JPH1172450A - Method and apparatus for fluorescent x-ray analysis - Google Patents
Method and apparatus for fluorescent x-ray analysisInfo
- Publication number
- JPH1172450A JPH1172450A JP9232310A JP23231097A JPH1172450A JP H1172450 A JPH1172450 A JP H1172450A JP 9232310 A JP9232310 A JP 9232310A JP 23231097 A JP23231097 A JP 23231097A JP H1172450 A JPH1172450 A JP H1172450A
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- sample
- image data
- intensity
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Image Processing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、試料から発生する
蛍光Ｘ線の強度分布を測定する蛍光Ｘ線分析において、
試料の形状や表面状態に適切に応じた測定データの分布
を表示できる蛍光Ｘ線分析方法および装置に関するもの
である。TECHNICAL FIELD The present invention relates to an X-ray fluorescence analysis for measuring the intensity distribution of X-ray fluorescence generated from a sample.
The present invention relates to an X-ray fluorescence analysis method and apparatus capable of displaying a distribution of measurement data appropriately corresponding to a shape and a surface state of a sample.
【０００２】[0002]
【従来の技術】蛍光Ｘ線分析装置においては、試料の測
定部分が位置すべき測定中心が設定されており、その測
定中心めがけて１次Ｘ線が照射され、その測定中心に位
置する試料の測定部分から発生する蛍光Ｘ線が検出手段
に入射するように、Ｘ線源や検出手段が設定されてい
る。したがって、試料表面やその深さ方向への近傍（以
下、試料部位という）から発生する蛍光Ｘ線の強度分布
を測定する際には、ＸＹステージやＺステージ等を用い
て試料を固定した試料台を移動または回転させることに
より、試料表面上の複数の測定点をそれぞれ測定中心に
位置させて、発生する蛍光Ｘ線の強度を測定する。な
お、試料の形状や測定点の設定方法により、測定点は必
ずしも厳密に試料表面上にあるとは限らない。2. Description of the Related Art In an X-ray fluorescence spectrometer, a measurement center at which a measurement portion of a sample is to be located is set, and primary X-rays are radiated toward the measurement center, and a sample located at the measurement center is measured. The X-ray source and the detection means are set so that the fluorescent X-rays generated from the measurement part enter the detection means. Therefore, when measuring the intensity distribution of fluorescent X-rays generated from the sample surface or its vicinity in the depth direction (hereinafter, referred to as a sample site), the sample stage on which the sample is fixed using an XY stage or a Z stage is used. Is moved or rotated, a plurality of measurement points on the sample surface are respectively positioned at the measurement center, and the intensity of the generated fluorescent X-ray is measured. Note that the measurement point is not always strictly on the sample surface due to the shape of the sample and the method of setting the measurement point.
【０００３】ここで、試料台の移動等にあたり、例え
ば、試料台について、基準となる位置からの水平面内で
直交する２方向への移動量を示すＸＹ座標および高さ方
向への移動量を示すＺ座標、ならびに、水平面内での回
転角度を示すθ座標および水平面からの回転角度を示す
φ座標からなる駆動系座標が用いられる。したがって、
試料が所定の形状で、所定の試料ホルダーに収められ、
その試料ホルダーが試料台の所定の位置に固定される場
合には、試料における各測定点の位置は、各測定点が測
定中心に位置したときの駆動系座標、すなわち、各測定
点の座標と対応づけられる。これにより、試料において
どの位置の測定点が、どのような測定強度またはこれに
基づく分析値を示したかを知ることができる。Here, when the sample stage is moved, for example, the XY coordinates and the height direction of the sample stage from the reference position in two directions orthogonal to each other in the horizontal plane are shown. The drive system coordinates including the Z coordinate, the θ coordinate indicating the rotation angle in the horizontal plane, and the φ coordinate indicating the rotation angle from the horizontal plane are used. Therefore,
A sample is placed in a given sample holder in a given shape,
When the sample holder is fixed at a predetermined position on the sample stage, the position of each measurement point on the sample is the driving system coordinates when each measurement point is located at the measurement center, that is, the coordinates of each measurement point. Can be associated. As a result, it is possible to know which measurement point of the sample has what measurement intensity or an analysis value based on the measurement intensity.
【０００４】[0004]
【発明が解決しようとする課題】しかし、例えば、所定
の形状でない異形の試料を、試料台の任意の位置に置い
た場合には、各測定点の座標と各測定点についての測定
強度等とからなる測定データが得られても、各測定点が
試料においてどの位置にあるのかは不明であり、分析と
しては不十分である。また、試料が異形でない場合にお
いても、例えば、表面に線状の付着物が認められる場合
に、その付着物を含む線分上での測定データの分布を見
て付着物の成分を知り、付着物が何であるかを特定する
ようなことはできなかった。However, for example, when a sample having an irregular shape that is not a predetermined shape is placed at an arbitrary position on the sample table, the coordinates of each measurement point and the measurement intensity for each measurement point, etc. Even if the measurement data consisting of is obtained, it is unclear where each measurement point is located in the sample, and the analysis is insufficient. In addition, even when the sample is not deformed, for example, if a linear adhered substance is found on the surface, the component of the adhered substance is known by observing the distribution of the measurement data on a line segment containing the adhered substance. There was no way to identify what the kimono was.
【０００５】本発明は前記従来の問題に鑑みてなされた
もので、試料から発生する蛍光Ｘ線の強度分布を測定す
る蛍光Ｘ線分析において、試料の形状や表面状態に適切
に応じた測定データの分布を表示できる蛍光Ｘ線分析方
法および装置を提供することを目的とする。[0005] The present invention has been made in view of the above-mentioned conventional problems. In the fluorescent X-ray analysis for measuring the intensity distribution of fluorescent X-rays generated from a sample, measurement data appropriately corresponding to the shape and surface condition of the sample are provided. It is an object of the present invention to provide a fluorescent X-ray analysis method and apparatus which can display the distribution of the X-ray fluorescence.
