JPS51134081A - Method to manufacture semiconductor unit - Google Patents

Method to manufacture semiconductor unit

Info

Publication number
JPS51134081A
JPS51134081A JP5828675A JP5828675A JPS51134081A JP S51134081 A JPS51134081 A JP S51134081A JP 5828675 A JP5828675 A JP 5828675A JP 5828675 A JP5828675 A JP 5828675A JP S51134081 A JPS51134081 A JP S51134081A
Authority
JP
Japan
Prior art keywords
semiconductor unit
manufacture semiconductor
concaves
vip
insulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5828675A
Other languages
Japanese (ja)
Inventor
Shigeharu Abe
Kenji Sugishima
Shuji Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5828675A priority Critical patent/JPS51134081A/en
Publication of JPS51134081A publication Critical patent/JPS51134081A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To prevent the cut of electrode wiring so that upper surface of an insulation film separating and insulating elements may have not have concaves, when a semi-conductor unit having VIP-type elements which are separated and insulated from each other, is formed.
COPYRIGHT: (C)1976,JPO&Japio
JP5828675A 1975-05-16 1975-05-16 Method to manufacture semiconductor unit Pending JPS51134081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5828675A JPS51134081A (en) 1975-05-16 1975-05-16 Method to manufacture semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5828675A JPS51134081A (en) 1975-05-16 1975-05-16 Method to manufacture semiconductor unit

Publications (1)

Publication Number Publication Date
JPS51134081A true JPS51134081A (en) 1976-11-20

Family

ID=13079943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5828675A Pending JPS51134081A (en) 1975-05-16 1975-05-16 Method to manufacture semiconductor unit

Country Status (1)

Country Link
JP (1) JPS51134081A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655060A (en) * 1979-10-11 1981-05-15 Fujitsu Ltd Semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655060A (en) * 1979-10-11 1981-05-15 Fujitsu Ltd Semiconductor integrated circuit device

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