JP4093206B2 - Transport vehicle system - Google Patents

Transport vehicle system Download PDF

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JP4093206B2
JP4093206B2 JP2004147332A JP2004147332A JP4093206B2 JP 4093206 B2 JP4093206 B2 JP 4093206B2 JP 2004147332 A JP2004147332 A JP 2004147332A JP 2004147332 A JP2004147332 A JP 2004147332A JP 4093206 B2 JP4093206 B2 JP 4093206B2
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article
sensor
shielding member
transport vehicle
loading platform
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JP2005330018A (en
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浩繁 岸本
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Murata Machinery Ltd
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Murata Machinery Ltd
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Description

この発明は、天井走行車や有軌道台車、スタッカークレーン、無人搬送車などの搬送車を用いたシステムに関し、特に搬送車上の物品の姿勢の検出に関する。   The present invention relates to a system using a transport vehicle such as an overhead traveling vehicle, a tracked carriage, a stacker crane, or an automatic guided vehicle, and more particularly to detection of an attitude of an article on the transport vehicle.

搬送車上の物品の姿勢を検出するため、センサを設けることが行われている。例えば光学式センサの光軸が物品により遮られるかどうかで、物品の位置を検出することが行われている。発明者はここで、物品の位置をセンサで直接監視すると、物品が透明か不透明か、物品が着色されているかどうか、あるいは物品表面が艶消しされているかどうかなどで、検出結果が影響を受けることを見出した。   In order to detect the posture of the article on the transport vehicle, a sensor is provided. For example, the position of an article is detected based on whether or not the optical axis of the optical sensor is blocked by the article. Here, the inventor directly monitors the position of the article with a sensor, and the detection result is affected by whether the article is transparent or opaque, whether the article is colored, or whether the article surface is matte, etc. I found out.

この発明の基本的課題は、物品の透明度や着色、艶消しの有無などの影響を受けずに確実に物品の姿勢を検出できるようにすることにある。
請求項２の発明での追加の課題は、センサの設置に要するスペースを最小にして、他の設備との干渉を防止することにある。
請求項３の発明での追加の課題は、センサが物品の移載手段と干渉しないようにし、かつ物品の姿勢が狂うと確実に検出できるようにすることにある。 A basic object of the present invention is to make it possible to reliably detect the posture of an article without being affected by the transparency, coloring, and the presence or absence of matting of the article.
An additional problem in the invention of claim 2 is to minimize the space required for installing the sensor and prevent interference with other equipment.
An additional problem in the invention of claim 3 is to prevent the sensor from interfering with the article transfer means and to reliably detect that the attitude of the article is out of order.

この発明の搬送車システムは、走行レールに沿って走行する搬送車上の物品の姿勢をセンサにより検出するようにしたシステムにおいて、
前記搬送車に、搬送車の荷台の底部下側で、かつ該荷台上の物品の少なくとも対角線の２角の下側の位置に、荷台から突き出した位置と没した位置との間で移動自在な遮蔽部材を設けて、
前記遮蔽部材を付勢手段で荷台から突き出す向きに付勢し、
さらに、前記遮蔽部材が荷台から没すると光軸が遮られるように、かつ前記搬送車の停止位置に合わせて、前記対角線の２角の各々に対し前記走行レール側に光センサを設けたことを特徴とする。 The transport vehicle system of the present invention is a system in which the posture of an article on a transport vehicle traveling along a traveling rail is detected by a sensor .
The carriage can be moved between a position protruding from the loading platform and a position where it has been sunk, at a position below the bottom of the loading platform of the transportation vehicle and at least two corners below the diagonal line of the article on the loading platform. Provide a shielding member,
Energizing the shielding member in the direction protruding from the cargo bed by the energizing means,
Furthermore, an optical sensor is provided on the traveling rail side for each of the two corners of the diagonal line so that the optical axis is blocked when the shielding member sinks from the loading platform, and in accordance with the stop position of the transport vehicle. Features.

好ましくは、前記光センサが反射式センサで、該センサから前記遮蔽部材を結ぶ線の延長部に反射板を設ける。 Preferably, the optical sensor is a reflective sensor, and a reflection plate is provided at an extension portion of a line connecting the sensor to the shielding member.

また好ましくは、前記光センサを前記物品の移載手段の移載経路外の位置に設けると共に、前記遮蔽部材を、前記物品の底部両側に設けられた一対の突条の下部で、かつ少なくとも前記対角線の２角の下部に配置する。 Preferably, the optical sensor is provided at a position outside the transfer path of the article transfer means, and the shielding member is provided at least under the pair of protrusions provided on both sides of the bottom of the article. It is placed at the bottom of the diagonal two corners.

この発明では、物品自体をセンサで検出するのではなく、物品により遮蔽部材が動作したかどうかをセンサで検出するので、物品の透明度や物品表面の状態などの影響を受けずに検出できる。また物品の位置が僅かに変動した場合に、これをセンサで直接検出することは難しいが、物品の位置の変化を遮蔽部材の状態の変化にいわば変換して検出すると、僅かな物品位置の変化を確実に検出できる。これらのため、物品の透明度等の影響を受けずに物品の姿勢を検出でき、さらに物品の対角線上の２角付近を検出するので、物品の姿勢が狂えば確実に検出できる。またセンサは走行レール側に設けるので、搬送車は電源が不要になる。 In the present invention, the article itself is not detected by the sensor, but whether the shielding member is operated by the article is detected by the sensor, so that it can be detected without being affected by the transparency of the article, the state of the article surface, or the like. In addition, when the position of the article slightly changes, it is difficult to detect this directly with a sensor, but if the change in the position of the article is converted into a change in the state of the shielding member and detected, a slight change in the position of the article will occur. Can be reliably detected. Therefore, the posture of the article can be detected without being affected by the transparency of the article, and further, the vicinity of two corners on the diagonal line of the article is detected, so that it can be reliably detected if the posture of the article is out of order. Further, since the sensor is provided on the traveling rail side, the transport vehicle does not need a power source.

請求項２の発明では、反射式のセンサを設けるので、透過式の場合と異なり、発信部と受信部の２組のセンサ部材を設ける必要が無く、センサの設置が容易で、必要なスペースも少なくできる。このため他の設備との干渉を少なくできる。   In the invention of claim 2, since a reflection type sensor is provided, unlike the transmission type, it is not necessary to provide two sets of sensor members of a transmission part and a reception part, the sensor can be easily installed, and the necessary space is also reduced. Less. For this reason, interference with other equipment can be reduced.

請求項３の発明では、センサを移載手段の移載経路の外側に配置するので、センサが移載手段と干渉することがない。また物品の姿勢が狂うと、突条が遮蔽部材に接触しなくなるので、より確実に物品の姿勢を検出できる。 In the invention of claim 3, since the sensor is arranged outside the transfer path of the transfer means, the sensor does not interfere with the transfer means. Further, if the posture of the article goes wrong, the protrusion does not come into contact with the shielding member, so that the posture of the article can be detected more reliably .

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図１〜図５に、実施例とその動作を示す。図において２は搬送車システムで、４はその走行レールで、６は開口である。また走行レール４にはリニアモータの１次側が設けてある。８，９は反射式センサ１０を取り付けるためのブラケットで、例えば走行レール４に設けるが、搬送物品の処理設備のロードポートなどに設けても良く、あるいは搬送車としての天井走行車１２自体に設けても良い。天井走行車１２は搬送車の例で、他の有軌道台車やスタッカークレーンなどでもよく、また無軌道で走行する無人搬送車などでもよい。天井走行車１２には、図示しないリニアモータの２次側を、開口６から走行レール４内に挿入するように設け、例えば無電源で、走行レール４に沿って走行する。   1 to 5 show an embodiment and its operation. In the figure, 2 is a transport vehicle system, 4 is its running rail, and 6 is an opening. The traveling rail 4 is provided with the primary side of the linear motor. Reference numerals 8 and 9 are brackets for attaching the reflective sensor 10, which are provided on the traveling rail 4, for example, but may be provided on the load port of the processing equipment for transported articles or on the overhead traveling vehicle 12 itself as a transporting vehicle. May be. The overhead traveling vehicle 12 is an example of a transport vehicle, and may be another tracked carriage, a stacker crane, or the like, or an automatic guided vehicle that travels without a track. The overhead traveling vehicle 12 is provided with a secondary side of a linear motor (not shown) so as to be inserted into the traveling rail 4 from the opening 6, and travels along the traveling rail 4 with no power source, for example.

天井走行車１２には例えば一対のカセット保持スペース１４，１４を設け、１６はカセットの底部を支持するための荷台で、１８，１９はカセットの脱落等を防止するためのガードである。２０は遮蔽板で、荷台１６の底部下側の位置に設け、２２は反射板で、同様に荷台１６の底部下側に設け、２４は遮蔽板２０の一部が荷台１６に突き出すようにするための開口である。なお開口２４を設けて遮蔽板２０の一部のみを露出させる代わりに、遮蔽板２０の全体を露出させても良い。遮蔽板２０はセンサ１０から反射板２２までの光軸を遮る位置に設け、高さレベルは例えばここでは荷台１６の底面下方で、カセットの底面よりも低い位置とする。また反射式センサ１０には可視光や赤外光などのセンサを用いるが、これ以外に超音波やマイクロ波などで指向性の強いセンサでも良い。   The overhead traveling vehicle 12 is provided with a pair of cassette holding spaces 14, 14, for example, 16 is a loading platform for supporting the bottom of the cassette, and 18 and 19 are guards for preventing the cassette from dropping off. 20 is a shielding plate provided at a position below the bottom of the loading platform 16, 22 is a reflection plate, similarly provided at the bottom bottom of the loading platform 16, and 24 is configured so that a part of the shielding plate 20 protrudes to the loading platform 16. It is an opening for. Instead of providing the opening 24 and exposing only a part of the shielding plate 20, the entire shielding plate 20 may be exposed. The shielding plate 20 is provided at a position that blocks the optical axis from the sensor 10 to the reflection plate 22, and the height level is, for example, below the bottom surface of the loading platform 16 and lower than the bottom surface of the cassette. In addition, a sensor such as visible light or infrared light is used as the reflective sensor 10, but a sensor having strong directivity using ultrasonic waves, microwaves, or the like may be used.

反射式センサ１０に代えて透過式のセンサを設けることも可能で、その場合、例えば反射式センサ１０を透過式センサの投光部などに変更し、走行レール４を挟んで遮蔽板２０の反対側に他のブラケット２５を設け、受光部２６を取り付ける。しかしながらこのようにすると、走行レール４に取り付けるブラケットの数が２倍になり、走行レール４の付近に設ける他の設備などとの干渉が増すので、透過式センサよりも反射式センサが好ましい。   It is also possible to provide a transmission type sensor instead of the reflection type sensor 10, and in this case, for example, the reflection type sensor 10 is changed to a light projecting part of the transmission type sensor and the opposite side of the shielding plate 20 with the traveling rail 4 interposed Another bracket 25 is provided on the side, and the light receiving unit 26 is attached. However, if this is done, the number of brackets attached to the traveling rail 4 is doubled, and interference with other equipment provided in the vicinity of the traveling rail 4 is increased. Therefore, the reflective sensor is preferable to the transmission sensor.

実施例では反射式センサ１０を走行レール４側に設けたが、天井走行車１２自体に設けることも可能である。例えば図１の２７は天井走行車１２に設けた反射式センサの例で、例えば荷台１６よりも低い位置で、遮蔽板２０と反射板２２を結ぶ線上に設ける。しかしこのようにすると、天井走行車１２に電源が必要になる。反射式センサ１０は物品の底面を監視するものに限らず、物品の側面などを監視しても良い。例えば前記のガード１８の付近に反射式のセンサなどを設けると共に、カセット２８と接触して揺動あるいは出没する遮蔽板を設けて、図示しない反射板での反射の有無を検出しても良い。さらにスタッカークレーンなどの場合、反射式センサ１０はその昇降台などに設ける。２９は信号処理部で、各カセット２８に付き、いずれかの反射式センサ１０が反射光を受光した際に、カセットの姿勢不良を出力する。   Although the reflective sensor 10 is provided on the traveling rail 4 side in the embodiment, it may be provided on the overhead traveling vehicle 12 itself. For example, 27 in FIG. 1 is an example of a reflection type sensor provided in the overhead traveling vehicle 12, and is provided on a line connecting the shielding plate 20 and the reflection plate 22, for example, at a position lower than the loading platform 16. However, when this is done, the overhead traveling vehicle 12 needs to be powered. The reflective sensor 10 is not limited to monitoring the bottom surface of the article, and may monitor the side surface of the article. For example, a reflection sensor or the like may be provided in the vicinity of the guard 18, and a shield plate that swings or protrudes in contact with the cassette 28 may be provided to detect the presence or absence of reflection on a reflection plate (not shown). Further, in the case of a stacker crane or the like, the reflective sensor 10 is provided on the lift platform or the like. A signal processing unit 29 is attached to each cassette 28, and outputs a cassette posture failure when any of the reflective sensors 10 receives reflected light.

半導体などを搬送するためのカセット２８には、その左右方向両側に一対の突条３０があり、この突条３０を荷台１６で支持する。遮蔽板２０は図２に示すように、軸３２を中心に揺動自在に設けられ、コイルバネ３４などで開口２４から突き出す位置に付勢する。そして突条３０が開口２４を覆う位置に現れると、遮蔽板２０が図２の実線位置へと揺動し、遮蔽部３６で反射板２２の反射面３８を完全に遮蔽する。実施例では遮蔽板２０を揺動させたが、バネなどで上向きに付勢して、突条３０で降下させるようにしても良い。図３は、図２とは逆向きに遮蔽板２０や反射板２２を見た姿を示す。   The cassette 28 for transporting semiconductors and the like has a pair of protrusions 30 on both sides in the left-right direction, and the protrusions 30 are supported by the loading platform 16. As shown in FIG. 2, the shielding plate 20 is provided so as to be swingable about a shaft 32 and is biased to a position protruding from the opening 24 by a coil spring 34 or the like. When the protrusion 30 appears at a position covering the opening 24, the shielding plate 20 swings to the solid line position in FIG. 2, and the shielding surface 36 completely shields the reflecting surface 38 of the reflecting plate 22. In the embodiment, the shielding plate 20 is swung. However, the shielding plate 20 may be urged upward by a spring or the like and lowered by the protrusion 30. FIG. 3 shows a state in which the shielding plate 20 and the reflection plate 22 are viewed in the opposite direction to FIG.

図４に、移載手段としてのスカラアーム４０と反射式センサ１０との位置関係を示す。なおスカラアーム４０は図示しないロードポートなどに設けられているものとし、天井走行車側に設けても良く、あるいはスライドフォークなどの他の移載手段でも良い。反射式センサ１０はカセット２８の底面下方に光軸があるので、ブラケット８も反射式センサ１０もカセット２８自体とは干渉しない。そしてブラケット８を一対の荷台の左右両側に配置することにより、図に鎖線で表示したスカラアーム４０の移動経路の外部に配置できる。この結果、ブラケット８も反射式センサ１０も、カセット２８やスカラアーム４０とは干渉しない。ロードポートに対するカセット２８の移載位置は、図４の実線で示したものと、１点鎖線で示したものと、２点鎖線で示したものの３通りである。鎖線の場合、一対の荷台上の一方のカセットのみを移載する。そしてこれらの３通りの移載位置のいずれに対しても、一対のブラケット８，９に設けた４個の反射式センサ１０により、各カセットに対して対角線上の２角で姿勢を検出できるので、物品の姿勢が狂うと確実に検出できる。このように物品の対角線の２角を検出することにより、１物品当たり２個の最小限のセンサで、物品が前後あるいは左右に位置ずれしていることや向きが狂っていることなどの、水平方向の物品の姿勢の狂いを確実に検出できる。   FIG. 4 shows the positional relationship between the SCARA arm 40 as the transfer means and the reflective sensor 10. The SCARA arm 40 is provided on a load port (not shown) or the like, and may be provided on the overhead traveling vehicle side or other transfer means such as a slide fork. Since the reflective sensor 10 has an optical axis below the bottom surface of the cassette 28, neither the bracket 8 nor the reflective sensor 10 interferes with the cassette 28 itself. By arranging the brackets 8 on the left and right sides of the pair of loading platforms, the brackets 8 can be arranged outside the moving path of the SCARA arm 40 indicated by chain lines in the figure. As a result, neither the bracket 8 nor the reflective sensor 10 interferes with the cassette 28 or the scalar arm 40. There are three transfer positions of the cassette 28 with respect to the load port: one indicated by a solid line in FIG. 4, one indicated by a one-dot chain line, and one indicated by a two-dot chain line. In the case of a chain line, only one cassette on a pair of loading platforms is transferred. At any of these three transfer positions, the four reflective sensors 10 provided on the pair of brackets 8 and 9 can detect the posture of each cassette at two diagonal corners. It is possible to reliably detect that the posture of the article is out of order. By detecting the two corners of the diagonal line of the article in this way, the horizontal position such as the article being misaligned in the front-rear or left-right direction or the orientation being out of order with two minimum sensors per article. It is possible to reliably detect a deviation in the posture of the article in the direction.

図５に、カセット２８の姿勢変化に対する検出を示す。反射式センサで実際に検出しているのは、開口２４の位置にカセット２８の突条３０があるかどうかである。ここで開口２４は突条３０の両角部付近にあり、図５の鎖線のようにカセット２８の姿勢が僅かでも変化すると、一方の開口が突条３０の底面から外れ、姿勢の変化を検出できる。   FIG. 5 shows detection for the posture change of the cassette 28. What is actually detected by the reflective sensor is whether or not the protrusion 30 of the cassette 28 exists at the position of the opening 24. Here, the openings 24 are in the vicinity of both corners of the ridge 30, and when the posture of the cassette 28 changes even slightly as shown by the chain line in FIG. .

実施例では反射式センサ１０などを図示しないロードポートの付近に設け、カセットの移載のために天井走行車が停止すると、半導体などの処理装置側へカセットを移載する前にその位置を確認する。そして１つのカセットについて何れか一方でも遮蔽板が動作していない場合、カセットの位置が不良であるものとし、移載を中断して点検を受ける。またロードポート側から天井走行車にカセットを移載する場合、移載後に反射式センサを用いてその姿勢を検査し、各カセットについて何れか一方でも遮蔽板が動作していない場合、姿勢不良として移載を再度行う。なお実施例では、カセットの透明度等が検出に影響しないので、透明／不透明などが異なるカセットを混在させることができる。
In the embodiment, a reflective sensor 10 or the like is provided in the vicinity of a load port (not shown), and when the overhead traveling vehicle stops to transfer the cassette, the position is confirmed before the cassette is transferred to the processing apparatus side such as a semiconductor. To do. If any one of the cassettes does not operate the shielding plate, the cassette is assumed to be defective, and the transfer is interrupted for inspection. In addition, when transferring a cassette from the load port side to an overhead traveling vehicle, the posture is inspected using a reflective sensor after the transfer, and if any one of the cassettes does not operate the shielding plate, Transfer again. In the embodiment, since the transparency of the cassette does not affect the detection, cassettes having different transparency / opacity can be mixed.

実施例の搬送車システムの要部平面部Plane part of main part of carrier system of embodiment 実施例でのカセットによる遮蔽板の動作を示す要部拡大側面図The principal part enlarged side view which shows the operation | movement of the shielding board by the cassette in an Example 実施例でカセットにより遮蔽板が動作した状態を示す要部拡大側面図The principal part enlarged side view which shows the state which the shielding board act | operated with the cassette in the Example. ロードポート側のスカラアームとセンサとの配置を模式的に示す図Diagram showing the layout of the load port side SCARA arm and sensor. 実施例でのカセットの姿勢検出を模式的に示す図The figure which shows typically the attitude | position detection of the cassette in an Example.

符号の説明Explanation of symbols

２ 搬送車システム
４ 走行レール
６ 開口
８，９ ブラケット
１０ 反射式センサ
１２ 天井走行車
１４ カセット保持スペース
１６ 荷台
１８，１９ ガード
２０ 遮蔽板
２２ 反射板
２４ 開口
２５ ブラケット
２６ 受光部
２７ 反射式センサ
２８ カセット
２９ 信号処理部
３０ 突条
３２ 軸
３４ コイルバネ
３６ 遮蔽部
３８ 反射面
４０ スカラアーム 2 Transportation vehicle system 4 Traveling rail 6 Opening 8 and 9 Bracket 10 Reflective sensor 12 Overhead traveling vehicle 14 Cassette holding space 16 Loading platform 18 and 19 Guard 20 Shielding plate 22 Reflecting plate 24 Opening 25 Bracket 26 Light receiving portion 27 Reflecting sensor 28 Cassette 29 Signal processing unit 30 Projection 32 Shaft 34 Coil spring 36 Shielding unit 38 Reflecting surface 40 SCARA arm

Claims (3)

走行レールに沿って走行する搬送車上の物品の姿勢をセンサにより検出するようにしたシステムにおいて、
前記搬送車に、搬送車の荷台の底部下側で、かつ該荷台上の物品の少なくとも対角線の２角の下側の位置に、荷台から突き出した位置と没した位置との間で移動自在な遮蔽部材を設けて、
前記遮蔽部材を付勢手段で荷台から突き出す向きに付勢し、
さらに、前記遮蔽部材が荷台から没すると光軸が遮られるように、かつ前記搬送車の停止位置に合わせて、前記対角線の２角の各々に対し前記走行レール側に光センサを設けたことを特徴とする、搬送車システム。 In a system in which the posture of an article on a transport vehicle traveling along a traveling rail is detected by a sensor ,
The carriage can be moved between a position protruding from the loading platform and a position where it has been sunk, at a position below the bottom of the loading platform of the transportation vehicle and at least two corners below the diagonal line of the article on the loading platform. Provide a shielding member,
Energizing the shielding member in the direction protruding from the cargo bed by the energizing means,
Furthermore, an optical sensor is provided on the traveling rail side for each of the two corners of the diagonal line so that the optical axis is blocked when the shielding member sinks from the loading platform, and in accordance with the stop position of the transport vehicle. A feature of the transport vehicle system. 前記光センサが反射式センサで、該センサから前記遮蔽部材を結ぶ線の延長部に反射板を設けたことを特徴とする、請求項１の搬送車システム。 2. The transport vehicle system according to claim 1, wherein the optical sensor is a reflective sensor, and a reflecting plate is provided at an extension of a line connecting the shielding member from the sensor. 前記光センサを前記物品の移載手段の移載経路外の位置に設けると共に、前記遮蔽部材を、前記物品の底部両側に設けられた一対の突条の下部で、かつ少なくとも前記対角線の２角の下部に配置したことを特徴とする、請求項１または２の搬送車システム。 The optical sensor is provided at a position outside the transfer path of the article transfer means, and the shielding member is provided at a lower part of a pair of protrusions provided on both sides of the bottom of the article and at least two diagonal lines. The conveyance vehicle system according to claim 1, wherein the conveyance vehicle system is disposed at a lower portion of the vehicle.
JP2004147332A 2004-05-18 2004-05-18 Transport vehicle system Expired - Fee Related JP4093206B2 (en)

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JP2007246232A (en) * 2006-03-16 2007-09-27 Hitachi Plant Technologies Ltd Conveyed article proper loading position detector in unmanned conveyer
JP4862535B2 (en) * 2006-07-27 2012-01-25 株式会社明電舎 Seating detection device
JP6853396B2 (en) * 2019-03-29 2021-03-31 平田機工株式会社 Load port

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