JPH10232203A - Method and device for measuring particulate in piping - Google Patents
Method and device for measuring particulate in pipingInfo
- Publication number
- JPH10232203A JPH10232203A JP5112997A JP5112997A JPH10232203A JP H10232203 A JPH10232203 A JP H10232203A JP 5112997 A JP5112997 A JP 5112997A JP 5112997 A JP5112997 A JP 5112997A JP H10232203 A JPH10232203 A JP H10232203A
- Authority
- JP
- Japan
- Prior art keywords
- fine particles
- concentration
- pipe
- liquid
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 43
- 239000007788 liquid Substances 0.000 claims abstract description 97
- 239000000203 mixture Substances 0.000 claims abstract description 97
- 238000010521 absorption reaction Methods 0.000 claims abstract description 84
- 238000009826 distribution Methods 0.000 claims abstract description 32
- 239000010419 fine particle Substances 0.000 claims description 199
- 238000011088 calibration curve Methods 0.000 claims description 35
- 239000002245 particle Substances 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000005070 sampling Methods 0.000 abstract description 34
- 238000002835 absorbance Methods 0.000 abstract description 28
- 239000000725 suspension Substances 0.000 abstract description 18
- 238000003860 storage Methods 0.000 abstract description 10
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 description 50
- 238000010586 diagram Methods 0.000 description 20
- 238000002329 infrared spectrum Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 10
- 238000000862 absorption spectrum Methods 0.000 description 9
- 230000002572 peristaltic effect Effects 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 6
- 238000004611 spectroscopical analysis Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011002 quantification Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000009615 fourier-transform spectroscopy Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000011481 absorbance measurement Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、配管内の液体に含
まれる微粒子を測定する方法および装置に関する。The present invention relates to a method and an apparatus for measuring fine particles contained in a liquid in a pipe.
【０００２】[0002]
【従来の技術】従来より、液体の濁度測定は、浄水およ
び排水の処理や、食品工業をはじめ各種製造業における
製造工程中の液体の管理指標として利用されており、透
過・散乱光方式，散乱光方式，積分球方式等の種々の液
体濁度測定方法が提案されている。2. Description of the Related Art Conventionally, liquid turbidity measurement has been used as an index for liquid management during the processing of purified water and wastewater, and in the manufacturing process in various industries including the food industry. Various liquid turbidity measurement methods such as a scattered light method and an integrating sphere method have been proposed.
【０００３】一方、液体中に含まれる微粒子の濃度は直
接に定量測定を行う方法は知られていない。そのため、
従来、液体中の微粒子濃度と液体の濁りとの間の相関関
係を利用した液体濁度の分布測定や定量測定によって、
液体中に含まれる微粒子の粒度分布測定や微粒子量測定
を行っている。[0003] On the other hand, there is no known method for directly measuring the concentration of fine particles contained in a liquid. for that reason,
Conventionally, by measuring the distribution and quantitative measurement of liquid turbidity using the correlation between the concentration of fine particles in the liquid and the turbidity of the liquid,
We measure the particle size distribution of fine particles contained in liquid and the amount of fine particles.
【０００４】また、水道水の配管やプラント内の種々の
配管内の液体に含まれる微粒子についても直接に定量測
定を行う方法は知られていないため、微粒子の濃度測定
を行う代わりに流水の濁度測定を行い、これによって、
微粒子の粒子分布測定や濃度の定量測定を行っている。[0004] Further, since there is no known method for directly measuring quantitatively fine particles contained in tap water pipes and liquids in various pipes in a plant, turbidity of flowing water is measured instead of measuring the concentration of fine particles. And measure the
We perform particle distribution measurement and quantitative measurement of concentration of fine particles.
【０００５】[0005]
【発明が解決しようとする課題】通常、浄水，排水，あ
るいは製造工程中の液体や、配管内の液体中には種々の
組成成分の微粒子が含まれており、該液体中に含まれる
微粒子の組成が既知である場合も、あるいは不知である
場合もある。一般に、液体中に含まれる微粒子は、その
微粒子の組成によって、製造装置や処理施設，あるいは
環境等に与える影響が異なる場合がある。Normally, fine particles of various composition components are contained in a liquid in water purification, drainage, or manufacturing processes, and in a liquid in a pipe. The composition may be known or unknown. In general, fine particles contained in a liquid may have different effects on a manufacturing apparatus, a processing facility, an environment, or the like, depending on the composition of the fine particles.
【０００６】しかしながら、従来より行なわれている液
体中の微粒子の測定では、液体中に異なる組成の微粒子
が含まれる場合であっても、これらの微粒子を同じ組成
の微粒子であるとして扱い、液体の濁度測定によって粒
度分布や微粒子量の測定を行なっている。そのため、従
来より行なわれる濁度測定による微粒子測定では、微粒
子の粒度分布や微粒子量は得られるが、微粒子の組成は
不明であるという問題点がある。However, in the conventional measurement of fine particles in a liquid, even when fine particles of different compositions are contained in the liquid, these fine particles are treated as fine particles of the same composition, and the fine particles of the liquid are treated. The particle size distribution and the amount of fine particles are measured by turbidity measurement. Therefore, in the conventional measurement of fine particles by turbidity measurement, the particle size distribution and the amount of fine particles can be obtained, but the composition of the fine particles is unknown.
【０００７】また、微粒子がどのような組成であるかに
ついてのデータが得られないため、得られた粒度分布や
微粒子の濃度が同種の組成の微粒子であるのか、あるい
は異種の組成の微粒子が含まれるものであるのかの判定
も不可能であるという問題点がある。また、微粒子の濃
度や組成は配管断面内でその分布が異なる場合がある
が、従来の微粒子測定では配管断面内での微粒子の分布
については測定できない。配管内の断面方向での分布が
異なる場合には、従来のように一採取箇所から得られる
濃度情報を用いると、配管中を流れる液体全体について
微粒子の正確な含有量を求めることができない。さら
に、配管内の断面方向で組成分布が異なる場合には、従
来の方法では配管内の微粒子分布を正確に把握すること
が困難である。Further, since data on the composition of the fine particles cannot be obtained, it is difficult to determine whether the obtained particle size distribution and the concentration of the fine particles are the same type of fine particles, or that the fine particles have different types of fine particles. However, there is a problem that it is impossible to determine whether or not the information is obtained. In addition, the concentration and composition of the fine particles may have a different distribution in the cross section of the pipe, but the conventional fine particle measurement cannot measure the distribution of the fine particles in the cross section of the pipe. In the case where the distribution in the cross-sectional direction in the pipe is different, if the concentration information obtained from one sampling point is used as in the related art, the accurate content of fine particles cannot be obtained for the entire liquid flowing in the pipe. Further, when the composition distribution differs in the cross-sectional direction in the pipe, it is difficult to accurately grasp the particle distribution in the pipe by the conventional method.
【０００８】そのため、得られた測定結果を用いて流水
の管理を行う場合においても、十分な管理が期待できな
いことになる。Therefore, even when the running water is managed using the obtained measurement results, sufficient management cannot be expected.
【０００９】そこで、本発明は上記従来の配管内の微粒
子測定の問題点を解決し、配管内微粒子の濃度を組成毎
に測定することができる微粒子の測定方法を提供するこ
とを目的とし、また、配管内の微粒子濃度の二次元分布
を測定することができる測定方法および測定装置を提供
することを目的とする。Accordingly, an object of the present invention is to solve the above-mentioned problems of the conventional measurement of fine particles in a pipe, and to provide a fine particle measuring method capable of measuring the concentration of fine particles in a pipe for each composition. It is another object of the present invention to provide a measuring method and a measuring apparatus capable of measuring a two-dimensional distribution of the concentration of fine particles in a pipe.
【００１０】[0010]
【課題を解決するための手段】本発明の配管内微粒子の
測定方法および測定装置は、微粒子の組成によって赤外
スペクトルが相違することを利用して、各組成に特有の
波長の吸収強度から微粒子の濃度を定量分析するもので
ある。液体中の微粒子に赤外領域の光を照射すると、照
射された赤外領域光は、それぞれ特徴的な異なる波長で
吸収が見られ、また、その吸収強度は微粒子の濃度に応
じたものとなる。The method and apparatus for measuring fine particles in a pipe according to the present invention take advantage of the fact that the infrared spectrum differs depending on the composition of the fine particles, and determine the fine particles from the absorption intensity at a wavelength specific to each composition. Is to quantitatively analyze the concentration of When the particles in the liquid are irradiated with light in the infrared region, the irradiated infrared region absorbs light at different characteristic wavelengths, and the absorption intensity depends on the concentration of the particles. .
【００１１】従って、赤外スペクトルの特徴的な吸収波
長から微粒子の組成を知ることができ、また、微粒子に
特徴的な波長の吸収強度から微粒子の濃度を求めること
ができる。Therefore, the composition of the fine particles can be known from the characteristic absorption wavelength of the infrared spectrum, and the concentration of the fine particles can be determined from the absorption intensity at the characteristic wavelength of the fine particles.
【００１２】本発明の配管内微粒子の測定方法および測
定装置は、微粒子の赤外スペクトルが持つ上記特性を利
用して、微粒子の組成毎にその濃度の定量分析を行うも
のである。また、本発明の配管内微粒子の測定では、配
管内の液体を配管内の位置に応じて選別して行うことに
よって、微粒子の濃度の二次元分布を測定し、配管断面
内の微粒子濃度の分布を求めるものである。また、配管
内の濃度の二次元分布測定は、微粒子の組成毎に行うこ
ともできる。The method and the apparatus for measuring fine particles in a pipe according to the present invention perform quantitative analysis of the concentration of fine particles for each composition by using the above-mentioned characteristics of the infrared spectrum of the fine particles. In the measurement of fine particles in the pipe of the present invention, the two-dimensional distribution of the fine particle concentration is measured by sorting the liquid in the pipe according to the position in the pipe, and the distribution of the fine particle concentration in the cross section of the pipe is measured. Is what you want. Further, the two-dimensional distribution measurement of the concentration in the pipe can be performed for each composition of the fine particles.
