JPS52100286A - Solid surface analyzer - Google Patents

Solid surface analyzer

Info

Publication number
JPS52100286A
JPS52100286A JP1602376A JP1602376A JPS52100286A JP S52100286 A JPS52100286 A JP S52100286A JP 1602376 A JP1602376 A JP 1602376A JP 1602376 A JP1602376 A JP 1602376A JP S52100286 A JPS52100286 A JP S52100286A
Authority
JP
Japan
Prior art keywords
solid surface
surface analyzer
converges
separates
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1602376A
Other languages
Japanese (ja)
Other versions
JPS5947423B2 (en
Inventor
Hiroshi Doi
Kuniyuki Sakumichi
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51016023A priority Critical patent/JPS5947423B2/en
Publication of JPS52100286A publication Critical patent/JPS52100286A/en
Publication of JPS5947423B2 publication Critical patent/JPS5947423B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To make possible throttling of beams finely in a state where beam intensity is high, with an ion source which separates and converges positive or negative ions only by using a quadruple pole lens group.
COPYRIGHT: (C)1977,JPO&Japio
JP51016023A 1976-02-18 1976-02-18 Solid surface analysis device Expired JPS5947423B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51016023A JPS5947423B2 (en) 1976-02-18 1976-02-18 Solid surface analysis device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51016023A JPS5947423B2 (en) 1976-02-18 1976-02-18 Solid surface analysis device

Publications (2)

Publication Number Publication Date
JPS52100286A true JPS52100286A (en) 1977-08-23
JPS5947423B2 JPS5947423B2 (en) 1984-11-19

Family

ID=11904955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51016023A Expired JPS5947423B2 (en) 1976-02-18 1976-02-18 Solid surface analysis device

Country Status (1)

Country Link
JP (1) JPS5947423B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020057510A (en) * 2018-10-02 2020-04-09 株式会社アルバック Ion gun controller and ion gun control method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020057510A (en) * 2018-10-02 2020-04-09 株式会社アルバック Ion gun controller and ion gun control method

Also Published As

Publication number Publication date
JPS5947423B2 (en) 1984-11-19

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