JPS5015594A - - Google Patents
Info
- Publication number
- JPS5015594A JPS5015594A JP48063803A JP6380373A JPS5015594A JP S5015594 A JPS5015594 A JP S5015594A JP 48063803 A JP48063803 A JP 48063803A JP 6380373 A JP6380373 A JP 6380373A JP S5015594 A JPS5015594 A JP S5015594A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
- H01J49/324—Static spectrometers using double focusing with an electrostatic section of 90 degrees, e.g. Nier-Johnson type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48063803A JPS5015594A (ja) | 1973-06-08 | 1973-06-08 | |
US05/477,466 US3986025A (en) | 1973-06-08 | 1974-06-07 | Ion microanalyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48063803A JPS5015594A (ja) | 1973-06-08 | 1973-06-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5015594A true JPS5015594A (ja) | 1975-02-19 |
Family
ID=13239884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48063803A Pending JPS5015594A (ja) | 1973-06-08 | 1973-06-08 |
Country Status (2)
Country | Link |
---|---|
US (1) | US3986025A (ja) |
JP (1) | JPS5015594A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63266746A (ja) * | 1987-04-24 | 1988-11-02 | Nec Corp | 二次イオン質量分析計 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2556291C3 (de) * | 1975-12-13 | 1980-11-27 | Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen | Raster-Ionenmikroskop |
US4107527A (en) * | 1977-07-13 | 1978-08-15 | Valentin Tikhonovich Cherepin | Ion-emission microanalyzer microscope |
US4554457A (en) * | 1983-07-08 | 1985-11-19 | Surface Science Laboratories, Inc. | Magnetic lens to rotate transverse particle momenta |
US4874946A (en) * | 1985-04-30 | 1989-10-17 | The United States Of America As Represented By The United States Department Of Energy | Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices |
US5089699A (en) * | 1989-03-14 | 1992-02-18 | Hitachi, Ltd. | Secondary charged particle analyzing apparatus and secondary charged particle extracting section |
JP2624854B2 (ja) * | 1989-10-23 | 1997-06-25 | 株式会社日立製作所 | 2次イオン質量分析装置 |
JP2774878B2 (ja) * | 1991-04-25 | 1998-07-09 | 株式会社日立製作所 | 多層膜絶縁物試料の二次イオン質量分析方法 |
US6867414B2 (en) * | 2002-09-24 | 2005-03-15 | Ciphergen Biosystems, Inc. | Electric sector time-of-flight mass spectrometer with adjustable ion optical elements |
GB0714301D0 (en) * | 2007-07-21 | 2007-08-29 | Ionoptika Ltd | Secondary ion mass spectrometry and secondary neutral mass spectrometry using a multiple-plate buncher |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1352167A (fr) * | 1962-11-28 | 1964-02-14 | Ct Nat De La Rech Scient Et Cs | Nouveau dispositif de microanalyse par émission ionique secondaire |
US3517191A (en) * | 1965-10-11 | 1970-06-23 | Helmut J Liebl | Scanning ion microscope with magnetic sector lens to purify the primary ion beam |
JPS5034439B1 (ja) * | 1969-05-16 | 1975-11-08 | ||
JPS5246514B2 (ja) * | 1972-01-28 | 1977-11-25 |
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1973
- 1973-06-08 JP JP48063803A patent/JPS5015594A/ja active Pending
-
1974
- 1974-06-07 US US05/477,466 patent/US3986025A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63266746A (ja) * | 1987-04-24 | 1988-11-02 | Nec Corp | 二次イオン質量分析計 |
Also Published As
Publication number | Publication date |
---|---|
US3986025A (en) | 1976-10-12 |