JPH09323013A - Dust collector for high temperature gas - Google Patents
Dust collector for high temperature gasInfo
- Publication number
- JPH09323013A JPH09323013A JP8144696A JP14469696A JPH09323013A JP H09323013 A JPH09323013 A JP H09323013A JP 8144696 A JP8144696 A JP 8144696A JP 14469696 A JP14469696 A JP 14469696A JP H09323013 A JPH09323013 A JP H09323013A
- Authority
- JP
- Japan
- Prior art keywords
- dust
- filter
- gas
- filter tube
- control means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title claims abstract description 182
- 239000007789 gas Substances 0.000 claims abstract description 158
- 239000000919 ceramic Substances 0.000 claims abstract description 33
- 230000007246 mechanism Effects 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- 238000011001 backwashing Methods 0.000 claims description 15
- 239000003245 coal Substances 0.000 claims description 15
- 238000001914 filtration Methods 0.000 claims description 13
- 239000000567 combustion gas Substances 0.000 claims description 9
- 238000002309 gasification Methods 0.000 claims description 8
- 230000001172 regenerating effect Effects 0.000 claims description 5
- 230000005856 abnormality Effects 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000011144 upstream manufacturing Methods 0.000 abstract description 4
- 239000002912 waste gas Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 238000002347 injection Methods 0.000 description 12
- 239000007924 injection Substances 0.000 description 12
- 230000003068 static effect Effects 0.000 description 11
- 238000002485 combustion reaction Methods 0.000 description 9
- 230000006378 damage Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 210000003027 ear inner Anatomy 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 239000004071 soot Substances 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、加圧流動床ボイラ
による発電プラント、石炭直接燃焼装置などの燃焼プロ
セスや石炭ガス化プラントなどにおいて排出される高温
の含塵ガスの除塵に好適なセラミックスフィルタが組み
込まれた流れ制御手段を有する高温ガス用除塵装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic filter suitable for dust removal of high temperature dust-containing gas discharged in a combustion process such as a power plant using a pressurized fluidized bed boiler, a direct coal combustion apparatus, or a coal gasification plant. The present invention relates to a hot gas dust remover having a flow control means incorporated therein.
【０００２】[0002]
【従来の技術】セラミックスフィルタが組み込まれた高
温ガス用除塵装置に関する技術は、次世代の高効率でク
リーンな石炭利用技術である石炭ガス化プラントや加圧
流動床ボイラによる発電プラントを実現するための鍵と
なる技術とみなされ、世界各国で実用化のための開発が
進んでいる。2. Description of the Related Art The technology related to a high-temperature gas dust removal device incorporating a ceramic filter is intended to realize a coal gasification plant or a power generation plant using a pressurized fluidized-bed boiler, which is a next-generation high-efficiency and clean coal utilization technology. It is regarded as a key technology of the world, and development for practical use is progressing in various countries around the world.
【０００３】除塵装置をこれらのプラントに組み込んで
使用する場合、特に注意を要するのは高温下における塵
の挙動である。すなわち、一般にガスの粘性係数は温度
が高いほど大きく、高温下において塵はガスの流れの影
響を強く受け、除塵室（除塵装置内で固気分離がなされ
る部分）内の主たる含塵ガスの流れを概ね下向きとなる
ように設計しても、微細な塵の一部分が乱れたガス流に
乗って重力に逆らって流動し、容易にホッパへと落下し
ない傾向がある。When the dust remover is used by incorporating it into these plants, the behavior of dust at high temperatures is of particular concern. That is, generally, the higher the temperature is, the larger the viscosity coefficient of gas is, and the dust is strongly influenced by the gas flow at high temperature, and the main dust-containing gas in the dust removing chamber (the part where solid-gas separation is performed in the dust removing device) is Even if the flow is designed to be generally downward, a part of the fine dust tends to ride against the turbulent gas flow and flow against gravity, and does not easily fall into the hopper.
【０００４】実機のプラントでは、除塵装置自体の運転
条件に起因する乱れや上流系又は下流系に生じる外乱に
よって、除塵室内の流れが絶えず変動し、様々な傍流を
伴う乱れた流れが除塵装置の内部に存在している。In an actual plant, the flow in the dust removal chamber constantly changes due to the turbulence caused by the operating conditions of the dust removal device itself or the disturbance generated in the upstream system or the downstream system, and a turbulent flow accompanied by various sidestreams is generated in the dust removal device. It exists inside.
【０００５】その結果、除塵装置には次のような問題が
発生する。片端が閉じたフィルタ管が使用されているい
わゆるキャンドル型除塵装置や、板状のフィルタが使用
されているクロスフロー型除塵装置において見られる現
象で、横向き又は上向きの傍流によってセラミックスフ
ィルタを逆洗しても塵が下部のホッパ空間に落下せず、
近くのセラミックスフィルタに再度堆積し、これが繰り
返されるために塵が一部のセラミックスフィルタの表面
に厚く堆積し、ついにはセラミックスフィルタの含塵ガ
ス側の流路の一部が堆積した塵で閉塞する。As a result, the dust removing device has the following problems. This is a phenomenon seen in so-called candle type dust removers that use filter tubes with one end closed, and in cross-flow type dust removers that use plate filters.Backwashing ceramic filters by sideways or upward flow. Even if dust does not fall into the hopper space below,
Redeposits on the nearby ceramic filter, and as this is repeated, dust is thickly deposited on the surface of some ceramic filters, and finally a part of the flow path on the dust-containing gas side of the ceramic filter is blocked by the accumulated dust. .
【０００６】このような塵によるブリッジングや厚い塵
の堆積層等の厚い塵層が形成されると、徐々にセラミッ
クスフィルタの有効濾過面積が減少して除塵装置の処理
能力が低下し、加圧流動床ボイラの燃焼ガスを除塵する
際には、ブリッジングした塵や厚い塵の堆積層等に含ま
れる未燃焼成分がしばしば発火燃焼し、セラミックスフ
ィルタが燃焼熱に起因する熱応力によって致命的な熱損
傷を受ける。When such a thick dust layer such as bridging due to dust or a thick dust accumulation layer is formed, the effective filtration area of the ceramics filter is gradually reduced and the processing capacity of the dust remover is lowered, so that the pressure is increased. When removing the combustion gas of a fluidized bed boiler, unburned components contained in the accumulated layer of bridging dust or thick dust often ignite and burn, and the ceramic filter is fatal due to thermal stress caused by combustion heat. Receives heat damage.
【０００７】また、塵中に未燃焼成分が含まれていなく
とも、厚い塵層は大きな熱容量を有するため、急激に負
荷変化させる場合、厚い塵層に接するフィルタ管の部分
はガス温度の変化に追随できず、厚い塵層が形成されて
いない同じフィルタ管の他の部分との境界で大きな温度
落差が生じ熱応力によって致命的な熱損傷を受ける。Even if the dust does not contain unburned components, the thick dust layer has a large heat capacity. Therefore, when the load is changed rapidly, the portion of the filter tube in contact with the thick dust layer is subject to changes in gas temperature. A large temperature drop occurs at the boundary with other parts of the same filter tube where a thick dust layer cannot be formed and cannot be followed up, and is fatally damaged by thermal stress.
【０００８】石炭ガス化プラントの生成ガスの除塵処理
では、運転停止直後の非酸化性ガスで置換された状態か
ら空気雰囲気への切り替え時、又は運転再立ち上げ時に
酸素を含む空気が除塵装置中に存在する状態のとき、厚
い塵層等に含まれる未燃焼成分が発火燃焼して除塵装置
のセラミックスフィルタに致命的な熱損傷を与える。In the dust removal treatment of the produced gas in the coal gasification plant, the air containing oxygen is present in the dust remover when the state replaced with the non-oxidizing gas immediately after the operation is stopped is switched to the air atmosphere or when the operation is restarted. In the state of being present, the unburned components contained in the thick dust layer and the like are ignited and burned to cause fatal heat damage to the ceramic filter of the dust remover.
【０００９】また、プラントの負荷変動時に可燃性ガス
や煤等の未燃焼成分が燃焼ガス中に多量に排出されてセ
ラミックスフィルタに飛来し、次いで発火して異常燃焼
する。例えば、加圧流動床ボイラの燃焼ガスを除塵する
場合は、低負荷時のボイラの運転操作によっては系中の
酸素濃度が高いにもかかわらず大量の未燃焼成分が発生
し、塵中に多量の煤（時には３０％にも達する）が含ま
れるとともに１００００ｐｐｍを超える一酸化炭素を含
む可燃性ガスが発生することがある。In addition, when the load on the plant changes, a large amount of unburned components such as combustible gas and soot are discharged into the combustion gas and fly to the ceramics filter, where they are ignited and abnormally burned. For example, when removing combustion gas from a pressurized fluidized bed boiler, a large amount of unburned components are generated depending on the operation of the boiler under low load, even though the oxygen concentration in the system is high, and a large amount of dust is contained in the dust. Flammable gas containing more than 10,000 ppm of carbon monoxide may be generated together with soot (sometimes reaching 30%).
【００１０】加圧流動床ボイラでは、一般にサイクロン
により粗除塵された燃焼ガスをセラミックスフィルタを
内蔵する除塵装置で除塵する方法が採用されているが、
サイクロンは含塵ガス中の塵濃度が急増するような過渡
的状態において塵がオーバーフローし、充分な除塵機能
を発揮しない。In a pressurized fluidized bed boiler, a method is generally adopted in which combustion gas roughly dust-removed by a cyclone is removed by a dust-removing device having a built-in ceramic filter.
A cyclone does not exhibit a sufficient dust removal function due to dust overflow in a transient state where the dust concentration in the dust-containing gas rapidly increases.
【００１１】この場合、サイクロンを素通りした大量の
未燃焼成分を含む含塵ガスが除塵装置のセラミックスフ
ィルタに到達する。このときの含塵ガス中の塵濃度が定
常時の塵濃度の５〜１０倍となるため、濾過差圧の増加
勾配も定常時の５〜１０倍になる。In this case, the dust-containing gas containing a large amount of unburned components passing through the cyclone reaches the ceramic filter of the dust remover. Since the dust concentration in the dust-containing gas at this time is 5 to 10 times the dust concentration in the steady state, the increase gradient of the filtration differential pressure is also 5 to 10 times that in the steady state.
【００１２】セラミックスフィルタに両端が開口したフ
ィルタ管を使用し、装置容器の内部を複数の水平な管板
で仕切り、複数のフィルタ管の両端をそれぞれ上下の管
板に保持し、含塵ガスがフィルタ管の内側を下方に流れ
るように構成されている除塵装置（以下チューブ型除塵
装置という）が特公昭６３−４０５６７、特公平２−２
２６８９、特公平３−２４２５１、特公平３−６１０７
６等に開示されている。チューブ型除塵装置では含塵ガ
ス側の流路断面積が小さいので、含塵ガス側の流れを完
全な下向流とするのが容易である。また、本発明者等は
フィルタ管の下端部において一定流速の下向流を生じさ
せる構成を特開平６−４７２２６に提案している。A ceramic filter uses a filter tube with both ends open, the inside of the apparatus container is partitioned by a plurality of horizontal tube plates, and both ends of the plurality of filter tubes are held by the upper and lower tube plates, respectively, and dust-containing gas is prevented. A dust remover (hereinafter referred to as a tube type dust remover) configured to flow downward inside a filter tube is disclosed in Japanese Examined Patent Publication No. 63-40567 and Japanese Examined Patent Publication 2-2.
2689, Japanese Patent Publication No. 3-24251, Japanese Patent Publication No. 3-6107
6 and the like. Since the cross-sectional area of the flow path on the dust-containing gas side is small in the tube-type dust remover, it is easy to make the flow on the dust-containing gas side completely downward. Further, the present inventors have proposed in Japanese Patent Laid-Open No. 6-47226 a structure for generating a downward flow at a constant flow rate at the lower end of the filter tube.
【００１３】チューブ型除塵装置では含塵ガス主流の方
向が重力の方向と一致していることと下向流による塵層
の削り落とし効果のため、通常の運転条件では塵がフィ
ルタ管の濾過表面に厚く堆積することがなく、飛来する
未燃焼成分の絶対量が大きく変動せず、塵中に常時１０
％程度以下の未燃焼成分が含まれ、これがフィルタ管の
表面で定常的に少しずつ燃焼している限りにおいてはフ
ィルタ管を熱損傷する問題は生じない。In the tube type dust remover, since the direction of the main flow of the dust-containing gas coincides with the direction of gravity and the dust layer is scraped off by the downward flow, dust is removed from the filter surface of the filter tube under normal operating conditions. It does not accumulate thickly, the absolute amount of unburned components that flies does not fluctuate significantly,
% Of unburned components are contained, and as long as the unburned components are constantly and gradually burned on the surface of the filter tube, there is no problem of heat damage to the filter tube.
【００１４】しかし、加圧流動床ボイラや石炭ガス化プ
ラント等においては、運転条件及び炭種によっては非常
に粘着性のある微細な塵が飛来する。このような条件下
においてはチューブ型除塵装置であっても下向きのガス
流速が約５ｍ／ｓ以下となる領域において、フィルタ管
の内面に塵が多量に堆積する。この堆積塵層に未燃分が
含まれると、強度のおき燃焼をしたり、条件によっては
一気に発火燃焼してフィルタ管の内側の温度を過度に上
昇させ、フィルタ管の内外及び軸方向の温度差がセラミ
ックスの許容温度差を超え、フィルタ管が熱応力で損傷
する。However, in a pressurized fluidized bed boiler, a coal gasification plant, etc., very sticky fine dust comes in, depending on the operating conditions and coal type. Under such conditions, a large amount of dust accumulates on the inner surface of the filter tube in a region where the downward gas flow velocity is about 5 m / s or less even in the case of a tube type dust remover. If this accumulated dust layer contains unburned matter, it will burn with high intensity, or under certain conditions, it will ignite and burn at once, causing the temperature inside the filter tube to rise excessively, and the temperature inside and outside the filter tube and in the axial direction. The difference exceeds the allowable temperature difference of ceramics, and the filter tube is damaged by thermal stress.
【００１５】さらに、セラミックフィルタの上流配管や
サイクロン壁面に付着堆積した未燃焼成分を含む塵層が
負荷上げ時に脱落して、ケーキ状や薄片状となってセラ
ミックフィルタに飛来することがある。これらがフィル
タ管を落下中にフィルタ管内で塵のブリッジングが発生
すると、この箇所から下部においてはホッパからの上昇
流が生ずる。落下中のケーキ状や薄片状の塵はフィルタ
管の中で浮遊を始め、さらにブリッジングやフィルタ管
内壁に厚い堆積層を形成して、おき燃焼することが判明
した。Further, a dust layer containing unburned components adhered and deposited on the upstream pipe of the ceramic filter and the wall surface of the cyclone may drop off when the load is increased, and may fly to the ceramic filter in the form of cake or flakes. If dust bridging occurs in the filter tube while they are falling, a rising flow from the hopper occurs from this point to the lower part. It was found that the cake-like or flaky dust that had fallen started to float in the filter tube, and further bridging and forming a thick deposit layer on the inner wall of the filter tube, and then burning it.
【００１６】特開平６−４７２２６の方法を用いてフィ
ルタ管の下端部での流速を５ｍ／ｓ以上とすることはで
きるが、ガスを循環させるために大きなエネルギが消費
され実用的ではない。Although the method of JP-A-6-47226 can be used to set the flow velocity at the lower end of the filter tube to 5 m / s or more, a large amount of energy is consumed to circulate the gas, which is not practical.
【００１７】熱交換器や配管等の管内のスケール除去の
ため高圧蒸気や高圧空気を直接管内に噴射する方法があ
り、広く実施されている。この方法と同様にノズルをフ
ィルタ管入口部又は出口部に設けて、フィルタ管内に向
けて直接空気、水蒸気及び窒素等の高圧ガスを噴射すれ
ば堆積塵層そのものは容易に除去できるが、フィルタ管
内の圧力が高くなるため１次濾過層を構成しているフィ
ルタ管表層部において塵粒子をフィルタ管内部に浸透さ
せ濾過差圧が不安定化する。高速気流が直接濾過面に衝
突して１次濾過層を破壊することも塵粒子のフィルタ管
内部浸透を促進する要因となる。There is a method of directly injecting high-pressure steam or high-pressure air into a pipe for removing scale in the pipe such as a heat exchanger or a pipe, which is widely practiced. Similar to this method, if a nozzle is installed at the inlet or outlet of the filter tube and high-pressure gas such as air, water vapor and nitrogen is directly injected into the filter tube, the accumulated dust layer itself can be easily removed. Since the pressure becomes higher, the dust particles permeate the inside of the filter tube in the surface layer portion of the filter tube forming the primary filtration layer, and the filtration differential pressure becomes unstable. The fact that the high-speed airflow directly collides with the filtration surface and destroys the primary filtration layer also becomes a factor that promotes the penetration of dust particles into the filter tube.
【００１８】また、この方法ではノズルを噴出した低温
の高速気流が直接フィルタ管に接触する可能性があり、
加圧流動床ボイラ等の高温プロセスにおいてはフィルタ
管に熱衝撃によるダメージを与える可能性がある。Further, in this method, there is a possibility that the low-speed high-speed airflow ejected from the nozzle may directly contact the filter tube,
In a high temperature process such as a pressurized fluidized bed boiler, the filter tube may be damaged by thermal shock.
【００１９】フィルタ管内に高圧ガスを噴射する場合、
同時にフィルタ管外の空間の圧力を高めて逆洗をすると
いう方法も考えられるが、フィルタ管内への高圧ガス噴
射によりフィルタ管内圧力が瞬間的に高くなっているた
め、非常に強力な逆洗をする必要が生じ逆洗用ユーティ
リティを増大させる。When injecting high-pressure gas into the filter tube,
At the same time, it is conceivable to increase the pressure in the space outside the filter tube to carry out backwashing, but since the pressure inside the filter tube is momentarily increased by high-pressure gas injection into the filter tube, very strong backwashing is required. The need to increase backwash utility.
【００２０】[0020]
【発明が解決しようとする課題】本発明の目的は、前述
の従来技術の問題点を解決し、加圧流動床ボイラなどの
高温の加圧燃焼プロセスや石炭ガス化プラント等からの
排出ガスの除塵に好適な、付着した塵の層厚が成長しに
くい高温ガス用除塵装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the prior art and to eliminate the exhaust gas from a high temperature pressurized combustion process such as a pressurized fluidized bed boiler or a coal gasification plant. It is to provide a dust remover for high temperature gas, which is suitable for dust removal and in which the layer thickness of the attached dust is less likely to grow.
【００２１】[0021]
【課題を解決するための手段】本発明は、セラミックス
フィルタと、上部に含塵ガスの導入部を有しかつ下部に
塵を集めるホッパ空間を有する容器と、セラミックフィ
ルタを再生する手段とを有する除塵装置であって、フィ
ルタ内含塵ガスの流れ制御手段を設けたことを特徴とす
る高温ガス用除塵装置である。The present invention comprises a ceramics filter, a container having a dust-containing gas introduction portion in the upper portion and a hopper space for collecting dust in the lower portion, and a means for regenerating the ceramic filter. A dust remover for high temperature gas, characterized in that a flow control means for the dust-containing gas in the filter is provided.
【００２２】本発明の最も望ましい態様は、セラミック
スフィルタが両端の開口したフィルタ管であり、容器の
内部に上下を水平な管板で仕切られた除塵室を有し、略
鉛直に配設された複数の各フィルタ管の望ましくはその
上下端がそれぞれ上下の管板に保持され、含塵ガスが各
フィルタ管の内側を下向きに流れるように構成され、フ
ィルタ管内含塵ガスの流動方向変化又はフィルタ管内含
塵ガスの吸い出しをさせうる流れ制御手段を設け、該手
段を随時又はあらかじめ定めれられた指標に基づいて作
動させることを特徴とする上記高温ガス用除塵装置であ
る。The most preferable embodiment of the present invention is a filter tube in which a ceramics filter is open at both ends, and has a dust removing chamber which is vertically partitioned by a horizontal tube plate and is arranged substantially vertically. Desirably, the upper and lower ends of each of the plurality of filter tubes are held by the upper and lower tube plates, respectively, and the dust-containing gas is configured to flow downward inside each filter tube. The above high temperature gas dust remover is characterized in that a flow control means capable of sucking out the dust-containing gas in the pipe is provided and the means is operated at any time or based on a predetermined index.
【００２３】前記した最も望ましい態様を例にとって本
発明を説明するが、本発明の技術思想は、セラミックフ
ィルタが管型でも、板状のフィルタを使用するクロスフ
ロー型除塵装置でも、管型であってかつ片端が閉じたセ
ラミックスフィルタ管を使用するいわゆるキャンドル型
除塵装置でも応用しうるものである。The present invention will be described with reference to the above-mentioned most desirable embodiment. However, the technical idea of the present invention is that the ceramic filter is tubular, whether it is a cross-flow type dust remover using a plate filter or a tubular filter. The present invention can also be applied to a so-called candle type dust remover that uses a ceramic filter tube whose one end is closed.
【００２４】セラミックスフィルタで含塵ガスを除塵処
理する場合、時間とともにフィルタ差圧が増大する。フ
ィルタ差圧を一定範囲内で維持する手段を再生手段と称
する。一般的な再生手段は清浄ガス側に高圧ガスを下流
から上流に向けて吹き込むことによりフィルタ管壁内に
逆流を発生させて付着塵を払い落とすものである。逆洗
以外の再生手段で実用化されているものはないが、低周
波の音波を含塵ガス側に送り込み、浮遊塵を凝集させる
試みもなされている。本発明は、再生方法によってその
本質が変わるものではない。When the dust-containing gas is removed by the ceramics filter, the filter pressure difference increases with time. Means for maintaining the filter differential pressure within a certain range is referred to as regeneration means. A general regenerating means is to blow a high-pressure gas into the clean gas side from the downstream side to the upstream side to generate a reverse flow in the wall of the filter tube and remove the adhered dust. Although there is no practical reclaiming means other than backwashing, attempts have been made to send low-frequency sound waves to the dust-containing gas side to aggregate suspended dust. The essence of the present invention does not change depending on the reproducing method.
【００２５】フィルタ管内含塵ガスの流れ制御手段と
は、フィルタ管内含塵ガスの流動方向変化又はフィルタ
管内含塵ガスの吸い出しをさせうる流れ制御手段であ
り、前述したような空気、水蒸気等の高圧ガスを直接フ
ィルタ管内に吹き込むことなく、フィルタ管内のガス流
の方向、流速を変化させる手段をいう。The flow control means of the dust-containing gas in the filter tube is a flow control means capable of changing the flow direction of the dust-containing gas in the filter tube or sucking out the dust-containing gas in the filter tube. Means for changing the direction and flow rate of the gas flow in the filter tube without directly blowing the high-pressure gas into the filter tube.
【００２６】本発明の好ましい高温ガス除塵装置では、
少なくともフィルタ管入口部にバタフライ弁、ボール
弁、板型スライド弁等の機械式弁機構による流れ制御手
段が設けられ、通常は含塵ガスを流入させるため全開と
し、あらかじめ定められた指標に基づいて例えば３０分
間隔で１０秒間全閉とすることにより含塵ガスがホッパ
から流入するよう構成されている。該機械式弁機構は、
流量を任意に調節できる機構を有するものだけでなく、
単にガス流れを開閉するだけの機能を有するものも含
む。In the preferred high temperature gas dust remover of the present invention,
At least the filter pipe inlet is equipped with a flow control means by a mechanical valve mechanism such as a butterfly valve, a ball valve, a plate type slide valve, etc. Normally, it is fully opened to allow dust-containing gas to flow in, and based on a predetermined index For example, it is configured such that the dust-containing gas flows in from the hopper by being fully closed for 10 seconds at intervals of 30 minutes. The mechanical valve mechanism is
Not only those with a mechanism that can arbitrarily adjust the flow rate,
It also includes those having the function of simply opening and closing the gas flow.
【００２７】該流れ制御手段を閉じる操作はフィルタ管
１本ずつであってもよいが、同時に複数本まとめたグル
ープで行えば、全フィルタ管本数に対する該流れ制御手
段が閉止されていないフィルタ管の本数の比に反比例し
て下降流速が増大する。The operation of closing the flow control means may be carried out one filter tube at a time, but if the operation is performed in a group in which a plurality of filter tubes are put together at the same time, the flow control means for all the filter tubes is not closed. The descending flow velocity increases in inverse proportion to the ratio of the numbers.
【００２８】通常時のフィルタ管入口ガス流速が１２ｍ
／ｓで、ホッパからのガスの抜き出しがない上中下３段
構成のチューブ型除塵装置を例にとって説明する。流れ
制御手段を閉じる操作を同時に全体の５０％のフィルタ
管について実施すると、流れ制御手段が開となっている
フィルタ管ではガス流速が上端部２４ｍ／ｓ、下端部１
２ｍ／ｓ、流れ制御手段が閉となっているフィルタ管で
はガス流速が下端部１２ｍ／ｓ、上端部０ｍ／ｓとな
る。この状態で１分間維持し、次に流れ制御手段が開と
なっていたフィルタ管グループについて閉操作を同じ時
間行う。The gas velocity at the inlet of the filter tube at the normal time is 12 m
An explanation will be given by taking as an example a tube-type dust removing device having three upper / middle / lower three-stage configurations in which gas is not extracted from the hopper. When the operation of closing the flow control means is simultaneously performed for 50% of the filter tubes, the gas flow velocity of the filter tube with the flow control means open is 24 m / s at the upper end and 1 at the lower end.
In the filter tube with the flow control means closed at 2 m / s, the gas flow velocity is 12 m / s at the lower end and 0 m / s at the upper end. This state is maintained for 1 minute, and then the filter tube group whose flow control means has been opened is closed for the same time.
【００２９】このようにすると、通常時６ｍ／ｓ以下で
ある中段フィルタ管中央部から下の部分が１８〜２４ｍ
／ｓの流速に曝され、固着堆積していた塵層は短時間で
削り落とされる。In this way, the lower part from the central part of the middle stage filter tube, which is usually 6 m / s or less, is 18 to 24 m.
The dust layer adhered and accumulated by being exposed to the flow velocity of / s is scraped off in a short time.
【００３０】本発明者らの加圧流動床ボイラの燃焼ガス
の除塵装置における経験によると、フィルタ管内流速は
９ｍ／ｓ以上あれば短時間で固着塵層を削り落とす効果
がある。これ以下の流速でも７ｍ／ｓまでは時間をかけ
れば削り落とし効果が期待できる。しかし、含塵ガスを
上向きに流せばフィルタ管内に堆積していた塵と外部か
ら流入する塵を全てフィルタ管上部で捕捉することにな
り塵中の未燃分の発火燃焼をもたらす危険性が生ずるの
で、フィルタ管入口部に設けた流れ制御手段を閉とする
時間はできる限り短時間、好ましくは５分間以内、より
好ましくは３分間以内がよい。３分間以内であれば、燃
焼が広範囲に伝播することはない。According to the experience of the inventors of the present invention in the apparatus for removing the combustion gas of the pressurized fluidized bed boiler, if the flow velocity in the filter tube is 9 m / s or more, it is effective to scrape off the adhered dust layer in a short time. Even if the flow velocity is less than this, the effect of scraping off can be expected if it takes time up to 7 m / s. However, if the dust-containing gas is caused to flow upward, all the dust accumulated in the filter tube and the dust flowing in from the outside will be captured by the upper part of the filter tube, and there is a risk of causing unburned combustion in the dust. Therefore, the time for closing the flow control means provided at the inlet of the filter tube is as short as possible, preferably within 5 minutes, more preferably within 3 minutes. Within 3 minutes, combustion does not spread over a wide area.
【００３１】本発明の好ましい高温ガス除塵装置では、
少なくともフィルタ管出口部に高圧ガスを下向きに噴射
することによりフィルタ管内に強い随伴下降流を生ぜし
めるエジェクタ機構による流れ制御手段が設けられ、あ
らかじめ定められた指標に基づいて例えば１０分間隔で
１秒間高圧ガスを噴射するよう構成されている。In the preferred high temperature gas dust remover of the present invention,
A flow control means by an ejector mechanism that produces a strong accompanying downward flow in the filter tube by injecting high-pressure gas downward at least at the outlet of the filter tube is provided, and based on a predetermined index, for example, at intervals of 10 minutes for 1 second. It is configured to inject high pressure gas.
【００３２】該流れ制御手段の作動操作は同時に複数本
まとめたグループ毎に実施してよいが、好ましくは少数
本のグループ毎、より好ましくはフィルタ管１本ずつで
行えば、例えば、常温の高圧空気を噴射してもホッパ内
温度を低下させることがないため他のフィルタ管に問題
となるような熱衝撃を与えることがない。The operation of the flow control means may be carried out simultaneously for each group consisting of a plurality of groups, but if it is carried out preferably for a small number of groups, more preferably for each filter tube, for example, high pressure at room temperature Even if the air is jetted, the temperature inside the hopper is not lowered, so that no problematic thermal shock is given to other filter tubes.
【００３３】本発明の好ましい高温ガス用除塵装置で
は、セラミックスフィルタを再生する手段が逆洗で、該
流れ制御手段の作動が逆洗操作の前後に行われる。In the preferred high temperature gas dust remover of the present invention, the means for regenerating the ceramics filter is backwash, and the operation of the flow control means is performed before and after the backwash operation.
【００３４】流れ制御手段が機械式弁機構である場合、
弁が閉の状態にあるフィルタ管においては、含塵ガスが
該フィルタ管下部から高流速で上向きに流れ、フィルタ
管上部の濾過層を形成している緻密な塵層の上に、下部
で削り落とされた比較的粗な塵片がケーキ状に堆積す
る。When the flow control means is a mechanical valve mechanism,
In the filter tube with the valve closed, the dust-containing gas flows upward from the lower part of the filter tube at a high flow rate, and scrapes at the lower part on the dense dust layer forming the filter layer on the upper part of the filter tube. The relatively coarse dust particles that have fallen off accumulate in a cake form.
【００３５】このような状態が形成された後、該弁を開
とし、直ちに逆洗を行えばケーキ状の塵塊はフィルタ管
内壁から剥離し下降流と重力によってホッパに直接落下
する。After such a state is formed, if the valve is opened and backwashing is immediately performed, cake-like dust particles are separated from the inner wall of the filter tube and directly fall into the hopper by the downward flow and gravity.
【００３６】流れ制御手段がフィルタ管出口に設けられ
たエジェクタ機構によるものである場合は、好ましくは
逆洗の前後に作動操作がなされる。より好ましくは逆洗
と同時に作動操作がなされる。When the flow control means is an ejector mechanism provided at the outlet of the filter tube, the operation is preferably performed before and after backwashing. More preferably, the operation is performed simultaneously with the backwash.
【００３７】本発明の好ましい高温ガス用除塵装置で
は、フィルタ管入口部及び出口部に機械式弁機構が設け
られ、フィルタ管の異常が検知されたとき該流れ制御手
段により含塵ガスのフィルタ管出口部からの流入が制限
又は遮断される。In a preferred high temperature gas dust remover of the present invention, mechanical valve mechanisms are provided at the inlet and outlet of the filter tube, and when an abnormality of the filter tube is detected, the filter tube for the dust-containing gas is provided by the flow control means. Inflow from the outlet is restricted or blocked.
【００３８】フィルタ管の異常を検知する方法として、
当該フィルタ管が破損した場合、当該フィルタ管を通過
するガスの流動抵抗が減少するため、このフィルタ管に
流れるガス量が急上昇し、当該フィルタ管入口部（上端
部近傍）及び出口部（下端部近傍）における静圧が減少
することを利用することが好ましい。As a method for detecting an abnormality in the filter tube,
When the filter tube is damaged, the flow resistance of the gas passing through the filter tube decreases, so the amount of gas flowing through the filter tube increases rapidly, and the filter tube inlet (near the upper end) and outlet (lower end) It is preferable to utilize that the static pressure in the vicinity) is reduced.
【００３９】すなわち、フィルタ管入口部又は出口部に
設けた静圧センサによって破損フィルタ管が同定されれ
ば、直ちに入口部及び出口部に設けた流れ制御手段を全
閉する。That is, as soon as a damaged filter tube is identified by the static pressure sensor provided at the inlet or outlet of the filter tube, the flow control means provided at the inlet and the outlet are completely closed immediately.
【００４０】流れ制御手段の応答性を充分高めておけ
ば、１本のフィルタ管が破損しても他に損害を与えるこ
となく運転を継続できる。If the responsiveness of the flow control means is sufficiently enhanced, even if one filter tube is damaged, the operation can be continued without causing any other damage.
【００４１】フィルタ管の異常検知は他のフィルタ管と
の静圧差で判断させるようにしてもよいが、より好まし
くは当該フィルタ管の静圧の減少速度で判断させる。The abnormality of the filter tube may be detected by the difference in static pressure between the filter tube and another filter tube, but more preferably, it is determined by the rate of decrease in static pressure of the filter tube.
【００４２】本発明の他の好ましい高温ガス用除塵装置
では、含塵ガスが加圧流動床ボイラの燃焼ガスである。
すなわち、石炭を利用する高効率でクリーン（排出され
るＳＯx やＮＯx が僅かである。）な今後のエネルギ技
術である加圧流動床ボイラが組込まれた発電プラントに
特に好適である。この種の発電プラントでは、ボイラの
蒸気による蒸気タービンと燃焼ガスにより駆動されるガ
スタービンを併用することで高い発電効率が得られるよ
うになっており、除塵装置は加圧された状態にある燃焼
ガスをガスタービンの駆動に供するときに有害な（ガス
タービンの羽をを摩耗して寿命を短める。）燃焼ガス中
の塵を除くために使用される。In another preferred high temperature gas dust remover of the present invention, the dust-containing gas is the combustion gas of a pressurized fluidized bed boiler.
That is, it is particularly suitable for a power plant incorporating a pressurized fluidized bed boiler, which is a future energy technology that uses coal with high efficiency and is clean (a small amount of SO x and NO x is discharged.). In this type of power plant, it is possible to obtain high power generation efficiency by using a steam turbine with steam of a boiler and a gas turbine driven by combustion gas, and the dust remover burns in a pressurized state. It is used to remove dust in the combustion gas that is harmful when the gas is used to drive the gas turbine (wears the blades of the gas turbine and shortens its life).
【００４３】本発明の高温ガス用除塵装置は、例えば加
圧流動床ボイラの負荷を増減するときなど、多量の未燃
焼成分を含む高温含塵ガスが一時的に発生する場合の除
塵に好ましく適用でき、未燃焼成分を含む塵がセラミッ
クスフィルタの表面に多量に堆積するのを防ぐことによ
って、堆積した塵中の未燃焼成分がたとえ発火燃焼して
も発熱量を小さく抑えることにより内蔵するセラミック
スフィルタの致命的な熱損傷を避けられる。The high-temperature gas dust remover of the present invention is preferably applied to dust removal when a high-temperature dust-containing gas containing a large amount of unburned components is temporarily generated, for example, when the load of a pressurized fluidized bed boiler is increased or decreased. The built-in ceramic filter can prevent the dust containing the unburned components from accumulating on the surface of the ceramic filter in a large amount, and keeps the calorific value small even if the unburned components in the deposited dust ignite and burn. Avoids fatal heat damage.
【００４４】[0044]
【実施例】以下、本発明の高温ガス用除塵装置を実施例
によって具体的に説明するが、本発明はこれらによって
限定されない。EXAMPLES The high temperature gas dust remover of the present invention will now be specifically described by way of examples, but the present invention is not limited thereto.
【００４５】図１は、本発明の第１実施例を示す高温ガ
ス用除塵装置の縦断面図である。図２は図１のＸ−Ｘ矢
視図、図３は図１のＡ部の拡大図、図４は図１のＢ部拡
大図である。図１において、１はチューブ型除塵装置で
あり、２は圧力容器、３はフィルタ管、５ａ、５ｂ、５
ｃ、５ｄは各フィルタ管を支持するとともに圧力容器の
内部を水平方向に仕切る管板、６は導入した含塵ガスを
各フィルタ管に一様に分配するガス入口室、７はホッパ
空間、８は弁体８ａ、軸８ｂからなるフィルタ管入口
（上端部）及び出口（下端部）に設けたバタフライ弁、
９ａ、９ｂ、９ｃは第１段、第２段、第３段の清浄室、
１０はガス導入口である。FIG. 1 is a vertical sectional view of a high temperature gas dust remover showing a first embodiment of the present invention. 2 is a view taken in the direction of arrows XX in FIG. 1, FIG. 3 is an enlarged view of part A of FIG. 1, and FIG. 4 is an enlarged view of part B of FIG. In FIG. 1, 1 is a tube type dust remover, 2 is a pressure vessel, 3 is a filter tube, 5a, 5b, 5
c and 5d are tube plates that support each filter tube and horizontally partition the inside of the pressure vessel, 6 is a gas inlet chamber for uniformly distributing the introduced dust-containing gas to each filter tube, 7 is a hopper space, 8 Is a butterfly valve provided at the inlet (upper end) and outlet (lower end) of the filter tube consisting of the valve body 8a and the shaft 8b,
9a, 9b and 9c are first, second and third clean rooms,
10 is a gas inlet.
【００４６】なお、フィルタ管の管板による保持は、フ
ィルタ管の上下端（連結部）によることが望ましい。圧
力容器２の内側には断熱材が内張りされている。少なく
ともフィルタ管の両端部と管板はシール手段１８により
ダストタイトにシールされ、かつフィルタ管と圧力容器
の熱膨張差が吸収されるよう構成されている。The holding of the filter tube by the tube plate is preferably performed by the upper and lower ends (connecting portions) of the filter tube. A heat insulating material is lined inside the pressure vessel 2. At least both ends of the filter tube and the tube plate are dust-tightly sealed by the sealing means 18 so that a difference in thermal expansion between the filter tube and the pressure vessel is absorbed.
【００４７】また、１１ａ、１１ｂ、１１ｃは夫々第１
段、第２段、第３段の清浄室に逆洗ガスを吹き込むエジ
ェクタのディフューザを兼ねた清浄ガス出口管、１２は
清浄ガス出口１２ａを有する清浄ガス出口集合管、１４
ａ、１４ｂ、１４ｃは夫々の清浄ガス出口管に逆洗用の
圧縮空気を噴出するエジェクタノズル、１１１は相対的
に温度の低い逆洗による逆流ガスの温度を昇温させるハ
ニカム状又は多層金網状の再生器である。Further, 11a, 11b and 11c are respectively the first
Clean gas outlet pipe also serving as a diffuser of an ejector for blowing backwash gas into the clean chambers of the second, third and third stages, 12 is a clean gas outlet collecting pipe having a clean gas outlet 12a, 14
Reference numerals a, 14b and 14c are ejector nozzles for ejecting backwashing compressed air to the respective clean gas outlet pipes, and 111 is a honeycomb or multi-layer wire netting for raising the temperature of the backflow gas by backwashing with a relatively low temperature. Is a regenerator.
【００４８】図３は、図１のフィルタ管入口又は出口部
を拡大した断面図であり、バタフライ弁８の軸部は各フ
ィルタ管の入口ポート、出口ポートを兼ねる軸受１３に
よって支持されている。軸受１３はバタフライ弁の取り
付けを容易にするため軸中心で上下二つ割りになってお
り、軸受けカバー１３ａと軸受台１３ｂからなってい
る。軸受けカバー１３ａと軸受台１３ｂは図示していな
いボルトによって締結されている。１９はアクチュエー
タである。FIG. 3 is an enlarged sectional view of the filter pipe inlet or outlet shown in FIG. 1. The shaft portion of the butterfly valve 8 is supported by a bearing 13 which also serves as an inlet port and an outlet port of each filter pipe. The bearing 13 is divided into upper and lower parts at the center of the shaft in order to facilitate the attachment of the butterfly valve, and is composed of a bearing cover 13a and a bearing stand 13b. The bearing cover 13a and the bearing base 13b are fastened by bolts (not shown). 19 is an actuator.
【００４９】図４において、弁軸８ｂは圧力容器２を貫
通しているが、内部ガスはラビリンス１５、１６及び軸
封空気２０によって外界と遮断され、軸封空気の気密は
Ｏリング１７によってなされている。弁軸の駆動方法は
本説明に拘束されない。例えば、弁軸は圧力容器を貫通
させずに、圧力容器内で高圧空気等によって回転駆動す
ることも考えられる。２５は各フィルタ管入口に設けら
れたガスの静圧計測口であって圧力検出器に接続されて
いる。図３の場合、静圧計測口を管板に設けているが、
弁軸を利用して行ってもよい。In FIG. 4, the valve shaft 8b penetrates the pressure vessel 2, but the internal gas is blocked from the outside by the labyrinths 15 and 16 and the shaft sealing air 20, and the air sealing of the shaft sealing air is made by the O-ring 17. ing. The method of driving the valve stem is not bound by this description. For example, the valve shaft may be driven to rotate by high-pressure air or the like in the pressure vessel without penetrating the pressure vessel. Reference numeral 25 denotes a gas static pressure measuring port provided at each filter tube inlet and connected to a pressure detector. In the case of FIG. 3, the static pressure measurement port is provided on the tube sheet,
Alternatively, the valve shaft may be used.
【００５０】図１、図２、図３は、通常の濾過運転時の
状態を示しており全てのバタフライ弁８は全開している
（弁体はガス流れに平行）。バタフライ弁は上下とも図
２に示されるようなＩ〜Ｖまでの５系列からなり、同一
系列のバタフライ弁は同時に開閉操作がなされる（上下
同時という意味ではない）。本実施例においては、上下
とも、Ｉ系列に２枚、IIに３枚、III 系列に４枚、IV系
列に３枚、Ｖ系列に２枚のバタフライ弁がある。FIGS. 1, 2 and 3 show the state during normal filtration operation, in which all butterfly valves 8 are fully open (valve elements are parallel to the gas flow). The upper and lower butterfly valves are composed of five series, I to V, as shown in FIG. 2, and the butterfly valves of the same series are opened and closed at the same time (this does not mean that the butterfly valves are open and closed simultaneously). In this embodiment, there are two butterfly valves for the I series, two for the I series, three for the II series, four for the III series, three for the IV series, and two for the V series.
【００５１】チューブ型除塵装置においては、フィルタ
管内の下降流は下に行くほど小さくなり、ホッパからの
ガスの抜き出しが行われていない図１の場合、各フィル
タ管下端部では下降流は０となる。先に述べたように、
加圧流動床ボイラや石炭ガス化プラント等においては、
運転条件及び炭種によっては非常に粘着性のある微細な
塵が飛来し、下向きのガス流速が約５ｍ／ｓ以下となる
領域において、フィルタ管の内面に塵が多量に堆積す
る。In the tube type dust remover, the downward flow in the filter tube becomes smaller as it goes downward, and in the case of FIG. 1 where the gas is not extracted from the hopper, the downward flow is 0 at the lower end of each filter tube. Become. As mentioned earlier,
In pressurized fluidized bed boilers and coal gasification plants,
Depending on the operating conditions and coal type, very sticky fine dust flies and a large amount of dust accumulates on the inner surface of the filter tube in the region where the downward gas flow velocity is about 5 m / s or less.
【００５２】一般にチューブ型除塵装置においては、フ
ィルタ管入口においては１０〜１５ｍ／ｓの流速が選ば
れることが多いが、このような設計においては第２段の
フィルタ管内で５ｍ／ｓに達し、この部分から下のフィ
ルタ管内において塵による閉塞の危険性が高い。Generally, in a tube type dust remover, a flow velocity of 10 to 15 m / s is often selected at the inlet of the filter tube, but in such a design, it reaches 5 m / s in the second stage filter tube, There is a high risk of blockage by dust in the filter tube below this part.
【００５３】本発明によれば、例えば３０分間に１度フ
ィルタ管入口部のＩ〜III 系列のバタフライ弁を１０秒
間遮断する。このようにすると、IV、Ｖ系列のフィルタ
管の下端部の流速は、通常濾過運転時のフィルタ管入口
流速が１０ｍ／ｓであれば、１０ｍ／ｓ×９÷５＝１８
ｍ／ｓとなり、ガス流によってフィルタ管内に付着堆積
している塵層は容易に削り落とされる。According to the present invention, for example, once every 30 minutes, the butterfly valves of the series I to III at the inlet of the filter tube are shut off for 10 seconds. By doing so, the flow velocity at the lower end of the IV and V series filter tubes is 10 m / s × 9/5 = 18 if the filter tube inlet flow rate during normal filtration operation is 10 m / s.
m / s, and the dust layer adhered and accumulated in the filter tube is easily scraped off by the gas flow.
【００５４】次に、III 〜Ｖ系列のバタフライ弁を１０
秒間遮断し、その後さらにＩ、II、IV、Ｖ系列のバタフ
ライ弁を１０秒間遮断する。前者の場合には、Ｉ、II系
列のフィルタ管下端部流速は１８ｍ／ｓとなり、後者の
場合にはIII 系列のフィルタ管下端部の流速は、１０ｍ
／ｓ×１０÷４＝２５ｍ／ｓとなる。バタフライ弁を遮
断する頻度及び遮断時間は塵の性状によって変わる。Next, the III-V series butterfly valves were replaced with 10
It shuts off for 2 seconds, and then shuts off the butterfly valves of I, II, IV, and V series for 10 seconds. In the former case, the flow velocity at the lower end of the I and II series filter tubes is 18 m / s, and in the latter case the flow velocity at the lower end of the III series filter pipe is 10 m.
/ S × 10 ÷ 4 = 25 m / s. The frequency and time for shutting off the butterfly valve depends on the nature of the dust.
【００５５】本実施例の構成において、例えばIII 系列
のフィルタ管に破損が発生すれば、破損の発生したフィ
ルタ管にガスが集中して流れ始めるため、そのフィルタ
管入口部の静圧が低下する。この静圧低下を静圧計測口
で捕捉して、直ちに上下のIII 系列のバタフライ弁を遮
断する。In the structure of the present embodiment, if a III series filter tube is damaged, for example, the gas begins to flow concentratedly in the damaged filter tube, so that the static pressure at the filter tube inlet is reduced. . This static pressure drop is captured by the static pressure measurement port, and the upper and lower III series butterfly valves are immediately shut off.
【００５６】破損発生後、当該フィルタ管入口の静圧低
下が検知されバタフライ弁が閉となるまでの短時間の間
（１０秒以内）、フィルタ管が破損により破片や塵が清
浄室内に飛散するが、清浄室出口に充分目の細かい再生
器１１１があるため、これらは再生器で捕捉されて下流
の機器、例えばガスタービン等に損傷を与えることはな
い。したがって、例えば加圧流動床ボイラの場合、ガス
タービンになんらの損傷を与えることなく、特に負荷を
下げずに運転を続行できる。勿論、濾過面積に大略逆比
例してフィルタ差圧は増大する。After the breakage, for a short time (within 10 seconds) until the drop in the static pressure at the inlet of the filter pipe is detected and the butterfly valve is closed (within 10 seconds), the filter pipe is broken and fragments and dust are scattered into the clean room. However, since there is a sufficiently fine regenerator 111 at the outlet of the clean room, they are not caught by the regenerator and damage downstream equipment such as a gas turbine. Therefore, for example, in the case of a pressurized fluidized bed boiler, the operation can be continued without damaging the gas turbine and without particularly reducing the load. Of course, the filter pressure difference increases substantially in inverse proportion to the filtration area.
【００５７】この場合、好ましくはインコネル、耐熱ス
テンレス鋼等の耐熱耐食性金属からなる網又は穴明き鋼
板で各々のフィルタ管の外側を覆っておく。このように
すれば、フィルタ管破損に伴い大きな破片が飛散して他
のフィルタ管を損傷させることはない。金網の網目又は
穴明き鋼板の目開きは２０ｍｍ以下、好ましくは１０ｍ
ｍ以下である。フィルタ管破損時の近接フィルタ管保護
が目的であるため、１ｍｍ以下にする必要はない。In this case, preferably, the outside of each filter tube is covered with a mesh or perforated steel plate made of heat-resistant and corrosion-resistant metal such as Inconel or heat-resistant stainless steel. In this way, when the filter tube is damaged, large fragments will not be scattered to damage other filter tubes. Wire mesh or perforated steel sheet has an opening of 20 mm or less, preferably 10 m
m or less. Since the purpose is to protect the proximity filter tube when the filter tube is damaged, it does not need to be 1 mm or less.
【００５８】図５は本発明の第２実施例を示す高温ガス
用除塵装置のフィルタ管入口に設けた他の機械式弁機構
による流れ制御手段で、図５は実施例１の図３に相当す
る拡大図であって、図６は図５のＹ−Ｙ断面図、８１は
ガス通路と同一径の穴８１ｈを有する丸棒からなる回転
弁である。第１実施例と比較して、通常濾過運転時にフ
ィルタ管に入るガス流をバタフライ弁のように弁体の厚
さによって遮ることがないので、弁体に塵が堆積すると
いう２次的な問題発生の可能性がないという特徴があ
る。本実施例では弁体を丸棒で構成したが、いわゆるボ
ール弁であっても同様の効果が得られる。本構成の機械
式弁機構はフィルタ管出口にも適用できる。FIG. 5 shows a flow control means by another mechanical valve mechanism provided at the filter pipe inlet of the dust remover for high temperature gas showing the second embodiment of the present invention, and FIG. 5 corresponds to FIG. 3 of the first embodiment. 6 is an enlarged view of FIG. 6, and FIG. 6 is a sectional view taken along line YY of FIG. 5, and 81 is a rotary valve formed of a round bar having a hole 81h having the same diameter as the gas passage. Compared with the first embodiment, since the gas flow entering the filter tube during normal filtration operation is not blocked by the thickness of the valve body unlike the butterfly valve, a secondary problem that dust accumulates on the valve body. It is characterized by no possibility of occurrence. In this embodiment, the valve element is formed of a round bar, but the same effect can be obtained even with a so-called ball valve. The mechanical valve mechanism of this configuration can also be applied to the filter tube outlet.
【００５９】第１実施例及び第２実施例はいずれも機械
式弁機構を流れ制御手段に用いているが、仕切弁、ニー
ドル弁等機械式弁機構であればどのようなものでも採用
できる。In both the first and second embodiments, the mechanical valve mechanism is used as the flow control means, but any mechanical valve mechanism such as a sluice valve and a needle valve can be adopted.
【００６０】図７は本発明の高温ガス用除塵装置の第３
実施例を示す縦断面図であって、図８は図７のＣ部拡大
図である。図７及び図８において、３０は最下段の管板
５ｄの下面に配設され各フィルタ管の出口ガス通路斜め
下向きに噴口３０ａを向けた高圧ガス噴射ノズル、３１
は各フィルタ管を取り囲むように配設された高圧ガス用
環状ヘッダ、３２は高圧ガス配管、３３は高圧ガス４０
の噴射を制御する弁である。噴口３０ａは円形ノズルで
あってもスリット状であってもよい。また、高圧ガスの
噴射は各々のフィルタ管毎に独立、又はグループ分けし
てグループ毎、もしくは全部、について実施する。フィ
ルタ管毎又は少数のグループ毎に実施する場合には温度
の低い高圧ガスを噴射してもホッパ内のガス温度の低下
度合いが少ないため、他のフィルタ管に熱衝撃による損
傷を与えることがない。FIG. 7 shows a third embodiment of the dust remover for high temperature gas according to the present invention.
FIG. 8 is a longitudinal sectional view showing an embodiment, and FIG. 8 is an enlarged view of a C portion of FIG. 7. In FIGS. 7 and 8, 30 is a high-pressure gas injection nozzle which is disposed on the lower surface of the lowermost tube sheet 5d and has the injection port 30a directed obliquely downward to the outlet gas passage of each filter tube, 31
Is a ring header for high pressure gas arranged so as to surround each filter tube, 32 is a high pressure gas pipe, 33 is a high pressure gas 40
It is a valve that controls the injection of. The injection port 30a may be a circular nozzle or a slit shape. Further, the injection of high-pressure gas is carried out independently for each filter tube, or divided into groups, or for each group or all. When carrying out for each filter tube or for a small number of groups, even if a high temperature gas with a low temperature is injected, the temperature of the gas in the hopper does not drop so much that other filter tubes are not damaged by thermal shock. .
【００６１】図７の高温ガス用除塵装置において、濾過
運転時例えば２時間に１度、弁３３を１秒間開弁する。
高圧ガスの斜め下向き噴射により、当該フィルタ管内に
強い随伴下降流が生じ（エジェクタ効果）、フィルタ管
内面に付着堆積している塵層は容易に削り落とされる。
高圧ガスには該高温ガス用除塵装置で除塵処理される含
塵ガス以外の空気、窒素、水蒸気、炭酸ガス、除塵処理
されたプロセスガス等が用いられ、好ましくはプロセス
ガスの１．２倍以上の圧力である。該高圧ガスの圧力を
プロセスガス圧に対し臨界圧力比以上にすれば、噴口３
０ａから超音速で高圧ガスが噴出し、含塵ガスの吸引が
非常に強くなり、該フィルタ管内は瞬間的にプロセス圧
力に対して負圧となりフィルタ管下端部での下降流が瞬
時に５０ｍ／ｓ以上になる。生じた負圧の程度によって
はフィルタ管の外側から内側への逆流、すなわち逆洗さ
えも同時に行われる。In the dust collector for high temperature gas shown in FIG. 7, the valve 33 is opened for 1 second, for example, once every 2 hours during the filtering operation.
Due to the oblique downward injection of the high-pressure gas, a strong accompanying downward flow is generated in the filter tube (ejector effect), and the dust layer adhered and deposited on the inner surface of the filter tube is easily scraped off.
As the high-pressure gas, air, nitrogen, water vapor, carbon dioxide gas, a dust-removed process gas or the like other than the dust-containing gas to be dust-removed by the dust-removing device for high-temperature gas is used, preferably 1.2 times or more of the process gas. Pressure. If the pressure of the high-pressure gas is set to be equal to or higher than the critical pressure ratio with respect to the process gas pressure, the injection port
High-pressure gas spouts from 0a at supersonic speed, suction of dust-containing gas becomes very strong, and the inside of the filter tube momentarily becomes negative pressure to the process pressure, and the downward flow at the lower end of the filter tube instantaneously reaches 50 m / s or more. Depending on the degree of the negative pressure generated, backflow from the outside to the inside of the filter tube, that is, even backwashing, is simultaneously performed.
【００６２】下降流がこのように高流速になると、フィ
ルタ管３の下部に生じている堆積塵を１秒以内で除去で
きる。When the descending flow has such a high flow velocity, the dust accumulated in the lower portion of the filter tube 3 can be removed within 1 second.
【００６３】また、図９のように塵によるブリッジ５０
がフィルタ管内に形成されている場合には、高圧ガスの
圧力がプロセスガスの圧力に比してあまり大きくなくて
も、噴口３０ａから噴出したガス流によってブリッジ５
０の下部から噴口３０ａ上部までのガス流路空間Ｓの圧
力Ｐｂがブリッジ５０上部空間圧力Ｐａや清浄室圧力Ｐ
ｃより容易に低くなる。このため、ブリッジ５０には上
部と外周部から強い力が作用する。ブリッジ５０に対し
外周から加わる力はブリッジ５０を圧縮しフィルタ管内
壁からの剥離を容易にさせる。この結果、ブリッジ５０
は下方に押されホッパに落下する。効果を確実にするた
めには高圧ガスの圧力はプロセスガスの１．２倍以上の
圧力であることが望ましい。In addition, as shown in FIG.
Is formed in the filter tube, even if the pressure of the high-pressure gas is not so large as compared with the pressure of the process gas, the bridge 5 is formed by the gas flow ejected from the injection port 30a.
The pressure Pb of the gas flow passage space S from the lower part of 0 to the upper part of the injection port 30a is the bridge 50 upper space pressure Pa and the clean room pressure P.
Easily lower than c. Therefore, a strong force acts on the bridge 50 from the upper portion and the outer peripheral portion. The force applied to the bridge 50 from the outer periphery compresses the bridge 50 and facilitates the separation from the inner wall of the filter tube. As a result, the bridge 50
Is pushed downward and falls into the hopper. In order to ensure the effect, the pressure of the high pressure gas is preferably 1.2 times or more the pressure of the process gas.
【００６４】流れ制御手段の作動を逆洗と組み合わせて
作動させることも、強固な付着堆積塵の成長を妨げるの
に有効である。The operation of the flow control means in combination with backwashing is also effective in preventing the growth of strong adhered accumulated dust.
【００６５】すなわち、フィルタ管入口に設けた機械式
弁機構の作動を行った後、逆洗を実施すれば、前記弁機
構が一旦閉となり次に開となることによりフィルタ管下
部に落下再付着した凝集力の弱くなった塵片を除去で
き、強固な付着堆積塵の成長を妨げうる。That is, when the mechanical valve mechanism provided at the inlet of the filter tube is operated and then backwashed, the valve mechanism once closes and then opens to drop and reattach to the lower part of the filter tube. The dust particles having weakened cohesive force can be removed, and the growth of strong adhered and accumulated dust can be hindered.
【００６６】流れ制御手段がフィルタ管出口に形成され
たエジェクタ機構によるものである場合は、逆洗と時間
的に重複させて作動させればフィルタ管内外圧力差が単
独に逆洗する場合に比してより大きくなり、逆洗の効果
が増大する。When the flow control means is based on the ejector mechanism formed at the outlet of the filter tube, when the flow control means is operated while being overlapped with the backwashing time, the pressure difference between the inside and outside of the filter tube is independently backwashed. Then, the effect of backwashing is increased.
【００６７】[0067]
【発明の効果】本発明による高温ガス用除塵装置を、加
圧流動床ボイラによる発電プラント、石炭直接燃焼装置
などの燃焼プロセスや石炭ガス化プラントなどで生成す
る高温含塵ガスの除塵に使用すれば、粘着性の大きい塵
が除塵装置に導入されても、セラミックスフィルタの濾
過面に塵が強固に付着堆積する現象を抑制でき、煤を始
めとする未燃焼成分を多量に含む塵が除塵装置中に導入
されても、塵が発火燃焼するのを抑制でき、塵が発火す
ることがあってもフィルタ管に堆積している塵の厚さが
薄いので、激しい燃焼が起きず、フィルタ管に熱損傷を
与えることなく安定して運転ができる。したがって、上
述の今後の石炭利用技術の本格的な実用化時期を早めら
れると期待できるので、そのエネルギ産業分野における
利用価値は多大である。EFFECTS OF THE INVENTION The dust remover for high temperature gas according to the present invention can be used for dust removal of high temperature dust-containing gas produced in a combustion process such as a power plant using a pressurized fluidized bed boiler, a direct coal combustion device, or a coal gasification plant. Thus, even if highly sticky dust is introduced into the dust remover, it is possible to suppress the phenomenon that dust adheres strongly to the filtration surface of the ceramics filter, and dust that contains a large amount of unburned components such as soot is removed by the dust remover. Even if it is introduced into the filter tube, it is possible to suppress the ignition and burning of the dust, and even if the dust is ignited, the thickness of the dust accumulated on the filter tube is thin, so violent combustion does not occur and Stable operation is possible without heat damage. Therefore, it can be expected that the full-scale practical use of the coal utilization technology in the future will be expedited, and its utility value in the energy industry field is enormous.
【図１】本発明の高温ガス用除塵装置の第１実施例の縦
断面図。FIG. 1 is a vertical sectional view of a first embodiment of a high temperature gas dust remover of the present invention.
【図２】図１のＸ−Ｘ矢視図。FIG. 2 is a view on arrow XX in FIG.
【図３】図１のＡ部拡大図。FIG. 3 is an enlarged view of part A of FIG.
【図４】図２のＢ部拡大図。FIG. 4 is an enlarged view of part B in FIG.
【図５】本発明の第２実施例の高温ガス用除塵装置のフ
ィルタ管入口に設けた他の機械式弁機構による流れ制御
手段の部分拡大図。FIG. 5 is a partially enlarged view of the flow control means by another mechanical valve mechanism provided at the filter pipe inlet of the high temperature gas dust remover of the second embodiment of the present invention.
【図６】図５のＹ−Ｙ断面図。6 is a sectional view taken along line YY of FIG.
【図７】本発明の高温ガス用除塵装置の第３実施例の縦
断面図。FIG. 7 is a vertical cross-sectional view of a third embodiment of the high temperature gas dust remover of the present invention.
【図８】図７のＣ部拡大図。8 is an enlarged view of a portion C in FIG. 7;
【図９】フィルタ管内に塵によるブリッジングが発生し
ている場合の説明図。FIG. 9 is an explanatory diagram when bridging due to dust occurs in the filter tube.
１：除塵装置 ２：圧力容器 ３：フィルタ管（セラミックスフィルタ） ５ａ、５ｂ、５ｃ、５ｄ：管板 ６：ガス入口室 ７：ホッパ空間 ８：バタフライ弁 ８ａ：バタフライ弁の弁体 ８ｂ：バタフライ弁の軸 ９ａ、９ｂ、９ｃ：除塵室 １０：ガス導入口 １１ａ、１１ｂ、１１ｃ、１１ｄ：清浄ガス出口管 １２：清浄ガス出口集合管 １２ａ：清浄ガス出口 １３：軸受 １３ａ：軸受けカバー １３ｂ：軸受台 １４ａ、１４ｂ、１４ｃ：エジェクタノズル １５：ラビリンス １６：ラビリンス １７：Ｏリング １９：アクチュエータ ２５：静圧計測口 ３０：高圧ガス噴射ノズル ３０ａ：高圧ガス噴口 ３１：高圧ガスヘッダ ３２：高圧ガス導管 ３３：高圧ガス制御弁 ４０：高圧ガス ５０：ブリッジを形成した塵 ８１：丸棒弁 ８１ｈ：弁穴 １１１：再生器 Ｐａ：ブリッジ５０上部空間圧力 Ｐｂ：ブリッジ５０の下部から噴口３０ａ上部までのガ
ス流路空間Ｓの圧力 Ｐｃ：清浄室圧力1: Dust remover 2: Pressure vessel 3: Filter tube (ceramic filter) 5a, 5b, 5c, 5d: Tube plate 6: Gas inlet chamber 7: Hopper space 8: Butterfly valve 8a: Butterfly valve body 8b: Butterfly valve 9a, 9b, 9c: Dust removal chamber 10: Gas inlet 11a, 11b, 11c, 11d: Clean gas outlet pipe 12: Clean gas outlet collecting pipe 12a: Clean gas outlet 13: Bearing 13a: Bearing cover 13b: Bearing stand 14a, 14b, 14c: Ejector nozzle 15: Labyrinth 16: Labyrinth 17: O-ring 19: Actuator 25: Static pressure measurement port 30: High pressure gas injection nozzle 30a: High pressure gas injection port 31: High pressure gas header 32: High pressure gas conduit 33: High pressure Gas control valve 40: High pressure gas 50: Dust forming a bridge 81: Round bar valve 81h: Valve hole 1 1: regenerator Pa: Bridge 50 headspace pressure Pb: pressure of the gas flow path space S from the bottom of the bridge 50 to the spray port 30a upper Pc: clean room pressure
Claims (8)
の導入部を有しかつ下部に塵を集めるホッパ空間を有す
る容器と、セラミックフィルタを再生する手段とを有す
る除塵装置であって、フィルタ内含塵ガスの流れ制御手
段を設けたことを特徴とする高温ガス用除塵装置。1. A dust remover comprising a ceramics filter, a container having a dust-containing gas introduction part in an upper part and a hopper space for collecting dust in a lower part, and a means for regenerating a ceramics filter, which comprises: A dust remover for high-temperature gas, comprising a flow control means for dust-containing gas.
ィルタ管であり、容器の内部に上下を水平な管板で仕切
られた除塵室を有し、略鉛直に配設された複数の各フィ
ルタ管は管板に保持され、含塵ガスが各フィルタ管の内
側を下向きに流れるように構成されてなることを特徴と
する請求項１の高温ガス用除塵装置。2. A ceramics filter is a filter tube having openings at both ends, and a plurality of filter tubes arranged substantially vertically have a dust removing chamber which is vertically partitioned by a horizontal tube plate inside a container. The dust remover for high-temperature gas according to claim 1, wherein the dust-containing gas is held by a tube plate and is configured so that dust-containing gas flows downward inside each filter tube.
れた指標に基づいて作動させることを特徴とする請求項
１又は２の高温ガス用除塵装置。3. The dust remover for high temperature gas according to claim 1 or 2, wherein the flow control means is operated at any time or based on a predetermined index.
あって、該機械式弁機構がフィルタ入口部に設けられ、
通常濾過運転時には概ね全開とされ、閉操作が１個又は
複数個のフィルタについて随時又はあらかじめ定めれら
れた指標に基づいて行われることを特徴とする請求項１
又は２の高温ガス用除塵装置。4. The flow control means is a mechanical valve mechanism, and the mechanical valve mechanism is provided at a filter inlet portion,
2. The normal filtration operation is generally fully opened, and the closing operation is performed on one or a plurality of filters at any time or based on a predetermined index.
Or the high temperature gas dust remover of 2.
されるエジェクタ機構によるものであって、該エジェク
タ機構がフィルタ出口部に設けられ、随時又はあらかじ
め定めれられた指標に基づいて流体噴射が行われること
を特徴とする請求項１又は２の高温ガス用除塵装置。5. The flow control means is based on an ejector mechanism operated by a second fluid jet, and the ejector mechanism is provided at a filter outlet portion, and the fluid jet is carried out at any time or based on a predetermined index. The dust remover for high temperature gas according to claim 1 or 2, characterized in that.
洗で、流れ制御手段の作動がフィルタの逆洗操作の前後
又は逆洗操作と同時期に行われることを特徴とする請求
項４又は５の高温ガス用除塵装置。6. The method of regenerating the ceramics filter is backwashing, and the operation of the flow control means is performed before and after the backwashing operation of the filter or at the same time as the backwashing operation. Dust remover for high temperature gas.
れ、フィルタの異常が検知されたとき該流れ制御手段に
より含塵ガスのフィルタ出口部からの流入を制限又は遮
断することを特徴とする請求項４の高温ガス用除塵装
置。7. A mechanical valve mechanism is also provided at the filter outlet, and when a filter abnormality is detected, the flow control means limits or blocks the inflow of dust-containing gas from the filter outlet. The dust remover for high-temperature gas according to claim 4.
は石炭ガス化ガスである請求項１〜７のいずれかに記載
の高温ガス用除塵装置。8. The dust remover for high temperature gas according to claim 1, wherein the dust-containing gas is combustion gas of a pressurized fluidized bed boiler or coal gasification gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8144696A JPH09323013A (en) | 1996-06-06 | 1996-06-06 | Dust collector for high temperature gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8144696A JPH09323013A (en) | 1996-06-06 | 1996-06-06 | Dust collector for high temperature gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09323013A true JPH09323013A (en) | 1997-12-16 |
Family
ID=15368152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8144696A Pending JPH09323013A (en) | 1996-06-06 | 1996-06-06 | Dust collector for high temperature gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09323013A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005058163B4 (en) * | 2005-12-05 | 2011-04-14 | Man Diesel & Turbo Se | exhaust stack |
| KR101245346B1 (en) * | 2011-04-22 | 2013-03-19 | 한국식품연구원 | Dust Collecting System |
| CN108525409A (en) * | 2018-06-04 | 2018-09-14 | 中国石油大学(北京) | The determination of failure screen pipe, guard method and the device of filter |
| CN108796160A (en) * | 2018-08-22 | 2018-11-13 | 中冶京诚工程技术有限公司 | Dust collector and coal gas high temperature dust pelletizing system |
| CN115318440A (en) * | 2022-10-13 | 2022-11-11 | 江苏仕邦柔性电子研究院有限公司 | Filtering equipment for process residual gas for atomic layer deposition equipment |
| KR200497709Y1 (en) * | 2022-09-13 | 2024-02-02 | 주식회사 한결이엔에스 | Filter dust separator |
-
1996
- 1996-06-06 JP JP8144696A patent/JPH09323013A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005058163B4 (en) * | 2005-12-05 | 2011-04-14 | Man Diesel & Turbo Se | exhaust stack |
| KR101245346B1 (en) * | 2011-04-22 | 2013-03-19 | 한국식품연구원 | Dust Collecting System |
| CN108525409A (en) * | 2018-06-04 | 2018-09-14 | 中国石油大学(北京) | The determination of failure screen pipe, guard method and the device of filter |
| CN108525409B (en) * | 2018-06-04 | 2023-04-28 | 中国石油大学(北京) | Method and device for determining and protecting invalid filter tube of filter |
| CN108796160A (en) * | 2018-08-22 | 2018-11-13 | 中冶京诚工程技术有限公司 | Dust collector and coal gas high temperature dust pelletizing system |
| KR200497709Y1 (en) * | 2022-09-13 | 2024-02-02 | 주식회사 한결이엔에스 | Filter dust separator |
| CN115318440A (en) * | 2022-10-13 | 2022-11-11 | 江苏仕邦柔性电子研究院有限公司 | Filtering equipment for process residual gas for atomic layer deposition equipment |
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