【０００６】[0006]
【課題を解決するための手段】前記目的を達成するため
に、請求項１の蛍光Ｘ線分析方法では、まず、測定を行
った各測定点についての測定強度またはこれに基づく分
析値からなる測定データと、測定範囲を含む試料表面の
画像データとを、前記各測定点の座標とその座標の単位
長あたりの画像データにおける画素数とを用いて関連づ
ける。そして、測定範囲内の画像データを同範囲外の画
像データと区別して、試料表面上での測定データの分布
と並列して同時に表示する。In order to achieve the above object, according to the X-ray fluorescence analysis method of the present invention, first, a measurement intensity at each measurement point at which measurement is performed or a measurement value based on an analysis value based on the measurement intensity. The data and the image data of the sample surface including the measurement range are associated using the coordinates of each measurement point and the number of pixels in the image data per unit length of the coordinates. Then, the image data within the measurement range is distinguished from the image data outside the same range, and simultaneously displayed in parallel with the distribution of the measurement data on the sample surface.
【０００７】請求項１の方法によれば、測定データと測
定範囲を含む試料表面の画像データとを関連づけ、測定
範囲内の画像データを試料表面上での測定データの分布
と並列して同時に表示するので、試料が異形の場合等で
あっても、試料においてどの位置の測定点が、どのよう
な分析値等を示したかを、視覚的に認識できる。According to the method of the first aspect, the measurement data is associated with the image data of the sample surface including the measurement range, and the image data within the measurement range is simultaneously displayed in parallel with the distribution of the measurement data on the sample surface. Therefore, even when the sample has an irregular shape or the like, it is possible to visually recognize which measurement point at which position in the sample indicates what analysis value or the like.
【０００８】請求項２の蛍光Ｘ線分析方法では、測定を
行った各測定点についての測定強度またはこれに基づく
分析値からなる測定データに基づいて、測定範囲内の任
意の線分上での測定データの分布を表示する。[0010] According to the X-ray fluorescence analysis method of the present invention, an arbitrary line segment within a measurement range is measured on the basis of measurement data at each measurement point at which measurement is performed or an analysis value based on the measurement intensity. Displays the distribution of measured data.
【０００９】請求項２の方法によれば、測定データに基
づいて、測定範囲内の任意の線分上での測定データの分
布を表示するので、試料表面に線状の付着物が認められ
るような場合に、その付着物を含む線分上での測定デー
タの分布を見て付着物の成分を知り、付着物が何である
かを特定することができる。According to the second aspect of the invention, the distribution of the measurement data on an arbitrary line segment within the measurement range is displayed based on the measurement data, so that a linear adhered substance can be recognized on the sample surface. In such a case, it is possible to know the components of the attached matter by looking at the distribution of the measurement data on the line segment containing the attached matter, and to specify what the attached matter is.
【００１０】請求項３の蛍光Ｘ線分析装置は、まず、試
料に１次Ｘ線を照射するＸ線源と、試料部位から発生す
る蛍光Ｘ線の強度を測定する検出手段と、試料とＸ線源
および検出手段とを相対的に移動させる移動手段とを備
えた装置である。そして、測定を行った各測定点につい
ての測定強度またはこれに基づく分析値からなる測定デ
ータを記憶する測定記憶手段と、試料表面を撮像して画
像データを生成する撮像手段と、その撮像手段からの測
定範囲を含む試料表面の画像データを記憶する画像記憶
手段と、前記記憶した測定データと前記記憶した画像デ
ータとを、前記各測定点の座標とその座標の単位長あた
りの画像データにおける画素数とを用いて関連づけて、
測定範囲内の画像データを同範囲外の画像データと区別
して、試料表面上での測定データの分布と並列して同時
に表示する表示手段とを備えている。請求項３の装置に
よれば、請求項１の方法と同様の作用効果がある。According to a third aspect of the present invention, there is provided an X-ray fluorescence analyzer for irradiating a sample with primary X-rays, detecting means for measuring the intensity of fluorescent X-rays generated from a sample portion, A moving means for relatively moving the radiation source and the detecting means. Then, a measurement storage unit that stores measurement intensity of each measurement point at which measurement is performed or measurement data composed of an analysis value based on the measurement intensity, an imaging unit that captures an image of a sample surface to generate image data, and Image storage means for storing image data of the sample surface including the measurement range, the stored measurement data and the stored image data, the coordinates of each of the measurement points and the pixels in the image data per unit length of the coordinates Using numbers to associate
Display means for distinguishing image data within the measurement range from image data outside the same range and displaying the distribution of the measurement data on the sample surface in parallel and simultaneously. According to the device of the third aspect, the same operation and effect as those of the method of the first aspect are obtained.
