JPH1124750A - Automated guided vehicle - Google Patents
Automated guided vehicleInfo
- Publication number
- JPH1124750A JPH1124750A JP9182872A JP18287297A JPH1124750A JP H1124750 A JPH1124750 A JP H1124750A JP 9182872 A JP9182872 A JP 9182872A JP 18287297 A JP18287297 A JP 18287297A JP H1124750 A JPH1124750 A JP H1124750A
- Authority
- JP
- Japan
- Prior art keywords
- light
- opening
- guided vehicle
- light emitting
- transferring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 17
- 230000032258 transport Effects 0.000 description 12
- 238000001514 detection method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 241000282412 Homo Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Cleaning In General (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、アームやマニピ
ュレータを有し、搬送物の搬送ならびに移載を行う無人
搬送装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an unmanned transfer device having an arm and a manipulator for transferring and transferring a transferred object.
【０００２】[0002]
【従来の技術】近年、半導体デバイスや、ＬＣＤ（Ｌiq
uid Ｃrystal Ｄisplay:液晶表示装置）を初めとするＦ
ＰＤ（Ｆlat Ｐannel Ｄisplay：平面表示装置）等を製
造するクリーンルームにおいては、例えば半導体ウェハ
を格納したカセットをＡＧＶ（Ａutomated Ｇuided Ｖe
hicle:自動案内車、無人搬送車）によって搬送する例が
多く見られる。2. Description of the Related Art In recent years, semiconductor devices and LCDs (Liq
uid Crystal Display: liquid crystal display)
In a clean room for manufacturing a PD (Flat Pannel Display: flat panel display) or the like, for example, a cassette containing semiconductor wafers is stored in an AGV (Automated Guided Ve).
hicle: automatic guided vehicle, automatic guided vehicle).
【０００３】図３は、半導体デバイス工場のクリーンル
ームと、この中で稼働するＡＧＶの外観構成を示す斜視
図である。図３に示すように、ＡＧＶ１００は装置１１
０と装置１１０、あるいは装置１１０とストッカ１１０
ａとの間を走行し、ウェハカセット１０２を搬送する。FIG. 3 is a perspective view showing a clean room of a semiconductor device factory and an external configuration of an AGV operating therein. As shown in FIG. 3, the AGV 100
0 and device 110, or device 110 and stocker 110
a, and transports the wafer cassette 102.
【０００４】図４は、ＡＧＶ１００によるウェハカセッ
ト１０２の移載中の様子を示す斜視図である。このよう
にＡＧＶ１００は、載置搬送するウェハカセット１０２
を移載するためのアーム１０３を有している。FIG. 4 is a perspective view showing a state where the wafer cassette 102 is being transferred by the AGV 100. As described above, the AGV 100 is mounted on the wafer cassette 102
Has an arm 103 for transferring.
【０００５】なお図３あるいは図４に示すように、装置
１１０においてウェハカセット１０２を載置する載置部
１１１は、当該装置１１０の前面から奥まった構成が一
般的であり、またＡＧＶ１００としては図示しないレー
ル上を走行する軌道式台車が主流であった。[0005] As shown in FIG. 3 or FIG. 4, a mounting portion 111 for mounting the wafer cassette 102 in the apparatus 110 is generally configured to be recessed from the front of the apparatus 110. Track-type bogies that run on rails that do not work were the mainstream.
【０００６】こういったクリーンルームで製造される半
導体ウェハも時代とともに大型化が進み、またウェハを
ボックスに格納して搬送するＭＥ（Ｍini-Ｅnvironmen
t）と呼ばれる方法が用いられるようになった。[0006] Semiconductor wafers manufactured in such clean rooms have been increasing in size with the times, and MEs (Mini-Environmenmen) which store and transport wafers in boxes.
A method called t) came to be used.
