JPH1164162A - Inspecting device of screen - Google Patents
Inspecting device of screenInfo
- Publication number
- JPH1164162A JPH1164162A JP22979597A JP22979597A JPH1164162A JP H1164162 A JPH1164162 A JP H1164162A JP 22979597 A JP22979597 A JP 22979597A JP 22979597 A JP22979597 A JP 22979597A JP H1164162 A JPH1164162 A JP H1164162A
- Authority
- JP
- Japan
- Prior art keywords
- optical member
- screen
- optical
- rotation
- glass plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液晶パネル、液晶
パネル用カラーフィルタ、ＣＲＴ用シャドーマスク等の
検査対象画面を構成する各画素の発光強度や透過率を測
定する画面の検査装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen inspection apparatus for measuring the emission intensity and transmittance of each pixel constituting an inspection screen such as a liquid crystal panel, a color filter for a liquid crystal panel, and a shadow mask for a CRT. is there.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】液晶パ
ネルに用いるカラーフィルタは、赤、青、緑の長方形の
３つのフィルタを含む１００μｍ角の正方形の画素で構
成されている。また、テレビに用いられるシャドーマス
クは、数１０μｍ径の孔の配列により構成されている。
画面の検査装置は、液晶パネルやカラーフィルタを構成
する各画素の光透過率のバラツキや、シャドーマスクを
構成する各孔の径のバラツキを検査する装置である。2. Description of the Related Art A color filter used in a liquid crystal panel is composed of 100 μm square pixels including three red, blue and green rectangular filters. Further, a shadow mask used for a television has an arrangement of holes having a diameter of several tens of μm.
The screen inspection apparatus is an apparatus for inspecting a variation in light transmittance of each pixel constituting a liquid crystal panel or a color filter and a variation in diameter of each hole constituting a shadow mask.
【０００３】画面の検査装置は、通常、図１に示すよう
に、拡散照射光源４と、検査対象画面１を撮像するカメ
ラ２と、このカメラ２によって撮像された画像を処理す
る処理部３とを備えている。画面の検査装置で検査する
場合、検査対象画面１を構成する画素の配列（空間周波
数）と、カメラ２の受光画面２ａを構成する画素の配列
（空間周波数）にずれがあると、モアレが発生する。こ
のために、検査対象画面１の欠陥と区別が付かなくな
り、結果的に画面の検査装置としての検査精度が低下す
るという問題があった。As shown in FIG. 1, a screen inspection apparatus generally includes a diffuse irradiation light source 4, a camera 2 for capturing an image of a screen 1 to be inspected, and a processing unit 3 for processing an image captured by the camera 2. It has. When inspecting with a screen inspection device, moire occurs if there is a deviation between the arrangement (spatial frequency) of the pixels constituting the inspection target screen 1 and the arrangement (spatial frequency) of the pixels constituting the light receiving screen 2a of the camera 2. I do. For this reason, there is a problem that the defect cannot be distinguished from the defect of the inspection target screen 1 and, as a result, the inspection accuracy as a screen inspection device is reduced.
【０００４】このため従来では、検査対象画素と受光画
素との位置ずれを位置の関数で表し、モアレの生ずる部
分を予測し、このモアレの生ずる部分に相当する受光画
素の受光信号を無視し、残りの受光画素の受光信号に基
づいて検査対象画面を再構成する発明が提案されている
（特開平８−７５５４２号公報参照）。しかし、この特
開平８−７５５４２号公報記載の技術では、モアレの生
ずる部分を予測し、検査対象画面を再構成するためのソ
フトウェアが必要になり、またそのソフトウェアを実行
するためのハードウェアも用意しなければならないの
で、装置全体の構成が複雑になる。For this reason, conventionally, the positional deviation between the pixel to be inspected and the light receiving pixel is represented by a function of the position, a portion where moiré occurs is predicted, and a light receiving signal of the light receiving pixel corresponding to the moiré portion is ignored. There has been proposed an invention for reconstructing a screen to be inspected based on the light receiving signals of the remaining light receiving pixels (see JP-A-8-75542). However, in the technique described in Japanese Patent Application Laid-Open No. H8-75542, software for predicting a moiré-producing portion and reconstructing a screen to be inspected is required, and hardware for executing the software is also prepared. Must be performed, the configuration of the entire apparatus becomes complicated.
