JPH10267662A - Angular velocity sensor - Google Patents
Angular velocity sensorInfo
- Publication number
- JPH10267662A JPH10267662A JP9077678A JP7767897A JPH10267662A JP H10267662 A JPH10267662 A JP H10267662A JP 9077678 A JP9077678 A JP 9077678A JP 7767897 A JP7767897 A JP 7767897A JP H10267662 A JPH10267662 A JP H10267662A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- angular velocity
- coriolis force
- velocity sensor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は自動車などに搭載さ
れ、回転角速度を検知する角速度センサに関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity sensor mounted on an automobile or the like for detecting a rotational angular velocity.
【０００２】[0002]
【従来の技術】図５及び図６は例えば特開平5-322579号
公報に示された従来の角速度センサであり、図５は概略
構成を示す要部の斜視図、図６は断面図である。図５、
図６において、１は絶縁基板、２は絶縁基板上１に一部
を支持固定され振動可能な梁形状を有する振動子、３は
絶縁基板１上の凹部に形成され、振動子２の下面と対向
する、コリオリ力方向の検出電極、４、５は振動子２の
梁部の両方の側面に対して各々平行な側面を有し絶縁基
板１上に支持固定された参照電極である。2. Description of the Related Art FIGS. 5 and 6 show a conventional angular velocity sensor disclosed in, for example, Japanese Patent Application Laid-Open No. 5-322579. FIG. 5 is a perspective view of a main part showing a schematic structure, and FIG. . FIG.
In FIG. 6, 1 is an insulating substrate, 2 is a vibrator having a beam shape capable of vibrating partially supported and fixed on the insulating substrate 1, 3 is formed in a concave portion on the insulating substrate 1, Opposite detection electrodes 4, 4 and 5 in the Coriolis force direction are reference electrodes which have side surfaces parallel to both side surfaces of the beam portion of the vibrator 2 and are supported and fixed on the insulating substrate 1.
【０００３】このような構成の従来の角速度センサは、
絶縁基板１に凹部を設けて、検出電極３を形成後、絶縁
基板１上にシリコン基板を陽極接合で接合し、上記シリ
コン基板を所定の形状にエッチングすることにより、振
動子２及び参照電極４、５を形成して製造される。A conventional angular velocity sensor having such a structure is as follows.
After a concave portion is provided in the insulating substrate 1 and the detection electrode 3 is formed, a silicon substrate is bonded to the insulating substrate 1 by anodic bonding, and the silicon substrate is etched into a predetermined shape, thereby forming the vibrator 2 and the reference electrode 4. , 5 are manufactured.
【０００４】次に動作について簡単に説明する。例えば
圧電体バイモルフ等の駆動手段により、外部より振動子
２の梁部の側面と参照電極４の側面、及び振動子２の他
の側面と参照電極５の側面からなる両方のギャップ方向
に、振動子の共振周波数近傍にて振動子２を駆動励振す
ると、このギャップ間の静電容量は変化する。前記振動
子２の駆動励振に、振動子２の長手方向を回転軸系とし
た回転角速度が加わると、駆動励振方向と直交する方向
にコリオリ力なる力が発生し、このコリオリ力方向に振
動子２は変位し、振動子２と絶縁基板１上の検出電極３
からなるギャップ間の静電容量は変化する。そこで検出
手段によりこの静電容量の変化を検出し、回転角速度の
検出を行う。Next, the operation will be briefly described. For example, driving means such as a piezoelectric bimorph causes vibrations from outside to both gap directions including the side surface of the beam portion of the vibrator 2 and the side surface of the reference electrode 4 and the other side surface of the vibrator 2 and the side surface of the reference electrode 5. When the vibrator 2 is driven and excited near the resonator resonance frequency, the capacitance between the gaps changes. When a rotational angular velocity with the longitudinal direction of the vibrator 2 as a rotation axis system is applied to the drive excitation of the vibrator 2, a force that is a Coriolis force is generated in a direction orthogonal to the drive excitation direction, and the vibrator is driven in the Coriolis force direction. 2 is displaced, and the vibrator 2 and the detection electrode 3 on the insulating substrate 1
The capacitance between the gaps consisting of Therefore, the change of the capacitance is detected by the detection means, and the rotation angular velocity is detected.
【０００５】回転角速度の検出は以下の原理で行われ
る。振動子２と絶縁基板１上の検出電極３からなるギャ
ップ間の静電容量Ｃの変化△Ｃを検出する。この△Ｃを
Ｃ−Ｖ変換により電圧Ｖの変化△Ｖに置き換える。Ｃ−
Ｖ変換は△Ｖ＝△Ｃ／Ｃ0 により行われる。ここでＣ0
は初期容量である。振動子２の変位量は入力角速度に比
例するので、結局、△Ｖにより入力角速度が検出でき
る。静電容量ＣはＣ＝ε・ｓ／ｄで与えられる。ここで
εはギャップの誘電率、ｓは検出電極と振動子との対向
面積、ｄは検出電極と振動子との距離である。従って入
力角速度に対するｄの変化すなわち振動子の変位量δが
大きくなるほど△Ｃが大きくなり、結局、初期容量Ｃ0
に対する△Ｃ、すなわち振動子の変位量δが大きくなる
ほど出力感度が増大することになる。The detection of the rotational angular velocity is performed based on the following principle. A change ΔC in the capacitance C between the gap formed by the vibrator 2 and the detection electrode 3 on the insulating substrate 1 is detected. This ΔC is replaced by a change ΔV of the voltage V by CV conversion. C-
V conversion is performed by ΔV = ΔC / C 0 . Where C 0
Is the initial capacity. Since the amount of displacement of the vibrator 2 is proportional to the input angular velocity, the input angular velocity can be eventually detected from ΔV. The capacitance C is given by C = ε · s / d. Here, ε is the dielectric constant of the gap, s is the facing area between the detection electrode and the vibrator, and d is the distance between the detection electrode and the vibrator. Therefore, ΔC increases as the change in d with respect to the input angular velocity, that is, the displacement amount δ of the vibrator increases, and eventually, the initial capacitance C 0.
