JPH11123390A - Desalination apparatus - Google Patents
Desalination apparatusInfo
- Publication number
- JPH11123390A JPH11123390A JP9289635A JP28963597A JPH11123390A JP H11123390 A JPH11123390 A JP H11123390A JP 9289635 A JP9289635 A JP 9289635A JP 28963597 A JP28963597 A JP 28963597A JP H11123390 A JPH11123390 A JP H11123390A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- membrane
- raw water
- water
- desalination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Landscapes
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、純水の製造に用い
られる脱塩装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a desalination apparatus used for producing pure water.
【０００２】[0002]
【従来の技術】半導体の製造工程で使用される洗浄用の
超純水や、火力発電や原子力発電の復水として使用され
る純水は、原水をイオン交換樹脂、逆浸透膜あるいは限
外濾過膜等の膜濾過手段、紫外線酸化手段、ポリシャー
など組み合わせて脱塩して製造されている。2. Description of the Related Art Ultrapure water for cleaning used in a semiconductor manufacturing process and pure water used as condensate for thermal power generation and nuclear power generation are obtained by converting raw water into an ion exchange resin, a reverse osmosis membrane, or ultrafiltration. It is manufactured by desalting in combination with a membrane filtration means such as a membrane, an ultraviolet oxidation means, a polisher and the like.
【０００３】純水や超純水の製造における脱塩工程で
は、前処理として、原水中の懸濁物質を取り除くため
に、凝集濾過、凝集沈澱濾過、膜除濁等の手段が用いら
れてきた。前処理として原水から懸濁物質を取り除く目
的は、脱塩装置に懸濁物質が流入することにより引き起
こされる通水差圧の上昇や脱塩性能の低下を防止するた
めである。前処理として膜除濁手段を採用した従来例
を、図１（ａ）に示す。図１（ａ）に示したように、原
水を膜除濁手段としての分離膜で処理して原水中の懸濁
物質を取り除き、その後通常の純水製造装置で用いられ
る２床３塔型のイオン交換樹脂塔により原水中のイオン
を吸着除去し、さらに逆浸透膜（ＲＯ）で処理し脱塩し
ている。[0003] In the desalting step in the production of pure water or ultrapure water, means such as coagulation filtration, coagulation sedimentation filtration, and membrane turbidity have been used as pretreatment to remove suspended substances in raw water. . The purpose of removing suspended substances from raw water as a pretreatment is to prevent an increase in differential pressure of water flow and a decrease in desalination performance caused by flowing of suspended substances into a desalination apparatus. FIG. 1A shows a conventional example in which a membrane clarifying means is employed as a pretreatment. As shown in FIG. 1 (a), raw water is treated with a separation membrane as a membrane clarifier to remove suspended substances in the raw water, and thereafter, a two-bed three-column type used in a normal pure water production apparatus is used. The ions in the raw water are adsorbed and removed by an ion exchange resin tower, and further treated with a reverse osmosis membrane (RO) for desalination.
【０００４】一方、原水にオゾンまたはオゾンから発生
するヒドロキシルラジカルを利用することにより、原水
中に含まれる有機物の酸化分解、殺菌、コロイド状物質
の酸化等を行い、水質を向上させる方法も一般的に採用
されている。On the other hand, a method of improving water quality by utilizing ozone or hydroxyl radicals generated from ozone in raw water to oxidatively decompose and sterilize organic substances contained in raw water, oxidize colloidal substances, and the like is also common. Has been adopted.
【０００５】[0005]
【発明が解決しようとする課題】脱塩工程の前処理とし
ての膜除濁手段は、透過水量が比較的小さく、その結果
使用する膜モジュールの本数が多くなり、設置面積やコ
スト面での問題が多かった。The membrane turbidity means as a pretreatment for the desalting process has a relatively small amount of permeated water, resulting in a large number of membrane modules to be used, and a problem in terms of installation area and cost. There were many.
【０００６】オゾン処理は、酸化力が不十分で脱塩装置
出口での水質向上効果、特に金属に対する効果が小さ
い。またオゾンから発生するヒドロキシルラジカルを利
用する方法は酸化力は充分であるが、全ての物質を酸化
してしまうために、目的の物質以外の物質も酸化してし
まうためヒドロキシルラジカルが無駄に消費されてしま
って結果的に水質向上効果が小さいとの問題点があっ
た。[0006] The ozone treatment has insufficient oxidizing power and has a small effect on improving the water quality at the outlet of the desalination apparatus, especially on metals. Also, the method using hydroxyl radicals generated from ozone has sufficient oxidizing power, but oxidizes all substances, and also oxidizes substances other than the target substance, so that hydroxyl radicals are wasted. As a result, there was a problem that the effect of improving water quality was small.