【００１１】請求項４の蛍光Ｘ線分析装置は、まず、試
料に１次Ｘ線を照射するＸ線源と、試料部位から発生す
る蛍光Ｘ線の強度を測定する検出手段と、試料とＸ線源
および検出手段とを相対的に移動させる移動手段とを備
えた装置である。そして、測定を行った各測定点につい
ての測定強度またはこれに基づく分析値からなる測定デ
ータを記憶する測定記憶手段と、前記記憶した測定デー
タに基づいて、測定範囲内の任意の線分上での測定デー
タの分布を表示する断面表示手段とを備えている。請求
項４の装置によれば、請求項２の方法と同様の作用効果
がある。According to a fourth aspect of the present invention, there is provided an X-ray fluorescence analyzer for irradiating a sample with primary X-rays, detecting means for measuring the intensity of fluorescent X-rays generated from a sample portion, A moving means for relatively moving the radiation source and the detecting means. Then, a measurement storage means for storing measurement data comprising measurement intensity or an analysis value based on the measurement intensity for each measurement point at which the measurement was performed, and, based on the stored measurement data, on any line segment within the measurement range. Cross-section display means for displaying the distribution of the measurement data. According to the device of the fourth aspect, the same operation and effect as those of the method of the second aspect are obtained.
【００１２】[0012]
【発明の実施の形態】以下、本発明の実施形態である蛍
光Ｘ線分析方法を説明する。まず、この方法で用いる駆
動系座標（Ｘ，Ｙ，θ，Ｚ，φ）について説明する。こ
の方法では、試料１を固定した試料台２を、移動、回転
させるが、図１に実線で示すように、後述するこの方法
に用いる装置の平行移動調整器７、高さ調整器８、回転
角調整器９および傾斜角調整器１０がすべて所定の初期
状態である場合の試料台２の上面の中心Ｔの位置を原点
ＯT とし、その原点ＯT から、図１に２点鎖線で示す移
動、回転後の試料台２の上面の中心Ｔの位置までの、水
平左方向（Ｘ軸）での移動量をＸ座標、紙面に垂直で奥
に向かう方向（Ｙ軸）での移動量をＹ座標、高さ方向
（Ｚ軸）での移動量をＺ座標とする。これら駆動系座標
のＸＹＺ軸および原点ＯT は、試料台２の移動、回転の
影響を受けず、空間に固定されている。また、前記初期
状態から、移動、回転後の試料台２の、水平面内での回
転角度をθ座標、水平面からの回転角度（傾斜角）をφ
座標とする。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an X-ray fluorescence analysis method according to an embodiment of the present invention will be described. First, the drive system coordinates (X, Y, θ, Z, φ) used in this method will be described. In this method, the sample stage 2 on which the sample 1 is fixed is moved and rotated. As shown by a solid line in FIG. 1, a parallel movement adjuster 7, a height adjuster 8, and a rotation adjuster of an apparatus used in this method described later. the position of the center T of the upper surface of the sample stage 2 when the angular regulator 9 and the tilt angle regulator 10 are all predetermined initial state as the origin O T, shown from its origin O T, by the two-dot chain line in FIG. 1 The amount of movement in the horizontal left direction (X-axis) up to the position of the center T of the upper surface of the sample table 2 after the movement and rotation is the X coordinate, and the amount of movement in the direction perpendicular to the paper surface and toward the back (Y-axis). The movement amount in the Y coordinate and the height direction (Z axis) is defined as the Z coordinate. The XYZ axes and the origin O T of these drive system coordinates are fixed in space without being affected by the movement and rotation of the sample table 2. From the initial state, the rotation angle of the sample stage 2 after the movement and rotation in the horizontal plane is θ coordinate, and the rotation angle (inclination angle) from the horizontal plane is φ.
Coordinates.
【００１３】次に、この方法に用いる蛍光Ｘ線分析装置
について説明する。図１に示すように、この装置は、ま
ず、試料１に１次Ｘ線３を照射するＸ線源４と、試料部
位から発生する蛍光Ｘ線５の強度を測定する検出手段６
と、試料１とＸ線源４および検出手段６とを相対的に移
動させる移動手段１７とを備えている。具体的には、試
料１が固定される試料台２と、測定中心Ｑに向けて１次
Ｘ線３を照射するＸ線源４と、前記測定中心Ｑに位置す
る試料部位から発生する蛍光Ｘ線５の強度を測定する検
出手段６とを備えている。そして、移動手段１７は、試
料台２について、前記駆動系座標のＸＹ座標を変化させ
る平行移動調整器７と、Ｚ座標を変化させる高さ調整器
８と、θ座標を変化させる回転角調整器９と、φ座標を
変化させる傾斜角調整器１０とを有している。平行移動
調整器７、高さ調整器８および回転角調整器９は、傾斜
角調整器１０の上面に垂直な軸Ｈを中心軸として構成さ
れている。Next, an X-ray fluorescence analyzer used in this method will be described. As shown in FIG. 1, the apparatus comprises an X-ray source 4 for irradiating a sample 1 with primary X-rays 3 and a detecting means 6 for measuring the intensity of fluorescent X-rays 5 generated from a sample site.
And a moving means 17 for relatively moving the sample 1 and the X-ray source 4 and the detecting means 6. Specifically, a sample stage 2 on which the sample 1 is fixed, an X-ray source 4 for irradiating the primary X-ray 3 toward the measurement center Q, and a fluorescent X-ray generated from the sample portion located at the measurement center Q Detecting means 6 for measuring the intensity of the line 5. The moving means 17 includes, for the sample stage 2, a translation adjuster 7 for changing the XY coordinates of the drive system coordinates, a height adjuster 8 for changing the Z coordinates, and a rotation angle adjuster for changing the θ coordinates. 9 and an inclination adjuster 10 for changing the φ coordinate. The translation adjustment unit 7, the height adjustment unit 8, and the rotation angle adjustment unit 9 are configured with an axis H perpendicular to the upper surface of the inclination angle adjustment unit 10 as a central axis.