, That is, as the displacement amount δ of the vibrator increases, the output sensitivity increases.
【０００６】なお、ここでは振動子２の側面と参照電極
４の側面、及び振動子２の他の側面と参照電極５の側面
からなる両方のギャップ方向に駆動励振して、駆動励振
方向と直交する方向のコリオリ力による変位を検出電極
３で検出するようにしたが、逆に、検出電極３を加振用
電極とし、振動子２の下面と加振用電極３とからなるギ
ャップ方向に駆動励振して、参照電極４、５を検出電極
として、駆動励振方向と直交する方向のコリオリ力によ
る変位を検出してもよい。[0006] In this case, the drive excitation is performed in both gap directions including the side surface of the vibrator 2 and the side surface of the reference electrode 4 and the other side surface of the vibrator 2 and the side surface of the reference electrode 5, and is orthogonal to the drive excitation direction. The detection electrode 3 detects the displacement due to the Coriolis force in the direction in which the vibrating electrode 3 is used as a vibrating electrode, and is driven in a gap direction formed by the lower surface of the vibrator 2 and the vibrating electrode 3. Excitation may be performed, and the reference electrodes 4 and 5 may be used as detection electrodes to detect displacement due to Coriolis force in a direction orthogonal to the drive excitation direction.
【０００７】[0007]
【発明が解決しようとする課題】従来の角速度センサは
以上のように構成されており、片持梁形状の振動子の変
位量δは片持梁寸法に対して、振動子長さＬの二乗に比
例し、振動子の幅Ｗに反比例する。出力感度を増大する
ためにはこの振動子長さＬを大きくするか振動子の幅Ｗ
を小さくする必要がある。また初期容量Ｃ0 は振動子２
と絶縁基板１上の検出電極３とからなるギャップの長さ
Ｇに反比例するので、出力感度を増大するためにはギャ
ップの長さＧをできるだけ小さくする必要がある。しか
しながら振動子長さを大きくするとセンサ自身が大きく
なり高価になるという欠点がある。また振動子長さを大
きくして変位量δを大きくする場合はギャップの長さＧ
を小さくすることができず、出力感度を増大することが
できない。振動子の幅Ｗを小さくすると、同時に振動子
の厚さを幅Ｗと同程度に小さくしないと駆動励振方向の
共振周波数と検出方向の共振周波数に大きな差が発生
し、やはり変位量δが小さくなる。振動子は通常シリコ
ンが用いられるが、この振動子の厚さを小さくするため
には、シリコン基板の厚みが薄いものを用いる必要があ
る。しかし、薄いシリコン基板を用いる場合、製造工程
中にシリコン基板が破損するなどの問題があった。ま
た、一本の振動子で入力角速度を検出しているので、周
囲の温度変化によって振動子２の共振特性にずれが生
じ、出力感度が低下することがある。The conventional angular velocity sensor is constructed as described above, and the displacement δ of the cantilever-shaped vibrator is the square of the length L of the vibrator with respect to the dimension of the cantilever. And inversely proportional to the width W of the vibrator. To increase the output sensitivity, increase the length L of the oscillator or the width W of the oscillator.
Needs to be smaller. Also, the initial capacitance C 0 is
The length G is inversely proportional to the length G of the gap formed between the electrode and the detection electrode 3 on the insulating substrate 1. Therefore, in order to increase the output sensitivity, the length G of the gap needs to be as small as possible. However, when the length of the vibrator is increased, there is a disadvantage that the sensor itself becomes large and expensive. When the displacement length δ is increased by increasing the length of the vibrator, the gap length G
Cannot be reduced, and the output sensitivity cannot be increased. If the width W of the vibrator is reduced, and if the thickness of the vibrator is not reduced at the same time as the width W, a large difference occurs between the resonance frequency in the drive excitation direction and the resonance frequency in the detection direction, and the displacement δ is also small. Become. Normally, silicon is used for the vibrator, but in order to reduce the thickness of the vibrator, it is necessary to use a thin silicon substrate. However, when a thin silicon substrate is used, there is a problem that the silicon substrate is damaged during the manufacturing process. Further, since the input angular velocity is detected by one vibrator, the resonance characteristic of the vibrator 2 may be shifted due to a change in ambient temperature, and the output sensitivity may be reduced.
【０００８】本発明は上述のような課題を解決するため
になされたもので、第１の目的は振動子自身を大きくす
ることなく、かつ信頼性を落とすことなく出力感度の大
きな角速度センサを得ることにある。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a first object of the present invention is to provide an angular velocity sensor having a large output sensitivity without increasing the size of the vibrator itself and without reducing reliability. It is in.
【０００９】さらに、第２の目的は上記の第１の目的を
達成する手段を簡単な製造工程で実現することにある。Further, a second object is to realize means for achieving the first object by a simple manufacturing process.
【００１０】また、第３の目的は周囲の温度変化があっ
ても出力感度を一定に保てるような角速度センサを得る
ことにある。It is a third object of the present invention to provide an angular velocity sensor capable of maintaining a constant output sensitivity even when ambient temperature changes.
