FR1352167A - Nouveau dispositif de microanalyse par émission ionique secondaire - Google Patents

Nouveau dispositif de microanalyse par émission ionique secondaire

Info

Publication number
FR1352167A
FR1352167A FR916836A FR916836A FR1352167A FR 1352167 A FR1352167 A FR 1352167A FR 916836 A FR916836 A FR 916836A FR 916836 A FR916836 A FR 916836A FR 1352167 A FR1352167 A FR 1352167A
Authority
FR
France
Prior art keywords
microanalysis
new device
secondary ionic
ionic emission
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR916836A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CT NAT de la RECH SCIENT ET CS
Original Assignee
CT NAT de la RECH SCIENT ET CS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CT NAT de la RECH SCIENT ET CS filed Critical CT NAT de la RECH SCIENT ET CS
Priority to FR916836A priority Critical patent/FR1352167A/fr
Priority to GB46920/63A priority patent/GB1078823A/en
Priority to DE19631498646 priority patent/DE1498646B2/de
Priority to JP38063524A priority patent/JPS5211599B1/ja
Application granted granted Critical
Publication of FR1352167A publication Critical patent/FR1352167A/fr
Priority to US518453A priority patent/US3585383A/en
Priority to JP42071479A priority patent/JPS4821314B1/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/466—Static spectrometers using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
FR916836A 1962-11-28 1962-11-28 Nouveau dispositif de microanalyse par émission ionique secondaire Expired FR1352167A (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR916836A FR1352167A (fr) 1962-11-28 1962-11-28 Nouveau dispositif de microanalyse par émission ionique secondaire
GB46920/63A GB1078823A (en) 1962-11-28 1963-11-27 Improvements in ion microscopes
DE19631498646 DE1498646B2 (de) 1962-11-28 1963-11-27 Ionen mikroanalysevorrichtung
JP38063524A JPS5211599B1 (fr) 1962-11-28 1963-11-28
US518453A US3585383A (en) 1962-11-28 1966-01-03 Microanalyzer for producing a characteristic ionic image of a sample surface
JP42071479A JPS4821314B1 (fr) 1962-11-28 1967-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR916836A FR1352167A (fr) 1962-11-28 1962-11-28 Nouveau dispositif de microanalyse par émission ionique secondaire

Publications (1)

Publication Number Publication Date
FR1352167A true FR1352167A (fr) 1964-02-14

Family

ID=8791691

Family Applications (1)

Application Number Title Priority Date Filing Date
FR916836A Expired FR1352167A (fr) 1962-11-28 1962-11-28 Nouveau dispositif de microanalyse par émission ionique secondaire

Country Status (5)

Country Link
US (1) US3585383A (fr)
JP (2) JPS5211599B1 (fr)
DE (1) DE1498646B2 (fr)
FR (1) FR1352167A (fr)
GB (1) GB1078823A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500042A (en) * 1965-02-09 1970-03-10 Csf Ionic microanalyzer which includes a convex mirror as an ion energy filter
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3558879A (en) * 1968-03-12 1971-01-26 Atomic Energy Commission Electrostatic deflector for selectively and adjustably bending a charged particle beam

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1171700A (en) * 1967-10-31 1969-11-26 Atomic Energy Authority Uk Improvements in or relating to Ion Beam Intensity Measuring Apparatus and Methods
FR2087652A5 (fr) * 1970-05-27 1971-12-31 Onera (Off Nat Aerospatiale)
JPS5015594A (fr) * 1973-06-08 1975-02-19
JPS5531771U (fr) * 1978-08-21 1980-02-29
US4296323A (en) * 1980-03-10 1981-10-20 The Perkin-Elmer Corporation Secondary emission mass spectrometer mechanism to be used with other instrumentation
JPS58116270A (ja) * 1981-12-30 1983-07-11 Nissan Motor Co Ltd 車体シ−ル構造
JPS59110473U (ja) * 1983-01-18 1984-07-25 トヨタ自動車株式会社 鋼板合わせ面の水入り防止構造
JPS5977910A (ja) * 1983-09-22 1984-05-04 Iseki & Co Ltd 乗用農機におけるフロントアクスルブラケツト
FR2575597B1 (fr) * 1984-12-28 1987-03-20 Onera (Off Nat Aerospatiale) Appareil pour la micro-analyse ionique a tres haute resolution d'un echantillon solide
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
JPH08236067A (ja) * 1994-12-28 1996-09-13 Ebara Corp 磁場型質量分析器
GB0624677D0 (en) * 2006-12-11 2007-01-17 Shimadzu Corp A co-axial time-of-flight mass spectrometer
DE102009044989A1 (de) 2009-09-24 2011-03-31 Funnemann, Dietmar, Dr. Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen
EP3203493B1 (fr) * 2016-02-02 2018-10-03 FEI Company Microscope à particules chargées avec compensation d'astigmatisme et sélection d'energie

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3126477A (en) * 1964-03-24 Multiple dispersion mass spectrometer
US2976413A (en) * 1956-06-25 1961-03-21 Cons Electrodynamics Corp Mass spectrometer
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer
US3061720A (en) * 1960-02-29 1962-10-30 Ewald Heinz Spectrograph
US3174034A (en) * 1961-07-03 1965-03-16 Max Planck Gesellschaft Mass spectrometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500042A (en) * 1965-02-09 1970-03-10 Csf Ionic microanalyzer which includes a convex mirror as an ion energy filter
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3558879A (en) * 1968-03-12 1971-01-26 Atomic Energy Commission Electrostatic deflector for selectively and adjustably bending a charged particle beam

Also Published As

Publication number Publication date
DE1498646B2 (de) 1971-12-16
JPS4821314B1 (fr) 1973-06-27
GB1078823A (en) 1967-08-09
DE1498646A1 (de) 1968-12-12
JPS5211599B1 (fr) 1977-03-31
US3585383A (en) 1971-06-15

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