【００１４】なお、図示したような構成においては、傾
斜角調整器１０が初期状態になくその上面が水平でない
ときには、前記平行移動調整器７、高さ調整器８および
回転角調整器９の中心軸Ｈが駆動系座標のＺ軸と一致し
ないので、平行移動調整器上部７ａの移動量、高さ調整
器上部８ａの移動量および回転角調整器９の回転角度
は、Ｘ座標、Ｚ座標およびθ座標のそれぞれの変化量に
一致しない。両者間の換算は、幾何学的な関係から周知
の方法でなされる。In the configuration shown in the figure, when the tilt angle adjuster 10 is not in the initial state and the upper surface thereof is not horizontal, the center of the parallel shift adjuster 7, the height adjuster 8, and the rotation angle adjuster 9 is adjusted. Since the axis H does not coincide with the Z axis of the drive system coordinates, the amount of movement of the parallel movement adjuster upper part 7a, the amount of movement of the height adjuster upper part 8a, and the rotation angle of the rotation angle adjuster 9 are represented by X coordinate, Z coordinate and It does not coincide with each change amount of the θ coordinate. The conversion between the two is performed by a well-known method from a geometric relationship.
【００１５】また、この装置は制御手段１１を備えてい
る。この制御手段１１は、試料台２を移動または回転さ
せることにより、試料表面１ａの任意の２点をそれぞれ
前記測定中心Ｑに位置させて指定された第１および第２
測定点に対し、第１および第２測定点を対向する頂点と
して、水平面に投影した場合にＸＹ軸と平行な辺で形成
される四角形を測定範囲とする。また、制御手段１１
は、第１測定点における水平面内での回転角度を、第２
測定点における水平面内での回転角度と同じにした場合
の、第１測定点のＸＹ座標を算出し、その算出した第１
測定点のＸＹ座標、および第２測定点のＸＹ座標と、Ｘ
方向およびＹ方向の測定点の数とに基づいて、他の測定
点のＸＹ座標を設定する。This device also has control means 11. The control unit 11 moves or rotates the sample table 2 so that any two points on the sample surface 1a are respectively positioned at the measurement center Q and the first and second designated points are set.
With the first and second measurement points facing the measurement point, a quadrangle formed by sides parallel to the XY axes when projected on a horizontal plane is defined as a measurement range. The control means 11
Is the rotation angle in the horizontal plane at the first measurement point,
The XY coordinates of the first measurement point are calculated when the rotation angle in the horizontal plane at the measurement point is the same, and the calculated first
XY coordinates of the measurement point, XY coordinates of the second measurement point, and X
Based on the direction and the number of measurement points in the Y direction, XY coordinates of other measurement points are set.
【００１６】一方、制御手段１１は、第２測定点のθ座
標を他の測定点のθ座標とする。さらに、制御手段１１
は、第１測定点のＺφ座標および第２測定点のＺφ座標
と、前記測定範囲における各測定点のＸＹ方向での位置
とに基づいて、他の測定点のＺφ座標を設定する。そし
て、制御手段１１は、第１、第２および他の測定点につ
いて蛍光Ｘ線５の強度を測定するように、前記Ｘ線源
４、検出手段６、平行移動調整器７、高さ調整器８、回
転角調整器９および傾斜角調整器１０を制御する。On the other hand, the control means 11 sets the θ coordinate of the second measurement point as the θ coordinate of another measurement point. Further, the control means 11
Sets the Zφ coordinates of the other measurement points based on the Zφ coordinates of the first measurement point, the Zφ coordinates of the second measurement point, and the positions of the respective measurement points in the XY directions in the measurement range. Then, the control means 11 controls the X-ray source 4, the detection means 6, the parallel movement adjuster 7, the height adjuster so as to measure the intensity of the fluorescent X-ray 5 at the first, second and other measurement points. 8. Control the rotation angle adjuster 9 and the inclination angle adjuster 10.
【００１７】さらに、この装置は、測定を行った各測定
点についての測定強度またはこれに基づく分析値からな
る測定データを記憶する測定記憶手段１９と、前記測定
中心Ｑを直下に臨むように設置され、試料表面１ａを撮
像して画像データを生成するＣＣＤ等の撮像手段１２
と、その撮像手段１２からの測定範囲を含む試料表面１
ａの画像データを記憶する画像記憶手段２０とを備えて
いる。ここで、各測定点についての測定強度に基づく分
析値、例えば各測定点についての当該蛍光Ｘ線を発生し
た元素の濃度は、検出手段６と測定記憶手段１９との間
に備えた分析手段１８により、求められる。Further, the apparatus is provided with a measurement storage means 19 for storing measurement data consisting of a measurement intensity or an analysis value based on the measurement intensity at each measurement point at which the measurement was performed, and an apparatus arranged so as to face the measurement center Q directly below. And imaging means 12 such as a CCD for imaging the sample surface 1a and generating image data.
And the sample surface 1 including the measurement range from the imaging means 12
and image storage means 20 for storing the image data a. Here, the analysis value based on the measured intensity at each measurement point, for example, the concentration of the element that generated the fluorescent X-ray at each measurement point, is stored in the analysis unit 18 provided between the detection unit 6 and the measurement storage unit 19. Is required.
【００１８】さらにまた、この装置は、前記記憶した測
定データと前記記憶した画像データとを、前記各測定点
の座標とその座標の単位長あたりの画像データにおける
画素数とを用いて関連づけて、測定範囲内の画像データ
を同範囲外の画像データと区別して、試料表面１ａ上で
の測定データの分布と並列して同時に表示する表示手段
２１を備えている。さらにまた、この装置は、前記記憶
した測定データに基づいて、測定範囲内の任意の線分上
での測定データの分布を表示する断面表示手段２３を備
えている。表示手段２１と断面表示手段２３は、ＣＲＴ
等の画像表示器２２を共有している。Still further, the apparatus associates the stored measurement data with the stored image data by using the coordinates of each measurement point and the number of pixels in the image data per unit length of the coordinates, There is provided a display means 21 for distinguishing image data within the measurement range from image data outside the same range and displaying the distribution of the measurement data on the sample surface 1a in parallel and simultaneously. Furthermore, this apparatus is provided with a cross-section display means 23 for displaying the distribution of the measurement data on an arbitrary line segment within the measurement range based on the stored measurement data. The display means 21 and the cross-section display means 23 are CRT
And the like.