【００１１】[0011]
【課題を解決するための手段】本発明の第１の構成によ
る角速度センサは、基板上に絶縁して一部が支持固定さ
れ、振動可能な梁形状を構成し、駆動方向に複数個並列
配置された振動子、上記振動子の梁部の両側面に対して
平行な側面を有し、上記基板上に絶縁して支持固定され
た駆動方向の参照電極、上記振動子を上記駆動方向に振
動させる駆動手段、上記振動子の梁部と対向する上記基
板に上記梁部との間に間隙を介して形成されたコリオリ
力方向の検出電極、及び該コリオリ力方向の検出電極を
用いて上記振動子の回転により発生するコリオリ力を検
出する手段を備えたものである。The angular velocity sensor according to the first aspect of the present invention is insulated and partially supported and fixed on a substrate, has a vibrating beam shape, and is arranged in parallel in the driving direction. Vibrator, a reference electrode in a driving direction having side surfaces parallel to both side surfaces of a beam portion of the vibrator, and insulated and fixed on the substrate, and vibrating the vibrator in the driving direction. A driving means for causing the vibration, a detection electrode for the Coriolis force direction formed on the substrate opposed to the beam portion of the vibrator with a gap between the beam portion, and the vibration using the detection electrode for the Coriolis force direction. It is provided with means for detecting the Coriolis force generated by the rotation of the child.
【００１２】本発明の第２の構成による角速度センサ
は、上記コリオリ力方向の検出電極は、上記振動子の全
てに対応して複数個備えたものである。In the angular velocity sensor according to the second configuration of the present invention, a plurality of the electrodes for detecting the direction of the Coriolis force are provided corresponding to all of the vibrators.
【００１３】本発明の第３の構成による角速度センサ
は、基板上に絶縁して一部が支持固定され、振動可能な
梁形状を構成する振動子、上記振動子の梁部の両側面に
対して平行な側面を有し、上記基板上に絶縁して支持固
定された駆動方向の参照電極、及び上記振動子の梁部と
対向する上記基板に上記梁部との間に間隙を介して形成
されたコリオリ力方向の検出電極を備えたセンサ部を複
数個、上記コリオリ力方向に積層配置し、上記振動子を
上記梁部の両側面の方向に振動させる駆動手段、及び上
記複数のコリオリ力方向の検出電極を用いて上記振動子
の回転により発生するコリオリ力を検出する手段を備え
たものである。An angular velocity sensor according to a third configuration of the present invention is a vibrator that is insulated and partially supported and fixed on a substrate and forms a vibrable beam shape, with respect to both side surfaces of a beam portion of the vibrator. A reference electrode in the drive direction, which is insulated and fixed on the substrate insulated and fixed on the substrate, and is formed with a gap between the beam portion on the substrate facing the beam portion of the vibrator. Driving means for arranging a plurality of sensor units having detection electrodes for the detected Coriolis force direction in the direction of the Coriolis force, vibrating the vibrator in the direction of both sides of the beam, and the plurality of Coriolis forces Means for detecting a Coriolis force generated by rotation of the vibrator using a direction detection electrode is provided.
【００１４】本発明の第４の構成による角速度センサ
は、上記複数のコリオリ力方向の検出電極を電気的に共
通化し、上記各検出電極からの検出信号を加算するよう
に構成したものである。An angular velocity sensor according to a fourth configuration of the present invention is configured such that the detection electrodes in the plurality of Coriolis force directions are electrically shared, and the detection signals from the respective detection electrodes are added.
【００１５】本発明の第５の構成による角速度センサ
は、上記複数の振動子は各々異なる共振周波数を有する
ものである。[0015] In the angular velocity sensor according to the fifth configuration of the present invention, the plurality of vibrators each have a different resonance frequency.
【００１６】本発明の第６の構成による角速度センサ
は、上記複数の振動子の共振周波数の範囲が±１０％以
下であるものである。In the angular velocity sensor according to a sixth aspect of the present invention, the range of the resonance frequency of the plurality of vibrators is ± 10% or less.
【００１７】本発明の第７の構成による角速度センサ
は、複数の振動子は、梁部の幅、長さ、および厚みの内
の少なくとも１つの寸法を違えることにより各々の共振
周波数を変化させたものである。In the angular velocity sensor according to the seventh aspect of the present invention, the plurality of vibrators have different resonance frequencies by changing at least one of the width, length and thickness of the beam. Things.
【００１８】[0018]
実施の形態１．以下、本発明の実施の形態１について、
図面を参照しながら説明する。図１は本発明の実施の形
態１による角速度センサの概略構成を示す要部の斜視図
である。図１において、１は例えばガラス等の絶縁基
板、２は絶縁基板１上に一部が支持固定され、振動可能
な梁形状を構成し、駆動励振方向（横方向）に複数個並
列配置された振動子、３は振動子２の梁部と対向する絶
縁基板１の凹部に梁部との間に間隙を介して形成された
コリオリ力方向（縦方向）の検出電極、４、５は振動子
２の梁部の両側面に対して平行な側面を有し、絶縁基板
１上に支持固定され、振動子２のうちの両端の振動子の
外側に配置された駆動方向の参照電極である。Embodiment 1 FIG. Hereinafter, regarding Embodiment 1 of the present invention,
This will be described with reference to the drawings. FIG. 1 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to Embodiment 1 of the present invention. In FIG. 1, reference numeral 1 denotes an insulating substrate made of, for example, glass, and reference numeral 2 denotes a part supported and fixed on the insulating substrate 1 to form a vibrable beam shape, and a plurality of beams are arranged in parallel in a drive excitation direction (lateral direction). The vibrator 3 is a detection electrode in the Coriolis force direction (longitudinal direction) formed between the beam part of the insulating substrate 1 and the concave part facing the beam part of the vibrator 2 with a gap between the vibrator and the beam part. A reference electrode in the driving direction, which has a side surface parallel to both side surfaces of the second beam portion, is supported and fixed on the insulating substrate 1, and is disposed outside the vibrators at both ends of the vibrator 2.
【００１９】このような構成の角速度センサは、絶縁基
板１に凹部を設けて、検出電極３を形成後、絶縁基板１
上にシリコン基板を陽極接合で接合し、上記シリコン基
板を所定の形状にエッチングすることにより、振動子２
及び参照電極４、５を形成して製造される。さらに詳細
に説明すると、複数の振動子２及び参照電極４、５は一
枚の（１１０）面方位を有するシリコン基板の異方性エ
ッチング技術により形成される。このため、振動子２の
梁部（長手部分）の厚み方向（コリオリ力方向）および
幅方向（駆動方向）の形状は高精度に形成できる。さら
に複数の振動子２の梁部の支持断面を同一直線上に配置
しているので、振動子の長さと幅方向の寸法のバランス
を良好にすることができる。コリオリ力方向の検出電極
３は絶縁基板１にエッチングにより形成した凹部内に各
々の振動子２の梁部の底面に対応して形成される。In the angular velocity sensor having such a configuration, a concave portion is provided in the insulating substrate 1 and the detecting electrode 3 is formed.
A silicon substrate is bonded by anodic bonding thereon, and the silicon substrate is etched into a predetermined shape.
And the reference electrodes 4 and 5 are formed. More specifically, the plurality of oscillators 2 and the reference electrodes 4 and 5 are formed by anisotropic etching of a silicon substrate having one (110) plane orientation. For this reason, the shape of the beam portion (longitudinal portion) of the vibrator 2 in the thickness direction (Coriolis force direction) and the width direction (drive direction) can be formed with high precision. Further, since the supporting cross sections of the beam portions of the plurality of vibrators 2 are arranged on the same straight line, the balance between the length of the vibrator and the dimension in the width direction can be improved. The detection electrodes 3 for the Coriolis force direction are formed in the recesses formed in the insulating substrate 1 by etching so as to correspond to the bottom surfaces of the beams of the respective vibrators 2.
【００２０】本実施の形態の角速度センサにおいて入力
角速度の検出を行う場合について説明する。例えば、外
部より圧電素子等（図示せず）を介して振動子２を横方
向に加振させる。複数の片持梁は平行に配置されている
ので、各振動子２は同じような状態で横方向に振動し、
被測定軸も一致する。振動子２が振動している状態で外
部から入力角速度が印加されると、振動子２に縦方向の
振動が発生する。この時、その振動量は入力角速度に比
例するため、この振動量を検出電極３にて静電容量の変
化として出力する。この静電容量の変化は各々の振動子
２と検出電極３の間で検出し、その各々の出力を加算す
ることで、出力感度が増大することになる。なお、この
演算は回路で行ってもよいし、変位量検出部の電極を電
気的に共通化することで加算してもよい。なお、参照電
極４、５により加振による振動量を検出して振動の参照
量としてもよい。The case where the angular velocity sensor of the present embodiment detects the input angular velocity will be described. For example, the vibrator 2 is vibrated laterally from outside via a piezoelectric element or the like (not shown). Since the plurality of cantilevers are arranged in parallel, each vibrator 2 vibrates laterally in a similar state,
The measured axes also match. When an input angular velocity is applied from the outside while the vibrator 2 is vibrating, a vertical vibration is generated in the vibrator 2. At this time, since the amount of vibration is proportional to the input angular velocity, the amount of vibration is output by the detection electrode 3 as a change in capacitance. This change in capacitance is detected between each of the transducers 2 and the detection electrode 3, and the output of each is added to increase the output sensitivity. This calculation may be performed by a circuit, or may be added by electrically sharing the electrodes of the displacement detection unit. The amount of vibration caused by the excitation may be detected by the reference electrodes 4 and 5 and used as the reference amount of vibration.
【００２１】なお、本実施の形態では、複数の振動子２
及び参照電極４、５を絶縁基板１上にある一枚の（１１
０）面方位を有するシリコン基板の異方性エッチング技
術により形成したが、このエッチングを反応性イオンエ
ッチングなどのドライエッチング技術を用いれば、シリ
コン基板の面方位に関係なく同様の構成の角速度センサ
を得ることができる。また、本実施の形態では、複数の
振動子２及び参照電極４、５を絶縁基板１に支持した
が、導電性基板に絶縁材を介して支持してもよい。さら
に、本実施の形態では、検出電極３を各振動子２の梁部
に対応して複数個備えたが、全ての振動子２の梁部に対
応する大きさの１個の検出電極を備えてもよく、製造が
簡単になる。In this embodiment, a plurality of transducers 2
The reference electrodes 4 and 5 are connected to one (11) on the insulating substrate 1.
0) An anisotropic etching technique for a silicon substrate having a plane orientation was formed. However, if this etching is performed by a dry etching technique such as reactive ion etching, an angular velocity sensor having the same configuration regardless of the plane orientation of the silicon substrate can be obtained. Obtainable. Further, in the present embodiment, the plurality of transducers 2 and the reference electrodes 4 and 5 are supported on the insulating substrate 1, but may be supported on a conductive substrate via an insulating material. Further, in the present embodiment, a plurality of detection electrodes 3 are provided corresponding to the beam portions of each transducer 2, but one detection electrode having a size corresponding to the beam portions of all the transducers 2 is provided. May be easier to manufacture.
【００２２】実施の形態２．図２は本発明の実施の形態
２による角速度センサの概略構成を示す要部の斜視図で
ある。本実施の形態では、振動子２ａと２ｂと２ｃで長
さが異なる。入力角速度を検出するにあたり、梁形状を
有する複数の振動子２の共振周波数を同一にすること
で、角速度の出力感度を最大にすることができる。しか
しながら、この共振周波数は環境温度により変化するた
め、例えば室温で出力感度を最大にするように各々の振
動子２の共振周波数を設定すると、温度が変化した場
合、共振周波数からずれた振動になり、出力感度が低下
する場合がある。同様に、容量検出回路においても温度
変化によるドリフトが生じ、出力が変動する。振動子２
の共振周波数は片持梁の幅、長さ、厚みにより変化させ
ることができる。Embodiment 2 FIG. FIG. 2 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to Embodiment 2 of the present invention. In the present embodiment, the lengths of the vibrators 2a, 2b, and 2c are different. In detecting the input angular velocity, the output sensitivity of the angular velocity can be maximized by making the resonance frequencies of the plurality of vibrators 2 having the beam shape the same. However, since this resonance frequency changes depending on the environmental temperature, for example, if the resonance frequency of each vibrator 2 is set so as to maximize the output sensitivity at room temperature, if the temperature changes, the vibration will deviate from the resonance frequency. However, the output sensitivity may be reduced. Similarly, a drift due to a temperature change occurs in the capacitance detection circuit, and the output fluctuates. Vibrator 2
Can be changed by the width, length, and thickness of the cantilever.
【００２３】本実施の形態では、複数の振動子２及び参
照電極４、５は、実施の形態１と同様、絶縁基板１上に
ある一枚の（１１０）面方位を有するシリコン基板の異
方性エッチング技術により形成される。片持梁の長さを
変化させるため、パターニングに用いるマスクの形状を
調整した。例えば、片持梁の幅と厚みを０．１９４ｍｍ
とした場合、マスクで１０ｍｍ長さに設定すると、実際
のシリコンの片持梁の長さは９．４ｍｍとなり、共振周
波数は３．１ｋＨｚとなる。またマスクで１１．６ｍｍ
長さに設定すると、実際のシリコンの片持梁の長さは１
１ｍｍとなり、共振周波数は２．２ｋＨｚとなる。回路
を含めたドリフトの温度係数は０．１５％／℃となるの
で、使用温度範囲をー３０℃〜９０℃とすると１８％に
なり、共振周波数を中心値に対して±１０％以内で各々
の片持梁が異なる共振周波数をもつようにしてやればよ
い。図２において、振動子２ａは長さ９．８ｍｍ、共振
周波数２．７５ｋＨｚ、振動子２ｂは長さ１０．３ｍ
ｍ、共振周波数２．５ｋＨｚ、振動子２ｃは長さ１０．
９ｍｍ、共振周波数２．２５ｋＨｚとしたので、温度範
囲ー３０℃〜９０℃にてほぼ一定の出力感度を得ること
ができた。In the present embodiment, the plurality of transducers 2 and the reference electrodes 4 and 5 are made of an anisotropic silicon substrate having a (110) plane orientation on the insulating substrate 1 as in the first embodiment. It is formed by a reactive etching technique. The shape of the mask used for patterning was adjusted to change the length of the cantilever. For example, the width and thickness of the cantilever are 0.194 mm
When the length is set to 10 mm using a mask, the actual length of the cantilever of silicon is 9.4 mm, and the resonance frequency is 3.1 kHz. 11.6mm with mask
When set to length, the actual silicon cantilever length is 1
1 mm, and the resonance frequency is 2.2 kHz. Since the temperature coefficient of the drift including the circuit is 0.15% / ° C, it becomes 18% if the operating temperature range is -30 ° C to 90 ° C, and the resonance frequency is within ± 10% of the center value. Can be made to have different resonance frequencies. In FIG. 2, the vibrator 2a is 9.8 mm long, the resonance frequency is 2.75 kHz, and the vibrator 2b is 10.3 m long.
m, the resonance frequency is 2.5 kHz, and the vibrator 2c has a length of 10.
Since the resonance frequency was 9 mm and the resonance frequency was 2.25 kHz, almost constant output sensitivity could be obtained in the temperature range of -30 ° C to 90 ° C.
【００２４】実施の形態３．図３は本発明の実施の形態
３による角速度センサの概略構成を示す要部の斜視図で
ある。本実施の形態では、絶縁基板１上に振動子２と参
照電極４、５を有し、絶縁基板１にコリオリ力方向の検
出電極３を備えたセンサ部を３個、コリオリ力方向（縦
方向）に積層配置して角速度センサを構成した。６は各
センサ部どうしの接合部であり、陽極接合でもよいし、
融合結合、ろう接、融接等であってもよい。２ｄ、２
ｅ、２ｆは振動子であり、この図では各振動子２ｄ、２
ｅ、２ｆ毎に梁部の厚みと幅を違えている。このよう
に、絶縁基板１と振動子２及び参照電極４、５とを順に
積層して構成したので、各々の（１１０）面方位を有す
るシリコン基板の厚さを変えることにより、振動子２の
梁部（長手部分）の厚み方向（コリオリ力方向）の寸法
を容易に変化させることができ、簡単な製造工程で、周
囲の温度変化があっても測定感度を一定に保つことがで
きる角速度センサが得られる。なお、振動子２毎に梁部
の厚みや幅を変えない場合には、実施の形態１の場合と
同様に出力感度を増大することができる。なお、本実施
の形態では駆動方向の参照電極４、５を振動子２の両側
面に対向して２個備えた場合について示したが、１個で
あってもよい。Embodiment 3 FIG. FIG. 3 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to Embodiment 3 of the present invention. In the present embodiment, three sensor units having a vibrator 2 and reference electrodes 4 and 5 on an insulating substrate 1 and having a detection electrode 3 for the Coriolis force direction on the insulating substrate 1 are provided in the Coriolis force direction (vertical direction). ) To form an angular velocity sensor. Reference numeral 6 denotes a junction between the sensor units, which may be an anodic junction,
Fusion bonding, brazing, fusion welding and the like may be used. 2d, 2
e and 2f are vibrators, and in this figure, each vibrator 2d, 2f
e, the thickness and width of the beam portion are different for each 2f. Since the insulating substrate 1, the vibrator 2, and the reference electrodes 4, 5 are sequentially laminated, the thickness of the silicon substrate having the respective (110) plane orientation is changed, whereby the vibrator 2 An angular velocity sensor that can easily change the dimension of the beam (longitudinal portion) in the thickness direction (Coriolis force direction), and can keep the measurement sensitivity constant even if there is a change in ambient temperature in a simple manufacturing process. Is obtained. When the thickness and width of the beam portion are not changed for each transducer 2, the output sensitivity can be increased as in the case of the first embodiment. In the present embodiment, the case where two reference electrodes 4 and 5 in the driving direction are provided on both sides of the vibrator 2 so as to be opposed to each other is shown.
【００２５】実施の形態４．図４は本発明の実施の形態
４による角速度センサの概略構成を示す要部の斜視図で
ある。本実施の形態では、実施の形態１で示したよう
な、複数個の振動子２を駆動方向に並列配置した構成の
センサ部を２個、コリオリ力方向に積層配置している。
さらに、各センサ部毎に振動子２の梁部の厚みと幅を変
えている。このように、本実施の形態では複数個の振動
子２を駆動方向に並列配置することにより実施の形態１
の場合と同様に出力感度を増大することができ、しかも
振動子２の梁部の厚みと幅が異なるセンサ部を積層する
ことにより実施の形態３の場合と同様に簡単な製造工程
で周囲の温度変化があっても測定感度を一定に保てるよ
うな角速度センサが得られる。なお、各センサ部毎に振
動子２の梁部の厚みや幅を変えない場合には出力感度を
さらに増大することができる。また、センサ部の積層個
数は２個に限るものではないのは言うまでもない。Embodiment 4 FIG. 4 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to Embodiment 4 of the present invention. In the present embodiment, two sensor units having a configuration in which a plurality of transducers 2 are arranged in parallel in the driving direction as shown in Embodiment 1 are stacked and arranged in the Coriolis force direction.
Further, the thickness and width of the beam portion of the vibrator 2 are changed for each sensor unit. As described above, in the present embodiment, a plurality of vibrators 2 are arranged in parallel in the driving direction, whereby the first embodiment is used.
As in the case of the third embodiment, the output sensitivity can be increased, and by stacking sensor portions having different thicknesses and widths of the beam portions of the vibrator 2, the peripheral portions can be formed in a simple manufacturing process as in the third embodiment. An angular velocity sensor that can keep the measurement sensitivity constant even when there is a temperature change is obtained. When the thickness and width of the beam of the vibrator 2 are not changed for each sensor, the output sensitivity can be further increased. Needless to say, the number of stacked sensor units is not limited to two.
【００２６】なお、上記実施の形態１、２及び４では駆
動方向の参照電極４、５を両端の振動子２の外側に２個
備えた場合について示したが、１個あるいは３個以上備
えてもよく、配置位置も端の振動子の外側に限らず隣合
う振動子の間であってもよい。In the first, second and fourth embodiments, the case where two reference electrodes 4 and 5 in the driving direction are provided outside the vibrator 2 at both ends is shown. However, one or three or more reference electrodes 4 and 5 are provided. The arrangement position is not limited to the outside of the end vibrator, but may be between adjacent vibrators.
【００２７】[0027]
【発明の効果】以上のように、本発明の第１の構成によ
れば、基板上に絶縁して一部が支持固定され、振動可能
な梁形状を構成し、駆動方向に複数個並列配置された振
動子、上記振動子の梁部の両側面に対して平行な側面を
有し、上記基板上に絶縁して支持固定された駆動方向の
参照電極、上記振動子を上記駆動方向に振動させる駆動
手段、上記振動子の梁部と対向する上記基板に上記梁部
との間に間隙を介して形成されたコリオリ力方向の検出
電極、及び該コリオリ力方向の検出電極を用いて上記振
動子の回転により発生するコリオリ力を検出する手段を
備えたので、被測定軸が一致し、振動子自身を大きくす
ることなく、かつ信頼性を落とすことなく出力感度の大
きな角速度センサを得ることができる。As described above, according to the first structure of the present invention, a part is supported and fixed insulated on a substrate, a vibrating beam is formed, and a plurality of beams are arranged in parallel in the driving direction. Vibrator, a reference electrode in a driving direction having side surfaces parallel to both side surfaces of a beam portion of the vibrator, and insulated and fixed on the substrate, and vibrating the vibrator in the driving direction. A driving means for causing the vibration, a detection electrode for the Coriolis force direction formed on the substrate opposed to the beam portion of the vibrator with a gap between the beam portion, and the vibration using the detection electrode for the Coriolis force direction. Since it is equipped with a means for detecting the Coriolis force generated by the rotation of the transducer, it is possible to obtain an angular velocity sensor having a large output sensitivity without increasing the size of the vibrator itself and without reducing the reliability, because the axes to be measured coincide. it can.
【００２８】本発明の第２の構成によれば、上記コリオ
リ力方向の検出電極は、上記振動子の全てに対応して複
数個備えたので、これらの出力を加算することにより出
力感度がより増大した角速度センサを得ることができ
る。According to the second configuration of the present invention, since a plurality of the electrodes for detecting the Coriolis force direction are provided corresponding to all of the vibrators, the output sensitivity is increased by adding these outputs. An increased angular velocity sensor can be obtained.
【００２９】本発明の第３の構成によれば、基板上に絶
縁して一部が支持固定され、振動可能な梁形状を構成す
る振動子、上記振動子の梁部の両側面に対して平行な側
面を有し、上記基板上に絶縁して支持固定された駆動方
向の参照電極、及び上記振動子の梁部と対向する上記基
板に上記梁部との間に間隙を介して形成されたコリオリ
力方向の検出電極を備えたセンサ部を複数個、上記コリ
オリ力方向に積層配置し、上記振動子を上記梁部の両側
面の方向に振動させる駆動手段、及び上記複数のコリオ
リ力方向の検出電極を用いて上記振動子の回転により発
生するコリオリ力を検出する手段を備えたので、センサ
部を複数個備えたことにより振動子自身を大きくするこ
となく、かつ信頼性を落とすことなく出力感度の大きな
角速度センサを得ることができ、さらに、センサ部毎に
振動子の梁部の厚みを変えることが容易になり、その場
合には周囲の温度変化に対応できる角速度センサが簡単
な製造工程で得られる。According to the third configuration of the present invention, the vibrator which is insulated and partially supported and fixed on the substrate to form a vibrable beam shape, and with respect to both side surfaces of the beam portion of the vibrator. A drive direction reference electrode having parallel side surfaces, insulated and fixed on the substrate, and formed with a gap between the beam portion of the vibrator and the substrate facing the beam portion of the vibrator. Driving means for arranging a plurality of sensor units having detection electrodes for the Coriolis force direction in the direction of the Coriolis force, vibrating the vibrator in the direction of both sides of the beam, and the plurality of Coriolis force directions Means for detecting the Coriolis force generated by the rotation of the vibrator using the detecting electrodes of the vibrator, so that the provision of a plurality of sensor portions does not increase the vibrator itself and does not reduce reliability. Obtain an angular velocity sensor with large output sensitivity It can, furthermore, it becomes easy to change the thickness of the beam portion of the vibrator for each sensor unit, an angular velocity sensor that can respond to changes in ambient temperature obtained by a simple production process in that case.
【００３０】本発明の第４の構成によれば、上記複数の
コリオリ力方向の検出電極を電気的に共通化し、上記各
検出電極からの検出信号を加算するように構成したの
で、簡単な製造工程で出力感度が増大した角速度センサ
が得られる。According to the fourth configuration of the present invention, the detection electrodes in the plurality of Coriolis force directions are electrically shared, and the detection signals from the respective detection electrodes are added. An angular velocity sensor having an increased output sensitivity in the process can be obtained.
【００３１】本発明の第５の構成によれば、上記複数の
振動子は各々異なる共振周波数を有するので、周囲の温
度変化があっても出力感度を一定に保てるような角速度
センサが得られる。According to the fifth configuration of the present invention, since the plurality of vibrators have different resonance frequencies, it is possible to obtain an angular velocity sensor that can keep the output sensitivity constant even when the ambient temperature changes.
【００３２】本発明の第６の構成によれば、上記複数の
振動子の共振周波数の範囲が±１０％以下であるので、
温度範囲−３０℃〜９０℃でほぼ一定の出力感度が得ら
れる。According to the sixth configuration of the present invention, since the range of the resonance frequency of the plurality of vibrators is ± 10% or less,
An almost constant output sensitivity is obtained in a temperature range of -30C to 90C.
【００３３】本発明の第７の構成によれば、複数の振動
子は、梁部の幅、長さ、および厚みの内の少なくとも１
つの寸法を違えることにより各々の共振周波数を変化さ
せたので、周囲の温度変化があっても出力感度を一定に
保てるような角速度センサが簡単な製造工程で得られ
る。According to the seventh configuration of the present invention, the plurality of vibrators have at least one of the width, length, and thickness of the beam portion.
Since the resonance frequency is changed by changing the three dimensions, an angular velocity sensor that can keep the output sensitivity constant even when the ambient temperature changes can be obtained by a simple manufacturing process.
【図１】 本発明の実施の形態１による角速度センサの
概略構成を示す要部の斜視図である。FIG. 1 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to a first embodiment of the present invention.
【図２】 本発明の実施の形態２による角速度センサの
概略構成を示す要部の斜視図である。FIG. 2 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to a second embodiment of the present invention.
【図３】 本発明の実施の形態３による角速度センサの
概略構成を示す要部の斜視図である。FIG. 3 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to a third embodiment of the present invention.
