JPS5038377A - - Google Patents

Info

Publication number
JPS5038377A
JPS5038377A JP8840573A JP8840573A JPS5038377A JP S5038377 A JPS5038377 A JP S5038377A JP 8840573 A JP8840573 A JP 8840573A JP 8840573 A JP8840573 A JP 8840573A JP S5038377 A JPS5038377 A JP S5038377A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8840573A
Other versions
JPS5721801B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8840573A priority Critical patent/JPS5721801B2/ja
Publication of JPS5038377A publication Critical patent/JPS5038377A/ja
Publication of JPS5721801B2 publication Critical patent/JPS5721801B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
JP8840573A 1973-08-08 1973-08-08 Expired JPS5721801B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8840573A JPS5721801B2 (ja) 1973-08-08 1973-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8840573A JPS5721801B2 (ja) 1973-08-08 1973-08-08

Publications (2)

Publication Number Publication Date
JPS5038377A true JPS5038377A (ja) 1975-04-09
JPS5721801B2 JPS5721801B2 (ja) 1982-05-10

Family

ID=13941875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8840573A Expired JPS5721801B2 (ja) 1973-08-08 1973-08-08

Country Status (1)

Country Link
JP (1) JPS5721801B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6344726A (ja) * 1986-08-12 1988-02-25 Norihisa Ito エキシマレ−ザを用いたステツパの照明光学装置
JPS6477124A (en) * 1988-07-29 1989-03-23 Hitachi Ltd Projection type exposure device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60101301A (ja) * 1983-11-07 1985-06-05 Mitsubishi Heavy Ind Ltd シリンダの制動エネルギの再生装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPLIED OPTICS#V9#N3 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6344726A (ja) * 1986-08-12 1988-02-25 Norihisa Ito エキシマレ−ザを用いたステツパの照明光学装置
JPS6477124A (en) * 1988-07-29 1989-03-23 Hitachi Ltd Projection type exposure device
JPH0480530B2 (ja) * 1988-07-29 1992-12-18 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5721801B2 (ja) 1982-05-10

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