【０００５】そこで、本発明は、特にソフトウェアによ
る処理を必要とせず、簡単な構造の光学部材を用いてモ
アレのない撮像画像を得ることのできる画面の検査装置
を実現することを目的とする。Accordingly, an object of the present invention is to realize a screen inspection apparatus capable of obtaining a captured image without moiré by using an optical member having a simple structure without particularly requiring processing by software.
【０００６】[0006]
【課題を解決するための手段】本発明の画面の検査装置
は、光路横ずらし光学部材を備え、カメラと検査対象画
面との間のいずれかの位置に光路横ずらし光学部材を挿
入するための光学部材装着手段と、この光学部材装着手
段を回転又は往復回動させる回転／回動手段とを備えて
いる（請求項１）。A screen inspection apparatus according to the present invention includes an optical path shifting optical member for inserting the optical path shifting optical member at any position between a camera and a screen to be inspected. An optical member mounting means and a rotation / rotation means for rotating or reciprocating the optical member mounting means are provided (claim 1).
【０００７】この装置の構造を図２を用いて説明する。
図２によれば、検査対象画面１の各画素を透過した光又
は検査対象画面１の各画素から照射された光は、光路横
ずらし光学部材５ａに入る。このとき、光路が横にずれ
てカメラ２の中の受光素子の所定の画素に結像する。光
路横ずらし光学部材５ａはあおられながら回転するの
で、カメラ２の露光時間を一回転する時間以上にとれ
ば、検査対象画面１の同心円上の画素からの光が受光画
面上で交じり合うことになる。したがって、検査対象画
面１の近傍の画素からの光が平均化された状態で受光素
子により検出される。この平均化作用のため、モアレの
輪郭をぼかすことができる。The structure of this device will be described with reference to FIG.
According to FIG. 2, the light transmitted through each pixel of the inspection target screen 1 or the light emitted from each pixel of the inspection target screen 1 enters the optical member 5a for laterally shifting the optical path. At this time, the optical path is shifted laterally and an image is formed on a predetermined pixel of the light receiving element in the camera 2. Since the optical member 5a for shifting the optical path is rotated while being lifted, if the exposure time of the camera 2 is set to be equal to or longer than one rotation, light from pixels on concentric circles of the inspection target screen 1 will be mixed on the light receiving screen. Become. Therefore, the light from the pixels near the inspection target screen 1 is detected by the light receiving element in an averaged state. Due to this averaging action, the contour of moire can be blurred.
【０００８】光路横ずらし光学部材５ａが光路を横にず
らす距離Ｄが大きいときは、検査対象画面１の画素から
の光は広い範囲で交じり合うことになり、モアレの輪郭
をぼかす効果は大きくなる。しかし、距離Ｄがあまりに
大きいと、検査対象画面１を構成する画素を分離するこ
とができなくなってしまう。なお、前記光路横ずらし光
学部材５ａとして、両面が平行な透明板を用いることが
できる（請求項２）。両面が平行な透明板はコスト的に
有利だからである。ただし、必ずしも板状のものである
必要はなく、空気以外の屈折率を有し、光を透過するも
のであれば任意の部材を用いることができる。両面が平
行な透明板を用いた場合、前記距離Ｄは、板の屈折率と
回転／回動軸に対して傾ける角度で決まる。傾ける角度
を大きくすれば距離Ｄは大きくなり、屈折率と空気の屈
折率との差が大きいほど距離Ｄは大きくなる。[0008] When the optical path lateral shifting optical member 5a has a large distance D for laterally shifting the optical path, the light from the pixels of the inspection target screen 1 intersects in a wide range, and the effect of blurring the moire contour increases. . However, if the distance D is too large, it becomes impossible to separate the pixels constituting the inspection target screen 1. It should be noted that a transparent plate having both surfaces parallel to each other can be used as the optical path lateral shifting optical member 5a (claim 2). This is because a transparent plate having both sides parallel is advantageous in cost. However, it is not necessarily required to be plate-shaped, and any member having a refractive index other than air and transmitting light can be used. When a transparent plate having two parallel surfaces is used, the distance D is determined by the refractive index of the plate and the angle of inclination with respect to the rotation / rotation axis. The distance D increases as the angle of inclination increases, and the distance D increases as the difference between the refractive index and the refractive index of air increases.