【００１９】この装置を用いて、本実施形態の方法で
は、以下のように、画像データと測定データを表示す
る。制御手段１１の制御により、各測定点についての蛍
光Ｘ線５の強度測定がなされ、これに基づく分析値、例
えば各測定点についての元素濃度が、分析手段１８によ
り求められると、各測定点Ｐijについての測定強度Ｉij
および元素濃度Ｗijからなる測定データ［（Ｘij，
Ｙij，θij，Ｚij，φij），（Ｉij，Ｗij）］が、測定
記憶手段１９に記憶される。測定が終了したときには、
表示手段２１により、図２に示すように、画像表示器２
２の画面の例えば左上側に、撮像手段１２（図１）によ
り撮像された測定範囲を含む試料表面１ａの画像が、測
定中心Ｑすなわちこのときは測定終了点Ｂ（Ｐmn）を中
心として、表示されている。これを、画像データ表示と
いう。画像データ表示において、画像の縦方向（上方
向）はＹ方向に合致し、画像の左方向はＸ方向に合致す
る。また、この画像データは、画像記憶手段２０（図
１）に記憶されている。Using this apparatus, in the method of this embodiment, image data and measurement data are displayed as follows. Under the control of the control means 11, the intensity of the fluorescent X-rays 5 at each measurement point is measured, and when an analysis value based on this, for example, the element concentration at each measurement point is obtained by the analysis means 18, each measurement point P the measured intensity I ij for ij
And measured data [(X ij consisting of element concentration W ij,
Y ij , θ ij , Z ij , φ ij ), (I ij , W ij )] are stored in the measurement storage means 19. When the measurement is finished,
As shown in FIG.
For example, on the upper left side of the screen 2, an image of the sample surface 1 a including the measurement range captured by the imaging unit 12 (FIG. 1) is centered on the measurement center Q, that is, the measurement end point B (P mn ). Is displayed. This is called image data display. In the image data display, the vertical direction (upward) of the image matches the Y direction, and the left direction of the image matches the X direction. This image data is stored in the image storage means 20 (FIG. 1).
【００２０】なお、本実施形態の方法においては、前述
したように、測定開始点（第１測定点）Ａ（Ｐ00）およ
び測定終了点（第２測定点）Ｂ（Ｐmn）に対し、第１お
よび第２測定点を対向する頂点として、水平面に投影し
た場合にＸＹ軸と平行な辺で形成される四角形を測定範
囲とし、また、Ｘ方向にｍ＋１、Ｙ方向にｎ＋１の測定
点が、各方向に等間隔で設定されるものとする（ｍ，ｎ
は自然数）。ここで、画像データ表示においては、測定
範囲内の画像が、同範囲外の画像と線により仕切られる
ことにより区別されて表示される。この区別は、測定範
囲外の画像を暗くすること等によって行ってもよい。な
お、図２において、各測定点Ｐijを記載したのは、理解
の容易のためであって、実際に、画像表示器２２の画面
に各測定点Ｐijが表示されるわけではない。In the method of the present embodiment, as described above, the measurement start point (first measurement point) A (P 00 ) and the measurement end point (second measurement point) B (P mn ) When the first and second measurement points are opposed vertices, a rectangle formed by sides parallel to the XY axes when projected on a horizontal plane is defined as a measurement range, and measurement points m + 1 in the X direction and n + 1 in the Y direction , Are set at equal intervals in each direction (m, n
Is a natural number). Here, in the image data display, an image within the measurement range is distinguished and displayed by being separated from an image outside the range by a line. This distinction may be made by darkening an image outside the measurement range. Note that, in FIG. 2, each measurement point P ij is described for easy understanding, and the respective measurement points P ij are not actually displayed on the screen of the image display 22.
【００２１】このように、測定範囲内の画像が、同範囲
外の画像と区別して表示できるのは、表示手段２１（図
１）により、測定データと画像データとが、各測定点Ｐ
ijの座標（Ｘij，Ｙij，θij，Ｚij，φij）とその座標
の単位長あたりの画像データにおける画素数とを用いて
関連づけられるからである。すなわち、前述したよう
に、画像データ表示において、中心に測定終了点Ｂ（Ｐ
mn）があり、画像の縦方向（上方向）はＹ方向に合致
し、画像の左方向はＸ方向に合致するから、測定記憶手
段１９（図１）に記憶された測定終了点Ｂ（Ｐmn）のＸ
Ｙ座標（Ｘmn，Ｙmn）および他の測定点ＰijのＸＹ座標
（Ｘij，Ｙij）と、表示手段２１（図１）にあらかじめ
入力されたＸＹ座標の単位長あたりの画像データにおけ
る画素数とから、他の測定点Ｐijが画像データ表示にお
いてどこに位置するかは、座標変換により容易に求めら
れる。したがって、画像データ表示において、どこが測
定範囲内かも容易に求められる。As described above, the image within the measurement range can be displayed separately from the image outside the same range because the display means 21 (FIG. 1) displays the measurement data and the image data at each measurement point P.
