JPH0999553A - Ink jet head - Google Patents
Ink jet headInfo
- Publication number
- JPH0999553A JPH0999553A JP26141295A JP26141295A JPH0999553A JP H0999553 A JPH0999553 A JP H0999553A JP 26141295 A JP26141295 A JP 26141295A JP 26141295 A JP26141295 A JP 26141295A JP H0999553 A JPH0999553 A JP H0999553A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- pressure
- pressure plate
- plate
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、インクジェットプ
リンタのインクジェットヘッドに係り、特に加圧板に圧
電素子をガイドして位置決めする溝を設けたインクジェ
ットヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inkjet head of an inkjet printer, and more particularly to an inkjet head having a pressure plate provided with a groove for guiding and positioning a piezoelectric element.
【０００２】近来、印字媒体にインクの微粒子を直接吹
きつけて記録するインクジェットプリンタが、印字媒体
に対する制限がなく、且つ高速印字ができて、低騒音で
あり、カラー化が容易であることから急速に普及しつつ
ある。Recently, an ink jet printer for directly recording fine particles of ink onto a printing medium for recording has no limitation on the printing medium, can print at high speed, has low noise, and is easy to colorize. Is becoming popular.
【０００３】このインクジェットプリンタのヘッドは、
例えば、ノズルを有するノズル板、壁部材、弾性部材及
び加圧板で形成した圧力室を複数備え、夫々の加圧板に
圧電素子を配置して、圧電素子に選択的に電圧を印加し
てその電歪による変位で、加圧板を介してインクを満た
した各圧力室に圧力を与えて、ノズルからインクを噴射
して用紙にドット印字を形成するものである。The head of this ink jet printer is
For example, a plurality of pressure chambers each including a nozzle plate having a nozzle, a wall member, an elastic member, and a pressure plate are provided, and each pressure plate is provided with a piezoelectric element, and a voltage is selectively applied to the piezoelectric element to apply the voltage to the piezoelectric element. Displacement due to strain applies pressure to each pressure chamber filled with ink via a pressure plate, and ejects ink from nozzles to form dot printing on paper.
【０００４】この場合に、夫々の加圧板に圧電素子を配
置する位置の精度が出しにくく、圧電素子の位置がずれ
ると、各加圧板による圧力室の圧力上昇に差異が出て、
噴射するインクの飛翔特性（粒量及び噴射速度）にバラ
ツキが生じて印字品質が低下するので、圧電素子の位置
のずれを防止する方法が望まれている。In this case, it is difficult to obtain the accuracy of the position where the piezoelectric element is arranged on each pressure plate, and if the position of the piezoelectric element shifts, there is a difference in the pressure rise of the pressure chamber by each pressure plate,
Since variations occur in the flight characteristics of ejected ink (particle amount and ejection speed) and print quality deteriorates, a method for preventing displacement of the piezoelectric element is desired.
【０００５】[0005]
【従来の技術】図９にインクジェットプリンタの概要を
示す。図に示すように、インクジェットヘッド（以下印
字ヘッドという)1を搭載したキャリア２にガイドシャフ
ト３が嵌合し、また、プーリP1,P2 に掛けられたタイミ
ングベルト（以下ベルトという)4にキャリア２が固定さ
れ、プーリP1はモータM1に連結されている。2. Description of the Related Art FIG. 9 shows an outline of an ink jet printer. As shown in the figure, a guide shaft 3 is fitted to a carrier 2 on which an inkjet head (hereinafter referred to as a print head) 1 is mounted, and a carrier 2 is mounted on a timing belt (hereinafter referred to as a belt) 4 hung on pulleys P1 and P2. Is fixed, and the pulley P1 is connected to the motor M1.
【０００６】キャリア２は板状のプラテン５の上方に配
置され、モータM1の正逆方向回転によりベルト４によっ
てプラテン５に平行に矢印Ａ、Ｂ方向に移動する。プラ
テン５の前段にモータM2に連結された送りローラＲが配
置されている。The carrier 2 is disposed above the plate-shaped platen 5, and is moved in parallel with the platen 5 in the directions of arrows A and B by the belt 4 by the rotation of the motor M1 in the forward and reverse directions. A feed roller R connected to the motor M2 is disposed at a stage preceding the platen 5.
【０００７】印字ヘッド１は、ヘッド部10及びインクタ
ンク11から成り、ヘッド部10は、プラテン５に所定の間
隙を介して対向し、先端に後述する複数のノズルを有し
ている。インクタンク11は、複数のノズルに共通し、ヘ
ッド部10に供給するインクが収容されている。The print head 1 comprises a head portion 10 and an ink tank 11. The head portion 10 faces the platen 5 with a predetermined gap and has a plurality of nozzles, which will be described later, at its tip. The ink tank 11 is common to a plurality of nozzles and stores ink to be supplied to the head unit 10.
【０００８】従って、キャリア２が移動しながら、印字
ヘッド１はノズルからインクを噴射して印字用紙７にマ
トリックスドットによって印字を形成する。印字用紙７
は送りローラＲの回転によって矢印Ｃ方向に行送りされ
る。Therefore, while the carrier 2 moves, the print head 1 ejects ink from the nozzles to form a print on the print paper 7 by matrix dots. Printing paper 7
Is fed in the direction of arrow C by the rotation of the feed roller R.
【０００９】次にヘッド部10については、本出願人によ
り、特願平３−５１１６８５号により、壁部材の一部を
弾性部材で構成し、圧電素子の電歪によって加圧板を弾
性的に変位させて圧力室のインクの圧力を変化させてイ
ンクを噴射するインクジェットヘッドが提案されている
が、以下に概要を説明する。Next, regarding the head portion 10, according to the applicant of the present application, Japanese Patent Application No. 3-511685, a part of the wall member is made of an elastic member, and the pressure plate is elastically displaced by electrostriction of the piezoelectric element. An inkjet head has been proposed which ejects the ink by changing the pressure of the ink in the pressure chamber, and the outline will be described below.
【００１０】図１０及び図１１に示すように、ヘッド部
10は、圧電素子81,82,…と、ノズル91,92,…（例えば、
孔径30〜50μｍ) が夫々設けられたノズル板121,122,
…、圧力室131,132,…、インク供給口161,162,…を夫々
有する壁部材141,142,…、シリコーンゴムで形成された
弾性部材151,152,…及びガラス板で形成された加圧板17
1,172,…で構成されている。As shown in FIGS. 10 and 11, the head portion
10 is a piezoelectric element 81, 82,,, and nozzle 91, 92, ... (for example,
Nozzle plate 12 with hole diameters of 30 to 50 μm)1,122,
…, Pressure chamber 131,132,,, ink supply port 161, 162, ...
Wall member having 141,142, ..., made of silicone rubber
Elastic member 151, 152, And a pressure plate 17 formed of a glass plate
1, 172,,.
【００１１】圧電素子81,82,…は、個々には矩形板状
で、複数の矩形板状の部分と連結された部分で櫛歯状に
一体に形成され、矩形板状の部分の一端面が加圧板171,
172,…の外側に接着され、両面に電極18a1,18a2,…、18
b1,18b2,…（例えば、電極18a1,18a2 は個別電極、電極
18b1,18b2,…は共通電極とする) が設けられている。Each of the piezoelectric elements 8 1 , 8 2 , ... Is a rectangular plate, and is integrally formed in a comb-tooth shape at a portion connected to a plurality of rectangular plate-shaped portions. One end surface is pressure plate 17 1 ,
The electrodes 18a 1 , 18a 2 , ..., 18 are bonded to the outside of the electrodes 17 2 , ...
b 1 , 18b 2 , ... (For example, electrodes 18a 1 and 18a 2 are individual electrodes,
18b 1 , 18b 2 , ... Are common electrodes).
【００１２】また、ノズル板121,122,…に壁部材141,14
2,…が接合され、壁部材141,142,…の他面は弾性部材15
1,152,…を介して加圧板171,172,…に接合し、これらに
囲まれた空間部により圧力室131,132,…が形成されてい
る。インク供給口161,162,…は、前記のインクタンク11
に接続されている。Further, the nozzle plates 12 1 , 12 2 , ... Have wall members 14 1 , 14
2 , ... are joined, and the other surface of the wall members 14 1 , 14 2 , ... Is elastic member 15
Are joined to the pressure plates 17 1 , 17 2 , and so on via 1 , 15 2 , and pressure chambers 13 1 , 13 2 , and so on are formed by the space surrounded by these. The ink supply ports 16 1 , 16 2 , ... Are the ink tanks 11 described above.
It is connected to the.
【００１３】ノズル板121,122,…、壁部材141,142,…及
び加圧板171,172,…は、夫々が一体に形成されて、ノズ
ル板121,122,…と壁部材141,142,…は静電接合 (或いは
拡散接合) 或いは接着剤等によって接合されている。The nozzle plates 12 1 , 12 2 , ..., The wall members 14 1 , 14 2 , ... And the pressure plates 17 1 , 17 2 , ... Are integrally formed to form the nozzle plates 12 1 , 12 2 ,. , And the wall members 14 1 , 14 2 , ... Are joined by electrostatic bonding (or diffusion bonding) or an adhesive.
【００１４】また、弾性部材151,152,…は、加圧板171,
172,…上にスクリーン印刷等の方法によって液状の弾性
部材が塗布され、上記のノズル板121,122,…を結合した
壁部材141,142,…の他面とで弾性部材を挟んで、加熱硬
化させて形成される。Further, the elastic members 15 1, 15 2, ... is a pressure plate 17 1,
A liquid elastic member is applied on the surface 17 2 , ... By a method such as screen printing, and the elastic member is formed on the other surface of the wall member 14 1 , 14 2 , ... To which the nozzle plates 12 1 , 12 2 , ... It is formed by heating and curing it with sandwiching.
【００１５】弾性部材151,152,…を形成する理由は、圧
電素子81,82,…の電歪によって圧力室131,132,…を変形
させてインク6aに圧力を与えた時に、壁部材141,142,…
が外側に膨れるように変形して、圧力がインク6aに効率
良く加えられないので、これを改善するために、弾性部
材151,152,…の弾力を利用したものである。The reason why the elastic members 15 1 , 15 2 , ... Are formed is that the pressure chambers 13 1 , 13 2 , ... Are deformed by the electrostriction of the piezoelectric elements 8 1 , 8 2 ,. When the wall members 14 1 , 14 2 , ...
Are deformed so as to bulge outward, and the pressure cannot be efficiently applied to the ink 6a. Therefore, in order to improve this, the elasticity of the elastic members 15 1 , 15 2 , ... Is used.
【００１６】従って、圧電素子81,82,…の電極18a1,18a
2,…、18b1,18b2,…に選択的に電圧を印加して、圧電素
子81,82,…の電気歪みの変位量により対応する加圧板17
1,17 2,…を振動させることによって、圧力室131,132,…
に圧力を加えて、インク供給口161,162,…から供給され
たインク6aが上記のようにノズル91,92,…から噴射す
る。Therefore, the piezoelectric element 81, 82, ... electrode 18a1, 18a
2, ..., 18b1, 18b2, ... are selectively applied to the piezoelectric element
Child 81, 82Pressurizing plate 17 corresponding to the displacement amount of electric strain of ...
1, 17 2By vibrating, ...1,132, ...
Apply pressure to the ink supply port 161, 162Sourced from ...
Ink 6a is applied to the nozzle 91, 92, ...
You.
【００１７】なお、加圧板171,172,…と壁部材141,142,
…、或いはノズル板121,122,…と壁部材141,142,…を一
体として、例えば電鋳法で形成したヘッド部もある。ま
た、ステンレス鋼板或いは感光ガラスをエッチングして
形成したノズル板、壁部材及び加圧板を使用したヘッド
部もある。The pressure plates 17 1 , 17 2 , ... And the wall members 14 1 , 14 2 ,
, Or the nozzle plates 12 1 , 12 2 , ... And the wall members 14 1 , 14 2 , ... Are integrally formed, for example, there is also a head portion formed by an electroforming method. Further, there is also a head portion using a nozzle plate formed by etching a stainless steel plate or a photosensitive glass, a wall member and a pressure plate.
【００１８】図１２(a) に示すように、圧電素子81,82,
…は櫛歯状に形成されており、形成方法は、圧電体ブロ
ックBLにダイシングソウで所定位置までスリットを入
れ、次に各圧電素子81,82,…に電極18a1,18a2,…、18
b1,18b2,…を形成するために無電解メッキ（Ｎｉ−Ａｕ
等）を施して、櫛歯の根元でメッキ層を切断して絶縁切
りを行う。なお、櫛歯の端面は予め研磨（Raで 500Å程
度) しておくことでメッキが付着しない。As shown in FIG. 12 (a), the piezoelectric elements 8 1 , 8 2 ,
... are formed in a comb shape, forming method, a slit to a predetermined position by a dicing saw to piezoelectric block BL, then the piezoelectric elements 81, 82, ... to the electrodes 18a 1, 18a 2, …, 18
b 1 , 18b 2 , ... To form electroless plating (Ni-Au
Etc.) and cut the plated layer at the base of the comb teeth to cut the insulation. It should be noted that the end surface of the comb teeth is polished (Ra of about 500Å) in advance so that plating does not adhere.
【００１９】次いで、ヘッド部10に必要な、縦に並んだ
圧電素子81,82,…の列数に対応する幅にブロック状に切
り出して圧電素子部Baを形成する。図１２(b) に２列
（図においてＡ列及びＢ列）をブロックとした場合を示
している。Next, the piezoelectric element portion Ba is formed by cutting it into blocks in a width corresponding to the number of columns of the piezoelectric elements 8 1 , 8 2 , ... FIG. 12B shows a case where two columns (columns A and B in the figure) are used as blocks.
【００２０】この圧電素子部Baの各圧電素子81,82,…を
各加圧板171,172,…に位置決めして接着することによ
り、前記のようなヘッド部10が形成される。The head portion 10 as described above is formed by positioning and bonding the piezoelectric elements 8 1 , 8 2 , ... Of the piezoelectric element portion Ba to the pressure plates 17 1 , 17 2 ,. .
【００２１】[0021]
【発明が解決しようとする課題】上記従来方法によれ
ば、圧電体ブロックにダイシングソウによりスリットを
入れて櫛形状に圧電素子を形成しており、櫛形状のため
に圧電素子の先端と加圧板との接触面積が小さく、大き
な圧力を発生させるのが困難である。しかも、スリット
加工による各圧電素子の先端間のピッチに誤差を生じ、
そのまま夫々対応する加圧板に当接して接合しているの
で、接合位置のずれが避けられず、圧電素子の駆動によ
る圧力室の変位体積量（圧力変化効率）にバラツキが生
じて、各ノズルのインクの飛翔特性（粒量及び噴射速
度）に相違が出て印字品質が損なわれる。従って、最も
効率の良い圧力室の中心に対応する位置に圧電素子が当
接する必要がある。という問題点がある。According to the above-mentioned conventional method, the piezoelectric element is formed in a comb shape by forming slits in the piezoelectric block by the dicing saw, and the tip of the piezoelectric element and the pressure plate are formed due to the comb shape. It is difficult to generate a large pressure due to its small contact area with. Moreover, an error occurs in the pitch between the tips of each piezoelectric element due to the slit processing,
Since they are in contact with the corresponding pressure plates and joined as they are, the displacement of the joining position is unavoidable, and the displacement volume amount (pressure change efficiency) of the pressure chamber due to the driving of the piezoelectric element varies, and each nozzle nozzle Differences in ink flight characteristics (particle amount and jetting speed) occur and print quality is impaired. Therefore, it is necessary for the piezoelectric element to contact the position corresponding to the center of the most efficient pressure chamber. There is a problem.
【００２２】本発明は、圧電素子の先端の位置及びピッ
チのバラツキを修正して加圧板に接合することにより、
インクの飛翔特性を改善することができ、印字品質を高
めることができるインクジェットヘッドを提供すること
を目的としている。The present invention corrects the variation in the position and pitch of the tip of the piezoelectric element and joins it to the pressure plate,
It is an object of the present invention to provide an inkjet head capable of improving the flight characteristics of ink and enhancing printing quality.
【００２３】[0023]
【課題を解決するための手段】図１は本発明の原理説明
図である。図１において、６はインク、８は圧電素子、
9 はノズル、16はインク供給口、12はインク６を噴射さ
せるノズル９を有するノズル板、17は片面の中心に凹部
19が形成され、インク６を押し出す加圧板、19は加圧板
14に設けられ、圧電素子８の端部がガイドされて当接
し、少なくとも一方向の中心からの位置ずれに対する拘
束性を有する形状に形成された凹部、14はノズル板12及
び加圧板17を接続し、インク供給口16を有する壁部材、
13はノズル板12、壁部材14及び加圧板17で形成され、イ
ンク供給口16からインクが供給される圧力室である。FIG. 1 is a diagram illustrating the principle of the present invention. In FIG. 1, 6 is ink, 8 is a piezoelectric element,
Reference numeral 9 is a nozzle, 16 is an ink supply port, 12 is a nozzle plate having a nozzle 9 for ejecting the ink 6, and 17 is a concave portion at the center of one surface.
19 is a pressure plate for pushing out the ink 6, and 19 is a pressure plate
A concave portion is provided in 14, which is guided by the end portion of the piezoelectric element 8 and abuts on the piezoelectric element 8 and has a shape of restraining displacement from the center in at least one direction. Reference numeral 14 connects the nozzle plate 12 and the pressure plate 17. A wall member having the ink supply port 16,
Reference numeral 13 is a pressure chamber formed by the nozzle plate 12, the wall member 14 and the pressure plate 17, and supplied with ink from the ink supply port 16.
【００２４】圧力室13及び圧電素子８を複数組備え、圧
電素子８に選択的に電圧を印加することによって加圧板
17を駆動させて、圧力室13に圧力変化を与えて、圧力室
13に供給されたインク６をノズル９から噴射するように
構成されている。A plurality of sets of pressure chambers 13 and piezoelectric elements 8 are provided, and a pressure plate is formed by selectively applying a voltage to the piezoelectric elements 8.
17 is driven to apply a pressure change to the pressure chamber 13,
The ink 6 supplied to the nozzle 13 is ejected from the nozzle 9.
【００２５】従って、加圧板17の中心位置に設けられた
凹部19によって圧電素子８の端部がガイドされるので、
複数の圧電素子８の端部間のピッチのずれが修正されて
凹部19に当接し、加圧板17への位置決めが容易となり、
圧力室13の圧力変化のバラツキをなくして均一化するこ
とができ、飛翔特性が改善して印字品質を高めることが
できる。Therefore, the end of the piezoelectric element 8 is guided by the recess 19 provided at the center of the pressure plate 17,
The pitch deviation between the end portions of the plurality of piezoelectric elements 8 is corrected and abuts the concave portion 19, which facilitates positioning on the pressure plate 17,
It is possible to eliminate variations in the pressure change of the pressure chambers 13 and make them uniform, improve flight characteristics, and improve printing quality.
【００２６】請求項２：壁部材14は、少なくとも一部が
弾性部材で形成される構成とする。従って、圧電素子８
による加圧板17の駆動で壁部材14の外側方向への変形が
防止され、圧力室13の圧力変化の効率を高めることがで
きる。Claim 2: The wall member 14 is constructed such that at least a part thereof is formed of an elastic member. Therefore, the piezoelectric element 8
By driving the pressure plate 17 by the above, the deformation of the wall member 14 in the outward direction is prevented, and the efficiency of the pressure change of the pressure chamber 13 can be improved.
【００２７】請求項３：凹部19の開口部が底面より広が
っている構成とする。従って、開口部の広がりによって
圧電素子８の端部がガイドされて凹部19の底面に当接
し、容易に位置決めすることができる。Claim 3: The opening of the recess 19 is wider than the bottom surface. Therefore, the end of the piezoelectric element 8 is guided by the expansion of the opening and abuts on the bottom surface of the concave portion 19, so that the piezoelectric element 8 can be easily positioned.
【００２８】請求項４：凹部19は、底面が形成された薄
い部分が他の部分よりヤング率が高い構成とする。従っ
て、薄い部分でも剛性が高いので、効率良く圧力室13に
圧力の伝達を行うことができる。A fourth aspect of the present invention is such that the thin portion having the bottom face has a higher Young's modulus than the other portions. Therefore, the rigidity is high even in the thin portion, so that the pressure can be efficiently transmitted to the pressure chamber 13.
【００２９】[0029]
【発明の実施の形態】以下、図２〜図８により本発明の
実施例及び異なる実施例を説明する。全図を通じて同一
符号は同一対象物を示す。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention and different embodiments will be described below with reference to FIGS. The same reference numerals denote the same objects throughout the drawings.
【００３０】図２は本発明の実施例を示す構成図、図３
及び図４は加圧板の凹部を示す説明図、図５は圧電素子
部を説明する斜視図、図６は凹部の作成方法を示す説明
図、図７は加圧板と圧電素子の接合を示す説明図であ
る。FIG. 2 is a block diagram showing an embodiment of the present invention, FIG.
FIG. 4 is an explanatory view showing the recess of the pressure plate, FIG. 5 is a perspective view illustrating the piezoelectric element portion, FIG. 6 is an explanatory view showing the method of forming the recess, and FIG. 7 is an illustration showing the joining of the pressure plate and the piezoelectric element. It is a figure.
【００３１】図２(a) 及び(b) に示すように、ヘッド部
10ａにおいて、加圧板17a1,17a2,…には、夫々の中心位
置（即ち、圧力室131,132,…の中心位置に対応する) に
凹部191,192,…が形成され、圧電素子部Baの櫛形状の圧
電素子81,82,…の先端が接合されている。As shown in FIGS. 2A and 2B, the head portion
In 10a, the pressure plate 17a 1, 17a 2, ..., the center position of each (i.e., the pressure chambers 13 1, 13 2, ... corresponding to the center position of the) concave portions 19 1 to 19 2, ... are formed The tips of the comb-shaped piezoelectric elements 8 1 , 8 2 , ... Of the piezoelectric element portion Ba are joined.
【００３２】図３(a) 及び(b) に示すように、凹部191,
192,…は、開口部21が底面20より広がった形状に斜面22
が形成され、圧電素子81,82,…の先端が凹部191,192,…
の斜面22にガイドされて底面20に当接し、図４(a) に示
すように、前後左右の位置ずれに対する拘束性を有する
ように、四辺形の窪みに形成されている。なお、図４
(b) に一方向だけの位置ずれに対して拘束性を有する、
縦方向の溝とした凹部19a1,19a2,…を形成した場合を示
している。As shown in FIGS. 3 (a) and 3 (b), the recesses 19 1 ,
19 2 , ... has a slope 22 with a shape in which the opening 21 is wider than the bottom 20.
Are formed, and the tips of the piezoelectric elements 8 1 , 8 2 , ... Are concave portions 19 1 , 19 2 ,.
It is formed into a quadrangular recess so as to be in contact with the bottom surface 20 while being guided by the inclined surface 22 and to have a restraint property with respect to the positional deviation in the front, rear, left and right directions as shown in FIG. 4 (a). FIG.
(b) has a restraint property against displacement in only one direction,
Shown is a case where recesses 19a 1 , 19a 2 , ... Are formed as vertical grooves.
【００３３】図５に示すように、圧電素子部Baは、例え
ば、２列（図２に示した圧電素子部Baは４列の場合）の
圧電素子部Baの場合の寸法を示し、長さＬ1 ６×幅Ｗ1
３.2×高さＨ1 ５ｍｍ、圧電素子81,82,…の寸法：幅Ｗ
2 ０.1×長さＬ21.325×高さＨ2 ３ｍｍ、ピッチＰ０.2
82ｍｍに形成されている。また、サイド部の厚さＴは0.
512ｍｍ、Ａ列とＢ列の間隔Ｇは0.55ｍｍに設定してい
る。As shown in FIG. 5, the piezoelectric element portion Ba shows the dimensions and the length in the case of the piezoelectric element portion Ba of two rows (when the piezoelectric element portion Ba shown in FIG. 2 has four rows), for example. L 1 6 x width W 1
3.2 × height H 15 mm, dimensions of piezoelectric elements 8 1 , 8 2 , ...: Width W
2 0.1 x length L 2 1.325 x height H 2 3 mm, pitch P 0.2
It is formed to 82 mm. Also, the thickness T of the side part is 0.
The distance G between the row A and the row B is set to 512 mm and 0.55 mm.
【００３４】次に、図６により、加圧板17a1,17a2,…の
凹部191,192,…の形成方法を説明する。 まず、ガラス板170(複数の加圧板17a1,17a2,…に対応
して一体に形成され、例えば、厚さ０.1ｍｍのガラス基
板) の片面にシリコーンゴム (弾性部材151,15 2,…とな
る)171をスクリーン印刷法により塗布（例えば、厚さ50
μｍ）する。Next, referring to FIG. 6, the pressure plate 17a1, 17a2,…of
Recess 191, 192A method of forming, ... Will be described. First, the glass plate 170 (the plurality of pressure plates 17a1, 17a2Corresponding to ...
And integrally formed, for example, a glass substrate with a thickness of 0.1 mm
Silicone rubber (elastic member 151, 15 2, ...
171 applied by screen printing (for example, a thickness of 50
μm).
【００３５】次に、ノズル板121,122,…に一端を接着
した壁部材141,142,…の他端面に、シリコーンゴム171
を塗布したガラス板170 のシリコーンゴム171 側を貼り
付け、120 ℃、60分でシリコーンゴム171 を硬化し、図
６(a) に示すように、壁部材141,142,…にシリコーンゴ
ム171 及びガラス板170 を積層接着する。Next, the silicone rubber 171 is attached to the other end surface of the wall members 14 1 , 14 2 , ... Adhering one end to the nozzle plates 12 1 , 12 2 ,.
The silicone rubber 171 side of the glass plate 170 coated with is attached, the silicone rubber 171 is cured at 120 ° C. for 60 minutes, and the silicone rubber is attached to the wall members 14 1 , 14 2 , ... As shown in FIG. 6 (a). 171 and the glass plate 170 are laminated and bonded.
【００３６】接着したガラス板170 の面にポジフォト
レジストをスピナー回転により塗布(例えば、膜厚１μ
ｍ）し、フォトファブリケーション(Photo Fabricatio
n) によりレジストパターンを作成し、ガラス板170 を
エッチング液 (例えば、フッ酸) によって浸食させてハ
ーフエッチングし、凹部191,192,…を形成する。この場
合、図６(b) に示すように、等方性エッチングでも45°
のパターン周辺に開口部21が広がった（例えば、Ｗ4 約
0.21ｍｍ）斜面22が形成される。（例えば、深さＨ3 0.
03ｍｍ、底面20の幅Ｗ3 0.15ｍｍ：加圧板17a1,17a2,…
の幅0.19ｍｍから、エッチング精度とピッチのバラツキ
から底面20の幅を設定した。) ダイサーで圧力室131,132,…に対応する大きさに分離
カットして、図６(c)に示すように、加圧板17a1,17a2,
…を形成する。A positive photoresist is applied to the surface of the adhered glass plate 170 by spinner rotation (for example, a film thickness of 1 μm).
m) and Photo Fabrication (Photo Fabricatio
n), a resist pattern is formed, and the glass plate 170 is half-etched by eroding the glass plate 170 with an etching solution (for example, hydrofluoric acid) to form recesses 19 1 , 19 2 , .... In this case, as shown in Fig. 6 (b), even if the etching is isotropic, the angle is 45 °.
The opening 21 spread around the pattern (for example, W 4
0.21 mm) Slope 22 is formed. (For example, depth H 30 .
03 mm, width W 3 of the bottom 20 0.15 mm: pressure plates 17a 1 , 17a 2 , ...
From the width of 0.19 mm, the width of the bottom surface 20 was set based on variations in etching accuracy and pitch. ) Separately cut into a size corresponding to the pressure chambers 13 1 , 13 2 , ... With a dicer, and pressurizing plates 17a 1 , 17a 2 ,
... to form.
【００３７】このように形成した加圧板17a1,17a2,…の
凹部191,192,…に紫外線硬化性接着剤 (商品名ロックタ
イト363:ロックタイト社製) を塗布し、図７に示すよう
に、凹部191,192,…に圧電素子81,82,…の先端を当てが
うと、先端が開口部21から斜面22にガイドされて底面20
に位置決めされ、紫外線の照射（15ｍｊ／ｃｍ、90S)に
よって硬化して接着する。An ultraviolet-curable adhesive (trade name: Loctite 363: manufactured by Loctite Co.) is applied to the recesses 19 1 , 19 2 of the pressure plates 17a 1 , 17a 2 , ... Formed in this way, and is shown in FIG. As described above, when the tips of the piezoelectric elements 8 1 , 8 2 , ... are applied to the recesses 19 1 , 19 2 , ..., the tips are guided by the slopes 22 from the openings 21 and the bottom surface 20
Positioned at, and cured by UV irradiation (15 mj / cm, 90S) and bonded.
【００３８】図８に異なる実施例を示す。異なる実施例
が上記実施例と異なるのは、ガラス板に凹部を形成する
方法に代えて、ガラス板に貼ったドライフィルムに凹部
を形成する方法としたことである。FIG. 8 shows a different embodiment. The different example is different from the above example in that instead of forming the concave portion on the glass plate, a method is formed on the dry film attached to the glass plate.
【００３９】即ち、図８に示すように、ヘッド部10ｂに
おいて、加圧板17b1,17b2,…には、圧電素子部Baの櫛形
状の圧電素子81,82,…の先端に対応する接合位置に、夫
々凹部19b1,19b2,…が形成されている。凹部19b1,19b2,
…は、上記実施例の凹部191,192,…と同形状に形成され
ている。That is, as shown in FIG. 8, in the head portion 10b, the pressure plates 17b 1 , 17b 2 , ... Correspond to the tips of the comb-shaped piezoelectric elements 8 1 , 8 2 ,. Recesses 19b 1 , 19b 2 , ... Are formed at the joining positions. Recesses 19b 1 , 19b 2 ,
Are formed in the same shape as the concave portions 19 1 , 19 2 ,.
【００４０】凹部19b1,19b2,…の形成方法は、前記実施
例の図６(a) で積層したガラス板170 の面に、有機樹脂
材で形成されたドライフィルム172 をラミネートし、ド
ライフィルム172 の面に、実施例と同様にフォトレジス
トを塗布する。The recesses 19b 1 , 19b 2 , ... Are formed by laminating a dry film 172 made of an organic resin material on the surface of the glass plate 170 laminated in FIG. A photoresist is applied to the surface of the film 172 as in the example.
【００４１】次いで、フォトファブリケーションにより
レジストパターンを作成し、ドライフィルム172 をドラ
イフィルム現像液によってハーフエッチングして、凹部
19b1,19b2,…を形成する。更に、底面20だけをキュア
（６０℃に加熱）して硬化させる。従って、他の部分よ
り底面20のヤング率が高くなり、圧電素子81,82,…の駆
動により効率良く圧力室131,132,…へ圧力を伝達するこ
とができる。Next, a resist pattern is formed by photofabrication, and the dry film 172 is half-etched by a dry film developing solution to form a recess.
19b 1 , 19b 2 , ... Are formed. Further, only the bottom surface 20 is cured (heated to 60 ° C.) and cured. Therefore, the Young's modulus of the bottom surface 20 becomes higher than that of other portions, and the pressure can be efficiently transmitted to the pressure chambers 13 1 , 13 2 , ... By driving the piezoelectric elements 8 1 , 8 2 ,.
【００４２】このようにして、位置決めした圧電素子
81,82,…の圧力室131,132,…に対する位置ずれを調査し
た結果、著しく位置ずれが減少していることが確認さ
れ、圧力変化の効率が向上し、且つ、すべてのノズル
91,92,…からインク6aが均一に噴射するヘッド部10a,10
b が得られた。従って、インクの飛翔特性を改善するこ
とができて、印字品質を高めることができる。The piezoelectric element positioned in this way
As a result of investigating the positional deviation of 8 1 , 8 2 , ... With respect to the pressure chambers 13 1 , 13 2 , ..., it was confirmed that the positional deviation was remarkably reduced, the efficiency of pressure change was improved, and nozzle
Ink 6a is ejected uniformly from 9 1 , 9 2 , ... Heads 10a, 10
b was obtained. Therefore, the ink flying characteristics can be improved, and the printing quality can be improved.
【００４３】上記実施例では、紫外線硬化性の接着剤を
使用した場合を説明したが、他の接着剤、例えば、エボ
キシ系の接着剤を使用しても良い。また、上記例では、
ガラス板170 或いはドライフィルム172 を使用してエッ
チングにより凹部191,192,…或いは凹部19b1,19b2,…を
形成した場合を説明したが、樹脂材等の射出成型によっ
て加圧板と一緒に凹部パターンを形成する方法としても
良い。In the above embodiment, the case where the ultraviolet curable adhesive is used has been described, but other adhesives, for example, an epoxy type adhesive may be used. In the above example,
The case where the recesses 19 1 , 19 2 , ... Or the recesses 19b 1 , 19b 2 , ... Are formed by etching using the glass plate 170 or the dry film 172 has been described. It is also possible to form a concave pattern on the substrate.
【００４４】更に、上記例では、壁部材141,142,…と加
圧板17a1,17a2,…或いは加圧板17b1,17b2,…の間に弾性
部材151,152,…を配置したゴム171 でガラス板170 を接
合したヘッド部10a,10b の場合を説明したが、弾性部材
151,152,…を用いないヘッドの場合にも同様に適用する
ことができる。この場合には、壁部材141,142,…にガラ
ス板170 を接着剤で接着する。[0044] Further, in the above example, the wall member 14 1, 14 2, ... and the pressing plate 17a 1, 17a 2, ... or the pressure plate 17b 1, 17b 2, ... elastic member 15 1, 15 2 between, ... The case of the heads 10a and 10b in which the glass plate 170 is joined with the rubber 171 in which the
The same can be applied to a head that does not use 15 1 , 15 2 , ... In this case, the glass plate 170 is adhered to the wall members 14 1 , 14 2 , ... With an adhesive.
【００４５】[0045]
【発明の効果】以上説明したように本発明によれば、加
圧板の凹部によって圧電素子の端部がガイドされて、複
数の圧電素子の端部間のピッチのずれが修正されて凹部
に当接し、加圧板への位置決めが容易となり、圧力室の
圧力変化のバラツキをなくして噴射インクの飛翔特性が
改善されて印字品質を高めることができるという効果が
ある。As described above, according to the present invention, the end portion of the piezoelectric element is guided by the concave portion of the pressure plate, the pitch deviation between the end portions of the plurality of piezoelectric elements is corrected, and the concave portion is abutted. In contact with each other, the positioning to the pressure plate is facilitated, the variation in the pressure change of the pressure chamber is eliminated, the flight characteristics of the ejected ink are improved, and the printing quality can be improved.
【図１】 本発明の原理説明図FIG. 1 is a diagram illustrating the principle of the present invention.
【図２】 本発明の実施例を示す構成図FIG. 2 is a configuration diagram showing an embodiment of the present invention.
【図３】 加圧板の凹部を示す説明図（その１）FIG. 3 is an explanatory view showing the concave portion of the pressure plate (No. 1)
【図４】 加圧板の凹部を示す説明図（その２）FIG. 4 is an explanatory view showing a concave portion of the pressure plate (part 2).
【図５】 圧電素子部を説明する斜視図FIG. 5 is a perspective view illustrating a piezoelectric element section.
【図６】 凹部の作成方法を示す説明図FIG. 6 is an explanatory view showing a method for forming a recess.
【図７】 加圧板と圧電素子の接合を示す説明図FIG. 7 is an explanatory view showing joining of the pressure plate and the piezoelectric element.
【図８】 本発明の異なる実施例を示す構成図FIG. 8 is a configuration diagram showing a different embodiment of the present invention.
【図９】 インクジェットプリンタの概要を示す斜視図FIG. 9 is a perspective view showing an outline of an inkjet printer.
【図１０】 ヘッド部の一部を破断して示す斜視図FIG. 10 is a perspective view showing a part of a head portion by breaking.
【図１１】 ヘッド部を例示する構成図FIG. 11 is a configuration diagram illustrating a head unit.
【図１２】 櫛歯状圧電素子の形成方法の説明図FIG. 12 is an explanatory diagram of a method for forming a comb-shaped piezoelectric element.
６,6a はインク、 ８,81,82は圧電素子、 ９,91,
92はノズル、12,121,122はノズル板、13,131,132は圧力
室、 14,141,142は壁部材、16,161,162はインク供給
口、17,171,172,17a1,17a2,17b1,17b2は加圧板、19,1
91,192,19a1,19a2,19b1,19b2は凹部、 20は底面、
21は開口部、 22は斜面6,6a is ink, 8,8 1 , 8 2 are piezoelectric elements, 9,9 1 ,
9 2 is a nozzle, 12, 12 1 and 12 2 are nozzle plates, 13, 13 1 and 13 2 are pressure chambers, 14, 14 1 and 14 2 are wall members, 16, 16 1 and 16 2 are ink supply ports, 17,17 1, 17 2, 17a 1 , 17a 2, 17b 1, 17b 2 is a pressure plate, 19,1
9 1 , 19 2 , 19a 1 , 19a 2 , 19b 1 , 19b 2 is a recess, 20 is a bottom,
21 is an opening, 22 is a slope
───────────────────────────────────────────────────── フロントページの続き (72)発明者 三田 剛 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (72)発明者 児玉 淳 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Tsuyoshi Mita Tsuyoshi Mita 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited (72) Inventor Atsushi Kodama, 1015, Kamikodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited
Claims (4)
るノズル板と、 インクを押し出す加圧板と、 ノズル板及び加圧板を接続し、インク供給口を有する壁
部材と、 ノズル板、壁部材及び加圧板で形成され、インク供給口
からインクが供給される圧力室と、 該加圧板を駆動させる圧電素子とを複数組備え、 該圧電素子に電圧を印加することによって駆動させて、
該圧力室に供給されたインクを該ノズルから噴射するイ
ンクジェットヘッドであって、 前記加圧板の片面に、前記複数の圧電素子の端部を夫々
ガイドして当接し、少なくとも一方向の中心からの位置
ずれに対する拘束性を有する形状の凹部を形成したこと
を特徴とするインクジェットヘッド。1. A nozzle plate having nozzles for ejecting ink particles, a pressure plate for pushing out ink, a wall member connecting the nozzle plate and the pressure plate and having an ink supply port, a nozzle plate, a wall member and a pressure member. A plurality of sets of pressure chambers, each of which is formed of a pressure plate and to which ink is supplied from the ink supply port, and a piezoelectric element that drives the pressure plate, are driven by applying a voltage to the piezoelectric element.
An ink jet head for ejecting ink supplied to the pressure chamber from the nozzle, wherein one end of each of the plurality of piezoelectric elements is guided and abutted on one surface of the pressure plate, and at least the center from one direction An ink jet head having a concave portion having a shape that is restrained against positional displacement.
材で形成されることを特徴とする請求項１のインクジェ
ットヘッド。2. The inkjet head according to claim 1, wherein at least a part of the wall member is formed of an elastic member.
ることを特徴とする請求項１のインクジェットヘッド。3. The ink jet head according to claim 1, wherein the opening of the recess is wider than the bottom surface.
が他の部分よりヤング率が高いことを特徴とする請求項
１或いは請求項２のインクジェットヘッド。4. The ink jet head according to claim 1, wherein the concave portion has a Young's modulus higher in a thin portion having a bottom surface than in other portions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26141295A JPH0999553A (en) | 1995-10-09 | 1995-10-09 | Ink jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26141295A JPH0999553A (en) | 1995-10-09 | 1995-10-09 | Ink jet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0999553A true JPH0999553A (en) | 1997-04-15 |
Family
ID=17361516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26141295A Withdrawn JPH0999553A (en) | 1995-10-09 | 1995-10-09 | Ink jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0999553A (en) |
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