【０００７】本発明が解決しようとする課題は、純水を
製造する脱塩装置において、脱塩工程の前処理としての
膜除濁装置を小型化でき、脱塩処理後の水質を向上でき
る脱塩装置を提供することにある。[0007] The problem to be solved by the present invention is that in a desalination apparatus for producing pure water, the size of the membrane clarifier as a pretreatment for the desalination step can be reduced, and the water quality after the desalination treatment can be improved. It is to provide a salt device.
【０００８】[0008]
【課題を解決するための手段】本発明者らが、鋭意研究
を重ねた結果、脱塩工程の前処理としてオゾン処理と耐
オゾン性分離膜による膜除濁処理を組み合わせることに
より、上記課題を解決できることを見いだし、本発明を
完成するに至った。Means for Solving the Problems As a result of intensive studies conducted by the present inventors, the above problems were solved by combining ozone treatment and membrane turbidity treatment using an ozone-resistant separation membrane as a pretreatment for a desalination step. They have found that they can be solved and have completed the present invention.
【０００９】すなわち、請求項１に記載した本発明は、
原水にオゾンを添加するオゾン添加手段と、オゾンが溶
解した原水中の懸濁物質を耐オゾン性分離膜により除去
する膜除濁手段と、除濁された原水を脱塩する脱塩手段
を備えたことを特徴とする脱塩装置に関するものであ
る。That is, the present invention described in claim 1 provides:
Ozone adding means for adding ozone to the raw water, membrane clarifying means for removing suspended substances in the raw water in which ozone is dissolved by an ozone-resistant separation membrane, and desalting means for desalinating the turbid raw water. And a desalination apparatus.
【００１０】請求項２に記載した本発明は、原水にオゾ
ンを添加するオゾン添加手段と、添加されたオゾンをヒ
ドロキシルラジカル化するヒドロキシルラジカル発生手
段と、ヒドロキシルラジカルで処理された処理水中の懸
濁物質を耐オゾン性分離膜により除去する膜除濁手段
と、除濁された原水を脱塩する脱塩手段を備えたことを
特徴とする脱塩装置に関するものである。The present invention described in claim 2 comprises an ozone adding means for adding ozone to raw water, a hydroxyl radical generating means for converting the added ozone into a hydroxyl radical, and a suspension in treated water treated with hydroxyl radical. The present invention relates to a desalination apparatus comprising a membrane turbidity removing means for removing a substance by an ozone-resistant separation membrane, and a desalinating means for desalinating clarified raw water.
【００１１】請求項３に記載した本発明は、原水にオゾ
ンを添加するオゾン添加手段と、オゾンが溶解した原水
中の懸濁物質を耐オゾン性分離膜により除去する膜除濁
手段と、除濁された原水中の溶存オゾンをヒドロキシル
ラジカル化するヒドロキシルラジカル発生手段と、ヒド
ロキシルラジカルで処理された原水を脱塩する脱塩手段
を備えたことを特徴とする脱塩装置に関するものであ
る。According to a third aspect of the present invention, there is provided an ozone adding means for adding ozone to raw water, a membrane opacity means for removing suspended substances in raw water in which ozone is dissolved by an ozone-resistant separation membrane, The present invention relates to a desalination apparatus comprising: a hydroxyl radical generating means for converting dissolved ozone in turbid raw water into hydroxyl radical; and a desalting means for desalinating raw water treated with hydroxyl radical.
【００１２】[0012]
【発明の実施の形態】本発明における原水とは、純水の
原料となる水であれば特に限定されないが、例えば工業
用水、水道水、回収水等を挙げることができる。DETAILED DESCRIPTION OF THE INVENTION Raw water in the present invention is not particularly limited as long as it is water used as a raw material of pure water, and examples thereof include industrial water, tap water, and recovered water.
