JPS5360178A - Target for focusing of electron beam - Google Patents

Target for focusing of electron beam

Info

Publication number
JPS5360178A
JPS5360178A JP13498976A JP13498976A JPS5360178A JP S5360178 A JPS5360178 A JP S5360178A JP 13498976 A JP13498976 A JP 13498976A JP 13498976 A JP13498976 A JP 13498976A JP S5360178 A JPS5360178 A JP S5360178A
Authority
JP
Japan
Prior art keywords
target
focusing
electron beam
electrons
readily
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13498976A
Other languages
Japanese (ja)
Other versions
JPS5442587B2 (en
Inventor
Mamoru Nakasuji
Kakuki Motoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13498976A priority Critical patent/JPS5360178A/en
Publication of JPS5360178A publication Critical patent/JPS5360178A/en
Publication of JPS5442587B2 publication Critical patent/JPS5442587B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To make a target for focusing capable of readily and accurately matching focus even for electrons of various sectional shapes of relatively large sizes.
JP13498976A 1976-11-10 1976-11-10 Target for focusing of electron beam Granted JPS5360178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13498976A JPS5360178A (en) 1976-11-10 1976-11-10 Target for focusing of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13498976A JPS5360178A (en) 1976-11-10 1976-11-10 Target for focusing of electron beam

Publications (2)

Publication Number Publication Date
JPS5360178A true JPS5360178A (en) 1978-05-30
JPS5442587B2 JPS5442587B2 (en) 1979-12-14

Family

ID=15141319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13498976A Granted JPS5360178A (en) 1976-11-10 1976-11-10 Target for focusing of electron beam

Country Status (1)

Country Link
JP (1) JPS5360178A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760841A (en) * 1980-09-30 1982-04-13 Toshiba Corp Exposure device for electron beam
JPS5766634A (en) * 1980-10-13 1982-04-22 Toshiba Corp Electron beam exposure device
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam
JPS62295419A (en) * 1987-05-29 1987-12-22 Toshiba Corp Electron beam exposure apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10981460B2 (en) 2019-02-15 2021-04-20 Mitsubishi Electric Corporation Vehicle charging device and vehicle charging/discharging device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760841A (en) * 1980-09-30 1982-04-13 Toshiba Corp Exposure device for electron beam
JPS5766634A (en) * 1980-10-13 1982-04-22 Toshiba Corp Electron beam exposure device
JPH0318331B2 (en) * 1980-10-13 1991-03-12 Tokyo Shibaura Electric Co
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam
JPS62295419A (en) * 1987-05-29 1987-12-22 Toshiba Corp Electron beam exposure apparatus

Also Published As

Publication number Publication date
JPS5442587B2 (en) 1979-12-14

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