【０００９】前記回転／回動手段は、光学部材装着手段
を光軸と平行な軸を中心として回転又は往復回動させて
もよく（請求項３）、光学部材装着手段を光軸と垂直な
軸を中心として往復回動させてもよい（請求項４）。往
復回動させた場合、往復する方向のモアレの除去効果が
上がる。回転させた場合は、画面全面において効果があ
る。一般にはレンズの歪みなどで同心円状にモアレが発
生する場合が多い。この場合回転運動によってモアレを
ほとんど除去することができる。The rotation / rotation means may rotate or reciprocate the optical member mounting means about an axis parallel to the optical axis (claim 3), wherein the optical member mounting means is perpendicular to the optical axis. It may be reciprocated about the axis (claim 4). When reciprocating, the effect of removing moire in the reciprocating direction increases. When rotated, there is an effect on the entire screen. In general, moire often occurs concentrically due to lens distortion or the like. In this case, the moiré can be almost completely removed by the rotation.
【００１０】図３は、光路横ずらし光学部材５ａを往復
回動させる場合を説明する図である。図３(a) は光軸と
平行に回動軸をとる例、図３(b) は光軸と垂直に回動軸
をとる例を示す。図３(a) の場合であれば、検査対象画
面１の同心円上の一部の画素からの光が受光画面上で交
じり合うことになる。図３(b) の場合であれば、検査対
象画面１の所定長さの線分上の各画素からの光が受光画
面上で交じり合う。FIG. 3 is a view for explaining a case where the optical member 5a for shifting the optical path sideways is reciprocated. FIG. 3A shows an example in which a rotation axis is set in parallel with the optical axis, and FIG. 3B shows an example in which a rotation axis is set in a direction perpendicular to the optical axis. In the case of FIG. 3A, light from some pixels on the concentric circle of the inspection target screen 1 intersects on the light receiving screen. In the case of FIG. 3B, light from each pixel on a line segment of a predetermined length of the inspection target screen 1 intersects on the light receiving screen.
【００１１】また、本発明の画面の検査装置は、光路曲
げ光学部材を備え、カメラと検査対象画面との間のいず
れかの位置に光路曲げ光学部材を挿入するための光学部
材装着手段と、この光学部材装着手段を回転又は往復回
動させるための回転／回動手段とを備えている（請求項
５）。光路曲げ光学部材を図示すると図４のようにな
る。光路を曲げる角度をθで表示している。この構成に
よっても検査対象画面１の同心円上の画素からの光が交
じり合う。The screen inspection apparatus of the present invention further comprises an optical path bending optical member, and an optical member mounting means for inserting the optical path bending optical member at any position between the camera and the screen to be inspected. A rotation / rotation means for rotating or reciprocating the optical member mounting means is provided (claim 5). FIG. 4 shows the optical path bending optical member. The angle at which the optical path is bent is indicated by θ. Also with this configuration, light from pixels on concentric circles of the inspection target screen 1 is mixed.
【００１２】なお、前記光路曲げ光学部材５ｂとしてプ
リズムを用いることができる（請求項６）。前記回転／
回動手段は、光学部材装着手段を光軸と平行な軸を中心
として回転又は往復回動する（請求項７）。図５は、光
路曲げ光学部材５ｂを光軸と平行な軸を中心として往復
回動させる場合を説明する図である。図５の場合であれ
ば、検査対象画面１の同心円上の一部の画素からの光が
受光画面上で交じり合う。Incidentally, a prism can be used as the optical path bending optical member 5b (claim 6). The rotation /
The rotating means rotates or reciprocates the optical member mounting means about an axis parallel to the optical axis. FIG. 5 is a diagram illustrating a case in which the optical path bending optical member 5b is reciprocated about an axis parallel to the optical axis. In the case of FIG. 5, light from some pixels on the concentric circle of the inspection target screen 1 intersects on the light receiving screen.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態を、添
付図面を参照しながら詳細に説明する。図６は、画面の
検査装置の構成を示す概略図である。画面の検査装置
は、拡散照射光源４と、載置盤１０に載置される検査対
象画面１を撮像するＣＣＤカメラ２と、このＣＣＤカメ
ラ２によって撮像された画像を処理する処理部３と、平
行ガラス板５１と、平行ガラス板５１を装着する円筒状
のフレーム７と、フレーム７を回転又は往復回動させる
モータ８及び駆動部６とを備えている。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 6 is a schematic diagram showing the configuration of the screen inspection device. The screen inspection apparatus includes a diffuse irradiation light source 4, a CCD camera 2 for imaging an inspection target screen 1 mounted on a mounting board 10, a processing unit 3 for processing an image captured by the CCD camera 2, A parallel glass plate 51, a cylindrical frame 7 on which the parallel glass plate 51 is mounted, a motor 8 for rotating or reciprocating the frame 7, and a driving unit 6 are provided.
