JPS51147273A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS51147273A
JPS51147273A JP7159475A JP7159475A JPS51147273A JP S51147273 A JPS51147273 A JP S51147273A JP 7159475 A JP7159475 A JP 7159475A JP 7159475 A JP7159475 A JP 7159475A JP S51147273 A JPS51147273 A JP S51147273A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
mos
density
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7159475A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Takashi Masaki
Kazutoshi Miyao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7159475A priority Critical patent/JPS51147273A/en
Publication of JPS51147273A publication Critical patent/JPS51147273A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To allow high integration and density in MOS IC by a combined use of a metal with high melting point and multicrystal silicon for the gate electrode.
COPYRIGHT: (C)1976,JPO&Japio
JP7159475A 1975-06-13 1975-06-13 Manufacturing process of semiconductor device Pending JPS51147273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7159475A JPS51147273A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7159475A JPS51147273A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147273A true JPS51147273A (en) 1976-12-17

Family

ID=13465140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7159475A Pending JPS51147273A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147273A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5561071A (en) * 1978-10-31 1980-05-08 Fujitsu Ltd Manufacture of semiconductor device
JPS5615070A (en) * 1979-07-18 1981-02-13 Fujitsu Ltd Semiconductor device
JPS5650533A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Semiconductor device
JPS5966150A (en) * 1982-10-08 1984-04-14 Toshiba Corp Semiconductor device and manufacture thereof
JPS6245046A (en) * 1985-08-22 1987-02-27 Nec Corp Semiconductor device
JPS6279675A (en) * 1985-10-02 1987-04-13 Agency Of Ind Science & Technol Compound semiconductor device
JPS6362356A (en) * 1986-09-03 1988-03-18 Mitsubishi Electric Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827506A (en) * 1971-08-19 1973-04-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827506A (en) * 1971-08-19 1973-04-11

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5561071A (en) * 1978-10-31 1980-05-08 Fujitsu Ltd Manufacture of semiconductor device
JPS5615070A (en) * 1979-07-18 1981-02-13 Fujitsu Ltd Semiconductor device
JPS6030110B2 (en) * 1979-07-18 1985-07-15 富士通株式会社 Semiconductor device and its manufacturing method
JPS5650533A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Semiconductor device
JPS5966150A (en) * 1982-10-08 1984-04-14 Toshiba Corp Semiconductor device and manufacture thereof
JPS6245046A (en) * 1985-08-22 1987-02-27 Nec Corp Semiconductor device
JPH0543177B2 (en) * 1985-08-22 1993-06-30 Nippon Electric Co
JPS6279675A (en) * 1985-10-02 1987-04-13 Agency Of Ind Science & Technol Compound semiconductor device
JPS6362356A (en) * 1986-09-03 1988-03-18 Mitsubishi Electric Corp Semiconductor device

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