JPS52104089A - Semiconductor unit - Google Patents
Semiconductor unitInfo
- Publication number
- JPS52104089A JPS52104089A JP2084576A JP2084576A JPS52104089A JP S52104089 A JPS52104089 A JP S52104089A JP 2084576 A JP2084576 A JP 2084576A JP 2084576 A JP2084576 A JP 2084576A JP S52104089 A JPS52104089 A JP S52104089A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline
- semiconductor unit
- insulating film
- wiring layer
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent alloy spike in Al and polycrystalline Si dual structure wiring by providing an insulation film having a slower etching speed than that of polycrystalline Si etching liquid between the insulating film and wiring layer when forming polycrystalline Si metal wiring layer of the insulating film provided on a semiconductor base.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2084576A JPS52104089A (en) | 1976-02-27 | 1976-02-27 | Semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2084576A JPS52104089A (en) | 1976-02-27 | 1976-02-27 | Semiconductor unit |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1602486A Division JPS6211250A (en) | 1986-01-27 | 1986-01-27 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52104089A true JPS52104089A (en) | 1977-09-01 |
Family
ID=12038404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2084576A Pending JPS52104089A (en) | 1976-02-27 | 1976-02-27 | Semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52104089A (en) |
-
1976
- 1976-02-27 JP JP2084576A patent/JPS52104089A/en active Pending
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