【００１４】検査対象画面１は、液晶パネル、液晶パネ
ル用カラーフィルタ、ＣＲＴ用シャドーマスク等から選
ばれる。拡散照射光源４は、検査対象画面１を照らす光
源であり、これから照射された光が検査対象画面１の各
画素を透過する。なお、光検査対象画面１自体が発光す
るものを使用するのであれば、拡散照射光源４は不要で
ある。The inspection target screen 1 is selected from a liquid crystal panel, a color filter for a liquid crystal panel, a shadow mask for a CRT, and the like. The diffuse illumination light source 4 is a light source that illuminates the inspection target screen 1, and light emitted from the diffuse illumination light source 4 passes through each pixel of the inspection target screen 1. If the light inspection target screen 1 itself emits light, the diffuse irradiation light source 4 is unnecessary.
【００１５】ＣＣＤカメラ２には、約３０００画素×約
２０００画素の分解能を持つものを使用した。ＣＣＤカ
メラ２の撮像範囲が最大になるように、ＣＣＤカメラ２
と検査対象画面１の距離を合わせる。ＣＣＤカメラ２の
露光時間は、フレーム７が一回転する時間又は一往復回
動若しくは片道回動する時間よりも大きくとる。平行ガ
ラス板５１は、１以外の屈折率を有する透明な材料で形
成されたものであれば何を使ってもよい。また、その平
行ガラス板５１に波長フィルタ機能を持たせてもよい。The CCD camera 2 has a resolution of about 3000 pixels × about 2000 pixels. In order to maximize the imaging range of the CCD camera 2, the CCD camera 2
And the distance between the screens 1 to be inspected. The exposure time of the CCD camera 2 is set longer than the time required for the frame 7 to make one rotation or one reciprocating rotation or one-way rotation. Any material may be used as the parallel glass plate 51 as long as it is formed of a transparent material having a refractive index other than 1. Further, the parallel glass plate 51 may have a wavelength filter function.
【００１６】平行ガラス板５１は、図７に示すように、
円筒状のフレーム７に所定角度α傾けて装着され、フレ
ーム７はベルト９を通してモータ８によって回転駆動又
は往復回動駆動される。なお、平行ガラス板５１を回転
又は往復回動させる構造として、図６に示したベルトと
プーリを用いた構造の他に、ギヤを介して回転又は往復
回動させる構造、その他公知の構造をとることが可能で
ある。The parallel glass plate 51 is, as shown in FIG.
The frame 7 is attached to the cylindrical frame 7 at a predetermined angle α, and the frame 7 is driven to rotate or reciprocate by a motor 8 through a belt 9. In addition, as a structure for rotating or reciprocating the parallel glass plate 51, in addition to the structure using the belt and the pulley shown in FIG. It is possible.
【００１７】モータ８として、パルスステッピングモー
タ等、任意の種類のモータを用いることができる。前記
の平行ガラス板５１が円筒状のフレーム７に傾けて装着
される角度をαとすると、平行ガラス板５１が光路を横
にずらす距離Ｄは、 Ｄ＝ｄsin(α−β) ／ cosβ （ｄは平行ガラス板５１の厚み、βは sinα＝ｎ sinβ
を満たす角、ｎは平行ガラス板５１の屈折率) で表され
る。距離Ｄは、大きな程モアレ除去効果が大きくなる
が、画像の輪郭もぼけてしまうので、通常、検査対象画
面１を構成する画素の大きさの１倍から数倍にとる。As the motor 8, any kind of motor such as a pulse stepping motor can be used. Assuming that the angle at which the parallel glass plate 51 is inclined and mounted on the cylindrical frame 7 is α, the distance D at which the parallel glass plate 51 shifts the optical path laterally is D = dsin (α−β) / cosβ (d Is the thickness of the parallel glass plate 51, β is sinα = n sinβ
Where n is the refractive index of the parallel glass plate 51). The moire removal effect increases as the distance D increases, but the outline of the image also blurs. Therefore, the distance D is usually set to one to several times the size of the pixels forming the inspection target screen 1.
