JPH10153586A - Ultrasonic probe and manufacture thereof - Google Patents
Ultrasonic probe and manufacture thereofInfo
- Publication number
- JPH10153586A JPH10153586A JP31333796A JP31333796A JPH10153586A JP H10153586 A JPH10153586 A JP H10153586A JP 31333796 A JP31333796 A JP 31333796A JP 31333796 A JP31333796 A JP 31333796A JP H10153586 A JPH10153586 A JP H10153586A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- protective plate
- ultrasonic probe
- linbo
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、被検体の内部ある
いは表面に超音波の送信あるいは受信を行う超音波探触
子の製造法及び超音波探触子に係り、特に、高温雰囲気
下で使用するのに好適な超音波探触子の製造法及び超音
波探触子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ultrasonic probe for transmitting or receiving an ultrasonic wave to or from a surface of a subject and an ultrasonic probe, and particularly to a method for using the probe in a high-temperature atmosphere. The present invention relates to a method for manufacturing an ultrasonic probe and an ultrasonic probe suitable for performing the method.
【０００２】[0002]
【従来の技術】近年、発電プラントや化学プラント等の
工業プラントで、圧力容器や配管等の構造材の探傷や減
肉測定などの非破壊検査に、超音波探触子を用いた超音
波検査法は幅広く用いられている。2. Description of the Related Art In recent years, in an industrial plant such as a power plant or a chemical plant, an ultrasonic inspection using an ultrasonic probe is carried out for non-destructive inspection such as flaw detection and measurement of thinning of structural materials such as pressure vessels and pipes. The law is widely used.
【０００３】図１は垂直探傷用の従来の超音波探触子１
０の構造図を示している。振動子１２の前面には外環境
への振動子の直接接触を防ぎ振動子を保護する保護板１
１が設置され、また、振動子１２の背面には振動子のパ
ルス振動が長く尾を引くのを防ぐためのダンパ材１４が
設置される。コネクタ１７，リード線１６を介して、ケ
ース１５の外部から超音波探傷器などによって数十から
数百Ｖの高電圧パルスが振動子１２の両面に印加される
と、振動子１２は電気信号を超音波に変換し、接触媒質
２を通して被検体１内部に超音波を送信するとともに、
逆に超音波が被検体１内部から接触媒質２を通して振動
子１２に入射すると、振動子１２は超音波を電気信号に
変換し、リード線１６，コネクタ１７を介して、変換し
た電気信号をケース１５の外部に送信する。FIG. 1 shows a conventional ultrasonic probe 1 for vertical flaw detection.
0 shows a structural diagram. A protection plate 1 is provided on the front surface of the vibrator 12 to prevent direct contact of the vibrator with the external environment and protect the vibrator.
1 is provided, and a damper member 14 is provided on the back of the vibrator 12 to prevent the pulse vibration of the vibrator from leaving a long tail. When a high voltage pulse of several tens to several hundreds of volts is applied to both surfaces of the vibrator 12 from the outside of the case 15 via the connector 17 and the lead wire 16 by an ultrasonic flaw detector or the like, the vibrator 12 outputs an electric signal. While converting into ultrasonic waves and transmitting ultrasonic waves into the subject 1 through the couplant 2,
Conversely, when the ultrasonic wave enters the vibrator 12 from inside the subject 1 through the couplant 2, the vibrator 12 converts the ultrasonic wave into an electric signal, and converts the converted electric signal through the lead wire 16 and the connector 17 into a case. 15 outside.
【０００４】従来の超音波探触子の製造法では、例え
ば、振動子１２はセラミックス振動子のＰＺＴ、保護板
１１はベークライトとして、両者を接合材１３となるエ
ポキシ系接着剤を用いて、室温で接合する方法をとって
いた。In a conventional method of manufacturing an ultrasonic probe, for example, the vibrator 12 is made of PZT of a ceramic vibrator, the protective plate 11 is made of bakelite, and both are made of an epoxy-based adhesive serving as a bonding material 13 at room temperature. The method of joining was adopted.
【０００５】[0005]
【発明が解決しようとする課題】しかし、上記従来の超
音波探触子の製造法による超音波探触子は、プラント配
管などの高温部材の検査，計測を行う場合、次のような
問題点があった。However, the ultrasonic probe manufactured by the above-described conventional ultrasonic probe manufacturing method has the following problems when inspecting and measuring high-temperature members such as plant piping. was there.
【０００６】すなわち、接合材１３のエポキシ系接着剤
は耐熱性がなく、熱により接合強度が低下するため、振
動子１２と保護板１１が剥離して超音波が振動子から被
検体内部に伝搬できなくなる。このため、１００℃以上
となる高温被検体の検査は定検時にプラントを停止して
被検体温度が室温に戻った後、実施するしか方法はな
く、プラント運転中に検査が実施できなかった。That is, since the epoxy adhesive of the bonding material 13 has no heat resistance and the bonding strength is reduced by heat, the vibrator 12 and the protective plate 11 are separated, and ultrasonic waves propagate from the vibrator into the subject. become unable. For this reason, the inspection of a high-temperature specimen having a temperature of 100 ° C. or higher can only be performed after the plant is stopped at the regular inspection and the temperature of the specimen returns to room temperature, and the inspection cannot be performed during the operation of the plant.
【０００７】また、高温部材の減肉監視や亀裂の進展監
視といったプラント運転中の長時間の監視用センサとし
て、超音波探触子が使用できないという問題があった。Another problem is that the ultrasonic probe cannot be used as a long-term monitoring sensor during plant operation, such as monitoring thinning of a high-temperature member or monitoring crack propagation.
【０００８】さらに、耐熱性を有する接合材１３は、無
機接着剤などの高温用接着剤，高融点半田やろう材が挙
げられるが、これらの接合材を用いて振動子と保護板を
接合する際には熱処理が必要なため、接合時に、振動子
１２と保護板１１の熱膨張係数の差により接合部が剥離
したり、又振動子１２に亀裂が発生するという問題が生
じていた。Further, the bonding material 13 having heat resistance includes a high-temperature adhesive such as an inorganic bonding agent, a high-melting-point solder or a brazing material, and the vibrator and the protective plate are bonded using these bonding materials. In such a case, since heat treatment is required, there has been a problem in that, at the time of joining, the joined portion is separated due to a difference in thermal expansion coefficient between the vibrator 12 and the protective plate 11 or a crack is generated in the vibrator 12.
【０００９】本発明の目的は、振動子と保護板の接合の
際に、接合部が剥離したり振動子に亀裂が発生しない超
音波探触子の製造法、及び、高温被検体に対しても、プ
ラントの運転中に検査が実施できるとともに、プラント
運転中の長時間の監視用センサとして使用できる超音波
探触子を提供することにある。An object of the present invention is to provide a method of manufacturing an ultrasonic probe in which a joint is not separated or a crack is not generated in a transducer when the transducer and a protective plate are joined, and a method for producing a high-temperature specimen. Another object of the present invention is to provide an ultrasonic probe that can be inspected during operation of a plant and can be used as a sensor for monitoring for a long time during operation of the plant.
【００１０】[0010]
【課題を解決するための手段】上記目的を達成するた
め、本発明は、被検体の内部あるいは表面に超音波の送
信または受信を行う超音波探触子の製造法で、高キュリ
ー点単結晶振動子LiNbO3とＬｉＮｂＯ3 にほぼ一致した
熱膨張係数を持つ保護板の接合面にそれぞれ金薄膜層を
形成した後、ＬｉＮｂＯ3 と保護板の間にろう材を挿入
し、ろう材を加熱溶融後、１０℃／分以下の冷却速度で
徐冷し、ＬｉＮｂＯ3 と保護板をろう付け接合する。In order to achieve the above object, the present invention relates to a method for manufacturing an ultrasonic probe for transmitting or receiving an ultrasonic wave to or from a surface of a subject. After forming a gold thin film layer on the bonding surface of the protection plate having a thermal expansion coefficient substantially equal to that of the oscillators LiNbO 3 and LiNbO 3 , a brazing material is inserted between the LiNbO 3 and the protection plate, and the brazing material is heated and melted. After slowly cooling at a cooling rate of 10 ° C./min or less, the LiNbO 3 and the protection plate are joined by brazing.
【００１１】また、被検体の内部あるいは表面に超音波
の送信または受信を行う超音波探触子で、高キュリー点
単結晶振動子のＬｉＮｂＯ3とＬｉＮｂＯ3とほぼ一致し
た熱膨張係数を持つ保護板の接合面にそれぞれ形成した
金薄膜層にて、ＬｉＮｂＯ3と保護板をろう付けにより
重畳した構成とする。An ultrasonic probe for transmitting or receiving an ultrasonic wave inside or on a surface of an object, and has a thermal expansion coefficient almost identical to that of a high Curie point single crystal oscillator LiNbO 3 and LiNbO 3. LiNbO 3 and a protection plate are superposed by brazing on the gold thin film layers formed on the bonding surfaces of the plates.
【００１２】本発明の超音波探触子の製造法では、振動
子に１２１０℃の高キュリー点を持つＬｉＮｂＯ3 を、
接合材に５００℃以上の高融点を持つろう材を用いてお
り、さらに振動子と保護板の接合面にろう材とのぬれ性
が良好な金薄膜層をそれぞれ形成することにより、接合
時に、振動子と保護板が剥離しない強固なろう付け接合
層が形成できる。加えて、接合時にろう材を加熱溶融
後、１０℃／分以下の冷却速度で徐冷して振動子と保護
板を接合することにより、冷却時に振動子にかかる熱衝
撃を緩和することができるため、上記接合時における振
動子の亀裂発生が抑制できる。In the method for manufacturing an ultrasonic probe according to the present invention, LiNbO 3 having a high Curie point of 1210 ° C.
By using a brazing material having a high melting point of 500 ° C. or more as the joining material, and further forming a gold thin film layer having good wettability with the brazing material on the joining surface between the vibrator and the protective plate, at the time of joining, A strong brazing joint layer in which the vibrator and the protective plate do not peel off can be formed. In addition, by heating and melting the brazing material at the time of joining, and gradually cooling the brazing material at a cooling rate of 10 ° C./min or less and joining the vibrator and the protective plate, the thermal shock applied to the vibrator during cooling can be reduced. Therefore, the occurrence of cracks in the vibrator during the joining can be suppressed.
【００１３】また、本発明の超音波探触子で、高キュリ
ー点単結晶振動子のＬｉＮｂＯ3 とＬｉＮｂＯ3 とほぼ
一致した熱膨張係数を持つ保護板の接合面にそれぞれ形
成した金薄膜層で、ＬｉＮｂＯ3 と保護板をろう付けに
より重畳した構成となっており、高温雰囲気下でも振動
子と保護板が剥離しない強固なろう付け接合層を形成す
ることができる。このため、上記超音波探触子は、高温
の被検体に対しても、プラントの運転中に検査が実施で
きるとともに、プラント運転中の長時間の監視用センサ
として使用できる。Further, in the ultrasonic probe of the present invention, a high-Curie point single crystal vibrator LiNbO 3 and a gold thin film layer formed on a bonding surface of a protective plate having a thermal expansion coefficient substantially coincident with LiNbO 3 are used. , LiNbO 3 and the protection plate are superposed by brazing, so that a strong brazing bonding layer in which the vibrator and the protection plate do not peel off even in a high-temperature atmosphere can be formed. For this reason, the ultrasonic probe can perform an inspection even on a high-temperature subject during operation of the plant and can be used as a long-time monitoring sensor during operation of the plant.
【００１４】[0014]
【発明の実施の形態】以下、図面を参照して本発明の実
施例を説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１５】図２は本発明の超音波探触子の製造法によ
る超音波探触子の構造を示す説明図であり、振動子１２
と保護板１１及びその接合部分を示している。FIG. 2 is an explanatory view showing the structure of an ultrasonic probe according to the method of manufacturing an ultrasonic probe of the present invention.
And a protection plate 11 and a joint portion thereof.
【００１６】本実施例では、振動子１２（高キュリー点
単結晶振動子ＬｉＮｂＯ3 ）の両面と振動子１２とほぼ
一致した熱膨張係数を持つ保護板１１の接合面側に、チ
タン層２１ａ，２１ｂ，２１ｃ、白金層２２ａ，２２
ｂ，２２ｃ及び金層２３ａ，２３ｂ，２３ｃを順番に３
層蒸着層が施される。これは、接合時の振動子１２と保
護板１１の剥離は、ろう材１３と振動子１２及び保護板
１１のぬれ性不良に起因するが、チタン層２１ａ，２１
ｂ，２１ｃは、ろう材１３のぬれ性不良の原因となる振
動子１２及び保護板１１の表面の酸化膜層にも安定して
形成できるためである。中間層の白金層２２ａ，２２
ｂ，２２ｃを介して、ろう材１３とのぬれ性が良好な金
層２３ａ，２３ｂ，２３ｃは振動子１２と保護板１１の
表面上に安定に形成できる。接合時には、振動子１２上
に形成した金層２３ｂと保護板１１上に形成した金層２
３ｃの間にろう材１３を挿入して、ろう材１３を加熱溶
融することで振動子１２と保護板１１を接合するが、上
記金層２３ｂ，２３ｃはろう材１３とのぬれ性が良好で
あるため、振動子１２と保護板１１の接合部は剥離せ
ず、両者は強固に接合される。In this embodiment, a titanium layer 21a, a titanium layer 21a, and a titanium plate 21a are provided on both sides of a vibrator 12 (high Curie point single crystal vibrator LiNbO 3 ) and a protective plate 11 having a thermal expansion coefficient substantially coincident with the vibrator 12. 21b, 21c, platinum layers 22a, 22
b, 22c and the gold layers 23a, 23b, 23c
A layer deposition layer is applied. This is because the peeling of the vibrator 12 and the protective plate 11 at the time of joining is caused by poor wettability of the brazing material 13 and the vibrator 12 and the protective plate 11, but the titanium layers 21a and 21
This is because b and 21c can be formed stably also on the oxide film layer on the surface of the vibrator 12 and the protective plate 11 which cause poor wettability of the brazing material 13. Intermediate platinum layers 22a, 22
Through the b and 22c, the gold layers 23a, 23b and 23c having good wettability with the brazing material 13 can be stably formed on the surfaces of the vibrator 12 and the protection plate 11. At the time of joining, the gold layer 23b formed on the vibrator 12 and the gold layer 23 formed on the protection plate 11
The vibrator 12 and the protective plate 11 are joined by inserting the brazing material 13 between 3c and heating and melting the brazing material 13, but the gold layers 23b and 23c have good wettability with the brazing material 13. Therefore, the joint between the vibrator 12 and the protective plate 11 does not peel off, and the two are firmly joined.
【００１７】振動子１２の接合面と反対側の面上に形成
する金層２３ａ、あるいは保護板１１上に形成し、振動
子１２とのろう付け接合面となる金層２３ｃは、電極層
としても用いられ、リード線１６は金層２３ａ，２３ｃ
に直接取り付けられるか、もしくは、リード線１６を取
り付ける端子が金層２３ａ，２３ｃ上に接合される。The gold layer 23a formed on the surface opposite to the bonding surface of the vibrator 12 or the gold layer 23c formed on the protection plate 11 and serving as a brazing bonding surface with the vibrator 12 serves as an electrode layer. Is used, and the lead wire 16 is made of gold layers 23a, 23c.
Or the terminals for attaching the lead wires 16 are joined on the gold layers 23a and 23c.
【００１８】また、図３は本発明による超音波探触子の
製造法の熱処理法を示す説明図であり、振動子１２と保
護板１１を接合する時の、ろう付け炉の炉中温度変化を
示している。図３（ａ）は、炉冷を行った場合の温度変
化を示した図であり、横軸は時間を縦軸は温度を示す。
炉中温度は室温点Ａからろう溶融開始点Ｂ（温度Ｔ）ま
で上昇し、ろう溶融終了点Ｃまで一定時間ろう付け温度
Ｔに維持された後、最後にろう付け装置の電源が切ら
れ、室温点Ｄ１まで低下しているが、この時、ろう溶融
終了点Ｃ付近における温度変化が急激なため、熱衝撃が
大きくなり振動子１２に割れが生じる。FIG. 3 is an explanatory view showing a heat treatment method in the method of manufacturing the ultrasonic probe according to the present invention, and shows a change in the furnace temperature of the brazing furnace when the vibrator 12 and the protection plate 11 are joined. Is shown. FIG. 3A is a diagram showing a temperature change when furnace cooling is performed, in which the horizontal axis represents time and the vertical axis represents temperature.
The temperature in the furnace rises from the room temperature point A to the brazing melting start point B (temperature T) and is maintained at the brazing temperature T for a certain time until the brazing melting end point C, and finally, the power of the brazing device is turned off. Although the temperature has dropped to the room temperature point D1, at this time, the temperature change near the end point C of the brazing melting is abrupt, so that the thermal shock increases and the vibrator 12 cracks.
【００１９】図３（ｂ）は、ろう溶融終了点Ｃ付近にお
ける熱衝撃を緩和し、振動子１２に発生する割れを抑制
するために、ろう溶融終了点Ｃから室温点Ｄ２まで徐冷
をした場合の温度変化を示した図であり、横軸は時間
を、縦軸は温度を示す。実際に、熱膨張係数がＬｉＮｂ
Ｏ3 に近いステンレス鋼を保護板にして、ＬｉＮｂＯ3
とろう接し、冷却速度を１０℃／分以下となるように温
度制御しながら冷却したところ、振動子１２に割れが発
生せずにＬｉＮｂＯ3 と保護板を接合することができ、
３５０℃の高温雰囲気下でも超音波探触子が超音波を送
受信することが確認された。FIG. 3 (b) shows that, in order to alleviate the thermal shock in the vicinity of the end point C of the melting of the braze and to suppress the cracks generated in the vibrator 12, the temperature was gradually cooled from the end point C of the brazing to the room temperature point D2. FIG. 6 is a diagram showing a temperature change in the case, in which the horizontal axis represents time and the vertical axis represents temperature. Actually, the thermal expansion coefficient is LiNb
Using stainless steel close to O 3 as a protective plate, LiNbO 3
When cooling was performed while controlling the temperature so that the cooling rate was 10 ° C./min or less, LiNbO 3 and the protection plate could be joined without generating cracks in the vibrator 12.
It was confirmed that the ultrasonic probe transmits and receives ultrasonic waves even in a high-temperature atmosphere of 350 ° C.
【００２０】さらに、この製造法に基づき製造した超音
波探触子は、高キュリー点単結晶振動子のＬｉＮｂＯ3
とＬｉＮｂＯ3 とほぼ一致した熱膨張係数を持つ保護板
の接合面にそれぞれ形成した金薄膜層にて、ＬｉＮｂＯ
3 と保護板をろう付けにより重畳しており、振動子と保
護板の間に高温雰囲気下でも剥離が生じない強固なろう
付け接合層を形成するため、高温の被検体に対しても、
プラントの運転中に検査が実施できるとともに、プラン
ト運転中の長時間の監視用センサとして使用できる。Further, the ultrasonic probe manufactured based on this manufacturing method is a high Curie point single crystal oscillator, LiNbO 3.
LiNbO 3 is formed on the bonding surface of the protective plate having a thermal expansion coefficient substantially equal to that of LiNbO 3 and LiNbO 3.
3 and the protection plate are overlapped by brazing, and a strong brazing joint layer that does not peel even under high temperature atmosphere between the vibrator and the protection plate is formed.
Inspection can be performed during operation of the plant, and the sensor can be used as a long-term monitoring sensor during operation of the plant.
【００２１】なお実施例では、振動子１２に保護板を接
合したが、保護板に変えて導波棒４２を用いて、導波棒
付超音波探触子にしてもよい。振動子１２の両面と導波
棒４２の接合面に、同様に金層２３ａ，２３ｂ，２３ｃ
を施した後、同様の熱処理を行うことにより、導波棒付
超音波探触子４０が製造できる。本例の超音波探触子に
よれば、振動子１２は高温の被検体１から遠ざけて設置
できるため、超音波探触子４０が被検体１に接触する瞬
間の熱衝撃による振動子１２の破壊が防止できる。ま
た、被検体１の熱変動が激しい場合にも、振動子１２に
かかる熱衝撃が緩和できるため有効である。被検体１に
導波棒４２を溶接等の方法で接合すれば、構造材の減肉
監視等の長時間に及ぶ監視にも実施例は適用可能とな
る。In the embodiment, the protection plate is bonded to the vibrator 12, but an ultrasonic probe with a waveguide rod may be used by using the waveguide rod 42 instead of the protection plate. Similarly, gold layers 23a, 23b, and 23c are provided on both surfaces of the vibrator 12 and the joint surface of the waveguide rod 42.
After performing the above, the same heat treatment is performed, whereby the ultrasonic probe with a waveguide rod 40 can be manufactured. According to the ultrasonic probe of this example, since the transducer 12 can be installed away from the high-temperature subject 1, the vibrator 12 due to a thermal shock at the moment when the ultrasonic probe 40 comes into contact with the subject 1. Destruction can be prevented. Further, even when the thermal fluctuation of the subject 1 is severe, the thermal shock applied to the vibrator 12 can be reduced, which is effective. If the waveguide rod 42 is joined to the subject 1 by a method such as welding, the embodiment can be applied to monitoring over a long period of time, such as monitoring thinning of a structural material.
【００２２】また、実施例の振動子１２に導波棒４２に
変えてシュー５１を接合すれば、斜角用超音波探触子５
０が製造できる。図５に、斜角用超音波探触子５０の構
造図を示す。シュー５１内の超音波の音速をｖ1 ，被検
体１内の音速をｖ2 とすると、振動子１２がシュー５１
に取り付けられる角度θ1 と、被検体１に超音波３が入
射する角度θ2 の関係は数１のように示される。If a shoe 51 is bonded to the transducer 12 of the embodiment instead of the waveguide rod 42, the oblique ultrasonic probe 5
0 can be manufactured. FIG. 5 shows a structural diagram of the ultrasonic probe 50 for oblique angles. Assuming that the sound speed of the ultrasonic wave in the shoe 51 is v 1 and the sound speed in the subject 1 is v 2 , the vibrator 12
The relationship between the angle θ 1 attached to the object 1 and the angle θ 2 at which the ultrasonic wave 3 is incident on the subject 1 is shown as in Equation 1.
【００２３】[0023]
【数１】 (Equation 1)
【００２４】したがって、角度θ1 を変更することによ
り、超音波の入射角度θ2 を変えることができる。ま
た、被検体１とシュー５１の境界における超音波のモー
ド変換を利用すれば、被検体１への横波超音波の入射や
表面波の入射が可能となる。Therefore, by changing the angle θ 1 , the incident angle θ 2 of the ultrasonic wave can be changed. In addition, if the mode conversion of the ultrasonic wave at the boundary between the subject 1 and the shoe 51 is used, it is possible to input the transverse ultrasonic wave and the surface wave to the subject 1.
【００２５】さらに実施例の変形例として、図６に、被
検体に直接接合する場合の構造図を示す。被検体１とな
る配管等の構造物を製作する際に、予め被検体１表面に
金層２３ｃを形成しておき、振動子１２上に形成した金
層２３ｂを合わせてろう付けを行う。この様な構成をと
ることにより、高温構造物の減肉監視等の長時間に及ぶ
監視にも適用可能となる。FIG. 6 shows a structural diagram in the case of directly bonding to a subject as a modification of the embodiment. When manufacturing a structure such as a pipe to be the subject 1, a gold layer 23 c is previously formed on the surface of the subject 1, and the gold layer 23 b formed on the vibrator 12 is brazed together. By adopting such a configuration, the present invention can be applied to monitoring for a long time, such as thinning monitoring of a high-temperature structure.
【００２６】[0026]
【発明の効果】本発明の超音波探触子の製造法によれ
ば、高キュリー点単結晶振動子LiNbO3とＬｉＮｂＯ3 と
ほぼ一致した熱膨張係数を持つ保護板の接合面に、ろう
材とのぬれ性が良好な金薄膜層を形成することにより、
ＬｉＮｂＯ3 と保護板の間に強固なろう付け接合層を形
成することができ、振動子と保護板の熱膨張係数差に起
因する接合時の振動子と保護板の剥離も回避できる。さ
らに、接合時でろう材を加熱溶融後、１０℃／分以下の
冷却速度で徐冷して振動子と保護板を接合することによ
り、冷却時に振動子にかかる熱衝撃を緩和することがで
きるため、上記接合時の振動子の割れ発生も抑制でき
る。According to the method of manufacturing the ultrasonic probe of the present invention, the brazing filler metal is bonded to the bonding surface of the high Curie point single crystal oscillator LiNbO 3 and the protective plate having a thermal expansion coefficient almost coincident with that of LiNbO 3. By forming a gold thin film layer with good wettability with
A strong brazing joint layer can be formed between LiNbO 3 and the protective plate, and peeling of the vibrator and the protective plate at the time of joining due to a difference in thermal expansion coefficient between the vibrator and the protective plate can be avoided. Furthermore, after the brazing material is heated and melted at the time of joining, it is gradually cooled at a cooling rate of 10 ° C./min or less to join the vibrator and the protective plate, so that the thermal shock applied to the vibrator during cooling can be reduced. Therefore, the occurrence of cracks in the vibrator during the joining can be suppressed.
【００２７】また、本発明の超音波探触子によれば、被
検体の内部あるいは表面に超音波の送信または受信を行
う超音波探触子で、高キュリー点単結晶振動子のＬiＮb
Ｏ3とＬｉＮｂＯ3 とほぼ一致した熱膨張係数を持つ保
護板の接合面にそれぞれ形成した金薄膜層にて、ＬｉＮ
ｂＯ3 と保護板をろう付けにより重畳する構成であるの
で、高温の被検体に対しても、プラントの運転中に検査
が実施できるとともに、プラント運転中の長時間の監視
用センサとして使用できる。According to the ultrasonic probe of the present invention, an ultrasonic probe for transmitting or receiving an ultrasonic wave inside or on a surface of a subject, and a high Curie point single crystal oscillator LiNb
The gold thin film layers formed on the bonding surfaces of the protective plate having a thermal expansion coefficient almost coincident with O 3 and LiNbO 3 , respectively.
Since the bO 3 and the protection plate are superimposed by brazing, the inspection can be performed even during the operation of the plant, even for a high-temperature subject, and the sensor can be used as a long-term monitoring sensor during the operation of the plant.
【図１】垂直探傷用の従来の超音波探触子の説明図。FIG. 1 is an explanatory view of a conventional ultrasonic probe for vertical flaw detection.
【図２】本発明法の超音波探触子構造を示す説明図。FIG. 2 is an explanatory diagram showing an ultrasonic probe structure according to the method of the present invention.
【図３】本発明法の熱処理法を示す説明図。FIG. 3 is an explanatory view showing a heat treatment method of the present invention.
【図４】導波棒を用いた超音波探触子の説明図。FIG. 4 is an explanatory diagram of an ultrasonic probe using a waveguide rod.
【図５】斜角用超音波探触子の説明図。FIG. 5 is an explanatory diagram of an oblique ultrasonic probe.
【図６】被検体に直接接合する場合の説明図。FIG. 6 is an explanatory diagram in the case of directly bonding to a subject.
１１…保護板、１２…振動子、１３…接合材、１６…リ
ード線、２１ａ，21ｂ，２１ｃ…チタン層、２２ａ，２
２ｂ，２２ｃ…白金層、２３ａ,２３ｂ,２３ｃ…金層。DESCRIPTION OF SYMBOLS 11 ... Protective plate, 12 ... Vibrator, 13 ... Bonding material, 16 ... Lead wire, 21a, 21b, 21c ... Titanium layer, 22a, 2
2b, 22c: a platinum layer; 23a, 23b, 23c: a gold layer.
Claims (7)
または受信を行う超音波探触子の製造法において、高キ
ュリー点単結晶振動子ＬｉＮｂＯ3 とＬｉＮｂＯ3 にほ
ぼ一致した熱膨張係数を持つ保護板の接合面にそれぞれ
金薄膜層を形成した後、ＬｉＮｂＯ3 と保護板の間にろ
う材を挿入し、ろう材を加熱溶融後、１０℃／分以下の
冷却速度で徐冷し、ＬｉＮｂＯ3 と保護板をろう付け接
合することを特徴とする超音波探触子の製造法。In a method of manufacturing an ultrasonic probe for transmitting or receiving an ultrasonic wave inside or on a surface of a subject, a high Curie point single crystal vibrator LiNbO 3 and a thermal expansion coefficient substantially coincident with LiNbO 3 are provided. after forming the respective metal thin film layer on the bonding surface of the protective plate having, insert a brazing material in the protective plates and LiNbO 3, after heating and melting the brazing material, gradually cooled at a cooling rate of 10 ° C. / min or less, LiNbO 3 A method for producing an ultrasonic probe, comprising brazing and bonding a protective plate to a probe.
形成する前記金薄膜層の形成方法をチタン層，白金層，
金層の順に３層に蒸着する方法とする請求項１に記載の
超音波探触子の製造法。2. A method for forming a gold thin film layer formed on a bonding surface between the LiNbO 3 and the protective plate, comprising the steps of:
2. The method of manufacturing an ultrasonic probe according to claim 1, wherein three layers are deposited in the order of the gold layer.
または受信を行う超音波探触子において、高キュリー点
単結晶振動子のＬｉＮｂＯ3 とＬｉＮｂＯ3 とほぼ一致
した熱膨張係数を持つ保護板の接合面にそれぞれ形成し
た金薄膜層で、ＬｉＮｂＯ3と保護板をろう付けにより
重畳することを特徴とする超音波探触子。3. An ultrasonic probe for transmitting or receiving an ultrasonic wave inside or on a surface of a subject, wherein the single crystal oscillator having a high Curie point has a thermal expansion coefficient almost identical to that of LiNbO 3 and LiNbO 3. An ultrasonic probe characterized in that LiNbO 3 and a protective plate are superimposed by brazing with a gold thin film layer formed on each joint surface of the plates.
形成する前記金薄膜層をチタン層，白金層，金層の順の
３層蒸着層とする請求項３に記載の超音波探触子。4. The ultrasonic probe according to claim 3, wherein the gold thin film layer formed on the bonding surface between the LiNbO 3 and the protective plate is a three-layer vapor-deposited layer of a titanium layer, a platinum layer, and a gold layer. Child.
を重畳する請求項３または４に記載の超音波探触子。5. A LiNbO 3 waveguide instead of said protective plate.
The ultrasonic probe according to claim 3, wherein the ultrasonic probe is superimposed.
ＮｂＯ3 を重畳する請求項３または４に記載の超音波探
触子。6. A wedge-shaped shoe instead of the protective plate,
The ultrasonic probe according to claim 3 , wherein NbO 3 is superimposed.
ＮｂＯ3 を重畳する請求項３または４に記載の超音波探
触子。7. The method according to claim 7, wherein the test object is replaced with Li directly.
The ultrasonic probe according to claim 3 , wherein NbO 3 is superimposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31333796A JPH10153586A (en) | 1996-11-25 | 1996-11-25 | Ultrasonic probe and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31333796A JPH10153586A (en) | 1996-11-25 | 1996-11-25 | Ultrasonic probe and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10153586A true JPH10153586A (en) | 1998-06-09 |
Family
ID=18040037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31333796A Pending JPH10153586A (en) | 1996-11-25 | 1996-11-25 | Ultrasonic probe and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10153586A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006090804A (en) * | 2004-09-22 | 2006-04-06 | Ishikawajima Inspection & Instrumentation Co | Two-vibrator type ultrasonic probe for high temperature |
| JP2010243320A (en) * | 2009-04-06 | 2010-10-28 | Hitachi-Ge Nuclear Energy Ltd | Ultrasonic flaw detection method |
| JP2011047905A (en) * | 2009-08-28 | 2011-03-10 | Mitsubishi Heavy Ind Ltd | Installation method of ultrasonic vibrator |
| JP2012034159A (en) * | 2010-07-30 | 2012-02-16 | Konica Minolta Medical & Graphic Inc | Ultrasonic probe, method of manufacturing the same, and ultrasonic medical image diagnostic device |
| JP2016524495A (en) * | 2013-05-24 | 2016-08-18 | フジフィルム ソノサイト インコーポレイテッド | High frequency ultrasonic probe |
-
1996
- 1996-11-25 JP JP31333796A patent/JPH10153586A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006090804A (en) * | 2004-09-22 | 2006-04-06 | Ishikawajima Inspection & Instrumentation Co | Two-vibrator type ultrasonic probe for high temperature |
| JP4502257B2 (en) * | 2004-09-22 | 2010-07-14 | 株式会社Ｉｈｉ検査計測 | Two transducer type ultrasonic probe for high temperature |
| JP2010243320A (en) * | 2009-04-06 | 2010-10-28 | Hitachi-Ge Nuclear Energy Ltd | Ultrasonic flaw detection method |
| JP2011047905A (en) * | 2009-08-28 | 2011-03-10 | Mitsubishi Heavy Ind Ltd | Installation method of ultrasonic vibrator |
| JP2012034159A (en) * | 2010-07-30 | 2012-02-16 | Konica Minolta Medical & Graphic Inc | Ultrasonic probe, method of manufacturing the same, and ultrasonic medical image diagnostic device |
| JP2016524495A (en) * | 2013-05-24 | 2016-08-18 | フジフィルム ソノサイト インコーポレイテッド | High frequency ultrasonic probe |
| US9907538B2 (en) | 2013-05-24 | 2018-03-06 | Fujifilm Sonosite, Inc. | High frequency ultrasound probe |
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