FR1352167A - Nouveau dispositif de microanalyse par émission ionique secondaire - Google Patents
Nouveau dispositif de microanalyse par émission ionique secondaireInfo
- Publication number
- FR1352167A FR1352167A FR916836A FR916836A FR1352167A FR 1352167 A FR1352167 A FR 1352167A FR 916836 A FR916836 A FR 916836A FR 916836 A FR916836 A FR 916836A FR 1352167 A FR1352167 A FR 1352167A
- Authority
- FR
- France
- Prior art keywords
- microanalysis
- new device
- secondary ionic
- ionic emission
- emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004452 microanalysis Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
- H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/466—Static spectrometers using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR916836A FR1352167A (fr) | 1962-11-28 | 1962-11-28 | Nouveau dispositif de microanalyse par émission ionique secondaire |
GB46920/63A GB1078823A (en) | 1962-11-28 | 1963-11-27 | Improvements in ion microscopes |
DE19631498646 DE1498646B2 (de) | 1962-11-28 | 1963-11-27 | Ionen mikroanalysevorrichtung |
JP38063524A JPS5211599B1 (fr) | 1962-11-28 | 1963-11-28 | |
US518453A US3585383A (en) | 1962-11-28 | 1966-01-03 | Microanalyzer for producing a characteristic ionic image of a sample surface |
JP42071479A JPS4821314B1 (fr) | 1962-11-28 | 1967-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR916836A FR1352167A (fr) | 1962-11-28 | 1962-11-28 | Nouveau dispositif de microanalyse par émission ionique secondaire |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1352167A true FR1352167A (fr) | 1964-02-14 |
Family
ID=8791691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR916836A Expired FR1352167A (fr) | 1962-11-28 | 1962-11-28 | Nouveau dispositif de microanalyse par émission ionique secondaire |
Country Status (5)
Country | Link |
---|---|
US (1) | US3585383A (fr) |
JP (2) | JPS5211599B1 (fr) |
DE (1) | DE1498646B2 (fr) |
FR (1) | FR1352167A (fr) |
GB (1) | GB1078823A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3500042A (en) * | 1965-02-09 | 1970-03-10 | Csf | Ionic microanalyzer which includes a convex mirror as an ion energy filter |
US3517191A (en) * | 1965-10-11 | 1970-06-23 | Helmut J Liebl | Scanning ion microscope with magnetic sector lens to purify the primary ion beam |
US3558879A (en) * | 1968-03-12 | 1971-01-26 | Atomic Energy Commission | Electrostatic deflector for selectively and adjustably bending a charged particle beam |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1171700A (en) * | 1967-10-31 | 1969-11-26 | Atomic Energy Authority Uk | Improvements in or relating to Ion Beam Intensity Measuring Apparatus and Methods |
FR2087652A5 (fr) * | 1970-05-27 | 1971-12-31 | Onera (Off Nat Aerospatiale) | |
JPS5015594A (fr) * | 1973-06-08 | 1975-02-19 | ||
JPS5531771U (fr) * | 1978-08-21 | 1980-02-29 | ||
US4296323A (en) * | 1980-03-10 | 1981-10-20 | The Perkin-Elmer Corporation | Secondary emission mass spectrometer mechanism to be used with other instrumentation |
JPS58116270A (ja) * | 1981-12-30 | 1983-07-11 | Nissan Motor Co Ltd | 車体シ−ル構造 |
JPS59110473U (ja) * | 1983-01-18 | 1984-07-25 | トヨタ自動車株式会社 | 鋼板合わせ面の水入り防止構造 |
JPS5977910A (ja) * | 1983-09-22 | 1984-05-04 | Iseki & Co Ltd | 乗用農機におけるフロントアクスルブラケツト |
FR2575597B1 (fr) * | 1984-12-28 | 1987-03-20 | Onera (Off Nat Aerospatiale) | Appareil pour la micro-analyse ionique a tres haute resolution d'un echantillon solide |
GB8725459D0 (en) * | 1987-10-30 | 1987-12-02 | Nat Research Dev Corpn | Generating particle beams |
JPH08236067A (ja) * | 1994-12-28 | 1996-09-13 | Ebara Corp | 磁場型質量分析器 |
GB0624677D0 (en) * | 2006-12-11 | 2007-01-17 | Shimadzu Corp | A co-axial time-of-flight mass spectrometer |
DE102009044989A1 (de) | 2009-09-24 | 2011-03-31 | Funnemann, Dietmar, Dr. | Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen |
EP3203493B1 (fr) * | 2016-02-02 | 2018-10-03 | FEI Company | Microscope à particules chargées avec compensation d'astigmatisme et sélection d'energie |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3126477A (en) * | 1964-03-24 | Multiple dispersion mass spectrometer | ||
US2976413A (en) * | 1956-06-25 | 1961-03-21 | Cons Electrodynamics Corp | Mass spectrometer |
US2947868A (en) * | 1959-07-27 | 1960-08-02 | Geophysics Corp Of America | Mass spectrometer |
US3061720A (en) * | 1960-02-29 | 1962-10-30 | Ewald Heinz | Spectrograph |
US3174034A (en) * | 1961-07-03 | 1965-03-16 | Max Planck Gesellschaft | Mass spectrometer |
-
1962
- 1962-11-28 FR FR916836A patent/FR1352167A/fr not_active Expired
-
1963
- 1963-11-27 DE DE19631498646 patent/DE1498646B2/de not_active Withdrawn
- 1963-11-27 GB GB46920/63A patent/GB1078823A/en not_active Expired
- 1963-11-28 JP JP38063524A patent/JPS5211599B1/ja active Pending
-
1966
- 1966-01-03 US US518453A patent/US3585383A/en not_active Expired - Lifetime
-
1967
- 1967-11-08 JP JP42071479A patent/JPS4821314B1/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3500042A (en) * | 1965-02-09 | 1970-03-10 | Csf | Ionic microanalyzer which includes a convex mirror as an ion energy filter |
US3517191A (en) * | 1965-10-11 | 1970-06-23 | Helmut J Liebl | Scanning ion microscope with magnetic sector lens to purify the primary ion beam |
US3558879A (en) * | 1968-03-12 | 1971-01-26 | Atomic Energy Commission | Electrostatic deflector for selectively and adjustably bending a charged particle beam |
Also Published As
Publication number | Publication date |
---|---|
DE1498646B2 (de) | 1971-12-16 |
JPS4821314B1 (fr) | 1973-06-27 |
GB1078823A (en) | 1967-08-09 |
DE1498646A1 (de) | 1968-12-12 |
JPS5211599B1 (fr) | 1977-03-31 |
US3585383A (en) | 1971-06-15 |
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