【０００７】また現在では、ウェハがＡＧＶに設けられ
たボックスに格納されるために、塵埃により汚染される
ことがなくなった。これにともなって、ウェハをクリー
ンルームの天井から吊り下げて移載する方法も用いられ
るようになった。At present, since the wafer is stored in a box provided in the AGV, the wafer is not contaminated by dust. Accordingly, a method of transferring a wafer by suspending it from the ceiling of a clean room has been used.
【０００８】図５は、ウェハを上方から吊り上げて移載
するＯＨＴ（Ｏverhead Ｈoist Ｔransportation：ホイ
スト付き頭上搬送）式クリーンルームの様子を説明する
斜視図である。図５に示すように、ＯＨＴでは各装置１
２０においても、ウェハ載置場所の上方がオープンにな
っている必要がある。FIG. 5 is a perspective view for explaining the state of an OHT (Overhead Hoist Transportation) type clean room in which a wafer is lifted from above and transferred. As shown in FIG.
Also in 20, it is necessary that the upper part of the wafer mounting place is open.
【０００９】[0009]
【発明が解決しようとする課題】そこで各装置１２０あ
るいはストッカ１２０ａは、その前面に突出したロード
ポート１２１を有する構成としたものが多くなってい
る。図６は、上述したＯＨＴ式のようにロードポート１
２１が突出した装置１２０とＡＧＶ１００ａとの関係を
詳細に示した斜視図である。Therefore, many apparatuses 120 or stockers 120a have a load port 121 projecting from the front thereof. FIG. 6 shows the load port 1 as in the OHT type described above.
It is the perspective view which showed in detail the relationship between the device 120 and AGV100a which 21 projected.
【００１０】ところが、図６に示すような構成による
と、ロードポート１２１が装置１２０の前面から突出し
ているため、例えば何れかのロードポート１２１と隣接
するロードポート１２１との間に空間が生じる。However, according to the configuration shown in FIG. 6, since the load port 121 protrudes from the front surface of the apparatus 120, a space is generated between any one of the load ports 121 and the adjacent load port 121, for example.
【００１１】この空間に、図６にも示すように人間が侵
入可能である場合も多いが、このように空間に人間が存
在する場合には、移載作業中にアーム１０３と人間とが
接触する可能性もあった。As shown in FIG. 6, there are many cases where a human can enter this space, but when a human exists in such a space, the arm 103 and the human come into contact with each other during the transfer operation. There was also a possibility.
【００１２】この発明は、このような背景の下になされ
たもので、人間と無人の搬送台車が混在するような工場
内等にあっても、高い安全性を確保することができる無
人搬送装置を提供することを目的としている。The present invention has been made in view of such a background, and is capable of ensuring high security even in a factory or the like where humans and unmanned transport carts are mixed. It is intended to provide.
【００１３】[0013]
【課題を解決するための手段】上述した課題を解決する
ために、請求項１に記載の発明にあっては、装置との間
で搬送物の受け渡しを可能とするロボット搭載無人搬送
車であって、前記装置側の開口部と無人搬送車側の搬送
物移載用開口部との間で光カーテンを形成するように前
記双方開口部端部の何れか一方に発光部、他方に受光部
を備えてなり、前記光カーテンの何れかが遮断されたと
きに前記移載ロボットの動作を停止することを特徴とす
る。また、請求項２に記載の発明にあっては、前記装置
側の開口部端部に発光部を備え、前記無人搬送車側の開
口部端部に受光部を備え、前記装置側の開口部と無人搬
送車側の搬送物移載用開口部との間で光カーテンを形成
することを特徴とする。また、請求項３に記載の発明に
あっては、前記装置側の開口部端部に受光部を備え、前
記無人搬送車側の開口部端部に発光部を備え、前記装置
側の開口部と無人搬送車側の搬送物移載用開口部との間
で光カーテンを形成することを特徴とする。According to the first aspect of the present invention, there is provided an automatic guided vehicle equipped with a robot capable of transferring goods to and from a device. A light emitting unit is provided at one of the ends of the two openings and a light receiving unit is provided at the other end so as to form a light curtain between the opening on the apparatus side and the transfer opening for articles on the automatic guided vehicle side. Wherein the operation of the transfer robot is stopped when any of the light curtains is shut off. In the invention according to claim 2, a light emitting unit is provided at an end of the opening on the device side, a light receiving unit is provided at an end of an opening on the automatic guided vehicle side, and the opening on the device side is provided. A light curtain is formed between the automatic transfer vehicle and the transfer object transfer opening on the automatic guided vehicle side. According to the invention as set forth in claim 3, a light receiving unit is provided at an end of the opening on the device side, a light emitting unit is provided at an end of an opening on the automatic guided vehicle side, and the opening on the device side is provided. A light curtain is formed between the automatic transfer vehicle and the transfer object transfer opening on the automatic guided vehicle side.
【００１４】この発明によれば、装置側の開口部と無人
搬送車側の搬送物移載用開口部の何れか一方に発光部、
他方に受光部を備えて双方開口部端部の間に光カーテン
を形成し、光カーテンの何れかが遮断されたとき移載ロ
ボットの動作を停止する。According to the present invention, the light emitting section is provided in one of the opening on the apparatus side and the opening for transferring a conveyed article on the automatic guided vehicle side.
On the other hand, a light curtain is formed between the ends of the two openings, and the operation of the transfer robot is stopped when one of the light curtains is shut off.
【００１５】[0015]
【発明の実施の形態】以下に本発明について説明する。
図１は、本発明の一実施の形態にかかる無人搬送装置の
全体構成を示す斜視図である。なお図１において、図３
ないし図６に示す各部と対応する部分には同一の符号を
付し、その詳細な説明は省略する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below.
FIG. 1 is a perspective view illustrating an entire configuration of an unmanned transport device according to an embodiment of the present invention. In FIG. 1, FIG.
6 are denoted by the same reference numerals, and the detailed description thereof will be omitted.
【００１６】図１において、１０は制御装置１２や図示
しない駆動装置（走行装置）を有する無人搬送台車であ
る。この無人搬送台車１０は、横行も可能であるが、こ
の場合矢印ＡＡ’方向に自走するものとし、このＡ、
Ａ’方向を各々前方および後方として説明する。In FIG. 1, reference numeral 10 denotes an automatic guided vehicle having a control device 12 and a drive device (traveling device) not shown. The unmanned transport vehicle 10 can also traverse, but in this case, it is assumed that it travels in the direction of the arrow AA '.
A direction will be described as front and rear, respectively.
【００１７】この無人搬送台車１０の上部に形成された
載置部１０ａは両側部が開口しており、また載置部１０
ａ内にはアーム１０３が設けられている。このアーム１
０３によって、装置１２０に設けられたロードポート１
２１との間でウェハカセット１０２等を移載する。The mounting portion 10a formed on the upper part of the automatic guided vehicle 10 is open on both sides.
An arm 103 is provided in a. This arm 1
03, the load port 1 provided in the device 120
Then, the wafer cassette 102 and the like are transferred to and from the storage device 21.
【００１８】なお上述の載置部１０ａの開口部にあって
は、一般には防護柵（安全柵）や光センサ等が設けら
れ、無人搬送台車１０の走行中とかアーム１０３の稼働
中にこの領域に作業員の腕とかが侵入したことを検知す
ると搬送台車１０の搬送停止とかアーム１０３の動作を
停止させる構成となっているが、本実施の形態では図示
ならびに詳細な説明は省略する。In the opening of the mounting portion 10a, a protective fence (safety fence), an optical sensor, and the like are generally provided, and this area is provided when the automatic guided vehicle 10 or the arm 103 is operating. When it is detected that an operator's arm or the like has entered, the transport of the transport trolley 10 or the operation of the arm 103 is stopped, but illustration and detailed description are omitted in this embodiment.
【００１９】上述した載置部１０ａの開口部には、その
前端側と後端側に、各々受光部２５ -1あるいは２５-2が
取り付けられている。この受光部２５-1および２５
-2は、複数の受光素子２５ａ、２５ａ・・・の配列から
構成されている。The opening of the mounting portion 10a is
A light receiving section 25 is provided on each of the front end side and the rear end side. -1Or 25-2But
Installed. This light receiving section 25-1And 25
-2From the arrangement of the plurality of light receiving elements 25a, 25a.
It is configured.
【００２０】一方装置１２０が有するロードポート１２
１の開口部には、その左端側と右端側に、各々発光部２
４-1あるいは２４-2が取り付けられている。この発光部
２４ -1および２５-2は、複数の発光素子２４ａ、２４ａ
・・・の配列から構成されている。On the other hand, the load port 12 of the device 120
The opening 1 has a light emitting section 2 at the left end and a right end, respectively.
4-1Or 24-2Is attached. This light emitting section
24 -1And 25-2Represents a plurality of light emitting elements 24a, 24a
.. Are arranged.
【００２１】この無人搬送台車１０が任意のロードポー
ト１２１の前方に停止すると、前述の発光部２４-1と受
光部２５-1、および発光部２４-2と受光部２５-2とが対
向する。[0021] The automatic guided carriage 10 stops in front of any of the load port 121, the light receiving portion 25 -1 and the light emitting portion 24 -1 described above, and a light emitting portion 24 -2 and a light receiving portion 25 -2 faces .
【００２２】従って、各発光素子２４、２４・・・が出
射するビーム（光）が対向する受光素子２５、２５・・
・に入射し、ロードポート１２１と無人搬送台車１０と
の間に光カーテンを形成する。Therefore, the light-receiving elements 25, 25,... To which the beams (light) emitted from the respective light-emitting elements 24, 24,.
To form a light curtain between the load port 121 and the automatic guided vehicle 10.
【００２３】図２は、本実施の形態における制御系の概
略構成を示すブロック図である。図２に示すように、無
人搬送台車１０が有する制御部１２は、ＣＰＵ(Ｃentra
l Ｐrocessing Ｕnit：中央処理装置)１２ａやＡＮＤ
（論理積）回路１２ｂを有している。またアーム１０３
は、このアーム１０３の関節等の可動部を駆動する駆動
部１０３ａを有している。以下に、無人搬送台車１０に
おいてウェハカセット１０２等の移載を行う側に設けら
れた受光部２５-1、２５-2に関して説明する。FIG. 2 is a block diagram showing a schematic configuration of a control system in the present embodiment. As shown in FIG. 2, the control unit 12 of the automatic guided vehicle 10 includes a CPU (Centra
l Processing Unit: Central processing unit) 12a and AND
(Logical product) circuit 12b. Arm 103
Has a driving section 103a for driving a movable section such as a joint of the arm 103. Hereinafter, the light receiving units 25 -1 and 25 -2 provided on the side where the wafer cassette 102 and the like are transferred in the automatic guided vehicle 10 will be described.
【００２４】発光部２４-1、２４-2を構成する発光素子
２４ａ、２４ａ・・・は、これと対向する受光部２
５-1、２５-2において対応する受光素子２５ａ、２５ａ
・・・に対してビームを送出する。The light-emitting elements 24a, 24a,... Constituting the light-emitting sections 24-1 , 24-2 are arranged opposite to the light-receiving section 2.
5-1, the corresponding light receiving element 25a in 25 -2, 25a
.. Are transmitted to.
【００２５】一方受光部２５-1あるいは２５-2において
は、全ての受光素子２５ａ、２５ａ・・・に、発光素子
２４ａ、２４ａ・・・から送出されるビームが入射して
いる場合に、検知信号Ｓｓを出力する。On the other hand the light receiving portion 25 -1 or 25 -2, all of the light receiving element 25a, the 25a · · ·, when the light emitting element 24a, the beam sent from 24a · · · is incident, detected The signal Ss is output.
【００２６】ＣＰＵ１２ａは、無人搬送台車１０がロー
ドポート１２１の前部の所定の位置に停止すると、アー
ム１０３を動作させるための制御信号Ｓｃを出力する。
この制御信号Ｓｃと上述の検知信号Ｓｓとは、ＡＮＤ回
路１２ｂに入力される。ＡＮＤ回路１２ｂの出力は駆動
信号Ｓｄとして駆動部１０３ａに入力される。When the automatic guided vehicle 10 stops at a predetermined position in front of the load port 121, the CPU 12a outputs a control signal Sc for operating the arm 103.
The control signal Sc and the above-described detection signal Ss are input to the AND circuit 12b. The output of the AND circuit 12b is input to the drive unit 103a as a drive signal Sd.
【００２７】上述の構成から分かるように、ＡＮＤ回路
１２ｂに制御信号Ｓｃと検知信号Ｓｓとは論理積が取ら
れ、両方の信号が入力された場合にのみ駆動信号Ｓｄを
出力する。As can be seen from the above configuration, the control signal Sc and the detection signal Ss are ANDed with the AND circuit 12b, and the drive signal Sd is output only when both signals are input.
【００２８】従って検知信号Ｓｓが出力されない状態で
は、ＣＰＵ１２ａが出力する制御信号Ｓｃが駆動信号Ｓ
ｄとして駆動部１０３ａには伝達されない。このため、
アーム１０３は動作しない。Therefore, when the detection signal Ss is not output, the control signal Sc output from the CPU 12a
It is not transmitted to the driving unit 103a as d. For this reason,
The arm 103 does not operate.
【００２９】例えば、ウェハカセット１０２等の移載作
業中に、装置１２０と無人搬送台車１０との間の空間か
ら、アーム１０３による移載領域に作業員等が侵入する
と、発光素子２４ａ、２４ａ・・・から受光素子２５
ａ、２５ａ・・・に入射するビームの何れかが遮断され
る。For example, when a worker or the like enters the transfer area by the arm 103 from the space between the apparatus 120 and the unmanned carrier 10 during the transfer operation of the wafer cassette 102 or the like, the light emitting elements 24a, 24a. ..From light receiving element 25
a, 25a... are blocked.
【００３０】これによって検知信号Ｓｓの出力が停止さ
れ、結果として駆動部１０３ａに駆動信号Ｓｄが入力さ
れなくなってアーム１０３の動作が停止するので、作業
員等とアーム１０３との接触を未然に防ぐことができ
る。As a result, the output of the detection signal Ss is stopped, and as a result, the drive signal Sd is not inputted to the drive section 103a, and the operation of the arm 103 is stopped. Therefore, the contact between the worker and the arm 103 is prevented beforehand. be able to.
【００３１】なお、通常は移載作業を行わない側の開口
部は防護柵等とか光カーテンにより閉じられており、光
カーテンの場合、上記説明の装置１２０と搬送台車１０
との間の空間部光カーテンと同じ役目を果たす。そこ
で、擬似的に作成した検知信号Ｓｓを入力する等の方法
で、アーム１０３の動作を可能とする。Normally, the opening on the side on which the transfer operation is not performed is closed by a protective fence or the like or a light curtain.
It plays the same role as the light curtain in the space between them. Therefore, the operation of the arm 103 is enabled by a method such as inputting a detection signal Ss created in a pseudo manner.
【００３２】また上述の実施の形態では、装置１２０側
に発光部を設け、無人搬送台車１０側に受光部を設けた
構成を示したが、装置１２０側に受光部を設け、無人搬
送台車１０側に発光部を設ける構成であってもよい。In the above-described embodiment, the light emitting unit is provided on the device 120 side and the light receiving unit is provided on the unmanned transport vehicle 10 side. However, the light receiving unit is provided on the device 120 side and the unmanned transport vehicle 10 is provided. A configuration in which a light emitting unit is provided on the side may be employed.
【００３３】この場合には、例えば無線等により作業指
示信号を送信する送信機を装置１２０に設け、無人搬送
台車１０には当該作業指示信号を受信する受信機を設け
る。そして、無人搬送台車１０が送出するビームが遮断
された場合に作業指示信号の送信を停止するか、あるい
は作業停止信号を送信してＣＰＵ１２ａが出力する制御
信号Ｓｃを停止させれる構成とすればよい。In this case, for example, a transmitter for transmitting a work instruction signal by radio or the like is provided in the apparatus 120, and the automatic guided vehicle 10 is provided with a receiver for receiving the work instruction signal. Then, the transmission of the work instruction signal may be stopped when the beam transmitted by the automatic guided vehicle 10 is cut off, or the control signal Sc output by the CPU 12a may be stopped by transmitting the work stop signal. .
【００３４】さらに上述の実施の形態では、装置１２０
が有するロードポート１２１の左右端に発光部を設けた
構成を例に挙げて説明したが、ロードポート１２１と無
人搬送台車１０とによって形成される移載領域の上端な
らびに下端に、装置１２０と無人搬送台車１０との間の
光センサ等を設けて、作業員等の侵入を監視する構成で
あってもよい。Further, in the above embodiment, the device 120
Has been described by taking as an example the configuration in which the light emitting units are provided at the left and right ends of the load port 121 included in the apparatus. However, the device 120 and the unmanned A configuration may be adopted in which an optical sensor or the like is provided between the vehicle and the transport vehicle 10 to monitor intrusion of an operator or the like.
【００３５】[0035]
【発明の効果】以上説明したように、この発明によれ
ば、装置側の開口部と無人搬送車側の搬送物移載用開口
部の何れか一方に発光部、他方に受光部を備えて双方開
口部端部の間に光カーテンを形成し、光カーテンの何れ
かが遮断されたとき移載ロボットの動作を停止するの
で、人間と無人の搬送台車が混在する工場内等にあって
も、高い安全性を確保することができる無人搬送装置が
実現可能であるという効果が得られる。As described above, according to the present invention, one of the opening on the apparatus side and the opening for transferring a conveyed article on the automatic guided vehicle side is provided with a light emitting section and the other is provided with a light receiving section. A light curtain is formed between both ends of the opening, and when one of the light curtains is shut off, the operation of the transfer robot is stopped. Therefore, even in a factory or the like where human and unmanned transport vehicles are mixed. Thus, an effect is obtained that an unmanned transfer device that can ensure high safety can be realized.
【００３６】即ち本発明によれば、装置と無人搬送台車
との間に空間ができる場合にあっても、当該装置と無人
搬送台車間の移載領域を光カーテンで監視することが可
能であるため、非常に高い安全性を確保することができ
る。That is, according to the present invention, even when a space is formed between the apparatus and the automatic guided vehicle, the transfer area between the apparatus and the automatic guided vehicle can be monitored by the light curtain. Therefore, very high security can be secured.
【図１】 本発明の一実施の形態にかかる無人搬送装置
の全体構成を示す斜視図である。FIG. 1 is a perspective view showing an entire configuration of an unmanned transport device according to an embodiment of the present invention.
【図２】 同実施の形態における制御系の概略構成を示
すブロック図である。FIG. 2 is a block diagram showing a schematic configuration of a control system in the embodiment.
【図３】 従来技術よる半導体デバイス工場のクリーン
ルームと、この中で稼働するＡＧＶの外観構成を示す斜
視図である。FIG. 3 is a perspective view showing a clean room of a semiconductor device factory according to the related art and an external configuration of an AGV operating therein.
【図４】 図３に示すＡＧＶ１００によるウェハカセッ
ト１０２の移載中の様子を示す斜視図である。FIG. 4 is a perspective view showing a state where the wafer cassette 102 is being transferred by the AGV 100 shown in FIG.
【図５】 従来技術によるＯＨＴ式クリーンルームの様
子を説明する斜視図である。FIG. 5 is a perspective view illustrating a state of an OHT type clean room according to the related art.
