JPS52107897A - Ion microanalyzer equipped with primary ion beam separator - Google Patents
Ion microanalyzer equipped with primary ion beam separatorInfo
- Publication number
- JPS52107897A JPS52107897A JP2322776A JP2322776A JPS52107897A JP S52107897 A JPS52107897 A JP S52107897A JP 2322776 A JP2322776 A JP 2322776A JP 2322776 A JP2322776 A JP 2322776A JP S52107897 A JPS52107897 A JP S52107897A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- beam separator
- primary
- ion beam
- microanalyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2322776A JPS52107897A (en) | 1976-03-05 | 1976-03-05 | Ion microanalyzer equipped with primary ion beam separator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2322776A JPS52107897A (en) | 1976-03-05 | 1976-03-05 | Ion microanalyzer equipped with primary ion beam separator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52107897A true JPS52107897A (en) | 1977-09-09 |
Family
ID=12104733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2322776A Pending JPS52107897A (en) | 1976-03-05 | 1976-03-05 | Ion microanalyzer equipped with primary ion beam separator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52107897A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1985001389A1 (en) * | 1983-09-14 | 1985-03-28 | Hitachi, Ltd. | Ion microbeam implanting apparatus |
-
1976
- 1976-03-05 JP JP2322776A patent/JPS52107897A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1985001389A1 (en) * | 1983-09-14 | 1985-03-28 | Hitachi, Ltd. | Ion microbeam implanting apparatus |
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