117591A JP3550176A JP3550176A JPS52117591A JP S52117591 A JPS52117591 A JP S52117591A JP 3550176 A JP3550176 A JP 3550176A JP 3550176 A JP3550176 A JP 3550176A JP S52117591 A JPS52117591 A JP S52117591A
- Authority
- JP
- Japan
- Prior art keywords
- circuit device
- integrating circuit
- layers
- semiconductor integrating
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To avoid the short between the two layers and increase the integration, by using the material withstanding the corrosive solution used for the opening hole of the insulating film between the two layers, in opening the contact hole to the insulating film on the multi crystal Si layer of upper and lower two layers insulated each other and in making connection to the upper layer multi crystal.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3550176A JPS52117591A (en) | 1976-03-30 | 1976-03-30 | Semiconductor integrating circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3550176A JPS52117591A (en) | 1976-03-30 | 1976-03-30 | Semiconductor integrating circuit device |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58054136A Division JPS58180041A (en) | 1983-03-30 | 1983-03-30 | Semiconductor integrated circuit device |
JP5413783A Division JPS6057705B2 (en) | 1983-03-30 | 1983-03-30 | Semiconductor integrated circuit device |
JP64084A Division JPS6029224B2 (en) | 1984-01-06 | 1984-01-06 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117591A true JPS52117591A (en) | 1977-10-03 |
Family
ID=12443493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3550176A Pending JPS52117591A (en) | 1976-03-30 | 1976-03-30 | Semiconductor integrating circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117591A (en) |
-
1976
- 1976-03-30 JP JP3550176A patent/JPS52117591A/en active Pending
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