【図６】 従来技術において、ＯＨＴ式のようにロード
ポート１２１が突出した装置１２０とＡＧＶ１００ａと
の関係を詳細に示した斜視図である。FIG. 6 is a perspective view showing in detail the relationship between an apparatus 120 having a load port 121 protruding like an OHT type and an AGV 100a in the related art.
１０ 無人搬送台車（無人搬送車） １０２ ウェハカセット（搬送物） １２０ 装置 Reference Signs List 10 automatic guided vehicle (automated guided vehicle) 102 wafer cassette (conveyed object) 120 device
Claims (3)
２）の受け渡しを可能とするロボット搭載無人搬送車で
あって、 前記装置（１２０）側の開口部と無人搬送車（１０）側
の搬送物移載用開口部との間で光カーテンを形成するよ
うに前記双方開口部端部の何れか一方に発光部、他方に
受光部を備えてなり、 前記光カーテンの何れかが遮断されたときに前記移載ロ
ボットの動作を停止することを特徴とする無人搬送装
置。An object (10) is transferred to and from an apparatus (120).
2) An automatic guided vehicle equipped with a robot that enables the transfer described in 2), wherein a light curtain is formed between an opening on the device (120) side and an opening for transferring a transferred object on the unmanned transport vehicle (10) side. A light-emitting part at one of the ends of the two openings, and a light-receiving part at the other, and the operation of the transfer robot is stopped when any of the light curtains is shut off. Unmanned transfer device.
光部を備え、 前記無人搬送車（１０）側の開口部端部に受光部を備
え、 前記装置（１２０）側の開口部と無人搬送車（１０）側
の搬送物移載用開口部との間で光カーテンを形成するこ
とを特徴とする請求項１に記載の無人搬送装置。2. A light emitting unit is provided at an end of the opening of the device (120), a light receiving unit is provided at an end of an opening of the automatic guided vehicle (10), and an opening of the device (120) is provided. The unmanned transport apparatus according to claim 1, wherein a light curtain is formed between the automatic transport vehicle (10) and the transported object transfer opening.
光部を備え、 前記無人搬送車（１０）側の開口部端部に発光部を備
え、 前記装置（１２０）側の開口部と無人搬送車（１０）側
の搬送物移載用開口部との間で光カーテンを形成するこ
とを特徴とする請求項１に記載の無人搬送装置。3. A light receiving unit is provided at an end of the opening on the device (120) side, a light emitting unit is provided on an end of an opening on the automatic guided vehicle (10) side, and an opening on the device (120) side is provided. The unmanned transport apparatus according to claim 1, wherein a light curtain is formed between the automatic transport vehicle (10) and the transported object transfer opening.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9182872A JPH1124750A (en) | 1997-07-08 | 1997-07-08 | Automated guided vehicle |
| KR1019980012715A KR100563456B1 (en) | 1997-04-14 | 1998-04-10 | The self-transfer vehicle and its device |
| US09/059,361 US6019563A (en) | 1997-04-14 | 1998-04-14 | Automated guided vehicle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9182872A JPH1124750A (en) | 1997-07-08 | 1997-07-08 | Automated guided vehicle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1124750A true JPH1124750A (en) | 1999-01-29 |
Family
ID=16125911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9182872A Pending JPH1124750A (en) | 1997-04-14 | 1997-07-08 | Automated guided vehicle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1124750A (en) |
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| WO2001013408A1 (en) * | 1999-08-12 | 2001-02-22 | Infineon Technologies Sc300 Gmbh & Co. Kg | Overhead transport system for open cassette transport |
| EP1113214A1 (en) * | 1999-12-28 | 2001-07-04 | Infineon Technologies AG | Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool |
| US6430839B1 (en) | 1999-04-09 | 2002-08-13 | Oki Electric Industry Co., Ltd. | Method of transferring a material from first apparatus to second apparatus in the clean room and an assembly line |