【図４】 本発明の実施の形態４による角速度センサの
概略構成を示す要部の斜視図である。FIG. 4 is a perspective view of a main part showing a schematic configuration of an angular velocity sensor according to a fourth embodiment of the present invention.
【図５】 従来の角速度センサの概略構成を示す要部の
斜視図である。FIG. 5 is a perspective view of a main part showing a schematic configuration of a conventional angular velocity sensor.
【図６】 従来の角速度センサの概略構成を示す要部の
断面図である。FIG. 6 is a sectional view of a main part showing a schematic configuration of a conventional angular velocity sensor.
１ 絶縁基板、 ２、２ａ、２ｂ、２ｃ、２ｄ、２ｅ、
２ｆ 振動子、 ３コリオリ力方向の検出電極、 ４、
５ 駆動方向の参照電極、 ６ 接合部。1 insulating substrate, 2, 2a, 2b, 2c, 2d, 2e,
2f vibrator, 3 detection electrode in Coriolis force direction, 4,
5 Reference electrode in drive direction, 6 Joint.
Claims (7)
振動可能な梁形状を構成し、駆動方向に複数個並列配置
された振動子、上記振動子の梁部の両側面に対して平行
な側面を有し、上記基板上に絶縁して支持固定された駆
動方向の参照電極、上記振動子を上記駆動方向に振動さ
せる駆動手段、上記振動子の梁部と対向する上記基板に
上記梁部との間に間隙を介して形成されたコリオリ力方
向の検出電極、及び該コリオリ力方向の検出電極を用い
て上記振動子の回転により発生するコリオリ力を検出す
る手段を備えたことを特徴とする角速度センサ。1. A part is supported and fixed on a substrate insulated,
A vibrating beam shape is formed, a plurality of vibrators arranged in parallel in the driving direction, having side surfaces parallel to both side surfaces of a beam portion of the vibrator, insulated and fixed on the substrate insulated. A reference electrode in the driving direction, a driving means for vibrating the vibrator in the driving direction, and a Coriolis force direction formed via a gap between the beam portion on the substrate facing the beam portion of the vibrator. An angular velocity sensor comprising: a detection electrode; and means for detecting a Coriolis force generated by rotation of the vibrator using the detection electrode in the direction of the Coriolis force.
振動子の全てに対応して複数個備えたことを特徴とする
請求項１記載の角速度センサ。2. An angular velocity sensor according to claim 1, wherein a plurality of said Coriolis force direction detecting electrodes are provided corresponding to all of said vibrators.
振動可能な梁形状を構成する振動子、上記振動子の梁部
の両側面に対して平行な側面を有し、上記基板上に絶縁
して支持固定された駆動方向の参照電極、及び上記振動
子の梁部と対向する上記基板に上記梁部との間に間隙を
介して形成されたコリオリ力方向の検出電極を備えたセ
ンサ部を複数個、上記コリオリ力方向に積層配置し、上
記振動子を上記梁部の両側面の方向に振動させる駆動手
段、及び上記複数のコリオリ力方向の検出電極を用いて
上記振動子の回転により発生するコリオリ力を検出する
手段を備えたことを特徴とする角速度センサ。3. A part is supported and fixed on the substrate by insulation.
A vibrator having a vibrating beam shape, a reference electrode in a driving direction having side surfaces parallel to both side surfaces of a beam portion of the vibrator and insulated and fixed on the substrate, and the vibration A plurality of sensor units each having a Coriolis force direction detection electrode formed on the substrate facing the beam portion of the substrate facing the beam portion with a gap interposed therebetween, are stacked and arranged in the Coriolis force direction, and Drive means for vibrating the vibrator in the direction of both side surfaces of the beam portion, and means for detecting Coriolis force generated by rotation of the vibrator using the plurality of Coriolis force direction detection electrodes. Angular velocity sensor.
的に共通化し、上記各検出電極からの検出信号を加算す
るように構成したことを特徴とする請求項２または３記
載の角速度センサ。4. The angular velocity sensor according to claim 2, wherein the detection electrodes in a plurality of Coriolis force directions are electrically shared, and the detection signals from the respective detection electrodes are added.
有するものであることを特徴とする請求項１ないし４の
何れかに記載の角速度センサ。5. The angular velocity sensor according to claim 1, wherein the plurality of vibrators have different resonance frequencies.
０％以下であることを特徴とする請求項５記載の角速度
センサ。6. The resonance frequency range of a plurality of transducers is ± 1.
The angular velocity sensor according to claim 5, wherein the angular velocity is 0% or less.
び厚みの内の少なくとも１つの寸法を違えることにより
各々の共振周波数を変化させたことを特徴とする請求項
５または６記載の角速度センサ。7. The resonator according to claim 5, wherein each of the plurality of vibrators has a different resonance frequency by changing at least one of a width, a length, and a thickness of the beam portion. An angular velocity sensor as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9077678A JPH10267662A (en) | 1997-03-28 | 1997-03-28 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9077678A JPH10267662A (en) | 1997-03-28 | 1997-03-28 | Angular velocity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10267662A true JPH10267662A (en) | 1998-10-09 |
Family
ID=13640557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9077678A Pending JPH10267662A (en) | 1997-03-28 | 1997-03-28 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10267662A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008224229A (en) * | 2007-03-08 | 2008-09-25 | Sony Corp | Inertial sensor, its manufacturing method, and electric and electronic device |
-
1997
- 1997-03-28 JP JP9077678A patent/JPH10267662A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008224229A (en) * | 2007-03-08 | 2008-09-25 | Sony Corp | Inertial sensor, its manufacturing method, and electric and electronic device |
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