This is because the ij coordinates (X ij , Y ij , θ ij , Z ij , φ ij ) are associated with the number of pixels in the image data per unit length of the coordinates. That is, as described above, in the image data display, the measurement end point B (P
mn ), the vertical direction (upward direction) of the image matches the Y direction, and the left direction of the image matches the X direction. Therefore, the measurement end point B (P) stored in the measurement storage unit 19 (FIG. 1). mn ) X
The Y coordinate (X mn , Y mn ) and the XY coordinate (X ij , Y ij ) of the other measurement point P ij and the image data per unit length of the XY coordinate previously input to the display means 21 (FIG. 1) From the number of pixels, where the other measurement point P ij is located in the image data display can be easily obtained by coordinate transformation. Therefore, in the display of image data, it is easy to find out what is within the measurement range.
【００２２】また、同時に、表示手段２１（図１）によ
り、この画像データの表示と並列して、試料表面上での
測定データの分布、例えば、各測定点Ｐijについての元
素濃度Ｗijが、各測定点Ｐijでの１６段階の円の大きさ
として、画像表示器２２の画面の例えば右上側に表示さ
れる。これを、測定データ表示という。試料表面上での
測定データの分布は、このような円の大きさや色の違い
による段階階層表示の他に、等高線表示、バーグラフ表
示、鳥瞰図表示などによってもよい。なお、複数種類の
蛍光Ｘ線、元素濃度等について同時に測定、分析すると
きは、画像表示器２２の画面の他の部分、例えば左下側
等に、他の元素濃度についての測定データの分布を表示
できる。このように、本実施形態の方法によれば、測定
データと測定範囲を含む試料表面１ａの画像データとを
関連づけ、測定範囲内の画像データを試料表面上での測
定データの分布と並列して同時に表示するので、試料１
が異形の場合等であっても、試料１においてどの位置の
測定点が、どのような分析値等を示したかを、視覚的に
認識できる。At the same time, the display means 21 (FIG. 1) displays the distribution of measurement data on the sample surface, for example, the element concentration W ij at each measurement point P ij , in parallel with the display of this image data. The size of the circle in 16 steps at each measurement point P ij is displayed, for example, on the upper right side of the screen of the image display 22. This is called measurement data display. The distribution of the measurement data on the sample surface may be displayed by a contour line display, a bar graph display, a bird's-eye view display, or the like, in addition to the hierarchical display according to the size and color of the circle. When simultaneously measuring and analyzing a plurality of types of fluorescent X-rays, element concentrations, and the like, the distribution of measurement data for other element concentrations is displayed on another portion of the screen of the image display device 22, for example, on the lower left side. it can. Thus, according to the method of the present embodiment, the measurement data is associated with the image data of the sample surface 1a including the measurement range, and the image data within the measurement range is paralleled with the distribution of the measurement data on the sample surface. Since it is displayed at the same time, sample 1
Can be visually recognized as to which measurement point of the sample 1 indicates what analysis value or the like even if is irregular.
【００２３】さらに、本実施形態の方法においては、断
面表示手段２３（図１）により、以下のように、前記記
憶した測定データ、例えば、各測定点Ｐijについての元
素濃度Ｗijに基づいて、測定範囲内の任意の線分上での
元素濃度の分布の表示ができる。今、画像データ表示の
測定範囲内において、線状の付着物２４が見られたとす
る。これに対し、操作者が、画像表示器２２の画面上
で、付着物２４を含んで画像データ表示の測定範囲を横
切るように、２点Ｃ1 ，Ｃ2 でマウスをクリックして、
測定範囲内で付着物２４を含む線分Ｄ1 Ｄ2 を指定する
と、画像表示器２２の画面の例えば右下側に、線分Ｄ1
Ｄ2 を横軸、元素濃度を縦軸とする表示がされる。な
お、２点Ｃ1 ，Ｃ2 の指定は、まず１点Ｃ1 を適切な位
置にクリックし、Ｃ1 を固定された一方の端点としてマ
ウスの移動に合わせて画面上で自在に伸縮する線分の他
方の端点Ｃ2 を、適切な位置にクリックする、いわゆる
ラバーバンド表示を利用するのが好ましい。Further, in the method of the present embodiment, the sectional display means 23 (FIG. 1) uses the stored measurement data, for example, the element concentration W ij at each measurement point P ij as follows. In addition, it is possible to display the distribution of the element concentration on an arbitrary line segment within the measurement range. Now, it is assumed that a linear attached matter 24 is seen in the measurement range of the image data display. On the other hand, the operator clicks the mouse at two points C 1 and C 2 on the screen of the image display 22 so as to cross the measurement range of the image data display including the attachment 24,
If you specify a line segment D 1 D 2 comprising a deposit 24 in the measuring range, for example the lower right side of the screen of the image display unit 22, the line segment D 1
Horizontal axis D 2, which is displayed to the element concentration and the vertical axis. To specify the two points C 1 and C 2 , first click one point C 1 at an appropriate position, and use C 1 as one fixed end point to freely expand and contract on the screen as the mouse moves. min of the other end points C 2, click in position, preferably using a so-called rubber band display.
