JPS51147273A - Manufacturing process of semiconductor device - Google Patents
Manufacturing process of semiconductor deviceInfo
- Publication number
- JPS51147273A JPS51147273A JP7159475A JP7159475A JPS51147273A JP S51147273 A JPS51147273 A JP S51147273A JP 7159475 A JP7159475 A JP 7159475A JP 7159475 A JP7159475 A JP 7159475A JP S51147273 A JPS51147273 A JP S51147273A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing process
- mos
- density
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To allow high integration and density in MOS IC by a combined use of a metal with high melting point and multicrystal silicon for the gate electrode.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7159475A JPS51147273A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7159475A JPS51147273A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51147273A true JPS51147273A (en) | 1976-12-17 |
Family
ID=13465140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7159475A Pending JPS51147273A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51147273A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5561071A (en) * | 1978-10-31 | 1980-05-08 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5615070A (en) * | 1979-07-18 | 1981-02-13 | Fujitsu Ltd | Semiconductor device |
JPS5650533A (en) * | 1979-10-01 | 1981-05-07 | Hitachi Ltd | Semiconductor device |
JPS5966150A (en) * | 1982-10-08 | 1984-04-14 | Toshiba Corp | Semiconductor device and manufacture thereof |
JPS6245046A (en) * | 1985-08-22 | 1987-02-27 | Nec Corp | Semiconductor device |
JPS6279675A (en) * | 1985-10-02 | 1987-04-13 | Agency Of Ind Science & Technol | Compound semiconductor device |
JPS6362356A (en) * | 1986-09-03 | 1988-03-18 | Mitsubishi Electric Corp | Semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827506A (en) * | 1971-08-19 | 1973-04-11 |
-
1975
- 1975-06-13 JP JP7159475A patent/JPS51147273A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827506A (en) * | 1971-08-19 | 1973-04-11 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5561071A (en) * | 1978-10-31 | 1980-05-08 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5615070A (en) * | 1979-07-18 | 1981-02-13 | Fujitsu Ltd | Semiconductor device |
JPS6030110B2 (en) * | 1979-07-18 | 1985-07-15 | 富士通株式会社 | Semiconductor device and its manufacturing method |
JPS5650533A (en) * | 1979-10-01 | 1981-05-07 | Hitachi Ltd | Semiconductor device |
JPS5966150A (en) * | 1982-10-08 | 1984-04-14 | Toshiba Corp | Semiconductor device and manufacture thereof |
JPS6245046A (en) * | 1985-08-22 | 1987-02-27 | Nec Corp | Semiconductor device |
JPH0543177B2 (en) * | 1985-08-22 | 1993-06-30 | Nippon Electric Co | |
JPS6279675A (en) * | 1985-10-02 | 1987-04-13 | Agency Of Ind Science & Technol | Compound semiconductor device |
JPS6362356A (en) * | 1986-09-03 | 1988-03-18 | Mitsubishi Electric Corp | Semiconductor device |
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