JPS5360178A - Target for focusing of electron beam - Google Patents
Target for focusing of electron beamInfo
- Publication number
- JPS5360178A JPS5360178A JP13498976A JP13498976A JPS5360178A JP S5360178 A JPS5360178 A JP S5360178A JP 13498976 A JP13498976 A JP 13498976A JP 13498976 A JP13498976 A JP 13498976A JP S5360178 A JPS5360178 A JP S5360178A
- Authority
- JP
- Japan
- Prior art keywords
- target
- focusing
- electron beam
- electrons
- readily
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To make a target for focusing capable of readily and accurately matching focus even for electrons of various sectional shapes of relatively large sizes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13498976A JPS5360178A (en) | 1976-11-10 | 1976-11-10 | Target for focusing of electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13498976A JPS5360178A (en) | 1976-11-10 | 1976-11-10 | Target for focusing of electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5360178A true JPS5360178A (en) | 1978-05-30 |
JPS5442587B2 JPS5442587B2 (en) | 1979-12-14 |
Family
ID=15141319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13498976A Granted JPS5360178A (en) | 1976-11-10 | 1976-11-10 | Target for focusing of electron beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5360178A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5760841A (en) * | 1980-09-30 | 1982-04-13 | Toshiba Corp | Exposure device for electron beam |
JPS5766634A (en) * | 1980-10-13 | 1982-04-22 | Toshiba Corp | Electron beam exposure device |
JPS5766637A (en) * | 1980-10-14 | 1982-04-22 | Toshiba Corp | Exposure device for electron beam |
JPS62295419A (en) * | 1987-05-29 | 1987-12-22 | Toshiba Corp | Electron beam exposure apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10981460B2 (en) | 2019-02-15 | 2021-04-20 | Mitsubishi Electric Corporation | Vehicle charging device and vehicle charging/discharging device |
-
1976
- 1976-11-10 JP JP13498976A patent/JPS5360178A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5760841A (en) * | 1980-09-30 | 1982-04-13 | Toshiba Corp | Exposure device for electron beam |
JPS5766634A (en) * | 1980-10-13 | 1982-04-22 | Toshiba Corp | Electron beam exposure device |
JPH0318331B2 (en) * | 1980-10-13 | 1991-03-12 | Tokyo Shibaura Electric Co | |
JPS5766637A (en) * | 1980-10-14 | 1982-04-22 | Toshiba Corp | Exposure device for electron beam |
JPS62295419A (en) * | 1987-05-29 | 1987-12-22 | Toshiba Corp | Electron beam exposure apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5442587B2 (en) | 1979-12-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |