JPH10110730A - Static pressure bearing structure for rotating tool - Google Patents

Static pressure bearing structure for rotating tool

Info

Publication number
JPH10110730A
JPH10110730A JP26409596A JP26409596A JPH10110730A JP H10110730 A JPH10110730 A JP H10110730A JP 26409596 A JP26409596 A JP 26409596A JP 26409596 A JP26409596 A JP 26409596A JP H10110730 A JPH10110730 A JP H10110730A
Authority
JP
Japan
Prior art keywords
rotary
bearing structure
rotary tool
hydrostatic bearing
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26409596A
Other languages
Japanese (ja)
Other versions
JP3243635B2 (en
Inventor
Hideaki Maruyama
英彰 丸山
Shoichi Ueda
詔一 上田
Masahito Hasegawa
雅人 長谷川
Hiroshi Saito
斎藤  博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIIGATA PREF GOV
Niigata Prefecture
Original Assignee
NIIGATA PREF GOV
Niigata Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIIGATA PREF GOV, Niigata Prefecture filed Critical NIIGATA PREF GOV
Priority to JP26409596A priority Critical patent/JP3243635B2/en
Publication of JPH10110730A publication Critical patent/JPH10110730A/en
Application granted granted Critical
Publication of JP3243635B2 publication Critical patent/JP3243635B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PROBLEM TO BE SOLVED: To inhibit the center of a rotating tool from being displaced in the axial direction by forming respective static pressure bearing structures disposed at both the right/left positions of the rotating tool into a bilateral symmetry structure to each other with regard to the mounting position of the rotating tool. SOLUTION: This static pressure bearing structure for rotating tool is constituted so as to be capable of bearing a rotating shaft 2 on which a rotating tool 1 is mounted in a dual holding condition with bearing casing 3, 3 which have static pressure bearing structures M, M disposed at both right/left positions of the rotating tool 1. The respective static pressure bearing structures M, M disposed at both the right/left positions of the rotating tool 1 are formed into a bilateral symmetry structure to each other with regard to the mounting position K of the rotating tool 1. When the rotating shaft 2 rotates, and air serving as fluid is fed into bearing clearances D to the bearing casing 3, even if the rotating shaft 2 produces thermal expansion by the heat due to friction with the fluid, it is possible to prevent the center of the rotating tool 1 from being displaced in the axial direction and attain the stabilization of the position in the axial direction O of the rotating tool 1 for highly accurate working.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は例えば円筒研削盤や
平面研削盤、フライス盤等の工作機械、詳しくは高精
度、高剛性、高速加工を必要とする工作機械のスピンド
ル軸受に用いられる回転工具用静圧軸受構造に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machine tool such as a cylindrical grinder, a surface grinder, and a milling machine, and more particularly, to a rotary tool used for a spindle bearing of a machine tool requiring high precision, high rigidity and high speed machining. The present invention relates to a hydrostatic bearing structure.

【0002】[0002]

【従来の技術】従来この種の回転工具用軸受構造として
は、その殆どにおいて、回転工具が装着される回転軸を
回転工具の一方側方位置に配置された軸受筐体により片
持状態で軸受する構造のものが採用されている。
2. Description of the Related Art Conventionally, as a bearing structure for a rotary tool of this type, in most cases, a rotary shaft on which the rotary tool is mounted is mounted in a cantilevered state by a bearing housing arranged at one side of the rotary tool. The structure is adopted.

【0003】この片持軸受構造にあっては、回転軸の一
方端部が解放され、その回転軸の一方端部から容易に工
具を交換し得ることになるからである。
[0003] In this cantilever bearing structure, one end of the rotating shaft is released, and the tool can be easily changed from one end of the rotating shaft.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、この種
の片持軸受構造は、軸受発熱に起因する回転軸の熱膨張
により加工時間の経過と共に回転軸の回転軸線方向の位
置が変位し、この回転工具の変位により加工寸法の狂い
が生じ、又、半径方向の剛性が低くて加工速度や加工精
度に限界が生じ易く、又、空気を用いた片持構造の静圧
軸受にあっては、空気の圧縮性により剛性の確保が困難
であると共に負荷の大きい高速加工には不向きであると
いう不都合を有している。
However, in this type of cantilever bearing structure, the position of the rotating shaft in the direction of the rotating axis is displaced with the elapse of machining time due to thermal expansion of the rotating shaft due to heat generation of the bearing. Due to the displacement of the tool, the machining dimensions are deviated, the rigidity in the radial direction is low, and the machining speed and machining accuracy are likely to be limited.In the case of a cantilevered hydrostatic bearing using air, air However, it is difficult to secure the rigidity due to the compressibility and is not suitable for high-speed machining with a large load.

【0005】[0005]

【課題を解決するための手段】本発明はこのような課題
を解決するため、基本的には両持静圧軸受構造を採用す
るものであり、本発明のうちで、請求項1記載の発明あ
っては、回転工具が装着される回転軸を該回転工具の左
右両側位置に配置された静圧軸受構造をもつ軸受筐体に
より両持状態で軸受可能な回転工具用静圧軸受構造にお
いて、上記回転工具の左右両側位置に配置されたそれぞ
れの静圧軸受構造を上記回転工具の装着位置を中心とし
て相互に左右対称構造に構成したことを特徴とするにあ
る。ここに、回転工具の左右両側位置に配置されたそれ
ぞれの静圧軸受構造を上記回転工具の装着位置を中心と
して相互に左右対称構造に構成するとは、例えばこれら
軸受部の軸受面形状、回転工具の装着位置からの距離等
が相互に実質的に対称であって、これにより熱膨張に伴
う回転工具の回転軸線方向の位置変位を実質的に抑制可
能な構造をいうものである。
In order to solve the above-mentioned problems, the present invention basically employs a double-supported hydrostatic bearing structure. There, in a hydrostatic bearing structure for a rotating tool capable of bearing a rotating shaft to which a rotating tool is mounted in a bearing housing having a hydrostatic bearing structure arranged on both left and right positions of the rotating tool in a double-supported state, The present invention is characterized in that the respective hydrostatic bearing structures disposed on both left and right positions of the rotary tool are configured to be symmetrical with respect to each other about the mounting position of the rotary tool. Here, to configure the respective hydrostatic bearing structures disposed on both left and right sides of the rotary tool in a mutually symmetrical structure with respect to the mounting position of the rotary tool means, for example, the bearing surface shape of these bearings, Are substantially symmetrical with respect to each other from the mounting position, whereby the displacement of the rotary tool in the rotation axis direction due to thermal expansion can be substantially suppressed.

【0006】又、請求項2記載の発明は、上記回転軸は
上記回転工具の回転軸線方向の左右両側位置に配置され
る一対の分割回転軸からなることを特徴とするものであ
り、、又、請求項3記載の発明は、上記回転軸の左右両
端部に周鍔部を設け、該周鍔部の軸線方向内面によりそ
れぞれスラスト静圧軸受構造を構成し、該スラスト静圧
軸受構造を上記回転工具の装着位置を中心として相互に
左右対称構造に構成したことを特徴とするものであり、
又、請求項4記載の発明は、上記各分割回転軸の各左右
両端部に周鍔部を設け、該周鍔部の軸線方向内面により
それぞれスラスト静圧軸受構造を構成し、該スラスト静
圧軸受構造を上記回転工具の装着位置を中心として相互
に左右対称構造に構成したことを特徴とするものであ
る。ここに、スラスト静圧軸受構造を上記回転工具の装
着位置を中心として相互に左右対称構造に構成すると
は、例えばこれら軸受部の軸受面形状、回転工具の装着
位置からの距離等が相互に実質的に対称であって、これ
により熱膨張に伴う回転工具の回転軸線方向の位置変位
を実質的に抑制可能な構造をいうものである。
According to a second aspect of the present invention, the rotary shaft comprises a pair of split rotary shafts disposed at both left and right positions in the rotary axis direction of the rotary tool. The invention according to claim 3 is characterized in that peripheral flanges are provided at both left and right end portions of the rotating shaft, and a thrust hydrostatic bearing structure is constituted by an axially inner surface of the peripheral flange, respectively. It is characterized by a mutually symmetrical structure around the mounting position of the rotating tool,
According to a fourth aspect of the present invention, a peripheral flange portion is provided at each of the left and right ends of each of the divided rotary shafts, and a thrust hydrostatic bearing structure is constituted by the axial inner surface of the peripheral flange portion. It is characterized in that the bearing structure is configured to be symmetrical with respect to each other about the mounting position of the rotary tool. Here, when the thrust hydrostatic bearing structure is configured to be mutually symmetrical with respect to the mounting position of the rotating tool, for example, the bearing surface shape of these bearings, the distance from the mounting position of the rotating tool, and the like are substantially mutually different. This is a structure which is substantially symmetrical and can thereby substantially suppress the displacement of the rotary tool in the rotation axis direction due to thermal expansion.

【0007】又、請求項5記載の発明は、上記各分割回
転軸の回転工具側の内方端部に設けられた周鍔部に上記
回転工具を挟装保持可能な一対の装着部材をそれぞれ着
脱自在に取付けると共に上記各分割回転軸の外方端部に
設けられた周鍔部を分割回転軸に対してそれぞれ着脱自
在に設けて構成したことを特徴とするものであり、又、
請求項6記載の発明にあっては、上記回転軸と該回転軸
を駆動する駆動軸との間に空気静圧を用いた継手構造を
設けて構成したことを特徴とするものであり、又、請求
項7記載の発明は、上記回転軸に温度制御された冷却水
又は空気を給送可能な給送穴を形成したことを特徴とす
るものである。
According to a fifth aspect of the present invention, a pair of mounting members capable of sandwiching and holding the rotary tool are provided on a peripheral flange provided at an inner end of the split rotary shaft on the rotary tool side. It is characterized by being configured to be detachably attached and configured so that a peripheral flange portion provided at an outer end portion of each of the divided rotary shafts is detachably provided with respect to the divided rotary shaft, respectively,
The invention according to claim 6 is characterized in that a joint structure using static air pressure is provided between the rotation shaft and a drive shaft that drives the rotation shaft, and The invention according to claim 7 is characterized in that a feed hole capable of feeding cooling water or air whose temperature is controlled is formed in the rotary shaft.

【0008】[0008]

【発明の実施の形態】図1乃至図10は本発明の実施の
形態例を示し、図1乃至図7は第一形態例、図8乃至図
10は第二形態例を示している。
1 to 10 show an embodiment of the present invention. FIGS. 1 to 7 show a first embodiment, and FIGS. 8 to 10 show a second embodiment.

【0009】図1乃至図7の第一形態例は本発明を空気
静圧軸受に適用したもので、1は回転工具、この場合砥
石車であり、回転工具1は回転軸2に装着され、回転軸
2は静圧軸受構造Mをもつ一対の軸受筐体3・3により
両持状態で軸受される。
In the first embodiment shown in FIGS. 1 to 7, the present invention is applied to an aerostatic bearing. Reference numeral 1 denotes a rotary tool, in this case, a grinding wheel. The rotary tool 1 is mounted on a rotary shaft 2; The rotating shaft 2 is supported in a double-supported state by a pair of bearing housings 3 having a hydrostatic bearing structure M.

【0010】これら回転工具1の左右両側位置に配置さ
れたそれぞれの静圧軸受構造M・Mは上記回転工具1の
装着位置Kを中心として相互に左右対称構造に構成さ
れ、即ち、これら静圧軸受構造M・Mの軸受部の軸受面
形状、回転工具1の装着位置Kからの距離等が相互に実
質的に対称であって、これにより熱膨張に伴う回転工具
1の回転軸線O方向の位置変位を実質的に抑制可能な構
造に構成されている。
Each of the hydrostatic bearing structures M and M arranged on both left and right sides of the rotary tool 1 are configured to be symmetrical with respect to each other with respect to the mounting position K of the rotary tool 1, that is, these static pressures The bearing surface shape of the bearing portion of the bearing structure MM, the distance from the mounting position K of the rotary tool 1, and the like are substantially symmetric with each other. It is configured to be able to substantially suppress positional displacement.

【0011】この場合上記回転軸2は回転工具1の回転
軸線O方向の左右両側位置に配置される一対の分割回転
軸2a・2aからなり、又、この場合、分割回転軸2a
・2aの各左右両端部に周鍔部4・4及び5・5を設
け、この周鍔部4・4・5・5の軸線方向内面によりス
ラスト静圧軸受構造Nを構成している。これら回転工具
1の左右両側位置に配置されたそれぞれのスラスト静圧
軸受構造N・Nは上記回転工具1の装着位置Kを中心と
して相互に左右対称構造に構成され、即ち、これらスラ
スト静圧軸受構造N・Nの軸受部の軸受面形状、回転工
具1の装着位置Kからの距離等が相互に実質的に対称で
あって、これにより熱膨張に伴う回転工具1の回転軸線
O方向の位置変位を実質的に抑制可能な構造に構成され
ている。
In this case, the rotary shaft 2 is composed of a pair of split rotary shafts 2a, 2a disposed at both left and right positions in the direction of the rotary axis O of the rotary tool 1. In this case, the split rotary shaft 2a
2a, peripheral flanges 4, 4 and 5.5 are provided at both left and right ends, and the axially inner surface of the peripheral flanges 4, 4, 5.5, 5 constitutes a thrust hydrostatic bearing structure N. The respective thrust hydrostatic bearing structures NN arranged on the left and right sides of the rotary tool 1 are configured to be symmetrical with respect to each other about the mounting position K of the rotary tool 1, that is, these thrust hydrostatic bearings The bearing surface shape of the bearing portion of the structure NN, the distance from the mounting position K of the rotary tool 1 and the like are substantially symmetrical with each other, whereby the position of the rotary tool 1 in the direction of the rotation axis O accompanying thermal expansion is obtained. The structure is such that the displacement can be substantially suppressed.

【0012】又、この場合各分割回転軸2a・2aの回
転工具1側の内方端部に設けられた周鍔部5・5に回転
工具1を挟装保持可能な一対の装着部材6・7をそれぞ
れ着脱自在に取付けると共に各分割回転軸2a・2aの
外方端部に設けられた周鍔部4・4を分割回転軸2a・
2aに対してそれぞれ着脱自在に設けている。
Further, in this case, a pair of mounting members 6 which can clamp and hold the rotary tool 1 on peripheral flanges 5 and 5 provided at the inner end of the rotary tool 1 on the rotary tool 1 side of each of the divided rotary shafts 2a. 7 are detachably mounted, and the peripheral flanges 4, 4 provided at the outer ends of the divided rotary shafts 2a, 2a are connected to the divided rotary shafts 2a, 2a.
2a are provided detachably.

【0013】更に詳述すると、この場合回転工具1は装
着部材6とこれに嵌合可能な装着部材7とにより挟持さ
れて複数個のボルト8により挟圧保持され、この分割回
転軸2a・2aの各内方端部に周鍔部5・5を複数個の
ボルト9により着脱自在に取付けると共に分割回転軸2
a・2aの各外方端部に周鍔部4・4を複数個のボルト
10により着脱自在に取付け、この分割回転軸2a・2
aの各内方端部に取り付けられた周鍔部5・5を複数本
のボルト11により装着部材6・7に取り付けて構成し
ている。
More specifically, in this case, the rotary tool 1 is sandwiched between a mounting member 6 and a mounting member 7 that can be fitted thereto, and is held by a plurality of bolts 8 to hold the rotary tool 1. The peripheral flanges 5 are detachably attached to the respective inner end portions by a plurality of bolts 9 and the divided rotary shaft 2
A peripheral flange portion 4 is detachably attached to each outer end of the shafts 2a and 2a by a plurality of bolts 10.
The peripheral flanges 5.5 attached to the respective inner ends of a are attached to the mounting members 6 and 7 with a plurality of bolts 11.

【0014】又、この場合軸受筐体3はベッドBに取り
付けられる四角ブロック状の筐体3aと左右二個の円筒
状の軸受体3b・3bからなり、筐体3a内に左右二個
の軸受体3b・3bをディスタンスリング3cにより対
峙配置し、この各軸受体3b・3bの内周面と分割回転
軸2aの外周面との間にそれぞれ静圧軸受構造Mが構成
され、軸受体3b・3bの両外端面と周鍔部4・5の軸
線方向内面との間にスラスト静圧軸受構造Nが構成さ
れ、又、筐体3aの内外面に覆部材12・12を複数個
のボルト13により取り付けて構成している。
Further, in this case, the bearing housing 3 comprises a square block-shaped housing 3a attached to the bed B and two left and right cylindrical bearing bodies 3b, 3b. The bodies 3b, 3b are opposed to each other by a distance ring 3c, and a hydrostatic bearing structure M is formed between the inner peripheral surface of each of the bearing bodies 3b, 3b and the outer peripheral surface of the divided rotary shaft 2a. A thrust hydrostatic bearing structure N is formed between both outer end surfaces of the outer flange 3b and the inner surfaces of the circumferential flanges 4 and 5 in the axial direction, and the cover members 12 are provided on the inner and outer surfaces of the housing 3a by a plurality of bolts 13. It is configured by mounting.

【0015】この場合静圧軸受構造M及びスラスト静圧
軸受構造Nは、上記軸受筐体3に図外の空圧源に接続さ
れる供給路14を形成し、供給路14を軸受体3bの内
周面と分割回転軸2aの外周面との間の軸受間隙Dに接
続する放射状配置の複数個のノズルE及び軸受体3b・
3bの各外面と周鍔部4・4・5・5の軸線方向内面と
の間のスラスト間隙Gに接続する複数個のノズルSに分
岐接続し、かつ筐体3aに左右の軸受体3b・3bの対
向間隙、ディスタンスリング3cの***等を介して軸受
間隙D及びスラスト間隙Gと外部とを接続する排出路3
dを形成して構成している。
In this case, the hydrostatic bearing structure M and the thrust hydrostatic bearing structure N form a supply path 14 connected to an unillustrated air pressure source in the bearing housing 3 and connect the supply path 14 to the bearing body 3b. A plurality of radially arranged nozzles E and bearing bodies 3b connected to a bearing gap D between the inner peripheral surface and the outer peripheral surface of the divided rotary shaft 2a.
3b is branched and connected to a plurality of nozzles S connected to a thrust gap G between each outer surface of the outer ring 3b and the inner surface in the axial direction of the peripheral flange portion 4, 4, 5, 5; 3b, the discharge path 3 connecting the bearing gap D and the thrust gap G to the outside via the small hole of the distance ring 3c and the like.
d is formed.

【0016】又、この場合分割回転軸2a・2aの各内
方端部に形成された周鍔部5・5に先細りのテーパー面
5a・5aを形成し、一方上記装着部材6の内周面にテ
ーパー面5a・5aに嵌合可能な先拡がりのテーパー面
6aを形成し、テーパー面5a・5aとテーパー面6a
との嵌合及び装着部材6・7の外面と周鍔部5・5の内
方面5b・5bとの二面拘束結合構造Lを採用すると共
に対向する周鍔部5・5の内方端面の間に硬質ゴム等か
らなる弾性カラー15を介装するように構成している。
Further, in this case, tapered tapered surfaces 5a are formed on peripheral flanges 5 formed at respective inner ends of the divided rotary shafts 2a, while the inner peripheral surface of the mounting member 6 is formed. The tapered surfaces 5a, 5a and the tapered surfaces 6a are formed so as to be fitted to the tapered surfaces 5a, 5a.
And the inner surfaces 5b, 5b of the peripheral flanges 5, 5 are connected to the outer surfaces of the fitting members 6, 7 and the inner surfaces 5b, 5b. An elastic collar 15 made of hard rubber or the like is interposed therebetween.

【0017】又、この場合、上記一方の分割回転軸3a
の側方位置に図外の回転駆動源により駆動される駆動軸
16を軸受17により配置し、この分割回転軸3aと駆
動軸16との間に空気静圧を用いた継手構造Fを設け構
成している。
In this case, the one of the divided rotary shafts 3a
A drive shaft 16 driven by a rotary drive source (not shown) is disposed at a side position by a bearing 17, and a joint structure F using static air pressure is provided between the divided rotary shaft 3a and the drive shaft 16. doing.

【0018】この継手構造Fは、上記分割回転軸3aに
直径方向の凹溝3gを形成すると共に駆動軸16に凹溝
3gに嵌合する平板状の凸状部16aを形成し、駆動軸
16の中心に図外の空圧源に接続された空気路16bを
形成し、空気路16bを凹溝3gと凸状部16aとの間
の間隙部Hに接続して構成している。
In the joint structure F, a diametrically concave groove 3g is formed in the divided rotary shaft 3a, and a flat plate-like convex portion 16a that fits into the concave groove 3g is formed in the drive shaft 16; An air passage 16b connected to an air pressure source (not shown) is formed at the center of the air passage, and the air passage 16b is connected to a gap H between the concave groove 3g and the convex portion 16a.

【0019】又、この場合、上記回転軸3としての分割
回転軸3a・3a、周鍔部4・4・5・5に温度制御さ
れた冷却水又は空気を給送可能な給送穴18を貫通形成
し、又、上記軸受筐体3としての軸受体3bの外周面に
台形螺旋溝状の通過冷却路19を形成し、筐体3bに通
過冷却路18と図示省略の冷却空気源や冷却水源及び排
出部とを接続する給気口19a・19bを形成してい
る。
In this case, a feed hole 18 through which temperature-controlled cooling water or air can be fed to the divided rotary shafts 3a, 3a as the rotary shaft 3 and the peripheral flanges 4, 4, 5, 5 is provided. A through cooling passage 19 having a trapezoidal spiral groove shape is formed on the outer peripheral surface of the bearing body 3b as the bearing housing 3, and a through cooling passage 18 and a cooling air source (not shown) The air supply ports 19a and 19b connecting the water source and the discharge unit are formed.

【0020】この実施の第一形態例は上記構成であるか
ら、回転工具1が装着される回転軸2を該回転工具1の
左右両側位置に配置された静圧軸受構造M・Mをもつ軸
受筐体3・3により両持状態で軸受可能な回転工具用静
圧軸受構造において、上記回転工具1の左右両側位置に
配置されたそれぞれの静圧軸受構造M・Mを上記回転工
具1の装着位置Kを中心として相互に左右対称構造に構
成しているから、回転軸2が回転すると共に軸受筐体3
との軸受間隙D内に流体としての空気が給送され、この
流体との摩擦に因る発熱により回転軸2が熱膨張を引き
起こしても、回転工具1の中心が軸線方向に変位するこ
とを抑制することができ、それだけ回転工具1の軸線方
向Oの位置の安定化を図ることができ、高精度加工が可
能となり、かつ両持軸受構造であるから、回転工具1の
半径方向及び軸線方向の剛性を高めることができ、更に
静圧軸受構造Mであるから、発熱を抑制することができ
ると共に高速加工が可能となり、ひいては高精度及び高
速加工が可能となる。
Since the first embodiment of the present invention has the above-described structure, the rotary shaft 2 on which the rotary tool 1 is mounted is provided with a hydrostatic bearing structure MM in which the rotary shaft 2 is disposed at both left and right positions of the rotary tool 1. In the hydrostatic bearing structure for a rotary tool that can be supported in a double-supported state by the housings 3, 3, the respective hydrostatic bearing structures MM arranged on both right and left positions of the rotary tool 1 are mounted on the rotary tool 1. Since they are configured symmetrically to each other about the position K, the rotating shaft 2 rotates and the bearing housing 3
Even if air as a fluid is supplied into the bearing gap D between the rotary tool and the rotary shaft 2 causing thermal expansion due to heat generated by friction with the fluid, the center of the rotary tool 1 is displaced in the axial direction. Can be suppressed, and the position of the rotary tool 1 in the axial direction O can be stabilized accordingly, high-precision machining can be performed, and since the bearing is a double-supported bearing structure, the radial direction and the axial direction of the rotary tool 1 Since the rigidity of the bearing is increased and the static pressure bearing structure M is used, heat generation can be suppressed and high-speed machining can be performed. As a result, high-precision and high-speed machining can be performed.

【0021】又、この場合、上記回転軸2は上記回転工
具の回転軸線方向の左右両側位置に配置される一対の分
割回転軸2a・2aからなるので、組付作業が容易とな
り、又、この場合上記回転軸2の左右両端部に周鍔部4
・4を設け、周鍔部4・4の軸線方向内面によりそれぞ
れスラスト静圧軸受構造N・Nを構成し、スラスト静圧
軸受構造N・Nを上記回転工具1の装着位置Kを中心と
して相互に左右対称構造に構成しているから、静圧軸受
構造M・M及びスラスト静圧軸受構造N・Nにより軸線
方向及び半径方向の荷重を受けることができると共に回
転工具1から外方に向く方向に静圧を掛けることがで
き、それだけ軸線方向の剛性を高めることができ、しか
も回転軸2が膨張してもスラスト間隙Gは広くなる方向
なので、軸受滑面の干渉を防ぐことができ、又、この場
合上記各分割回転軸2a・2aの各左右両端部に周鍔部
4・4・5・5を設け、周鍔部4・4・5・5の軸線方
向内面によりそれぞれスラスト静圧軸受構造N・N・N
・Nを構成し、スラスト静圧軸受構造N・N・N・Nを
上記回転工具1の装着位置Kを中心として相互に左右対
称構造に構成しているから、軸線方向の荷重を四面で受
けることができ、四面拘束により軸線方向の剛性を一層
高めることができる。
Also, in this case, the rotating shaft 2 is composed of a pair of divided rotating shafts 2a, 2a arranged at both left and right positions in the direction of the rotating axis of the rotating tool. In this case, a peripheral flange 4 is provided at both left and right ends of the rotary shaft 2.
The thrust hydrostatic bearing structures NN are constituted by the axially inner surfaces of the peripheral flange portions 4. The thrust hydrostatic bearing structures NN are mutually reciprocated about the mounting position K of the rotary tool 1. , The axial and radial loads can be received by the hydrostatic bearing structures M and M and the thrust hydrostatic bearing structures N and N, and the direction from the rotary tool 1 to the outside. , The axial rigidity can be increased accordingly, and the thrust gap G is widened even if the rotary shaft 2 expands, so that interference with the bearing smooth surface can be prevented. In this case, peripheral flanges 4, 4, 5.5, 5 are provided at both left and right ends of each of the divided rotary shafts 2a, 2a, and thrust hydrostatic bearings are respectively provided by inner surfaces of the peripheral flanges 4, 4, 5.5, 5 in the axial direction. Structure N ・ N ・ N
N, and the thrust hydrostatic bearing structure N, N, N, N is configured to be mutually symmetrical with respect to the mounting position K of the rotary tool 1, so that axial loads are received on four sides. The rigidity in the axial direction can be further increased by the four-sided constraint.

【0022】又、この場合上記各分割回転軸2a・2a
の回転工具1側の内方端部に設けられた周鍔部5・5に
上記回転工具1を挟装保持可能な一対の装着部材6・7
をそれぞれ着脱自在に取付けると共に各分割回転軸2a
・2aの外方端部に設けられた周鍔部4・4を分割回転
軸2a・2aに対してそれぞれ着脱自在に設けて構成し
ているから、回転工具1、分割回転軸2a・2a,周縁
部4・4・5・5、装着部材6・7に分割することがで
き、特にこの場合テーパー面5a・5aとテーパー面6
aとの嵌合及び装着部材6・7の外面と周鍔部5・5の
内方面5b・5bとの二面拘束結合構造Lに構成してい
るので、高組付精度と高剛性のもとで回転工具1の交換
を軸受部分を分解することなく行うことができ、又、こ
の場合、上記回転軸2と回転軸2を駆動する駆動軸16
との間に空気静圧を用いた継手構造Fを設けて構成して
いるから、駆動軸16側から発生する回転振動や発熱の
回転軸2や軸受本体3への熱伝播を抑制することがで
き、又、この場合上記回転軸3に温度制御された冷却水
又は空気を給送可能な給送穴18を形成しているから、
回転軸2の発熱現象を抑制することができ、又、この場
合、上記軸受筐体3に冷却空気や冷却水が通過する通過
冷却路19を形成しているから、軸受筐体3の発熱現象
を抑制することができ、一層高精度、高剛性、高速加工
が可能となり、加工作業性を向上することができる。
In this case, each of the divided rotary shafts 2a
A pair of mounting members 6 and 7 capable of holding and holding the rotary tool 1 on peripheral flanges 5 and 5 provided at the inner end of the rotary tool 1 on the side of the rotary tool 1.
And each of the divided rotary shafts 2a
Since the peripheral flanges 4 provided at the outer ends of the 2a are detachably provided to the divided rotary shafts 2a, respectively, the rotary tool 1, the divided rotary shafts 2a, 2a, It can be divided into a peripheral portion 4, 4, 5, 5 and a mounting member 6, 7, especially in this case, the tapered surfaces 5a, 5a and the tapered surfaces 6
a and the inner surfaces 5b and 5b of the peripheral flanges 5 and 5 have a two-sided constrained connection structure L, so that high assembly accuracy and high rigidity can be achieved. In this case, the rotary tool 1 can be replaced without disassembling the bearing portion. In this case, the rotary shaft 2 and the drive shaft 16 for driving the rotary shaft 2 can be replaced.
, The joint structure F using the static air pressure is provided, so that the heat propagation from the drive shaft 16 side to the rotary shaft 2 and the bearing body 3 due to the generation of rotational vibration and heat generation can be suppressed. Also, in this case, since the rotary shaft 3 is provided with a feed hole 18 capable of feeding cooling water or air whose temperature is controlled,
The heat generation phenomenon of the rotating shaft 2 can be suppressed. In this case, since the passage cooling passage 19 through which the cooling air and the cooling water pass is formed in the bearing housing 3, the heat generation phenomenon of the bearing housing 3 is formed. Can be suppressed, high-precision, high-rigidity, and high-speed machining can be performed, and machining workability can be improved.

【0023】図8乃至図10の第二形態例は本発明を油
静圧軸受に適用したもので、上記第一形態例のものと同
一態様部分については同符号を付して説明を省略するこ
ととし、この静圧軸受構造M及びスラスト静圧軸受構造
Nは空気と違って油圧によってなされることから、軸受
間隙D及びスラスト間隙G内に給送された圧油を排出路
3dを介して図外のタンク内に戻流させるため、軸受体
3b・3bの内周面に軸線方向に延びる複数個の通過横
溝3eを形成すると共にその外端面に通過縦溝3fを形
成して構成し、かつ軸受間隙D及びスラスト間隙G内に
給送された油を静圧状態にすべく、軸受体3b・3bの
内周面及び各外面に拡散凹部3h・3kをそれぞれ形成
し、更に軸受筐体3と周鍔部4・4との間にラビリンス
構造Qを採用して構成している。
In the second embodiment shown in FIGS. 8 to 10, the present invention is applied to a hydrostatic bearing. The same reference numerals are given to the same parts as those in the first embodiment, and the description will be omitted. Since the static pressure bearing structure M and the thrust static pressure bearing structure N are formed by hydraulic pressure, unlike air, the pressure oil fed into the bearing gap D and the thrust gap G is discharged through the discharge path 3d. In order to return to the inside of the tank (not shown), a plurality of passage lateral grooves 3e extending in the axial direction are formed on the inner peripheral surface of the bearing body 3b, and a passage longitudinal groove 3f is formed on the outer end surface thereof. In addition, in order to make the oil fed into the bearing gap D and the thrust gap G into a static pressure state, diffusion recesses 3h and 3k are respectively formed on the inner peripheral surface and each outer surface of the bearing bodies 3b. The labyrinth structure Q is adopted between 3 and the peripheral collars 4 Forms.

【0024】この実施の第二形態例は上記構成であるか
ら、上記第一形態例と同様な作用効果を得ることができ
ると共に油静圧により高負荷加工を行うことができる。
Since the second embodiment has the above-described configuration, the same operation and effect as those of the first embodiment can be obtained, and high-load machining can be performed by static oil pressure.

【0025】尚、本発明は上記実施の形態例で示す構造
に限られるものではなく、例えば静圧軸受構造Mやスラ
スト軸受構造Nは適宜変更して設計され、例えば、ラジ
アル方向及びスラスト方向の荷重を同時に受けるような
静圧軸受構造Mの軸受面が相互にハ状となるテーパー状
に形成されることもあり、又、回転工具は砥石車に限ら
ず、フライスカッタ等にも適用することができ、又、上
記形態例と異なり、分割回転軸2a・2aからなる回転
軸2ではなく、分割回転軸2a・2aが一体に連結さ
れ、一本の回転軸2の場合にも適用することができ、こ
の場合、回転工具1の左右両側位置に配置されたそれぞ
れの静圧軸受構造Mやスラスト静圧軸受構造Nを上記回
転工具1の装着位置Kを中心として相互に左右対称構造
に構成することになる。
It should be noted that the present invention is not limited to the structure shown in the above-described embodiment. For example, the hydrostatic bearing structure M and the thrust bearing structure N are designed by appropriately changing the design. The bearing surface of the hydrostatic bearing structure M that receives a load at the same time may be formed in a tapered shape in which the bearing surfaces are c-shaped, and the rotary tool is not limited to a grinding wheel, and may be applied to a milling cutter or the like. Also, unlike the above-described embodiment, the present invention can be applied to the case where the divided rotary shafts 2a and 2a are integrally connected to each other instead of the rotary shaft 2 composed of the divided rotary shafts 2a In this case, each of the hydrostatic bearing structures M and the thrust hydrostatic bearing structures N arranged on the left and right sides of the rotary tool 1 are configured to be mutually symmetrical with respect to the mounting position K of the rotary tool 1. To do .

【0026】[0026]

【発明の効果】本発明は上述の如く、請求項1記載の発
明にあっては、回転工具が装着される回転軸を回転工具
の左右両側位置に配置された静圧軸受構造をもつ軸受筐
体により両持状態で軸受可能な回転工具用静圧軸受構造
において、上記回転工具の左右両側位置に配置されたそ
れぞれの静圧軸受構造を上記回転工具の装着位置を中心
として相互に左右対称構造に構成しているから、回転軸
が回転すると共に軸受筐体との軸受間隙内に流体が給送
され、この流体との摩擦に因る発熱により回転軸が熱膨
張を引き起こしても、回転工具の中心が軸線方向に変位
することを抑制することができ、それだけ回転工具の軸
線方向の位置の安定化を図ることができ、高精度加工が
可能となり、かつ両持軸受構造であるから、回転工具の
半径方向及び軸線方向の剛性を高めることができ、更に
静圧軸受構造であるから、発熱を抑制することができる
と共に高速加工が可能となり、ひいては高精度及び高速
加工が可能となる。
As described above, according to the first aspect of the present invention, there is provided a bearing housing having a hydrostatic bearing structure in which a rotary shaft on which a rotary tool is mounted is disposed at both left and right positions of the rotary tool. In a hydrostatic bearing structure for a rotating tool that can be supported in a double-supported state by a body, the respective hydrostatic bearing structures disposed on the left and right sides of the rotating tool are mutually symmetrical with respect to the mounting position of the rotating tool. Even if the rotating shaft rotates and the fluid is fed into the bearing gap with the bearing housing and the heat generated by friction with the fluid causes the rotating shaft to thermally expand, the rotating tool Of the rotating tool can be suppressed in the axial direction, the position of the rotating tool in the axial direction can be stabilized accordingly, high-precision machining becomes possible, and the rotating bearing structure is used. Tool radial and axis It is possible to increase the rigidity of the direction, further from a hydrostatic bearing structure, high speed processing becomes possible with heat generation can be suppressed, it is possible to turn the high accuracy and high-speed machining.

【0027】又、請求項2記載の発明にあっては、上記
回転軸は上記回転工具の回転軸線方向の左右両側位置に
配置される一対の分割回転軸からなるので、組付作業が
容易となり、又、請求項3記載の発明にあっては、上記
回転軸の左右両端部に周鍔部を設け、周鍔部の軸線方向
内面によりそれぞれスラスト静圧軸受構造を構成し、ス
ラスト静圧軸受構造を上記回転工具の装着位置を中心と
して相互に左右対称構造に構成しているから、静圧軸受
構造及びスラスト静圧軸受構造により軸線方向及び半径
方向の荷重を受けることができると共に回転工具から外
方に向く方向に静圧を掛けることができ、それだけ軸線
方向の剛性を高めることができ、しかも回転軸が膨張し
てもスラスト間隙は広くなる方向なので、軸受滑面の干
渉を防ぐことができ、又、請求項4記載の発明にあって
は、上記各分割回転軸の各左右両端部に周鍔部を設け、
周鍔部の軸線方向内面によりそれぞれスラスト静圧軸受
構造を構成し、スラスト静圧軸受構造を上記回転工具の
装着位置を中心として相互に左右対称構造に構成してい
るから、軸線方向の荷重を四面で受けることができ、四
面拘束により軸線方向の剛性を一層高めることができ
る。
According to the second aspect of the present invention, the rotating shaft is composed of a pair of divided rotating shafts arranged at both left and right positions in the direction of the rotating axis of the rotating tool, so that the assembling operation is facilitated. According to the third aspect of the present invention, a peripheral flange portion is provided at both left and right ends of the rotating shaft, and a thrust hydrostatic bearing structure is constituted by the axially inner surfaces of the peripheral flange portion. Since the structure is configured to be symmetrical with respect to each other centering on the mounting position of the rotating tool, the hydrostatic bearing structure and the thrust hydrostatic bearing structure can receive loads in the axial direction and the radial direction, and can also receive from the rotating tool. Static pressure can be applied in the outward direction, which increases axial rigidity.In addition, the thrust gap tends to increase even if the rotating shaft expands, preventing interference with the bearing smooth surface. so Further, in the invention described in claim 4, the peripheral flange portion provided at each right and left end portions of each divided rotary shaft,
The thrust hydrostatic bearing structure is formed by the axial inner surface of the peripheral flange portion, and the thrust hydrostatic bearing structure is configured to be mutually symmetrical with respect to the mounting position of the rotary tool. It can be received on four sides, and the rigidity in the axial direction can be further increased by the four-sided constraint.

【0028】又、請求項5記載の発明にあっては、上記
各分割回転軸の回転工具側の内方端部に設けられた周鍔
部に上記回転工具を挟装保持可能な一対の装着部材をそ
れぞれ着脱自在に取付けると共に各分割回転軸の外方端
部に設けられた周鍔部を分割回転軸に対してそれぞれ着
脱自在に設けて構成しているから、回転工具、分割回転
軸、周縁部、装着部材に分割することができ、回転工具
の交換を軸受部分を分解することなく行うことができ、
又、請求項6記載の発明にあっては、上記回転軸と回転
軸を駆動する駆動軸との間に空気静圧を用いた継手構造
を設けて構成しているから、駆動軸側から発生する回転
振動や発熱の回転軸や軸受本体への熱伝播を抑制するこ
とができ、又、請求項7記載の発明にあっては、上記回
転軸に温度制御された冷却水又は空気を給送可能な給送
穴を形成しているから、回転軸の発熱現象を抑制するこ
とができ、一層高精度、高剛性、高速加工が可能とな
り、加工作業性を向上することができる。
Further, in the invention according to claim 5, a pair of mounting members capable of holding and holding the rotary tool on a peripheral flange portion provided at an inner end of the divided rotary shaft on the rotary tool side. Since the members are detachably attached and the peripheral flanges provided at the outer ends of the respective divided rotary shafts are provided so as to be detachable with respect to the divided rotary shaft, respectively, the rotating tool, the divided rotary shaft, Peripheral part, can be divided into mounting members, rotating tools can be replaced without disassembling the bearing part,
In the invention according to claim 6, since a joint structure using static air pressure is provided between the rotary shaft and the drive shaft that drives the rotary shaft, the joint structure is generated from the drive shaft side. The heat transmission to the rotating shaft and the bearing body due to the rotating vibration and heat generated can be suppressed, and in the invention according to claim 7, cooling water or air whose temperature is controlled is supplied to the rotating shaft. Since possible feeding holes are formed, the heat generation phenomenon of the rotating shaft can be suppressed, and higher precision, higher rigidity, and higher speed machining can be performed, and machining workability can be improved.

【0029】以上、所期の目的を充分達成することがで
きる。
As described above, the intended purpose can be sufficiently achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の第一形態例の全体断面図であ
る。
FIG. 1 is an overall sectional view of a first embodiment of the present invention.

【図2】本発明の実施の第一形態例の部分拡大断面図で
ある。
FIG. 2 is a partially enlarged cross-sectional view of the first embodiment of the present invention.

【図3】本発明の実施の第一形態例の全体側面図であ
る。
FIG. 3 is an overall side view of the first embodiment of the present invention.

【図4】本発明の実施の第一形態例の横断面図である。FIG. 4 is a cross-sectional view of the first embodiment of the present invention.

【図5】本発明の実施の第一形態例の片側部分分解斜視
図である。
FIG. 5 is a partially exploded perspective view of one side of the first embodiment of the present invention.

【図6】本発明の実施の第一形態例の片側部分分解斜視
図である。
FIG. 6 is a partially exploded perspective view of one side of the first embodiment of the present invention.

【図7】本発明の実施の第一形態例の基本説明図であ
る。
FIG. 7 is a basic explanatory diagram of the first embodiment of the present invention.

【図8】本発明の実施の第二形態例の全体断面図であ
る。
FIG. 8 is an overall sectional view of a second embodiment of the present invention.

【図9】本発明の実施の第二形態例の片側部分拡大断面
図である。
FIG. 9 is a partially enlarged sectional view on one side of a second embodiment of the present invention.

【図10】本発明の実施の第二形態例の部分横断面図で
ある。
FIG. 10 is a partial cross-sectional view of the second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 回転工具 2 回転軸 2a 分割回転軸 3 軸受筐体 4 周鍔部 5 周鍔部 6 装着部材 7 装着部材 16 駆動軸 18 給送穴 19 通過冷却路 K 装着位置 M 静圧軸受構造 N スラスト静圧軸受構造 F 継手構造 DESCRIPTION OF SYMBOLS 1 Rotary tool 2 Rotating shaft 2a Split rotary shaft 3 Bearing housing 4 Peripheral flange 5 Peripheral flange 6 Mounting member 7 Mounting member 16 Drive shaft 18 Feeding hole 19 Passing cooling path K Mounting position M Hydrostatic bearing structure N Thrust static Pressure bearing structure F Joint structure

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成8年11月19日[Submission date] November 19, 1996

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0004[Correction target item name] 0004

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0004】[0004]

【発明が解決しようとする課題】しかしながら、この種
の片持軸受構造は、軸受発熱に起因する回転軸の熱膨張
により加工時間の経過と共に回転工具の回転軸線方向の
位置が変位し、この回転工具の変位により加工寸法の狂
いが生じ、又、半径方向の剛性が低くて加工速度や加工
精度に限界が生じ易く、又、空気を用いた片持構造の静
圧軸受にあっては、空気の圧縮性により剛性の確保が困
難であると共に負荷の大きい高速加工には不向きである
という不都合を有している。
However, in this type of cantilever bearing structure, the position of the rotating tool in the direction of the rotating axis is displaced with the elapse of machining time due to thermal expansion of the rotating shaft caused by bearing heat. Due to the displacement of the tool, the machining dimensions are deviated, the rigidity in the radial direction is low, and the machining speed and machining accuracy are likely to be limited.In the case of a cantilevered hydrostatic bearing using air, air However, it is difficult to secure the rigidity due to the compressibility and is not suitable for high-speed machining with a large load.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 回転工具が装着される回転軸を該回転工
具の左右両側位置に配置された静圧軸受構造をもつ軸受
筐体により両持状態で軸受可能な回転工具用静圧軸受構
造において、上記回転工具の左右両側位置に配置された
それぞれの静圧軸受構造を上記回転工具の装着位置を中
心として相互に左右対称構造に構成したことを特徴とす
る回転工具用静圧軸受構造。
1. A hydrostatic bearing structure for a rotary tool in which a rotary shaft on which a rotary tool is mounted can be supported in a double-supported state by a bearing housing having a hydrostatic bearing structure disposed on both left and right positions of the rotary tool. A hydrostatic bearing structure for a rotary tool, wherein each of the hydrostatic bearing structures disposed on both left and right sides of the rotary tool is configured to be symmetrical with respect to each other about a mounting position of the rotary tool.
【請求項2】 上記回転軸は上記回転工具の回転軸線方
向の左右両側位置に配置される一対の分割回転軸からな
ることを特徴とする請求項1記載の回転工具用静圧軸受
構造。
2. The hydrostatic bearing structure for a rotary tool according to claim 1, wherein said rotary shaft comprises a pair of split rotary shafts disposed on both left and right positions in a direction of a rotation axis of said rotary tool.
【請求項3】 上記回転軸の左右両端部に周鍔部を設
け、該周鍔部の軸線方向内面によりそれぞれスラスト静
圧軸受構造を構成し、該スラスト静圧軸受構造を上記回
転工具の装着位置を中心として相互に左右対称構造に構
成したことを特徴とする請求項1記載の回転工具用静圧
軸受構造。
3. A peripheral flange portion is provided at both left and right ends of the rotating shaft, and an axial inner surface of the peripheral flange portion constitutes a thrust hydrostatic bearing structure. The thrust hydrostatic bearing structure is mounted with the rotating tool. 2. A hydrostatic bearing structure for a rotary tool according to claim 1, wherein said hydrostatic bearing structure is symmetrical to each other about a position.
【請求項4】 上記各分割回転軸の各左右両端部に周鍔
部を設け、該周鍔部の軸線方向内面によりそれぞれスラ
スト静圧軸受構造を構成し、該スラスト静圧軸受構造を
上記回転工具の装着位置を中心として相互に左右対称構
造に構成したことを特徴とする請求項2記載の回転工具
用静圧軸受構造。
4. A peripheral flange portion is provided at each of the left and right ends of each of said divided rotary shafts, and an axial inner surface of said peripheral flange portion constitutes a thrust hydrostatic bearing structure. 3. The hydrostatic bearing structure for a rotary tool according to claim 2, wherein the structure is symmetrical with respect to the center of the tool mounting position.
【請求項5】 上記各分割回転軸の回転工具側の内方端
部に設けられた周鍔部に上記回転工具を挟装保持可能な
一対の装着部材をそれぞれ着脱自在に取付けると共に上
記各分割回転軸の外方端部に設けられた周鍔部を分割回
転軸に対してそれぞれ着脱自在に設けて構成したことを
特徴とする請求項4記載の回転工具用静圧軸受構造。
5. A pair of mounting members capable of holding and holding the rotary tool are detachably attached to a peripheral flange portion provided at an inner end of the split rotary shaft on the rotary tool side. 5. The hydrostatic bearing structure for a rotary tool according to claim 4, wherein a peripheral flange provided at an outer end of the rotary shaft is detachably provided to the divided rotary shaft.
【請求項6】 上記回転軸と該回転軸を駆動する駆動軸
との間に空気静圧を用いた継手構造を設けて構成したこ
とを特徴とする請求項1乃至3記載の回転工具用静圧軸
受構造。
6. A static power tool for a rotary tool according to claim 1, wherein a joint structure using static air pressure is provided between said rotary shaft and a drive shaft for driving said rotary shaft. Pressure bearing structure.
【請求項7】 上記回転軸に温度制御された冷却水又は
空気を給送可能な給送穴を形成したことを特徴とする請
求項1乃至3記載の回転工具用静圧軸受構造。
7. A hydrostatic bearing structure for a rotary tool according to claim 1, wherein a feed hole capable of feeding temperature-controlled cooling water or air is formed in said rotary shaft.
JP26409596A 1996-10-04 1996-10-04 Hydrostatic bearing structure for rotary tools Expired - Fee Related JP3243635B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26409596A JP3243635B2 (en) 1996-10-04 1996-10-04 Hydrostatic bearing structure for rotary tools

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26409596A JP3243635B2 (en) 1996-10-04 1996-10-04 Hydrostatic bearing structure for rotary tools

Publications (2)

Publication Number Publication Date
JPH10110730A true JPH10110730A (en) 1998-04-28
JP3243635B2 JP3243635B2 (en) 2002-01-07

Family

ID=17398447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26409596A Expired - Fee Related JP3243635B2 (en) 1996-10-04 1996-10-04 Hydrostatic bearing structure for rotary tools

Country Status (1)

Country Link
JP (1) JP3243635B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111623038A (en) * 2020-07-06 2020-09-04 德本恒嘉精机(昆山)有限公司 Ultrahigh-precision hydrostatic bearing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111623038A (en) * 2020-07-06 2020-09-04 德本恒嘉精机(昆山)有限公司 Ultrahigh-precision hydrostatic bearing
CN111623038B (en) * 2020-07-06 2023-08-29 德本恒嘉精机(昆山)有限公司 Ultra-high precision hydrostatic bearing

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Publication number Publication date
JP3243635B2 (en) 2002-01-07

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