【００１８】以上の発明の実施の形態では、フレーム７
を光軸を中心として回転駆動又は往復回動駆動させた。
しかし、フレーム７を光軸と垂直な軸を中心として往復
回動させてもよい。図８は、円筒状のフレーム７の側面
にモータ８の軸を取り付けて、フレーム７を光軸と垂直
な軸を中心として往復回動させる構成を示す図である。
この場合は、平行ガラス板５１を、フレーム７に所定角
度傾けて装着する必要はない。In the above embodiment of the present invention, the frame 7
Was driven to rotate or reciprocally rotate about the optical axis.
However, the frame 7 may be reciprocated about an axis perpendicular to the optical axis. FIG. 8 is a view showing a configuration in which a shaft of a motor 8 is attached to a side surface of a cylindrical frame 7 and the frame 7 is reciprocated about an axis perpendicular to the optical axis.
In this case, it is not necessary to mount the parallel glass plate 51 on the frame 7 at a predetermined angle.
【００１９】また、以上の発明の実施の形態では、光路
横ずらし光学部材（具体的には平行ガラス板５１）を用
いた。しかし、プリズムに代表されるような光路曲げ光
学部材を用いることもできる。図９は、プリズム５２を
フレーム７に装着した状態を示す図である。なお、この
ときの検査対象画面１上にできる同心円の半径は、光路
を曲げる角度をθ、プリズムと検査対象画面１との距離
をｘとすると、ｘθとなる。In the above-described embodiment, the optical member for shifting the optical path laterally (specifically, the parallel glass plate 51) is used. However, an optical path bending optical member such as a prism can be used. FIG. 9 is a diagram illustrating a state in which the prism 52 is mounted on the frame 7. The radius of the concentric circle formed on the inspection target screen 1 at this time is xθ, where θ is the angle at which the optical path is bent and x is the distance between the prism and the inspection target screen 1.
【００２０】[0020]
【発明の効果】以上のように本発明の画面の検査装置に
よれば、カメラや検査対象画面の載置盤のような重い部
材を動かさなくても、光路横ずらし光学部材や光路曲げ
光学部材を用い、これらを回転又は往復回動させるだけ
で、検査対象画面の近傍の画素からの光が平均化された
状態で受光素子により検出し、モアレの輪郭をぼかすこ
とができる。As described above, according to the screen inspection apparatus of the present invention, the optical member for shifting the optical path laterally or the optical member for bending the optical path can be used without moving a heavy member such as a camera or a mounting board of the screen to be inspected. By simply rotating or reciprocating them, light from the pixels near the inspection target screen can be detected by the light receiving element in an averaged state, and the contour of the moire can be blurred.
【図１】従来の画面の検査装置の構成図である。FIG. 1 is a configuration diagram of a conventional screen inspection apparatus.
【図２】光路横ずらし光学部材を使用した本発明の画面
の検査装置の構成図である。FIG. 2 is a configuration diagram of a screen inspection apparatus of the present invention using an optical member for shifting the optical path laterally.
【図３】光路横ずらし光学部材を往復回動させる動きを
説明する図である。FIG. 3 is a diagram for explaining a movement of reciprocatingly rotating an optical member for shifting an optical path laterally.
【図４】光路曲げ光学部材を示す図である。FIG. 4 is a diagram showing an optical path bending optical member.
【図５】光路曲げ光学部材を光軸と平行な軸を中心とし
て往復回動させる動きを説明する図である。FIG. 5 is a diagram illustrating a movement of reciprocatingly rotating the optical path bending optical member about an axis parallel to the optical axis.
【図６】本発明の実施の形態に係る画面の検査装置の構
成を示す概略図である。FIG. 6 is a schematic diagram showing a configuration of a screen inspection device according to an embodiment of the present invention.
【図７】フレームに装着された光路横ずらし光学部材を
示す図である。FIG. 7 is a view showing an optical member for shifting an optical path laterally mounted on a frame.
【図８】フレーム７を光軸と垂直な軸を中心として往復
回動させる構成を示す図である。FIG. 8 is a diagram showing a configuration in which the frame 7 is reciprocated about an axis perpendicular to the optical axis.
【図９】フレームに装着された光路曲げ光学部材を示す
図である。FIG. 9 is a diagram showing an optical path bending optical member mounted on a frame.
１ 検査対象画面 ２ ＣＣＤカメラ ３ 処理部 ４ 拡散照射光源 ５１ 平行ガラス板 ５２ プリズム ６ 駆動部 ７ フレーム ８ モータ ９ ベルト DESCRIPTION OF REFERENCE NUMERALS 1 inspection target screen 2 CCD camera 3 processing unit 4 diffused irradiation light source 51 parallel glass plate 52 prism 6 driving unit 7 frame 8 motor 9 belt
Claims (7)
メラによって撮像された画像信号を処理する処理部とを
備える画面の検査装置であって、 光路横ずらし光学部材を備え、 カメラと検査対象画面との間のいずれかの位置に光路横
ずらし光学部材を挿入するための光学部材装着手段と、
この光学部材装着手段を回転又は往復回動させる回転／
回動手段とを備えていることを特徴とする画面の検査装
置。1. A screen inspection apparatus comprising: a camera for imaging a screen to be inspected; and a processing unit for processing an image signal captured by the camera, comprising: an optical member for shifting a light path sideways; Optical member mounting means for inserting the optical path laterally shifting optical member at any position between the screen and
A rotation / rotation for rotating or reciprocating the optical member mounting means.
A screen inspection apparatus, comprising: a rotating unit.
明板である請求項１記載の画面の検査装置。2. The screen inspection apparatus according to claim 1, wherein the optical member for shifting the optical path sideways is a transparent plate having two parallel surfaces.
軸と平行な軸を中心として回転又は往復回動させるもの
である請求項１記載の画面の検査装置。3. The screen inspection apparatus according to claim 1, wherein the rotation / rotation means rotates or reciprocates the optical member mounting means about an axis parallel to the optical axis.
軸と垂直な軸を中心として往復回動させるものである請
求項１記載の画面の検査装置。4. The screen inspection apparatus according to claim 1, wherein the rotation / rotation means reciprocates the optical member mounting means about an axis perpendicular to the optical axis.
メラによって撮像された画像信号を処理する処理部とを
備える画面の検査装置であって、 光路曲げ光学部材を備え、 カメラと検査対象画面との間のいずれかの位置に光路曲
げ光学部材を挿入するための光学部材装着手段と、この
光学部材装着手段を回転又は往復回動させるための回転
／回動手段とを備えていることを特徴とする画面の検査
装置。5. A screen inspection apparatus comprising: a camera for imaging a screen to be inspected; and a processing unit for processing an image signal captured by the camera, comprising: an optical path bending optical member; And an optical member mounting means for inserting the optical path bending optical member at any position between the optical member mounting means and a rotation / rotation means for rotating or reciprocating the optical member mounting means. Features a screen inspection device.
項５記載の画面の検査装置。6. The screen inspection apparatus according to claim 5, wherein the optical path bending optical member is a prism.
軸と平行な軸を中心として回転又は往復回動させるもの
である請求項５記載の画面の検査装置。7. The screen inspection apparatus according to claim 5, wherein the rotation / rotation means rotates or reciprocates the optical member mounting means about an axis parallel to the optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22979597A JPH1164162A (en) | 1997-08-26 | 1997-08-26 | Inspecting device of screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22979597A JPH1164162A (en) | 1997-08-26 | 1997-08-26 | Inspecting device of screen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1164162A true JPH1164162A (en) | 1999-03-05 |
Family
ID=16897802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22979597A Pending JPH1164162A (en) | 1997-08-26 | 1997-08-26 | Inspecting device of screen |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1164162A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105716649A (en) * | 2016-04-25 | 2016-06-29 | 广东每通测控科技股份有限公司 | One-button detection instrument |
-
1997
- 1997-08-26 JP JP22979597A patent/JPH1164162A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105716649A (en) * | 2016-04-25 | 2016-06-29 | 广东每通测控科技股份有限公司 | One-button detection instrument |
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