| JP2010152955A (en) * | 2008-12-24 | 2010-07-08 | Fujitsu Ltd | Robot positioning device and robot |
| WO2012150644A1 (en) * | 2011-05-02 | 2012-11-08 | 村田機械株式会社 | Automated warehouse |
| JP2021091028A (en) * | 2019-12-09 | 2021-06-17 | トヨタ自動車株式会社 | Conveyance robot system and control method of conveyance robot |
| JP2021091027A (en) * | 2019-12-09 | 2021-06-17 | トヨタ自動車株式会社 | Conveyance robot system and control method of conveyance robot |
| JP2021091029A (en) * | 2019-12-09 | 2021-06-17 | トヨタ自動車株式会社 | Conveyance robot system |
| US20220185601A1 (en) * | 2019-04-11 | 2022-06-16 | Trumpf Maschinen Austria Gmbh & Co. Kg. | Manufacturing device and conveyor means |
| US11513530B1 (en) * | 2019-05-08 | 2022-11-29 | Amazon Technologies, Inc. | Techniques for coordinating movement of components within a workspace |
| EP4122650A1 (en) * | 2021-07-22 | 2023-01-25 | Magazino GmbH | Mobile robot with improved safety |
| USD986882S1 (en) | 2010-01-06 | 2023-05-23 | Apple Inc. | Portable display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6430839B1 (en) | 1999-04-09 | 2002-08-13 | Oki Electric Industry Co., Ltd. | Method of transferring a material from first apparatus to second apparatus in the clean room and an assembly line |
| US6467189B2 (en) | 1999-04-09 | 2002-10-22 | Oki Electric Industry Co., Ltd. | Method of transferring a material from first apparatus to second apparatus in the clean room and an assembly line |
| WO2001013408A1 (en) * | 1999-08-12 | 2001-02-22 | Infineon Technologies Sc300 Gmbh & Co. Kg | Overhead transport system for open cassette transport |
| EP1113214A1 (en) * | 1999-12-28 | 2001-07-04 | Infineon Technologies AG | Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool |
| WO2001048416A1 (en) * | 1999-12-28 | 2001-07-05 | Infineon Technologies Sc300 Gmbh & Co. Kg | Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool |
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| JP5673806B2 (en) * | 2011-05-02 | 2015-02-18 | 村田機械株式会社 | Automatic warehouse |
| WO2012150644A1 (en) * | 2011-05-02 | 2012-11-08 | 村田機械株式会社 | Automated warehouse |
| US20220185601A1 (en) * | 2019-04-11 | 2022-06-16 | Trumpf Maschinen Austria Gmbh & Co. Kg. | Manufacturing device and conveyor means |
| JP2022528924A (en) * | 2019-04-11 | 2022-06-16 | トルンプ マシーネン オーストリア ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディトゲゼルシャフト | Manufacturing equipment and transportation means |
| US11945666B2 (en) | 2019-04-11 | 2024-04-02 | Trumpf Maschinen Austria Gmbh & Co. Kg. | Manufacturing device and conveyor means |
| US11513530B1 (en) * | 2019-05-08 | 2022-11-29 | Amazon Technologies, Inc. | Techniques for coordinating movement of components within a workspace |
| JP2021091028A (en) * | 2019-12-09 | 2021-06-17 | トヨタ自動車株式会社 | Conveyance robot system and control method of conveyance robot |
| JP2021091027A (en) * | 2019-12-09 | 2021-06-17 | トヨタ自動車株式会社 | Conveyance robot system and control method of conveyance robot |
| JP2021091029A (en) * | 2019-12-09 | 2021-06-17 | トヨタ自動車株式会社 | Conveyance robot system |
| US11642782B2 (en) | 2019-12-09 | 2023-05-09 | Toyota Jidosha Kabushiki Kaisha | Conveyance robot system, method for controlling conveyance robot and non-transitory computer readable storage medium storing a robot control program |
| EP4122650A1 (en) * | 2021-07-22 | 2023-01-25 | Magazino GmbH | Mobile robot with improved safety |
| WO2023001600A1 (en) * | 2021-07-22 | 2023-01-26 | Magazino Gmbh | Mobile robot with improved safety |
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