【００１３】本発明における膜除濁手段に用いられる分
離膜としては、耐オゾン性のある精密濾過膜や限外濾過
膜等を用いることができる。膜材質としては、ポリ二フ
ッ化ビニリデン（ＰＶＤＦ）、ポリ四フッ化エチレン
（ＰＴＦＥ）等のフッ素系ポリマーを主体とする分離
膜、アルミナ、ジルコニア、金属等の無機膜を用いるこ
とができる。耐オゾン性のない分離膜では、分離膜がオ
ゾンによって酸化され、劣化するので好ましくない。As the separation membrane used for the membrane turbidity means in the present invention, an ozone-resistant microfiltration membrane or ultrafiltration membrane can be used. As the membrane material, a separation membrane mainly composed of a fluoropolymer such as polyvinylidene difluoride (PVDF) or polytetrafluoroethylene (PTFE), or an inorganic membrane such as alumina, zirconia, or metal can be used. A separation membrane having no ozone resistance is not preferable because the separation membrane is oxidized and deteriorated by ozone.
【００１４】本発明におけるオゾン添加手段とは、原水
中にオゾンを添加できる手段であれば特に限定されない
が、例えばオゾン溶解ポンプ、気泡塔、充填塔、ガス溶
解膜等を挙げることができる。The means for adding ozone in the present invention is not particularly limited as long as it can add ozone to raw water, and examples thereof include an ozone dissolving pump, a bubble column, a packed column, and a gas dissolving film.
【００１５】本発明におけるヒドロキシルラジカル発生
手段とは、オゾンからヒドロキシルラジカルを発生させ
ることができる手段であれば特に限定されないが、例え
ば、オゾンと紫外線照射との組合せ（オゾン溶解後に紫
外線を照射するか、あるいはオゾン添加と同時に紫外線
照射を行なう方法）、オゾンと過酸化水素との組合せ
（過酸化水素の存在下にオゾンを添加するか、あるいは
溶存オゾンの存在下に過酸化水素を添加する方法）、オ
ゾンと活性炭の組合せ（オゾン溶解水を活性炭と接触さ
せる方法）、オゾンとアルカリ剤との組合せ（アルカリ
存在下でオゾンを添加するか、あるいはオゾン溶解水に
アルカリ剤を添加してアルカリ性に調整する方法）を挙
げることができる。さらには、これらのヒドロキシルラ
ジカル発生手段の二つ以上を組合せた方法、例えばオゾ
ンと過酸化酸素の組合せ処理の後に、さらにその処理水
を活性炭と接触させる方法等を挙げることができる。The hydroxyl radical generating means in the present invention is not particularly limited as long as it is a means capable of generating hydroxyl radicals from ozone. For example, a combination of ozone and ultraviolet irradiation (whether or not ultraviolet irradiation is performed after dissolution of ozone). Or a method of irradiating ultraviolet rays simultaneously with the addition of ozone), a combination of ozone and hydrogen peroxide (a method of adding ozone in the presence of hydrogen peroxide or a method of adding hydrogen peroxide in the presence of dissolved ozone) Combination of ozone and activated carbon (method of bringing ozone-dissolved water into contact with activated carbon), combination of ozone and an alkaline agent (add ozone in the presence of alkali, or add an alkaline agent to ozone-dissolved water to make it alkaline) Method). Further, a method combining two or more of these hydroxyl radical generating means, for example, a method in which after the combined treatment of ozone and oxygen peroxide, the treated water is further contacted with activated carbon, and the like can be mentioned.
【００１６】膜除濁後にヒドロキシルラジカルを発生さ
せる場合は、膜除濁後に残存するオゾンからヒドロキシ
ルラジカルを発生させる方法でもよいし、膜除濁後の原
水に新たにオゾンを溶解させてからヒドロキシルラジカ
ルを発生させてもよい。In the case where hydroxyl radicals are generated after the membrane is clarified, a method of generating hydroxyl radicals from ozone remaining after the membrane is clarified may be used. May be generated.
【００１７】脱塩手段としては、純水の製造に用いられ
るものであれば特に限定されないが、例えば、イオン交
換樹脂を用いた脱塩装置、逆浸透膜装置（ＲＯ）、電気
透析装置（ＥＤ）、電気再生式純水装置（ＥＤＩ）等の
公知の手段を採用することができる。The means for desalting is not particularly limited as long as it is used for producing pure water. For example, a desalting apparatus using an ion exchange resin, a reverse osmosis membrane apparatus (RO), an electrodialysis apparatus (ED) ) And a known means such as an electric regeneration type pure water apparatus (EDI).
【００１８】なお、本発明においては、上記脱塩手段の
前段で脱塩手段に流入する被処理水を活性炭と接触させ
ることにより、脱塩手段に流入する被処理水中に残留す
るオゾンや過酸化水素等の酸化剤を予め分解してから脱
塩手段に流入させるようにするのが望ましい。In the present invention, the water to be treated flowing into the desalting means is brought into contact with the activated carbon before the desalting means, so that the ozone and the peroxide remaining in the water to be treated flowing into the desalting means are removed. It is desirable that an oxidizing agent such as hydrogen be decomposed in advance before flowing into the desalting means.
【００１９】オゾンを原水に溶解させることにより、原
水中の有機物、コロイド等を酸化することができる。そ
の結果、膜除濁装置の透過水量を高く保つことができ、
膜装置の小型化が可能になる。また、オゾンの酸化力、
殺菌力により、脱塩装置出口の生菌数、金属濃度も低く
保つことができる。その理由として、原水中の高分子有
機物が酸化されて低分子化され、結果として膜の表面に
蓄積しにくくなったためと思われる。By dissolving ozone in raw water, organic substances, colloids and the like in the raw water can be oxidized. As a result, the amount of permeated water of the membrane clarifier can be kept high,
The size of the membrane device can be reduced. Also, the oxidizing power of ozone,
By virtue of the sterilizing power, the number of viable bacteria and the metal concentration at the outlet of the desalting apparatus can be kept low. It is considered that the reason is that the high molecular organic matter in the raw water was oxidized and reduced in molecular weight, and as a result, it became difficult to accumulate on the surface of the film.
【００２０】オゾンから発生させたヒドロキシルラジカ
ルは、オゾンと比較してさらに酸化力が高く、有機物、
コロイド等を有効に酸化分解することができる。コロイ
ド等は核に金属等を含有することがあり、また電気的に
も安定状態にあり、イオン交換や逆浸透膜で充分除去す
ることが難しかった。これらをヒドロキシルラジカルで
強力に酸化処理することにより、イオン化することが可
能になり、イオン交換、逆浸透膜で除去しやすくなると
推定される。The hydroxyl radical generated from ozone has a higher oxidizing power than ozone,
Colloids and the like can be effectively oxidatively decomposed. Colloids and the like sometimes contain metals and the like in the nucleus, and are in an electrically stable state, and it has been difficult to remove them sufficiently by ion exchange or reverse osmosis membranes. It is presumed that by strongly oxidizing these with hydroxyl radicals, it becomes possible to ionize them, and it becomes easier to remove them with ion exchange and reverse osmosis membranes.
【００２１】また、膜除濁後にヒドロキシルラジカルを
発生させた方が、膜除濁前にヒドロキシルラジカルを発
生させる場合よりもさらに脱塩水の水質が向上する。こ
れは以下の理由によるものと思われる。すなわち、ラジ
カル反応は非選択的な反応であり、ヒドロキシルラジカ
ルが発生した近傍にある物質を何でも酸化すると考えら
れる。したがって、水中に濁質等が残っていると、本来
ヒドロキシルラジカルと反応させたい有機物、コロイド
等に反応するだけでなく、濁質等にも反応してしまい、
結果的に有効に反応するヒドロキシルラジカルが減少し
てしまう。これに対し、膜除濁処理後であれば、濁質は
完全に除去されているので、発生したヒドロキシルラジ
カルが有効に、有機物、コロイドと反応し、効果的にイ
オン化が起こるために、イオン交換、ＲＯ膜で除去され
ると思われる。またヒドロキシルラジカルの酸化力が高
いことから、膜除濁後にヒドロキシルラジカルを発生さ
せた方が、分離膜がヒドロキシルラジカルに接しないた
め、分離膜の酸化劣化を防止することができ、寿命の観
点からも優れている。Further, when hydroxyl radicals are generated after membrane turbidity, the quality of demineralized water is further improved than when hydroxyl radicals are generated before membrane turbidity. This may be for the following reasons. That is, the radical reaction is a nonselective reaction, and it is considered that any substance near the hydroxyl radical is oxidized. Therefore, if turbidity or the like remains in the water, it will react not only with organic substances and colloids that are originally intended to react with hydroxyl radicals, but also with turbidity and the like,
As a result, effectively reacting hydroxyl radicals are reduced. On the other hand, if the turbidity has been completely removed after the membrane turbidity treatment, the generated hydroxyl radicals effectively react with organic substances and colloids, and ionization occurs effectively. , And the RO film. In addition, since the oxidizing power of the hydroxyl radical is high, it is better to generate the hydroxyl radical after the membrane is opaque because the separation membrane does not come into contact with the hydroxyl radical. Is also excellent.
【００２２】なお、本発明の脱塩装置は各種産業分野に
適用することができるが、特に半導体製造等の電子産業
分野において使用される超純水の製造装置に好適に用い
られる。すなわち、前記超純水製造装置は、通常、市
水、工業用水等の原水を処理して一次純水を製造する一
次純水系システムと、一次純水系システムで得られた一
次純水をさらに浄化する二次系純水システム（サブシス
テム）とから構成されているが、本発明の脱塩装置は前
記一次純水系システムに好適に使用される。Although the desalination apparatus of the present invention can be applied to various industrial fields, it is particularly suitably used for an apparatus for producing ultrapure water used in the electronics industry such as semiconductor manufacturing. That is, the ultrapure water production apparatus is usually a primary pure water system for producing primary pure water by treating raw water such as city water and industrial water, and further purifies the primary pure water obtained by the primary pure water system. The desalination apparatus of the present invention is preferably used for the primary pure water system.
【００２３】[0023]
実施例１ 図１（ａ）〜（ｄ）に示した脱塩処理装置を用い、表１
に示した分離膜を使用して原水を処理し、安定ｆｌｕｘ
と末端の処理水（最終処理水）の水質を測定した。その
結果を表１に示す。Example 1 Table 1 was obtained by using the desalination treatment apparatus shown in FIGS.
The raw water is treated using the separation membrane shown in (1) and the stable flux
And the quality of the treated water at the end (final treated water) was measured. Table 1 shows the results.
【００２４】なお、各従来例および本発明例で使用した
装置等は、以下の通りである。The devices used in each of the conventional examples and the present invention are as follows.
【００２５】・Ｏ3添加装置：オゾン溶解ポンプ 流
量：１ｍ3／ｈｒ、オゾナイザー 住友精密工業（株）
製 ・分離膜 Ａ膜（耐オゾン性分離膜）：日東電工（株）製精密濾過
膜「ＳＡＦ１２０２０」 （膜材質：ＰＴＦＥ、孔径：０．２μ、膜面積：１．２
ｍ2） Ｂ膜：メムテック（株）製精密濾過膜「メムコアフィル
ターＭ２」（膜材質：ＰＰ、孔径：０．２μ、膜面積：
２．０ｍ2） ・ＥＤＩ（電気再生式純水装置）：オルガノ（株）製
処理量：１ｍ3／ｈｒ ・ＲＯ：日東電工（株）製「ＥＳ−１０−Ｄ８」（処理
量：１ｍ3／ｈｒ）O 3 adding apparatus: Ozone dissolving pump Flow rate: 1 m 3 / hr, Ozonizer Sumitomo Precision Industries, Ltd.
-Separation membrane A membrane (ozone resistant separation membrane): Nitto Denko Corporation's microfiltration membrane "SAF12020" (membrane material: PTFE, pore size: 0.2 µ, membrane area: 1.2)
m 2 ) B membrane: Memtech Co., Ltd. microfiltration membrane “Memcore filter M2” (membrane material: PP, pore size: 0.2 μ, membrane area:
2.0m 2 )-EDI (Electric regeneration type pure water system): Organo Corporation
Processing amount: 1 m 3 / hr RO: “ES-10-D8” manufactured by Nitto Denko Corporation (processing amount: 1 m 3 / hr)
【００２６】[0026]
【表１】 [Table 1]
【００２７】表１に示した結果から明らかなように、従
来例（図１（ａ）および図１（ｂ））においては、分離
膜として耐オゾン性分離膜（Ａ膜）を使用したものと通
常の分離膜（Ｂ膜）を使用したものでは安定ｆｌｕｘに
差がなかったのに対し、耐オゾン性分離膜を使用し、オ
ゾンを注入した本発明例では、安定ｆｌｕｘは従来例の
２倍に向上した。したがって、除濁処理に必要な膜を約
半分に減らすことができる。また、末端の処理水質にお
いても、従来例と本発明例の差は明かである。脱塩装置
として、２床３塔式（２Ｂ３Ｔ）のイオン交換樹脂塔と
ＲＯを組み合わせた例（図１（ｃ））でも、ＲＯとＥＤ
ＩとＣＰ（混床式カートリッジポリッシャー）を組み合
わせた例（図１（ｄ））であっても、末端処理水中の金
属の低減効果が認められた。ただし、安定ｆｌｕｘの増
大傾向はオゾン注入濃度が５ｐｐｍで頭打ちなのに対
し、末端水質向上効果はオゾン注入濃度１０ｐｐｍまで
改善傾向が認められた。As is clear from the results shown in Table 1, in the conventional examples (FIGS. 1A and 1B), the ozone-resistant separation membrane (A membrane) was used as the separation membrane. In the case of using the ordinary separation membrane (B membrane), there was no difference in the stable flux. On the other hand, in the example of the present invention using the ozone-resistant separation membrane and injecting ozone, the stable flux was twice as large as that of the conventional example. Improved. Therefore, the membrane required for the turbidity treatment can be reduced to about half. Also, the difference between the conventional example and the present invention example in the treated water quality at the terminal is clear. As an example of a desalination apparatus, a combination of a two-bed three-column (2B3T) ion-exchange resin tower and RO (FIG. 1 (c)) is also used.
Even in the example in which I and CP (mixed bed type cartridge polisher) were combined (FIG. 1 (d)), an effect of reducing metals in the water for terminal treatment was observed. However, the increasing tendency of the stable flux reached its peak at an ozone injection concentration of 5 ppm, while the effect of improving the terminal water quality was improved up to an ozone injection concentration of 10 ppm.
【００２８】実施例２ オゾン処理に加えてヒドロキシルラジカルを発生する手
段を加えた例として、図１（ｃ）、図１（ｅ）および図
１（ｆ）に示した脱塩処理装置を用い、実施例１と同じ
耐オゾン性の分離膜を使用して原水を処理し、安定ｆｌ
ｕｘと末端の処理水の水質を測定した。その結果を表２
に示す。なお、ヒドロキシルラジカル発生手段は注入オ
ゾン量の０．３倍モル量の過酸化水素を添加することに
より行った。Embodiment 2 As an example of adding a means for generating hydroxyl radicals in addition to the ozone treatment, the desalination treatment apparatus shown in FIGS. 1 (c), 1 (e) and 1 (f) was used. Raw water was treated using the same ozone-resistant separation membrane as in Example 1, and stable fl
ux and the quality of the treated water at the end were measured. Table 2 shows the results.
Shown in The hydroxyl radical generating means was prepared by adding 0.3 times mol of hydrogen peroxide to the amount of injected ozone.
【００２９】[0029]
【表２】 [Table 2]
【００３０】表２に示した結果から明らかなようにヒド
ロキシルラジカル発生手段のない本発明例１（図１
（ｃ））に対し、ヒドロキシルラジカル発生手段のある
本発明例３（図１（ｅ）），本発明例４（図１（ｆ））
は明らかにオゾン注入濃度がより低い濃度で末端水質向
上が観察された。特に膜除濁後にヒドロキシルラジカル
を発生させた本発明例４においては、顕著な効果が認め
られた。As is clear from the results shown in Table 2, Example 1 of the present invention having no means for generating a hydroxyl radical (FIG. 1)
In contrast to (c)), Example 3 of the present invention (FIG. 1 (e)) and Example 4 of the present invention (FIG. 1 (f)) having a hydroxyl radical generating means.
It was clearly observed that the lower ozone injection concentration improved the terminal water quality. In particular, in Example 4 of the present invention in which hydroxyl radicals were generated after membrane turbidity, a remarkable effect was observed.
【００３１】なお、本発明は上記実施例の図１（ｃ）〜
（ｆ）の構成に何ら限定されるものではなく、例えば、
図１（ｃ），（ｅ），（ｆ）のＲＯの後段にさらにカー
トリッジポリッシャー（ＣＰ）を設けた構成としてもよ
く、また、図１（ｅ）および（ｆ）の「２Ｂ３Ｔ」→
「ＲＯ」の代わりに、「ＲＯ」→「ＥＤＩ」→「ＣＰ」
の構成を配置してもよい。The present invention relates to the above embodiment shown in FIGS.
The configuration of (f) is not limited at all. For example,
A cartridge polisher (CP) may be further provided after the RO in FIGS. 1C, 1E, and 1F, and “2B3T” in FIGS. 1E and 1F.
"RO" → "EDI" → "CP" instead of "RO"
May be arranged.
【００３２】[0032]
【発明の効果】本発明により、純水を製造する脱塩装置
において、脱塩工程の前処理としての膜除濁装置を小型
化でき、脱塩処理後の水質を向上できるAccording to the present invention, in a desalination apparatus for producing pure water, the size of the membrane clarifier as a pretreatment in the desalination step can be reduced, and the water quality after the desalination treatment can be improved.
【図１】（ａ）〜（ｂ）は、従来の脱塩装置のシステム
構成を示すブロック図、（ｃ）〜（ｆ）は、本発明の脱
塩装置のシステム構成を示すブロック図。1 (a) and 1 (b) are block diagrams showing a system configuration of a conventional desalination apparatus, and FIGS. 1 (c) to 1 (f) are block diagrams showing a system configuration of a desalination apparatus of the present invention.
Claims (3)
と、オゾンが溶解した原水中の懸濁物質を耐オゾン性分
離膜により除去する膜除濁手段と、除濁された原水を脱
塩する脱塩手段を備えたことを特徴とする脱塩装置。1. An ozone adding means for adding ozone to raw water, a membrane turbidity removing means for removing suspended substances in ozone-dissolved raw water by an ozone-resistant separation membrane, and desalinating opaque raw water. A desalination apparatus comprising a desalination means.
と、添加されたオゾンをヒドロキシルラジカル化するヒ
ドロキシルラジカル発生手段と、ヒドロキシルラジカル
で処理された処理水中の懸濁物質を耐オゾン性分離膜に
より除去する膜除濁手段と、除濁された原水を脱塩する
脱塩手段を備えたことを特徴とする脱塩装置。2. An ozone adding means for adding ozone to raw water, a hydroxyl radical generating means for converting the added ozone into a hydroxyl radical, and a suspended substance in the treated water treated with the hydroxyl radical by an ozone-resistant separation membrane. A desalination apparatus comprising: a membrane turbidity removing means; and a desalination means for desalinating clarified raw water.
と、オゾンが溶解した原水中の懸濁物質を耐オゾン性分
離膜により除去する膜除濁手段と、除濁された原水中の
溶存オゾンをヒドロキシルラジカル化するヒドロキシル
ラジカル発生手段と、ヒドロキシルラジカルで処理され
た原水を脱塩する脱塩手段を備えたことを特徴とする脱
塩装置。3. Ozone addition means for adding ozone to raw water, membrane opacity means for removing suspended substances in raw water in which ozone is dissolved by an ozone-resistant separation membrane, and dissolved ozone in opaque raw water A desalination apparatus, comprising: a hydroxyl radical generating means for converting the raw water into a hydroxyl radical; and a desalting means for desalinating raw water treated with the hydroxyl radical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28963597A JP3727156B2 (en) | 1997-10-22 | 1997-10-22 | Desalination equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28963597A JP3727156B2 (en) | 1997-10-22 | 1997-10-22 | Desalination equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11123390A true JPH11123390A (en) | 1999-05-11 |
| JP3727156B2 JP3727156B2 (en) | 2005-12-14 |
Family
ID=17745798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28963597A Expired - Fee Related JP3727156B2 (en) | 1997-10-22 | 1997-10-22 | Desalination equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3727156B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007325981A (en) * | 2006-06-06 | 2007-12-20 | Chlorine Eng Corp Ltd | Circulation-type apparatus for preparing ozone water and method for operating the same |
| JP2008508093A (en) * | 2004-08-04 | 2008-03-21 | ユー・エス・フィルター・ウェイストウォーター・グループ・インコーポレイテッド | Method for cleaning membranes and chemicals therefor |
| JP2011117903A (en) * | 2009-12-07 | 2011-06-16 | Sekisui Chem Co Ltd | Analysis pretreatment method of environmental sample and analysis method of environmental sample |
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| JP2008508093A (en) * | 2004-08-04 | 2008-03-21 | ユー・エス・フィルター・ウェイストウォーター・グループ・インコーポレイテッド | Method for cleaning membranes and chemicals therefor |
| JP2007325981A (en) * | 2006-06-06 | 2007-12-20 | Chlorine Eng Corp Ltd | Circulation-type apparatus for preparing ozone water and method for operating the same |
| JP2011117903A (en) * | 2009-12-07 | 2011-06-16 | Sekisui Chem Co Ltd | Analysis pretreatment method of environmental sample and analysis method of environmental sample |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3727156B2 (en) | 2005-12-14 |
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