【００１３】微粒子の組成毎の濃度定量分析を行うため
に、本発明の測定方法は、配管内の液体を配管内の位置
に応じて選別して採取する行程と、採取した液体中の微
粒子に赤外領域の光を入射し、得られる透過光又は反射
光から波長毎に吸収強度を測定する工程と、既知組成の
微粒子の濃度と赤外領域光の吸収強度の関係を用いて、
測定した吸収強度から液体中の微粒子濃度を求める工程
とを含む。これによって、配管内の液体中に含まれる微
粒子について、波長から微粒子の組成を特定し、吸収強
度から濃度を定量することができる。また、採取位置か
ら濃度の二次元分布を求めることができ、採取位置を配
管内の断面内で変えることによって、配管断面内の微粒
子濃度や測定の分布を得ることができる。In order to carry out a quantitative analysis of the concentration of each fine particle composition, the measuring method of the present invention comprises the steps of selecting and collecting the liquid in the pipe according to the position in the pipe; Injecting light in the infrared region, the step of measuring the absorption intensity for each wavelength from the transmitted light or reflected light obtained, using the relationship between the concentration of fine particles of a known composition and the absorption intensity of the infrared region light,
Obtaining the concentration of fine particles in the liquid from the measured absorption intensity. This makes it possible to specify the composition of the fine particles contained in the liquid in the pipe from the wavelength and determine the concentration from the absorption intensity. Further, a two-dimensional distribution of the concentration can be obtained from the collection position, and by changing the collection position within the cross section in the pipe, the particle concentration and the distribution of measurement in the cross section of the pipe can be obtained.
【００１４】本発明の配管内微粒子の測定方法によれ
ば、配管内の液体中に含まれる微粒子に赤外領域の光を
入射すると、該赤外領域光は、各微粒子の組成に特有の
波長に吸収ピークを有する微粒子によって吸収される。According to the method for measuring fine particles in a pipe according to the present invention, when light in the infrared region is incident on fine particles contained in the liquid in the pipe, the infrared region light has a wavelength specific to the composition of each fine particle. Is absorbed by the fine particles having an absorption peak.
【００１５】波長に対する吸収度は、グレーティングや
プリズム等を用いた分光器によって透過光あるいは反射
光を分光したり、フーリエ変換分光により波長毎の吸収
度を求めたり、バンドパスフィルターを用いて特定波長
域のみの吸収度を求めることによって測定することがで
きる。この吸収光の測定において、透過光又は反射光で
特徴的な吸収を示す波長位置から微粒子の組成を求める
ことができ、また、その吸収強度から微粒子の流水中で
の濃度を求めることができる。The absorptance with respect to the wavelength can be determined by dispersing the transmitted light or the reflected light with a spectroscope using a grating, a prism, or the like, determining the absorbance for each wavelength by using Fourier transform spectroscopy, or using a bandpass filter to specify a specific wavelength. It can be measured by determining the absorbance only in the region. In the measurement of the absorbed light, the composition of the fine particles can be determined from the wavelength position at which characteristic absorption occurs in the transmitted light or the reflected light, and the concentration of the fine particles in flowing water can be determined from the absorption intensity.
【００１６】吸収強度に対する微粒子濃度の測定は、あ
らかじめ微粒子の濃度と吸収強度との関係を求めてお
き、該濃度と吸収強度との関係を用いて、測定した吸収
強度から対応する濃度を求めることによって行うことが
できる。この濃度と吸収強度との関係は、例えば標準懸
濁液の既知濃度の微粒子に対する吸収強度を測定し、該
測定値から検量線を作成することによって求めることが
できる。In measuring the concentration of fine particles with respect to the absorption intensity, the relationship between the concentration of the fine particles and the absorption intensity is determined in advance, and the corresponding concentration is determined from the measured absorption intensity using the relationship between the concentration and the absorption intensity. Can be done by The relationship between the concentration and the absorption intensity can be determined, for example, by measuring the absorption intensity of the standard suspension with respect to fine particles of a known concentration, and creating a calibration curve from the measured values.
【００１７】また、微粒子の濃度や組成の二次元分布の
測定においては、液体を採取した位置と濃度および組成
とを対応させることによって求めることができる。In the measurement of the two-dimensional distribution of the concentration and composition of the fine particles, the concentration can be obtained by associating the position where the liquid is collected with the concentration and composition.
【００１８】微粒子の濃度と吸収強度の関係は、濃度が
既知の微粒子から得られる赤外領域光の吸収強度を測定
し、この吸収強度を用いて検量線により定めることがで
きる。The relationship between the concentration of the fine particles and the absorption intensity can be determined by measuring the absorption intensity of infrared region light obtained from the fine particles having a known concentration and using the absorption intensity as a calibration curve.
【００１９】本発明の配管内微粒子の測定装置は、配管
内の液体を、配管内の位置に応じて選別して採取する採
取手段と、採取した液体に赤外領域光を入射する光源
と、吸収光の吸収強度を波長毎に測定する吸収強度測定
手段と、既知組成の微粒子濃度と赤外領域光の吸収強度
の関係を用いて、吸収強度測定手段によって求めた吸収
強度から配管内の微粒子濃度を求める測定手段とを備え
る。[0019] The apparatus for measuring particulates in a pipe according to the present invention comprises: a sampling means for selecting and collecting a liquid in the pipe according to a position in the pipe; a light source for injecting infrared light into the collected liquid; Using the absorption intensity measuring means for measuring the absorption intensity of the absorbed light for each wavelength, and the fine particles in the pipe from the absorption intensity determined by the absorption intensity measuring means using the relationship between the concentration of the fine particles of a known composition and the absorption intensity of the infrared region light Measuring means for determining the concentration.
【００２０】これによって、配管内微粒子の濃度を組成
毎に測定することができ、また、微粒子濃度の二次元分
布を求めることができる。また、液体の採取位置を配管
断面内で変更することによって、配管断面内の微粒子分
布を求めることができる。Thus, the concentration of the fine particles in the pipe can be measured for each composition, and the two-dimensional distribution of the fine particle concentration can be obtained. Further, by changing the liquid sampling position in the cross section of the pipe, the distribution of fine particles in the cross section of the pipe can be obtained.
【００２１】本発明の配管内の微粒子測定装置によれ
ば、採取手段によって配管内の液体を配管内の位置に応
じて選別して採取し、光源から液体に赤外領域光を入射
し、吸収強度測定手段によって吸収光の吸収強度を測定
する。測定手段は、既知組成の波長毎の微粒子濃度と吸
収強度との関係を用いて、液体から求めた吸収強度から
微粒子濃度を測定する。According to the apparatus for measuring fine particles in a pipe of the present invention, the liquid in the pipe is selected and collected by the collecting means in accordance with the position in the pipe, and infrared light is incident on the liquid from the light source to absorb the liquid. The absorption intensity of the absorbed light is measured by the intensity measuring means. The measuring means measures the concentration of the fine particles from the absorption intensity obtained from the liquid, using the relationship between the concentration of the fine particles for each wavelength of the known composition and the absorption intensity.
【００２２】この既知組成の波長毎の微粒子濃度と吸収
強度との関係は、導入手段によって、組成と濃度が既知
の微粒子を含む液体を測定セルに導入し、光源から測定
セルに赤外領域光を入射し、吸収強度測定手段によって
吸収光の波長毎の吸収強度を測定して、微粒子濃度と反
射強度との関係を波長毎に求めることによって得ること
ができる。The relationship between the concentration of fine particles and the absorption intensity at each wavelength of the known composition is determined by introducing a liquid containing fine particles having a known composition and concentration into the measuring cell by the introducing means, and transmitting light from the light source to the measuring cell in the infrared region. And the absorption intensity is measured for each wavelength of the absorbed light by the absorption intensity measuring means, and the relationship between the concentration of the fine particles and the reflection intensity is obtained for each wavelength.
【００２３】本発明の実施の態様によれば、採取手段
は、配管内において、径方向および周方向に異なる位置
で液体の採取が可能な採取管を備え、これによって、配
管断面内の微粒子分布を求めることができる。また、採
取手段は、径方向に配列した複数個の採取管により構成
することができ、また、周方向に配列した複数個の採取
管により構成することができる。さらに、径方向に配列
した複数個の採取管を周方向に回転可能とする構成とす
ることもできる。According to an embodiment of the present invention, the collecting means includes a collecting pipe capable of collecting a liquid at different positions in the pipe in a radial direction and a circumferential direction, whereby the fine particle distribution in the cross section of the pipe is provided. Can be requested. Further, the sampling means can be constituted by a plurality of sampling tubes arranged in the radial direction, and can be constituted by a plurality of sampling tubes arranged in the circumferential direction. Furthermore, it is also possible to adopt a configuration in which a plurality of collecting tubes arranged in the radial direction can be rotated in the circumferential direction.
【００２４】また、本発明の実施の態様によれば、管内
の液体と、組成および濃度が既知の標準懸濁液を納める
容器とを、測定セルに対して選択的に接続するバルブを
採取手段に設け、これによって、測定セルに対して、配
管内の液体と組成および濃度が既知の微粒子を含む液体
とのいずれかを選択して導入することができる。According to an embodiment of the present invention, a valve for selectively connecting a liquid in a tube and a container containing a standard suspension having a known composition and concentration to a measuring cell is provided. Thus, any of the liquid in the pipe and the liquid containing fine particles having a known composition and concentration can be selectively introduced into the measurement cell.
【００２５】[0025]
【発明の実施の形態】以下、本発明の実施の形態を図を
参照しながら詳細に説明する。図１は本発明の流水中の
微粒子の濃度定量方法を説明するためのフローチャート
であり、図２は本発明の流水中の微粒子の濃度定量方法
に使用する検量線の作成を説明するための概略図であ
り、また、図３，４は本発明の検量線を用いた濃度定量
方法を説明するための概略図である。Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a flowchart for explaining the method for quantifying the concentration of fine particles in running water of the present invention, and FIG. 2 is a schematic diagram for explaining creation of a calibration curve used in the method for quantifying concentration of fine particles in running water of the present invention. FIGS. 3 and 4 are schematic diagrams for explaining a concentration quantification method using a calibration curve of the present invention.
【００２６】図１のフローチャートにおいて、はじめ
に、あらかじめ微粒子濃度と吸収強度との関係を求めて
おく。ここでは、検量線によって吸収強度に対する微粒
子濃度の関係を求める場合について説明する。図２にお
いて、組成ａ，ｂ，ｃを含む微粒子を例として説明す
る。なお、図２では、吸収強度を吸光度によって表して
いる。In the flowchart of FIG. 1, first, the relationship between the particle concentration and the absorption intensity is determined in advance. Here, a case will be described in which the relationship between the concentration of fine particles and the absorption intensity is determined by a calibration curve. In FIG. 2, a description will be given by taking as an example fine particles containing compositions a, b, and c. In FIG. 2, the absorption intensity is represented by the absorbance.
【００２７】組成ａ，ｂ，ｃの各微粒子は、微粒子毎に
異なるλａ，λｂ，λｃの波長位置に特徴的な吸収波長
がある。そのため、吸収強度は微粒子に特定の波長位置
で吸収ピークを持つことになる。そこで、組成および濃
度が既知の微粒子を含む標準懸濁液を用意する。図２で
は、一例として、組成ａについては濃度Ｃａ，組成ｂに
ついては濃度Ｃｂ，組成ｃについては濃度Ｃｃの微粒子
を含む標準懸濁液の場合について示している。Each of the fine particles of the compositions a, b, and c has a characteristic absorption wavelength at a wavelength position of λa, λb, and λc that differs for each fine particle. Therefore, the absorption intensity has an absorption peak at a specific wavelength position in the fine particles. Therefore, a standard suspension containing fine particles having a known composition and concentration is prepared. FIG. 2 shows, as an example, the case of a standard suspension containing fine particles having a concentration Ca for the composition a, a concentration Cb for the composition b, and a concentration Cc for the composition c.
【００２８】この濃度が既知の微粒子について、各微粒
子に特徴的に吸収ピークを表す波長位置（λａ，λｂ，
λｃ）で吸収強度（図２中では、吸光度で示している）
を求め、この吸収強度を基にして、各微粒子の濃度と吸
収強度との関係を検量線として求める。For the fine particles of which the concentration is known, the wavelength position (λa, λb,
λc) and the absorption intensity (in FIG. 2, indicated by absorbance)
Is determined, and the relationship between the concentration of each fine particle and the absorption intensity is determined as a calibration curve based on the absorption intensity.
【００２９】図２（ａ）において、微粒子の各組成ａ，
ｂ，ｃの吸収強度は吸光度Ｅａ，Ｅｂ，Ｅｃであって、
この吸光度を基にして、それぞれ図２（ｂ），（ｃ），
（ｄ）に示す検量線を作成する。図２（ｂ）は、前記図
２（ａ）の測定で求めた基準濃度Ｃａに対する吸光度Ｅ
ａを基にして作成した検量線を示している。また、図２
（ｃ），（ｄ）に示す組成ｂ，ｃの検量線についても、
図２（ｂ）と同様して検量線を求めることができる（ス
テップＳ１）。In FIG. 2A, each composition a,
The absorption intensities of b and c are absorbances Ea, Eb and Ec,
Based on this absorbance, FIGS. 2 (b), (c),
A calibration curve shown in (d) is created. FIG. 2B shows the absorbance E with respect to the reference concentration Ca obtained by the measurement in FIG. 2A.
2 shows a calibration curve created based on a. FIG.
Regarding the calibration curves of the compositions b and c shown in (c) and (d),
A calibration curve can be obtained in the same manner as in FIG. 2B (step S1).
【００３０】次に、検出対象の溶液に赤外領域光を照射
して、透過光又は反射光の波長と強度を測定する。この
測定において、透過光又は反射光の波長毎の吸収強度を
測定して赤外スペクトルを求める。この赤外スペクトル
は、グレーティングやプリズム等の分光器を用いて分光
を行ったり、フーリエ変換分光を用いたり、フィルター
によって特定波長域のみの吸収度を求めることによって
測定することができる。求めた赤外スペクトルから、測
定対象の微粒子に特有の波長の吸光度Ｅを求める。Next, the solution to be detected is irradiated with light in the infrared region, and the wavelength and intensity of transmitted light or reflected light are measured. In this measurement, an infrared spectrum is obtained by measuring the absorption intensity of each wavelength of the transmitted light or the reflected light. This infrared spectrum can be measured by performing spectroscopy using a spectroscope such as a grating or a prism, using Fourier transform spectroscopy, or determining the absorbance only in a specific wavelength range using a filter. From the obtained infrared spectrum, the absorbance E at a wavelength specific to the fine particles to be measured is obtained.
【００３１】図３は組成ａの未知濃度の微粒子の濃度測
定を説明するための図である。図３（ａ）に示す吸光度
ＥA は、微粒子濃度が未知の組成ａの微粒子を含む溶液
の吸光度測定において、組成ａの微粒子に特徴的な吸収
波長λａにおける吸光度を表している。この吸光度は赤
外スペクトルから求めることができる。（ステップＳ
２）。FIG. 3 is a diagram for explaining the measurement of the concentration of fine particles having an unknown concentration of the composition a. The absorbance EA shown in FIG. 3A represents the absorbance at an absorption wavelength λa characteristic of the fine particles of the composition a in the absorbance measurement of the solution containing the fine particles of the composition a whose fine particle concentration is unknown. This absorbance can be determined from the infrared spectrum. (Step S
2).
【００３２】前記ステップＳ２で求めた吸光度ＥA に対
して、検量線を用いて濃度測定を行う。この吸光度ＥA
を図３（ｂ）に示す組成ａの検量線に適用すると（図３
中の一点鎖線参照）、該検量線から吸光度ＥA に対応す
る濃度ＣA が得られる。上記操作によって、測定した液
体中に含まれる組成ａの微粒子の濃度ＣA を求めること
ができる。なお、図３中には、検量線を求める際に用い
た吸光度Ｅａと濃度Ｃａについても示している（ステッ
プＳ３）。The concentration of the absorbance EA obtained in step S2 is measured using a calibration curve. This absorbance EA
Is applied to the calibration curve of the composition a shown in FIG.
The concentration CA corresponding to the absorbance EA is obtained from the calibration curve. By the above operation, the concentration CA of the fine particles of the composition a contained in the measured liquid can be obtained. FIG. 3 also shows the absorbance Ea and the concentration Ca used when obtaining the calibration curve (step S3).
【００３３】また、図４は、図３の組成ａと同様にし
て、組成ｂの未知濃度の微粒子の濃度ＣB を求める場合
を示している。図４（ａ）は、微粒子濃度が未知の組成
ｂの微粒子において、特徴的に吸収を行う波長λｂの吸
光度がＥB であることを表しており、この吸光度ＥB を
図４（ｂ）に示す組成ｂの検量線に適用すると（図４中
の一点鎖線参照）、該検量線から吸光度ＥB に対応する
濃度ＣB を求めることができ、測定した液体中に含まれ
る組成ｂの微粒子の濃度ＣB を求めることができる。FIG. 4 shows a case where the concentration CB of fine particles of unknown concentration of the composition b is obtained in the same manner as the composition a of FIG. FIG. 4 (a) shows that the absorbance at the wavelength .lambda.b at which characteristic absorption is performed is EB in the fine particles of the composition b whose particle concentration is unknown, and this absorbance EB is represented by the composition shown in FIG. When applied to the calibration curve b (see the dashed line in FIG. 4), the concentration CB corresponding to the absorbance EB can be determined from the calibration curve, and the concentration CB of the fine particles of the composition b contained in the measured liquid is determined. be able to.
【００３４】図５は、本発明の配管内微粒子の測定装置
の一構成例の概略図である。図５に示す測定装置１は、
配管内から液体を採取する採取部と採取した液体の組
成，濃度を測定する濃度測定部とを備える。なお、図５
において、濃度測定部の各部分を示す符号は一桁の数字
で表し、採取部の各部分を示す符号は１０番代の数字で
表している。FIG. 5 is a schematic view of an example of the configuration of the apparatus for measuring fine particles in a pipe according to the present invention. The measuring device 1 shown in FIG.
It has a sampling unit for sampling the liquid from inside the pipe and a concentration measuring unit for measuring the composition and concentration of the sampled liquid. FIG.
In FIG. 7, the reference numeral indicating each part of the concentration measuring unit is represented by a single-digit number, and the reference numeral representing each part of the sampling unit is represented by a tenth-generation numeral.
【００３５】採取部は、配管１０中から液体を抽出して
測定セル１４に導く採取管１１と、微粒子濃度と組成が
既知である標準懸濁液を蓄液する蓄液容器１２と、配管
内の液体と蓄液容器１２内の標準懸濁液を選択的に導入
するバルブ１３と、吸収光を得るための測定セル１４
と、液体を配管１０に戻すための管１６と、測定セル１
４からの液体を排出するための排出管１７と、測定セル
１４からの液体を管１６と排出管１７に選択的に導くバ
ルブ１５と、標準懸濁液を撹拌する撹拌装置１８と、導
管に導入した液体を送液するペリスタルティックポンプ
１９を備える。なお、バルブ１３において、採取管１１
側をＡ、測定セル１４側をＢ、蓄液容器１２側をＣと
し、バルブ１５において、管１６側をＡ、測定セル１４
側をＢ、排出管１７側をＣとする。The collection unit includes a collection pipe 11 for extracting a liquid from the pipe 10 and guiding the extracted liquid to the measurement cell 14, a liquid storage container 12 for storing a standard suspension having a known concentration and composition of fine particles, A valve 13 for selectively introducing the liquid and the standard suspension in the liquid storage container 12, and a measuring cell 14 for obtaining absorbed light
A pipe 16 for returning the liquid to the pipe 10, and the measuring cell 1
A discharge pipe 17 for discharging the liquid from the measuring cell 14; a valve 15 for selectively guiding the liquid from the measuring cell 14 to the pipe 16 and the discharge pipe 17; a stirring device 18 for stirring the standard suspension; A peristaltic pump 19 for sending the introduced liquid is provided. In the valve 13, the sampling tube 11
A is the side, B is the measurement cell 14 side, C is the liquid storage container 12 side.
B is on the side and C is on the discharge pipe 17 side.
【００３６】また、採取管１１は、駆動機構２１によっ
て配管１０内の位置が変更可能である。駆動機構２１は
駆動制御装置２０によって制御され、少なくとも採取管
１１の採取口が配管断面内で位置変更するように駆動を
行う。これによって、配管１０の断面内の異なる位置に
ある液体を選別して採取することができる。また、駆動
制御装置２０は、バルブ１３，１５の開閉制御も行う。The position of the sampling pipe 11 in the pipe 10 can be changed by the drive mechanism 21. The drive mechanism 21 is controlled by the drive control device 20 and performs driving such that at least the sampling port of the sampling pipe 11 changes its position in the cross section of the pipe. Thus, liquids at different positions in the cross section of the pipe 10 can be selectively collected. The drive control device 20 also controls opening and closing of the valves 13 and 15.
【００３７】図５に示す濃度測定部は、レンズで構成す
る光学系を通して得た透過光を分光器で分光する構成例
である。濃度測定部は、測定セル１４に赤外領域の光を
放出する光源２と、赤外領域光を測定セル１４内に集光
させる第１光学系３と、測定セル１４内の液体に含まれ
る微粒子によって吸収された吸収光を分光器５側に集光
させる第２光学系４と、前記吸収光から特定波長の光を
分光する分光器５と、分光した特定波長の吸収光を検出
する検出器６と、吸収光に基づいて液体中の微粒子の濃
度を測定する測定装置７を備える。The density measuring section shown in FIG. 5 is an example of a configuration in which transmitted light obtained through an optical system formed by a lens is split by a spectroscope. The concentration measurement unit is included in the light source 2 that emits light in the infrared region to the measurement cell 14, the first optical system 3 that focuses infrared region light in the measurement cell 14, and the liquid in the measurement cell 14. A second optical system 4 for condensing the absorption light absorbed by the fine particles on the spectroscope 5 side, a spectroscope 5 for separating light of a specific wavelength from the absorption light, and a detection for detecting the spectroscopic absorption light of the specific wavelength The apparatus includes a measuring device 6 and a measuring device 7 for measuring the concentration of fine particles in the liquid based on the absorbed light.
【００３８】分光器５は、入射した吸収光を波長に応じ
て分光する装置であり、グレーティングを用いて構成す
ることができる。また、この分光器５として分光波長の
設定が変更可能な分光器を用いたり、あるいは異なる分
光波長の分光器と検出器との組み合わせを複数設けるこ
とによって、複数種類の微粒子の検出を同時に行うこと
ができる。検出器６で検出した吸収強度は測定装置７に
入力される。測定装置７は、あらかじめ求めておいた検
量線を用いて、入力した吸収強度から各組成の微粒子の
濃度を求める機能を備え、配管内の液体の濃度と組成を
求めることができる。The spectroscope 5 is a device for splitting incident absorption light according to the wavelength, and can be configured using a grating. Further, by using a spectroscope whose setting of the spectral wavelength can be changed as the spectroscope 5, or by providing a plurality of combinations of a spectroscope and a detector having different spectral wavelengths, it is possible to simultaneously detect a plurality of types of fine particles. Can be. The absorption intensity detected by the detector 6 is input to the measuring device 7. The measuring device 7 has a function of calculating the concentration of the fine particles of each composition from the input absorption intensity using a calibration curve determined in advance, and can determine the concentration and the composition of the liquid in the pipe.
【００３９】測定装置７で求めた濃度や組成に関するデ
ータは、演算装置８で演算処理され、配管断面における
二次元分布が求められる。演算装置８は、制御器８１と
演算器８２とメモリ８３を備え、測定装置７で求めた濃
度や組成に関するデータと、駆動制御装置２０から送ら
れる採取管１１の位置データとを基にして、配管断面内
の液体の濃度や組成の分布を演算し、求めたデータを記
憶しておく。また、演算装置８は、求めた配管断面内の
液体の濃度や組成の分布に基づいて、配管内を流れる液
体中に含まれる微粒子のトータルの含有量を求めること
ができる。また、各組成毎の含有量を求めることもでき
る。The data relating to the concentration and composition obtained by the measuring device 7 is processed by the calculating device 8 to obtain a two-dimensional distribution in the cross section of the pipe. The computing device 8 includes a controller 81, a computing device 82, and a memory 83, and based on data on the concentration and composition obtained by the measuring device 7 and position data of the sampling tube 11 sent from the drive control device 20, The distribution of the concentration and composition of the liquid in the cross section of the pipe is calculated, and the obtained data is stored. Further, the arithmetic unit 8 can determine the total content of the fine particles contained in the liquid flowing through the pipe based on the determined concentration and composition distribution of the liquid in the cross section of the pipe. Further, the content for each composition can also be determined.
【００４０】次に、上記測定装置を用いた微粒子の濃度
の定量測定について、図６，７のフローチャートを用い
て説明する。測定装置による配管内微粒子の測定では、
配管内において液体を採取する測定点を設定し（ステッ
プＳ１０）、設定した測定点で液体の採取を行い、採取
した液体中に含まれる微粒子の濃度ないし微粒子の組成
を求める（ステップＳ２０）。前記ステップＳ１０の測
定点のデータとステップＳ２０の濃度や組成のデータを
記憶する。これによって、配管内のある位置の濃度と組
成のデータを得ることができる（ステップＳ３０）。Next, quantitative measurement of the concentration of fine particles using the above-described measuring device will be described with reference to the flowcharts of FIGS. In the measurement of fine particles in the pipe by the measuring device,
A measurement point at which the liquid is collected in the pipe is set (Step S10), the liquid is collected at the set measurement point, and the concentration or composition of the fine particles contained in the collected liquid is determined (Step S20). The data of the measurement point in step S10 and the data of the concentration and composition in step S20 are stored. Thereby, data on the concentration and composition at a certain position in the pipe can be obtained (step S30).
【００４１】前記ステップＳ１０，２０，３０の工程を
測定点を変えながら繰り返して（ステップＳ４０）、各
測定点における濃度データや組成データを求めることに
よって、配管断面内の各所における濃度と組成のデータ
を求め、濃度分布を得ることができる（ステップＳ５
０）。The steps S10, S20, S30 are repeated while changing the measurement points (step S40), and the concentration data and the composition data at each measurement point are obtained, so that the data of the concentration and the composition at various points in the pipe cross section are obtained. To obtain the concentration distribution (step S5).
0).
【００４２】図７のフローチャートは微粒子の濃度を求
める手順（図６中ステップＳ２０）を表している。な
お、ここで示す手順は、微粒子濃度と吸収強度との関係
を、組成と微粒子濃度が既知の標準懸濁液を用いて求め
る操作を含む場合について示している。The flowchart of FIG. 7 shows a procedure for obtaining the concentration of the fine particles (step S20 in FIG. 6). In addition, the procedure shown here shows the case where the relationship between the fine particle concentration and the absorption intensity includes an operation for obtaining the relationship between the composition and the fine particle concentration using a known standard suspension.
【００４３】図７のフローチャートにおいて、はじめ
に、バルブ１３およびバルブ１５の開閉操作を行う。こ
のバルブ操作において、バルブ１３のＡを閉じるととも
にＢとＣを開いて、蓄液容器１２を測定セル１４に接続
し、また、バルブ１５のＡを閉じるとともにＢとＣを開
いて、排出管１７を測定セル１４に接続する。このバル
ブ操作によって、蓄液容器１２中の標準懸濁液が測定セ
ル１４を通って排出管１７に排出される流路が形成され
る（ステップＳ２１）。In the flowchart of FIG. 7, first, the opening and closing operations of the valves 13 and 15 are performed. In this valve operation, A of the valve 13 is closed and B and C are opened to connect the liquid storage container 12 to the measuring cell 14. Further, A of the valve 15 is closed and B and C are opened, and the discharge pipe 17 is opened. Is connected to the measurement cell 14. By this valve operation, a flow path is formed in which the standard suspension in the liquid storage container 12 is discharged to the discharge pipe 17 through the measurement cell 14 (Step S21).
【００４４】ステップＳ２１のバルブ操作の後、ペリス
タルティックポンプ１９を作動させることによって、測
定セル１４内には蓄液容器１２から組成と微粒子濃度が
既知の標準懸濁液が導入され、排出管１７から排出され
る。光源２から測定セル１４に赤外領域の光を放出す
る。測定セル１４内に導入された赤外領域光は、微粒子
によって吸収される。分光器５は、この吸収光を導入
し、微粒子の組成に対して特徴的に吸収を行う波長で分
光を行い、検出器６は吸収強度を検出して吸光度の測定
を行う。この測定によって、ある組成の微粒子に特有の
波長において、既知の濃度に対する吸収強度を求めるこ
とができる（ステップＳ２２）。測定装置７は、検出器
６で求めた吸収強度と標準懸濁液の既知の微粒子濃度を
基にして検量線を作成し、図示しない記憶手段に格納し
ておく（ステップＳ２３）。After the valve operation in step S 21, the peristaltic pump 19 is operated to introduce a standard suspension having a known composition and fine particle concentration from the liquid storage container 12 into the measuring cell 14. Is discharged from Light in the infrared region is emitted from the light source 2 to the measurement cell 14. The infrared region light introduced into the measurement cell 14 is absorbed by the fine particles. The spectroscope 5 introduces the absorbed light, performs spectroscopy at a wavelength that characteristically absorbs the composition of the fine particles, and the detector 6 detects the absorption intensity to measure the absorbance. By this measurement, the absorption intensity at a wavelength specific to the fine particles of a certain composition with respect to a known concentration can be obtained (step S22). The measuring device 7 creates a calibration curve based on the absorption intensity obtained by the detector 6 and the known fine particle concentration of the standard suspension, and stores it in storage means (not shown) (step S23).
【００４５】上記ステップＳ２１からステップＳ２３の
検量線を作成する工程を、標準懸濁液の微粒子の組成を
代えながら繰り返すことによって、複数種の組成の検量
線を作成することができる。なお、このステップＳ２１
からステップＳ２３の工程は、前記図６のステップＳ１
０より前の時点で行うことができる。By repeating the steps of preparing the calibration curves from step S21 to step S23 while changing the composition of the fine particles of the standard suspension, it is possible to prepare calibration curves of a plurality of types of compositions. This step S21
Step S23 to Step S23 are performed in Step S1 of FIG.
This can be done at times prior to zero.
【００４６】次に、バルブ１３およびバルブ１５の開閉
操作を行って管接続の切り換えを行う。このバルブ操作
では、バルブ１３のＣを閉じるとともにＡとＢを開い
て、蓄液容器１２を測定セル１からはずして採取管１１
を測定セル１４に接続し、バルブ１５のＣを閉じるとと
もにＡとＢを開いて、排出管１７をはずして配管１０側
の管１６を測定セル１４に接続する。この管接続の切り
換えによって、配管中を流れる液体は、採取管１１から
測定セル１４を通過して再び配管１０に戻る流路が形成
される（ステップＳ２４）。Next, the pipe connection is switched by opening and closing the valves 13 and 15. In this valve operation, C of the valve 13 is closed and A and B are opened, the liquid storage container 12 is detached from the measuring cell 1 and the sampling tube 11 is opened.
Is connected to the measuring cell 14, C of the valve 15 is closed and A and B are opened, the discharge pipe 17 is removed, and the pipe 16 on the pipe 10 side is connected to the measuring cell 14. By this switching of the pipe connection, a flow path is formed for the liquid flowing through the pipe from the sampling pipe 11 to pass through the measuring cell 14 and return to the pipe 10 again (Step S24).
【００４７】ステップＳ２４のバルブ操作の後、ペリス
タルティックポンプ１９を作動させることによって、測
定セル１４内には配管中を流れる液体を採取し、バルブ
１５を通過して配管１０に戻す。このとき、光源２から
測定セル１４に赤外領域の光を放出する。以下、ステッ
プＳ２５〜ステップＳ２７によって、配管内の液体中に
含まれる未知の微粒子の組成とその濃度を測定する。After the operation of the valve in step S24, the peristaltic pump 19 is operated to collect the liquid flowing through the pipe in the measuring cell 14, and return the pipe to the pipe 10 through the valve 15. At this time, light in the infrared region is emitted from the light source 2 to the measurement cell 14. Hereinafter, in steps S25 to S27, the composition and the concentration of the unknown fine particles contained in the liquid in the pipe are measured.
【００４８】測定セル１４内に導入された赤外領域光
は、液体に含まれる種々の微粒子によって吸収される。
分光器５は、この吸収光を導入して分光を行い、検出対
象の微粒子の組成に対応する波長の吸収光を選択的に取
り出す。分光器５は、吸収光の選択的な取り出しを行う
ために、検出対象の微粒子に特有の波長に分光波長を設
定する。検出器６は選別した吸収光の吸収強度を検出し
て吸光度の測定を行う。分光波長を異ならせながら吸光
度を測定することによって、吸収スペクトルを求めるこ
ともできる（ステップＳ２５）。前記ステップＳ２５に
おいて、検出対象に特有の波長で分光を行った場合に
は、検出対象の微粒子に特有の吸光度が得られる。ま
た、分光波長を異ならせながら吸収スペクトルを求めた
場合には、該吸収スペクトルから検出対象に特有の波長
位置の吸収量から検出対象の微粒子に特有の吸光度を求
めることができ、この波長位置を異ならせることによっ
て、複数種の微粒子について測定を行うことができる。The infrared light introduced into the measuring cell 14 is absorbed by various fine particles contained in the liquid.
The spectroscope 5 introduces the absorbed light to perform spectroscopy, and selectively extracts the absorbed light having a wavelength corresponding to the composition of the fine particles to be detected. The spectroscope 5 sets the spectral wavelength to a wavelength specific to the fine particles to be detected in order to selectively extract the absorbed light. The detector 6 measures the absorbance by detecting the absorption intensity of the selected absorbed light. By measuring the absorbance while changing the spectral wavelength, an absorption spectrum can also be obtained (step S25). In step S25, when spectroscopy is performed at a wavelength specific to the detection target, an absorbance specific to the fine particles to be detected is obtained. Further, when the absorption spectrum is obtained while changing the spectral wavelength, the specific absorbance of the fine particles to be detected can be obtained from the absorption amount at the wavelength position specific to the detection target from the absorption spectrum. By making them different, measurement can be performed on a plurality of types of fine particles.
【００４９】この吸光度の測定において、検出対象の微
粒子に特有の波長について吸収強度がノイズ程度の微小
値である場合には、配管内の液体中にその検出対象の微
粒子が存在しないことを示しており、また、ある波長に
ついてノイズ以上の有意な大きさの吸収強度が得られた
場合には、配管内の液体中にその検出対象の微粒子が存
在することを示している。これによって、配管内の液体
中に含まれる微粒子の組成を識別することができる。In the measurement of the absorbance, when the absorption intensity at a wavelength specific to the fine particles to be detected is a minute value of the order of noise, it indicates that the fine particles to be detected do not exist in the liquid in the pipe. In addition, when a significant absorption intensity equal to or higher than noise is obtained for a certain wavelength, it indicates that the detection target fine particles are present in the liquid in the pipe. Thereby, the composition of the fine particles contained in the liquid in the pipe can be identified.
【００５０】なお、吸収スペクトルの測定は、分光器の
設定波長を変更して測定したり、あるいは、分光器およ
び検出器を複数用いることによって行うことができる
（ステップＳ２６）。The absorption spectrum can be measured by changing the set wavelength of the spectroscope, or by using a plurality of spectroscopes and detectors (step S26).
【００５１】次に、前記ステップＳ２３で作成した検量
線を用いて微粒子の濃度測定を行う。あらかじめ求めて
おいた検量線の中から、検出対象の微粒子に対応した検
量線を選択し、ステップＳ２６で求めた吸光度に対応す
る濃度を検量線から求める。この検量線の選択は、ステ
ップＳ２６で用いた分光波長と同じ波長の検量線を用い
ることにより行うことができる。これによって、検出対
象の微粒子の濃度を求めることができる（ステップＳ２
７）。Next, the concentration of fine particles is measured using the calibration curve created in step S23. From the calibration curves obtained in advance, a calibration curve corresponding to the fine particles to be detected is selected, and the concentration corresponding to the absorbance obtained in step S26 is obtained from the calibration curve. This calibration curve can be selected by using a calibration curve having the same wavelength as the spectral wavelength used in step S26. Thereby, the concentration of the fine particles to be detected can be obtained (step S2).
7).
【００５２】前記構成および測定によって、配管内断面
内の各位置における微粒子の濃度ないし組成のデータを
得ることができる。また、これらデータを用いて、配管
面内の微粒子の濃度分布を組成毎に求めることができ
る。さらに、配管内を流れる液体の流速を求めることに
よって、配管内の微粒子のトータルの含有量を組成毎に
求めたり、該組成毎の含有量を合計することによって、
配管内の微粒子の前含有量を求めることもできる。With the above configuration and measurement, it is possible to obtain data on the concentration or composition of the fine particles at each position in the cross section inside the pipe. Using these data, the concentration distribution of the fine particles in the pipe surface can be obtained for each composition. Furthermore, by calculating the flow rate of the liquid flowing in the pipe, the total content of the fine particles in the pipe is determined for each composition, or by summing the content for each composition,
The pre-content of the fine particles in the pipe can also be determined.
【００５３】次に、図８，９，１０を用いて、測定装置
の採取部の一構成例について説明する。なお、図８，
９，１０は,それぞれ採取部を説明するための概略ブロ
ック図,一部を切り欠いた斜視図、および配管断面図で
ある。Next, an example of the configuration of the sampling unit of the measuring device will be described with reference to FIGS. Note that FIG.
9 and 10 are a schematic block diagram, a partially cutaway perspective view, and a cross-sectional view of a pipe, respectively, for explaining a sampling unit.
【００５４】図８，９において、採取管１１は、複数個
の採取口１１ａ，１１ｂ，１１ｃ，１１ｄを備えた導入
管２２を備え、各採取口は配管１０の中心（図中の一点
鎖線で示す）から外周に向かって径方向に配列されてい
る。この構成によって、配管１０内の液体は、配管断面
内の異なる位置で採取することができる。8 and 9, the sampling pipe 11 includes an introduction pipe 22 having a plurality of sampling ports 11a, 11b, 11c, and 11d, and each sampling port is located at the center of the pipe 10 (indicated by a chain line in the figures). ) Are arranged radially toward the outer periphery. With this configuration, the liquid in the pipe 10 can be collected at different positions in the cross section of the pipe.
【００５５】導入管２２は、配管１０の中心において束
ねられ、フレキシブルジョイント２３によって同心円多
層構造の配管２４に回転可能に接続され、さらに、該導
入管２２は、駆動機構２１によって回転駆動される。こ
の駆動機構２１によって、配管１０の中心軸を回転中心
として導入管２２を回転させると、図１０に示すように
径方向に配列された採取口１１ａ，１１ｂ，１１ｃ，１
１ｄは配管断面内を回転し、配管断面内の各部分での液
体の採取を行うことができる。The introduction pipe 22 is bundled at the center of the pipe 10 and rotatably connected to a pipe 24 having a concentric multilayer structure by a flexible joint 23. The introduction pipe 22 is driven to rotate by a driving mechanism 21. When the introduction pipe 22 is rotated by the drive mechanism 21 about the center axis of the pipe 10 as the center of rotation, the sampling ports 11a, 11b, 11c, 1 arranged in the radial direction as shown in FIG.
1d rotates in the cross section of the pipe, and liquid can be collected at each part in the cross section of the pipe.
【００５６】駆動機構２１は、例えば、モーター等の駆
動装置２１ａ，駆動を伝達するためのギヤ機構２１ｂ，
配管１０内の採取管１１の駆動を伝達するための伝達機
構２１ｄ，および配管１０内の採取口の位置を求めるた
めの位置検出器２１ｃを備える。また、複数個の採取口
と接続する配管２４は、多方バルブ２５およびペリスタ
ルティックポンプ２６を介して測定セルないし分光器５
に接続され、採取した液体の測定を行う。The driving mechanism 21 includes, for example, a driving device 21a such as a motor, a gear mechanism 21b for transmitting driving,
A transmission mechanism 21d for transmitting the drive of the sampling pipe 11 in the pipe 10 and a position detector 21c for determining the position of the sampling port in the pipe 10 are provided. A pipe 24 connected to a plurality of sampling ports is connected to a measuring cell or spectrometer 5 through a multi-way valve 25 and a peristaltic pump 26.
Is connected to the device and measures the collected liquid.
【００５７】駆動制御装置２０は、駆動機構２１，多方
バルブ２５およびペリスタルティックポンプ２６を制御
することによって、配管１０の断面内の液体を選別して
採取し、測定することができる。By controlling the drive mechanism 21, the multi-way valve 25, and the peristaltic pump 26, the drive control device 20 can select and collect and measure liquid in the cross section of the pipe 10.
【００５８】なお、採取口１１ａ，１１ｂ，１１ｃ，１
１ｄの個数や配置間隔は、配管１０の内径、配管断面内
の二次元分布の精度、採取管１１の配置による配管１０
内の液体の流れに及ぼす影響等に応じて設定することが
できる。The sampling ports 11a, 11b, 11c, 1
The number and arrangement interval of 1 d are determined by the inner diameter of the pipe 10, the accuracy of the two-dimensional distribution in the cross section of the pipe, and the arrangement of the sampling pipe 11.
It can be set according to the effect on the flow of the liquid in the inside.
【００５９】また、駆動機構による採取管１１の回転速
度は、採取した液体の濃度測定に要する時間や測定点の
個数等に応じて設定することができる。The rotation speed of the collection tube 11 by the driving mechanism can be set according to the time required for measuring the concentration of the collected liquid, the number of measurement points, and the like.
【００６０】以下、濃度測定における別の構成につい
て、図１１〜図２５を用いて説明する。図１１に示す光
学系は反射鏡４ｂを用いたものであり、図５に示す構成
例中の光学系に代えて構成することができる。前記図
５，１１に示した構成例は、透過光をグレーティングを
用いた分光器によって分光する例であるが、図１２，１
３に示すようにプリズムを用いた分光器で構成すること
もできる。図１２はレンズ系とプリズムを用いた光学系
５ｂによる構成例であり、プリズム５ｂ１で分光した光
をスリット５ｂ２で絞って検出器６に導くものである。
また、図１３は、反射鏡４ｂとプリズム５ｂ１を用いた
光学系５ｂによる構成例であり、図１２と同様にプリズ
ム５ｂ１で分光した光をスリット５ｂ２で絞って検出器
６に導く。Hereinafter, another configuration in the density measurement will be described with reference to FIGS. The optical system shown in FIG. 11 uses the reflecting mirror 4b, and can be configured in place of the optical system in the configuration example shown in FIG. The configuration examples shown in FIGS. 5 and 11 are examples in which transmitted light is separated by a spectroscope using a grating.
As shown in FIG. 3, a spectroscope using a prism can be used. FIG. 12 shows a configuration example of an optical system 5b using a lens system and a prism, in which light split by a prism 5b1 is narrowed by a slit 5b2 and guided to a detector 6.
FIG. 13 shows an example of the configuration of the optical system 5b using the reflecting mirror 4b and the prism 5b1, and the light separated by the prism 5b1 is narrowed by the slit 5b2 and guided to the detector 6 as in FIG.
【００６１】図１４〜図１７は干渉光を用いて赤外スペ
クトルを求める構成であり、ＭＣＴ検出器を用いて得た
測定信号をフーリエ変換する構成例を図１４，１５に示
し、フィルターを用いて特定の波長域のみを通過させる
構成例を図１６，１７に示す。FIGS. 14 to 17 show a configuration for obtaining an infrared spectrum using interference light. FIGS. 14 and 15 show examples of a configuration for Fourier transforming a measurement signal obtained using an MCT detector. 16 and 17 show a configuration example in which only a specific wavelength band is passed.
【００６２】図１４，図１５の構成例は、レンズ系４ａ
あるいは反射鏡４ｂを介して得られた光をＭＣＴ検出器
８に直接に導く構成であり、測定装置７においてＭＣＴ
検出器８で得られた測定信号をフーリエ変換して、赤外
スペクトルを求める。また、図１６，図１７の構成例
は、レンズ系４ａあるいは反射鏡４ｂを介して得られた
光をバンドパスフィルター５ｃに通し、該バンドパスフ
ィルター５ｃで設定される特定波長域のみを選択的に通
過させ検出器６に導く構成である。FIGS. 14 and 15 show an example of the lens system 4a.
Alternatively, the light obtained through the reflecting mirror 4 b is directly guided to the MCT detector 8.
The measurement signal obtained by the detector 8 is Fourier-transformed to obtain an infrared spectrum. 16 and 17, the light obtained through the lens system 4a or the reflecting mirror 4b is passed through a band-pass filter 5c, and only a specific wavelength range set by the band-pass filter 5c is selectively used. To the detector 6.
【００６３】図１８〜図２５に示す構成例は、試料Ｓか
らの反射光を測定光とする場合である。図１８に示す構
成例は、光源２からの光をハーフミラー４Ａを介して試
料Ｓに照射し、試料Ｓで吸収が行われ放出される反射光
を再びハーフミラー４Ａを介して分光器５に導いて分光
する例であり、図１９に示す構成例は、光源２からの光
をカセグレン式対物鏡４Ｂを介して試料Ｓに照射し、試
料Ｓから反射される吸収光を分光器５に導いて分光する
例である。The configuration examples shown in FIGS. 18 to 25 are for the case where the reflected light from the sample S is used as the measuring light. In the configuration example shown in FIG. 18, the light from the light source 2 is applied to the sample S via the half mirror 4A, and the reflected light absorbed and emitted by the sample S is returned to the spectroscope 5 via the half mirror 4A again. In the example shown in FIG. 19, the light from the light source 2 is applied to the sample S via the Cassegrain-type objective mirror 4B, and the absorbed light reflected from the sample S is guided to the spectroscope 5. This is an example of spectroscopy.
【００６４】また、図２０，２１に示すようにプリズム
を用いた構成とすることもできる。図２０はハーフミラ
ー４Ａとプリズム５ｂ１を用いた光学系５ｂによる構成
例であり、プリズム５ｂ１で分光した光をスリット５ｂ
２で絞って検出器６に導く。また、図２１は、カセグレ
ン式対物鏡４Ｂとプリズム５ｂ１を用いた光学系５ｂに
よる構成例であり、図２０と同様にプリズム５ｂ１で分
光した光をスリット５ｂ２で絞って検出器６に導く。Further, a configuration using a prism as shown in FIGS. FIG. 20 shows a configuration example of an optical system 5b using a half mirror 4A and a prism 5b1, and the light split by the prism 5b1 is slit 5b.
The light is squeezed at 2 and guided to the detector 6. FIG. 21 shows an example of the configuration of an optical system 5b using a Cassegrain-type objective mirror 4B and a prism 5b1, and similarly to FIG.
【００６５】図２２〜図２５は干渉光を用いて赤外スペ
クトルを求める構成であり、ＭＣＴ検出器を用いて得た
測定信号をフーリエ変換する構成例を図２２，２３に示
し、フィルターを用いて特定の波長域のみを通過させる
構成例を図２４，２５に示す。図２２，図２３の構成例
は、ハーフミラー４Ａあるいはカセグレン式対物鏡４Ｂ
を介して得られた光をＭＣＴ検出器８に直接に導く構成
であり、測定装置７においてＭＣＴ検出器８で得られた
測定信号をフーリエ変換して、赤外スペクトルを求め
る。また、図２４，図２５の構成例は、ハーフミラー４
Ａあるいはカセグレン式対物鏡４Ｂを介して得られた光
をバンドパスフィルター５ｃに通し、該バンドパスフィ
ルター５ｃで設定される特定波長域のみを選択的に通過
させ検出器６に導く構成である。FIGS. 22 to 25 show a configuration for obtaining an infrared spectrum using interference light. FIGS. 22 and 23 show configuration examples for performing a Fourier transform on a measurement signal obtained using an MCT detector. 24 and 25 show a configuration example in which only a specific wavelength band is passed. 22 and 23 show a half mirror 4A or a Cassegrain type objective mirror 4B.
In this configuration, the light obtained via the MCT is directly guided to the MCT detector 8, and the measurement signal obtained by the MCT detector 8 is subjected to Fourier transform in the measuring device 7 to obtain an infrared spectrum. In addition, the configuration examples of FIGS.
In this configuration, light obtained through the A or Cassegrain type objective mirror 4B is passed through a bandpass filter 5c, and only a specific wavelength range set by the bandpass filter 5c is selectively passed to the detector 6.
【００６６】以下に、微粒子の組成毎に異なる吸収波長
の一例について説明する。例えば、ＣａＣＯ3 の微粒子
の場合には、１４２０ｃｍ-1付近にＣＯ3 2- の縮重伸縮
振動の吸収があり、ＣａＳＯ4 の微粒子の場合には、１
１３０ｃｍ-1付近にＳＯ4 2-の縮重伸縮振動の吸収があ
る。図２６はＣａＣＯ3 の懸濁液の赤外吸収スペクトル
の図であり、顕微赤外装置を用いてフーリエ変換により
求めたスペクトルデータである。図２７の赤外吸収スペ
クトルから、ＣａＣＯ3 を０．２ｍｏｌ／ｌ溶存する水
溶液の１４２０ｃｍ-1付近のＣＯ3 2- の縮重伸縮振動の
吸収による吸収量は３７であり、Ｈ2Ｏ の１４２０ｃｍ
-1付近の吸収量は２１．５であるから、図２７に示す検
量線を求めることができる。Hereinafter, an example of an absorption wavelength that differs depending on the composition of the fine particles will be described. For example, in the case of fine particles of CaCO 3 , there is absorption of degenerate stretching vibration of CO 3 2- in the vicinity of 1420 cm −1 , and in the case of fine particles of CaSO 4 , 1
At around 130 cm -1, there is absorption of SO 4 2- degenerate stretching vibration. FIG. 26 is a diagram of an infrared absorption spectrum of a suspension of CaCO 3 , which is spectrum data obtained by Fourier transform using a microscopic infrared device. From the infrared absorption spectrum of FIG. 27, the absorption amount due to the absorption of the degenerate stretching vibration of CO 3 2- around 1420 cm −1 of the aqueous solution in which CaCO 3 is dissolved at 0.2 mol / l is 37, and the absorption amount of H 2 O is 1420 cm −1.
Since the absorption amount near -1 is 21.5, the calibration curve shown in FIG. 27 can be obtained.
【００６７】従って、図２７の検量線を用いることによ
って、吸収量からＣａＣＯ3 の微粒子の濃度を求めるこ
とができる。また、他の組成の微粒子についても同様に
検量線を求めておき、微粒子に対応する波長について吸
収量を求めることによって、各組成の微粒子の濃度を求
めることができる。Therefore, by using the calibration curve of FIG. 27, the concentration of CaCO 3 fine particles can be obtained from the amount of absorption. In addition, a calibration curve is similarly obtained for fine particles of other compositions, and the concentration of the fine particles of each composition can be obtained by obtaining the absorption amount at a wavelength corresponding to the fine particles.
【００６８】また、図示していないが、ＣａＳＯ4 の微
粒子についても同様にして赤外吸収スペクトルおよび検
量線を求めることができる。Although not shown, an infrared absorption spectrum and a calibration curve can be similarly obtained for the fine particles of CaSO 4 .
【００６９】なお、本発明による微粒子の濃度測定で
は、吸収強度は、微粒子の組成によって生じるため、微
粒子の粒子径による影響はない。In the measurement of the concentration of the fine particles according to the present invention, the absorption intensity is caused by the composition of the fine particles, and is not affected by the particle diameter of the fine particles.
【００７０】本発明の実施形態によれば、配管内の液体
中に含まれる微粒子の濃度を組成毎に求めることがで
き、配管断面内の微粒子の濃度分布を組成毎に求めるこ
とができる。According to the embodiment of the present invention, the concentration of the fine particles contained in the liquid in the pipe can be obtained for each composition, and the concentration distribution of the fine particles in the cross section of the pipe can be obtained for each composition.
【００７１】また、本発明の実施形態によれば、配管内
の微粒子の組成毎の含有量あるいは前含有量を求めるこ
とができる。Further, according to the embodiment of the present invention, it is possible to obtain the content or the previous content of the fine particles in the pipe for each composition.
【００７２】[0072]
【発明の効果】以上説明したように、本発明の流水中の
微粒子の濃度定量方法によれば、流水中の微粒子の濃度
を組成毎に定量測定することができ、また、本発明の流
水中の微粒子の濃度定量装置によれば、１つの装置で流
水中の微粒子の濃度を組成毎に定量測定することができ
る。As described above, according to the method for determining the concentration of fine particles in running water of the present invention, the concentration of fine particles in running water can be quantitatively measured for each composition. According to the apparatus for determining the concentration of fine particles, the concentration of fine particles in flowing water can be quantitatively measured for each composition by one apparatus.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明の微粒子の測定方法を説明するための図
である。FIG. 1 is a view for explaining a method for measuring fine particles according to the present invention.
【図２】本発明の微粒子の測定方法に使用する検量線の
作成を説明するための概略図である。FIG. 2 is a schematic diagram for explaining creation of a calibration curve used in the method for measuring fine particles of the present invention.
【図３】本発明の検量線を用いた定量方法を説明するた
めの概略図である。FIG. 3 is a schematic diagram for explaining a quantification method using a calibration curve of the present invention.
【図４】本発明の検量線を用いた定量方法を説明するた
めの概略図である。FIG. 4 is a schematic diagram for explaining a quantification method using a calibration curve of the present invention.
【図５】本発明の微粒子の測定方法を適用することがで
きる装置の第１の概略図である。FIG. 5 is a first schematic diagram of an apparatus to which the method for measuring fine particles of the present invention can be applied.
【図６】本発明の微粒子の測定装置を用いた微粒子の濃
度の定量測定を説明するためのフローチャートである。FIG. 6 is a flowchart for explaining quantitative measurement of the concentration of fine particles using the fine particle measuring apparatus of the present invention.
【図７】本発明の微粒子の測定装置を用いた微粒子の濃
度を求める手順を説明するためのフローチャートであ
る。FIG. 7 is a flowchart illustrating a procedure for obtaining the concentration of fine particles using the fine particle measuring device of the present invention.
【図８】本発明の測定装置の採取部の一構成例について
説明するための概略ブロック図である。FIG. 8 is a schematic block diagram for explaining one configuration example of a sampling unit of the measuring device of the present invention.
【図９】本発明の測定装置の採取部の一構成例について
説明するための一部を切り欠いた斜視図である。FIG. 9 is a partially cutaway perspective view for explaining one configuration example of a sampling unit of the measuring apparatus of the present invention.
【図１０】本発明の測定装置の採取部の一構成例につい
て説明するための配管断面図である。FIG. 10 is a cross-sectional view of a pipe for describing an example of a configuration of a sampling unit of the measuring device of the present invention.
【図１１】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第２の概略図である。FIG. 11 is a second schematic diagram of an apparatus to which the method for determining the concentration of fine particles of the present invention can be applied.
【図１２】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第３の概略図である。FIG. 12 is a third schematic diagram of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１３】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第４の概略図である。FIG. 13 is a fourth schematic view of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１４】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第５の概略図である。FIG. 14 is a fifth schematic view of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１５】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第６の概略図である。FIG. 15 is a sixth schematic diagram of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１６】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第７の概略図である。FIG. 16 is a seventh schematic diagram of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１７】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第８の概略図である。FIG. 17 is an eighth schematic view of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１８】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第９の概略図である。FIG. 18 is a ninth schematic view of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図１９】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１０の概略図である。FIG. 19 is a tenth schematic view of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図２０】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１１の概略図である。FIG. 20 is an eleventh schematic view of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図２１】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１２の概略図である。FIG. 21 is a twelfth schematic diagram of an apparatus to which the method for determining the concentration of fine particles of the present invention can be applied.
【図２２】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１３の概略図である。FIG. 22 is a thirteenth schematic diagram of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図２３】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１４の概略図である。FIG. 23 is a fourteenth schematic diagram of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図２４】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１５の概略図である。FIG. 24 is a fifteenth schematic view of an apparatus to which the method for determining the concentration of fine particles of the present invention can be applied.
【図２５】本発明の微粒子の濃度定量方法を適用するこ
とができる装置の第１６の概略図である。FIG. 25 is a sixteenth schematic diagram of an apparatus to which the method for quantifying the concentration of fine particles of the present invention can be applied.
【図２６】本発明の微粒子の濃度定量によるＣａＣＯ3
の懸濁液の赤外吸収スペクトルの図である。FIG. 26 shows CaCO 3 by concentration determination of the fine particles of the present invention.
FIG. 4 is a diagram of an infrared absorption spectrum of the suspension of FIG.
【図２７】本発明の微粒子の濃度定量によるＣａＣＯ3
の懸濁液の赤外吸収スペクトルから求めた検量線の図で
ある。FIG. 27 shows CaCO 3 by concentration determination of fine particles of the present invention.
FIG. 4 is a diagram of a calibration curve obtained from an infrared absorption spectrum of the suspension of Example 1.
１ 濃度定量装置 ２ 光源 ３，４ 光学系 ５ 分光器 ６ 検出器 ７ 測定装置 １０ 配管 １１ 採取管 １１ａ，１１ｂ，１１ｃ，１１ｄ 採取口 １２ 蓄液容器 １３，１５，２５ バルブ １４ 測定セル １６ 管 １７ 排出管 １８ 撹拌装置 １９，２６ ペリスタルティックポンプ ２０ 駆動制御装置 ２１ 駆動機構 ２２ 導入管 ２３ フレキシブルジョイント ２４ 同心円多層配管 DESCRIPTION OF SYMBOLS 1 Concentration determination apparatus 2 Light source 3, 4 Optical system 5 Spectrometer 6 Detector 7 Measuring apparatus 10 Pipe 11 Sampling pipe 11a, 11b, 11c, 11d Sampling port 12 Liquid storage container 13, 15, 25 Valve 14 Measurement cell 16 Tube 17 Discharge pipe 18 Stirrer 19, 26 Peristaltic pump 20 Drive controller 21 Drive mechanism 22 Inlet pipe 23 Flexible joint 24 Concentric multilayer pipe
Claims (9)
選別して採取する行程と、採取した液体中の微粒子に赤
外領域の光を入射し、得られる透過光又は反射光から波
長毎に吸収強度を測定する工程と、既知組成の微粒子の
濃度と赤外領域光の吸収強度の関係を用いて、測定した
吸収強度から液体中の微粒子濃度を求める工程とを含
み、微粒子の配管内位置と微粒子の組成および濃度を求
めることを特徴とする配管内微粒子の測定方法。1. A process of selecting and collecting a liquid in a pipe according to a position in the pipe, and irradiating light in an infrared region to fine particles in the collected liquid and obtaining transmitted light or reflected light. Measuring the absorption intensity for each wavelength, and using the relationship between the concentration of the particles of the known composition and the absorption intensity of the infrared region light, including the step of determining the concentration of the particles in the liquid from the measured absorption intensity, A method for measuring fine particles in a pipe, comprising determining the position in the pipe and the composition and concentration of the fine particles.
ける微粒子濃度から、配管内の微粒子の濃度分布を求め
ることを特徴とする請求項１記載の配管内微粒子の測定
方法。2. The method for measuring fine particles in a pipe according to claim 1, wherein a concentration distribution of the fine particles in the pipe is obtained from a position in the pipe from which the liquid is collected and a fine particle concentration at the position.
濃度が既知の微粒子から得られる赤外領域光の吸収強度
を測定し、該吸収強度を用いて検量線により定めること
を特徴とする請求項１、又は２記載の配管内微粒子の測
定方法。3. The relationship between the concentration of the fine particles and the absorption intensity is as follows:
3. The method for measuring fine particles in a pipe according to claim 1, wherein the absorption intensity of infrared region light obtained from the fine particles having a known concentration is measured, and the absorption intensity is determined by a calibration curve.
選別して採取する採取手段と、採取した液体に赤外領域
光を入射する光源と、吸収光の吸収強度を波長毎に測定
する吸収強度測定手段と、既知組成の微粒子濃度と赤外
領域光の吸収強度の関係を用いて、前記吸収強度測定手
段によって求めた吸収強度から配管内の微粒子濃度を求
める測定手段とを備えたことを特徴とする配管内微粒子
の測定装置。4. A collecting means for selecting and collecting a liquid in a pipe according to a position in the pipe, a light source for irradiating infrared light to the collected liquid, and an absorption intensity of absorbed light for each wavelength. An absorption intensity measuring means for measuring, and a measuring means for obtaining the concentration of fine particles in the pipe from the absorption intensity determined by the absorption intensity measuring means, using a relationship between the concentration of the fine particles of a known composition and the absorption intensity of infrared region light An apparatus for measuring fine particles in a pipe.
と濃度が既知の微粒子を含む液体とを選択的に導入する
手段を備え、前記測定手段は、組成と濃度が既知の微粒
子を含む液体を用いて、組成と濃度が既知の微粒子に対
する波長毎の吸収強度を求める手段を備えることを特徴
とする請求項４記載の配管内微粒子の測定装置。5. The collection means includes means for selectively introducing flowing water in a pipe and a liquid containing fine particles having a known composition and concentration, and the measuring means comprises a fine particle having a known composition and concentration. 5. The apparatus for measuring fine particles in a pipe according to claim 4, further comprising means for obtaining absorption intensity at each wavelength for fine particles having a known composition and concentration using a liquid containing the liquid.
位置と該位置における微粒子濃度とから、配管内の微粒
子の濃度分布を求める手段を備えることを特徴とする請
求項４、又は５記載の配管内微粒子の測定装置。6. The apparatus according to claim 4, wherein said measuring means includes means for obtaining a concentration distribution of the fine particles in the pipe from a position in the pipe from which the liquid is collected and a concentration of the fine particles at the position. For measuring fine particles in piping.
と濃度が既知の微粒子を含む液体とを選択的に導入する
手段を備え、前記測定手段は、組成と濃度が既知の微粒
子を含む液体を用いて、組成と濃度が既知の微粒子に対
する波長毎の吸収強度を求める手段を備えることを特徴
とする請求項４、５又は６記載の配管内微粒子の測定装
置。7. The collecting means includes means for selectively introducing a liquid in a pipe and a liquid containing fine particles having a known composition and concentration, and the measuring means comprises a fine particle having a known composition and concentration. 7. The apparatus for measuring fine particles in a pipe according to claim 4, further comprising means for obtaining absorption intensity at each wavelength for fine particles having a known composition and concentration using a liquid containing the liquid.
導入口を、配管内の径方向に配置したことを特徴とする
請求項４、５、６又は７記載の配管内微粒子の測定装
置。8. The apparatus for measuring fine particles in a pipe according to claim 4, wherein the collecting means has a plurality of inlets for introducing a liquid arranged in a radial direction in the pipe. .
方向に回転することを特徴とする請求項７記載の配管内
微粒子の測定装置。9. The apparatus for measuring fine particles in a pipe according to claim 7, wherein the plurality of inlets rotate in a circumferential direction in the pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5112997A JPH10232203A (en) | 1997-02-20 | 1997-02-20 | Method and device for measuring particulate in piping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5112997A JPH10232203A (en) | 1997-02-20 | 1997-02-20 | Method and device for measuring particulate in piping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10232203A true JPH10232203A (en) | 1998-09-02 |
Family
ID=12878211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5112997A Withdrawn JPH10232203A (en) | 1997-02-20 | 1997-02-20 | Method and device for measuring particulate in piping |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10232203A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11352067A (en) * | 1998-05-19 | 1999-12-24 | Agrovision Ab | Component concentration determining apparatus and component uniformity determining apparatus |
| WO2003016881A3 (en) * | 2001-08-13 | 2004-01-22 | Particle Measuring Syst | Spectroscopic measurement of the chemical constituents of a cmp slurry |
| JP2012251998A (en) * | 2011-05-10 | 2012-12-20 | Mitsubishi Chemicals Corp | Measurement device for solvent insoluble matter of coal tar or coal tar pitch type |
| JP2013231638A (en) * | 2012-04-27 | 2013-11-14 | Mitsubishi Heavy Ind Ltd | Concentration measuring apparatus and denitrification device |
-
1997
- 1997-02-20 JP JP5112997A patent/JPH10232203A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11352067A (en) * | 1998-05-19 | 1999-12-24 | Agrovision Ab | Component concentration determining apparatus and component uniformity determining apparatus |
| JP4647046B2 (en) * | 1998-05-19 | 2011-03-09 | マルバーン インストゥルメンツ リミテッド | Component concentration determination apparatus, component concentration determination method, and pharmaceutical preparation method |
| WO2003016881A3 (en) * | 2001-08-13 | 2004-01-22 | Particle Measuring Syst | Spectroscopic measurement of the chemical constituents of a cmp slurry |
| JP2012251998A (en) * | 2011-05-10 | 2012-12-20 | Mitsubishi Chemicals Corp | Measurement device for solvent insoluble matter of coal tar or coal tar pitch type |
| JP2013231638A (en) * | 2012-04-27 | 2013-11-14 | Mitsubishi Heavy Ind Ltd | Concentration measuring apparatus and denitrification device |
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