【００２４】この表示は、前記記憶した各測定点Ｐijに
ついての元素濃度Ｗijを補間して、線分Ｄ1 Ｄ2 での元
素濃度の分布を示したもので、あたかも、線分Ｄ1 Ｄ2
に沿って測定データ表示を試料表面に垂直に切って、そ
の断面を表示したように見えるので、これを断面表示と
いう。図２に示すように、断面表示において、付着物２
４に相当する部分で元素濃度が高ければ、付着物２４が
その元素を含むことが分かる。複数種類の蛍光Ｘ線、元
素濃度等について同時に測定、分析するときには、断面
表示において、複数の元素濃度について重ねて表示さ
れ、付着物２４の組成を知ることができる。ただし、線
分Ｄ1 Ｄ2 の指定は、付着物の有無等に関係なく、任意
に行うことができる。また、線分Ｄ1 Ｄ2 の指定は、測
定データ表示において行うこともでき、この場合には、
複数の元素濃度について同時に分析するときであって
も、断面表示においては、線分Ｄ1 Ｄ2 を指定したその
測定データ表示の元素濃度についてのみ表示される。This display shows the distribution of the element concentration at the line segment D 1 D 2 by interpolating the stored element concentration W ij at each of the measurement points P ij , as if the line segment D 1 D 2
The measurement data display is cut perpendicular to the surface of the sample along, and it appears as if the cross section was displayed. As shown in FIG.
If the element concentration is high in the portion corresponding to No. 4, it is understood that the deposit 24 contains the element. When simultaneously measuring and analyzing a plurality of types of fluorescent X-rays, element concentrations, and the like, a plurality of element concentrations are superimposed and displayed in a cross-sectional view, so that the composition of the attached matter 24 can be known. However, the designation of the line segments D 1 and D 2 can be arbitrarily performed irrespective of the presence or absence of the attached matter. The designation of the line segments D 1 and D 2 can also be performed in the measurement data display. In this case,
Even when a plurality of element concentrations are analyzed at the same time, in the cross-section display, only the element concentration of the measurement data display that specifies the line segment D 1 D 2 is displayed.
【００２５】このように、本実施形態の方法によれば、
測定データに基づいて、測定範囲内の任意の線分Ｄ1 Ｄ
2 上での元素濃度等の測定データの分布を表示するの
で、試料表面１ａに線状の付着物２４が認められるよう
な場合に、その付着物２４を含む線分Ｄ1 Ｄ2 上での測
定データの分布を見て付着物２４の成分を知り、付着物
が何であるかを特定することができる。As described above, according to the method of the present embodiment,
Based on the measurement data, any line segment D 1 D within the measurement range
Since the distribution of the measurement data such as the element concentration on the sample 2 is displayed, when a linear adhered substance 24 is observed on the sample surface 1a, the distribution on the line segment D 1 D 2 including the attached substance 24 is displayed. By looking at the distribution of the measurement data, it is possible to know the components of the deposit 24 and to specify what the deposit is.
【００２６】[0026]
【発明の効果】以上に説明したように、本発明によれ
ば、試料から発生する蛍光Ｘ線の強度分布を測定する蛍
光Ｘ線分析において、試料の形状や表面状態に適切に応
じた測定データの分布を表示できる。As described above, according to the present invention, in the X-ray fluorescence analysis for measuring the intensity distribution of the X-ray fluorescence generated from the sample, the measurement data suitable for the shape and surface condition of the sample are obtained. Can be displayed.
【図１】本発明の一実施形態である蛍光Ｘ線分析方法に
用いる装置を示す正面図である。FIG. 1 is a front view showing an apparatus used for a fluorescent X-ray analysis method according to one embodiment of the present invention.
【図２】同装置における画像表示器の画面を示す図であ
る。FIG. 2 is a diagram showing a screen of an image display in the device.
１…試料、１ａ…試料表面、２…試料台、３…１次Ｘ
線、４…Ｘ線源、５…試料部位から発生する蛍光Ｘ線、
６…検出手段、１１…制御手段、１２…撮像手段、１７
…移動手段、１９…測定記憶手段、２０…画像記憶手
段、２１…表示手段、２３…断面表示手段、Ｐij…測定
点。DESCRIPTION OF SYMBOLS 1 ... sample, 1a ... sample surface, 2 ... sample table, 3 ... primary X
X-ray source, 4 X-ray source, 5 X-ray fluorescence emitted from the sample site,
6 detection means, 11 control means, 12 imaging means, 17
... moving means, 19 ... measurement storage means, 20 ... image storage means, 21 ... display means, 23 ... cross-section display means, P ij ... measurement points.
Claims (4)
測定する蛍光Ｘ線分析方法において、 測定を行った各測定点についての測定強度またはこれに
基づく分析値からなる測定データと、測定範囲を含む試
料表面の画像データとを、前記各測定点の座標とその座
標の単位長あたりの画像データにおける画素数とを用い
て関連づけて、 測定範囲内の画像データを同範囲外の画像データと区別
して、試料表面上での測定データの分布と並列して同時
に表示することを特徴とする蛍光Ｘ線分析方法。1. An X-ray fluorescence analysis method for measuring the intensity of X-ray fluorescence generated from a sample site, comprising: a measurement data consisting of a measurement intensity or an analysis value based on the measurement intensity at each measurement point; The image data of the sample surface including, by using the coordinates of each of the measurement points and the number of pixels in the image data per unit length of the coordinates, the image data within the measurement range and the image data outside the same range A fluorescent X-ray analysis method characterized by displaying the distribution of measurement data on a sample surface in parallel and simultaneously.
測定する蛍光Ｘ線分析方法において、 測定を行った各測定点についての測定強度またはこれに
基づく分析値からなる測定データに基づいて、測定範囲
内の任意の線分上での測定データの分布を表示すること
を特徴とする蛍光Ｘ線分析方法。2. An X-ray fluorescence analysis method for measuring the intensity of X-ray fluorescence generated from a sample site, wherein the X-ray fluorescence analysis method comprises the steps of: A fluorescent X-ray analysis method characterized by displaying a distribution of measurement data on an arbitrary line segment within a measurement range.
段と、 試料とＸ線源および検出手段とを相対的に移動させる移
動手段とを備えた蛍光Ｘ線分析装置において、 測定を行った各測定点についての測定強度またはこれに
基づく分析値からなる測定データを記憶する測定記憶手
段と、 試料表面を撮像して画像データを生成する撮像手段と、 その撮像手段からの測定範囲を含む試料表面の画像デー
タを記憶する画像記憶手段と、 前記記憶した測定データと前記記憶した画像データと
を、前記各測定点の座標とその座標の単位長あたりの画
像データにおける画素数とを用いて関連づけて、測定範
囲内の画像データを同範囲外の画像データと区別して、
試料表面上での測定データの分布と並列して同時に表示
する表示手段とを備えたことを特徴とする蛍光Ｘ線分析
装置。3. An X-ray source for irradiating a sample with primary X-rays, detection means for measuring the intensity of fluorescent X-rays generated from a sample site, and relatively moving the sample, the X-ray source and the detection means An X-ray fluorescence spectrometer provided with a moving means for performing measurement, a measurement storage means for storing measurement data consisting of a measurement intensity or an analysis value based on the measurement intensity at each measurement point at which the measurement was performed, and an image obtained by imaging the surface of the sample. Imaging means for generating data; image storage means for storing image data of the sample surface including the measurement range from the imaging means; and the stored measurement data and the stored image data, the coordinates of each of the measurement points. And using the number of pixels in the image data per unit length of the coordinates to associate the image data within the measurement range with image data outside the same range,
Display means for simultaneously displaying the distribution of measurement data on the sample surface in parallel with the distribution thereof.
段と、 試料とＸ線源および検出手段とを相対的に移動させる移
動手段とを備えた蛍光Ｘ線分析装置において、 測定を行った各測定点についての測定強度またはこれに
基づく分析値からなる測定データを記憶する測定記憶手
段と、 前記記憶した測定データに基づいて、測定範囲内の任意
の線分上での測定データの分布を表示する断面表示手段
とを備えたことを特徴とする蛍光Ｘ線分析装置。4. An X-ray source for irradiating a sample with primary X-rays, detection means for measuring the intensity of fluorescent X-rays generated from a sample site, and relatively moving the sample, the X-ray source and the detection means An X-ray fluorescence spectrometer provided with a moving means for performing measurement, a measurement storage means for storing measurement data consisting of a measurement intensity or an analysis value based on the measurement intensity at each measurement point at which measurement is performed, and An X-ray fluorescence analyzer comprising: a cross-section display means for displaying a distribution of measurement data on an arbitrary line segment within the measurement range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09232310A JP3122395B2 (en) | 1997-08-28 | 1997-08-28 | X-ray fluorescence analysis method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09232310A JP3122395B2 (en) | 1997-08-28 | 1997-08-28 | X-ray fluorescence analysis method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1172450A true JPH1172450A (en) | 1999-03-16 |
| JP3122395B2 JP3122395B2 (en) | 2001-01-09 |
Family
ID=16937206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09232310A Expired - Fee Related JP3122395B2 (en) | 1997-08-28 | 1997-08-28 | X-ray fluorescence analysis method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3122395B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011247740A (en) * | 2010-05-26 | 2011-12-08 | Rigaku Corp | X-ray analyzing device |
| JP2013036861A (en) * | 2011-08-08 | 2013-02-21 | Rigaku Corp | X-ray stress measurement device |
-
1997
- 1997-08-28 JP JP09232310A patent/JP3122395B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011247740A (en) * | 2010-05-26 | 2011-12-08 | Rigaku Corp | X-ray analyzing device |
| JP2013036861A (en) * | 2011-08-08 | 2013-02-21 | Rigaku Corp | X-ray stress measurement device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3122395B2 (en) | 2001-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7206378B2 (en) | X-ray analysis apparatus | |
| US20020118869A1 (en) | Method and apparatus for displaying images of tubular structures | |
| JPH02501411A (en) | Automatic laminography system for testing electronics | |
| JP3101257B2 (en) | Method for inspecting sample surface and X-ray analyzer using the same | |
| US5128545A (en) | Method and apparatus for background correction in analysis of a specimen surface | |
| JP3122395B2 (en) | X-ray fluorescence analysis method and apparatus | |
| JPH07260444A (en) | Method and apparatus for measuring object three-dimensionally by light section method | |
| US5192866A (en) | Sample-moving automatic analyzing apparatus | |
| JP3655778B2 (en) | X-ray analyzer | |
| JP3567176B2 (en) | X-ray fluorescence analyzer | |
| JPS5478166A (en) | Method and apparatus for measuring length of electron microscopes | |
| JP2003148936A (en) | Three-dimensional measurement method for object by light-section method | |
| JP2900086B2 (en) | X-ray fluorescence analyzer | |
| JPH0821808A (en) | Analysis position determining method | |
| JP3322227B2 (en) | Infrared microscope | |
| JPH07303631A (en) | Ct scanner | |
| JP2000171421A (en) | Mapping analyzing method | |
| JP2000046769A (en) | Analyzer | |
| US6215588B1 (en) | Infrared microscope | |
| JP3629542B2 (en) | X-ray fluorescence analyzer | |
| JPH02110306A (en) | Detection of observation position and device therefor | |
| US20070064869A1 (en) | Laminography apparatus | |
| JP3516028B2 (en) | X-ray fluorescence analysis method and apparatus | |
| JPS5855736A (en) | Analyzing apparatus of density distribution by emission spectrochemical analysis | |
| JP2001176439A (en) | Analytical measurement method with surface analysis equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081020 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091020 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091020 Year of fee payment: 9 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091020 Year of fee payment: 9 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101020 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111020 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121020 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131020 Year of fee payment: 13 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |