CN115318440A - Filtering equipment for process residual gas for atomic layer deposition equipment - Google Patents
Filtering equipment for process residual gas for atomic layer deposition equipment Download PDFInfo
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- CN115318440A CN115318440A CN202211250267.7A CN202211250267A CN115318440A CN 115318440 A CN115318440 A CN 115318440A CN 202211250267 A CN202211250267 A CN 202211250267A CN 115318440 A CN115318440 A CN 115318440A
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- 238000001914 filtration Methods 0.000 title claims abstract description 24
- 238000000231 atomic layer deposition Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000008569 process Effects 0.000 title claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims abstract description 56
- 238000009792 diffusion process Methods 0.000 claims abstract description 37
- 238000001179 sorption measurement Methods 0.000 claims abstract description 24
- 235000015112 vegetable and seed oil Nutrition 0.000 claims description 37
- 239000008158 vegetable oil Substances 0.000 claims description 37
- 239000003921 oil Substances 0.000 claims description 35
- 235000019198 oils Nutrition 0.000 claims description 35
- 230000003068 static effect Effects 0.000 claims description 34
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 29
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 29
- 241001330002 Bambuseae Species 0.000 claims description 29
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 29
- 239000011425 bamboo Substances 0.000 claims description 29
- 238000005086 pumping Methods 0.000 claims description 11
- 239000000428 dust Substances 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000004062 sedimentation Methods 0.000 claims description 3
- 239000010909 process residue Substances 0.000 claims 7
- 241000220317 Rosa Species 0.000 claims 1
- 239000000843 powder Substances 0.000 abstract description 47
- 239000007787 solid Substances 0.000 abstract description 5
- 238000002360 preparation method Methods 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 9
- 230000002441 reversible effect Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 230000008275 binding mechanism Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/017—Combinations of electrostatic separation with other processes, not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
- B01D29/03—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements self-supporting
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a filtering device for process residual gas for atomic layer deposition equipment, which comprises a convex angle plate, a settling tank, a weight increasing cylinder, an air inlet box, a supporting frame, a conical diffusion and tapered drawing gathering quality-increasing mechanism and a pressure self-adjusting type loss-free adsorption mechanism, wherein the settling tank is arranged on the upper wall of the convex angle plate, the supporting frame is symmetrically arranged on the upper wall of the convex angle plate at two sides of the convex angle plate, the weight increasing cylinder is arranged at one side of the supporting frame far away from the convex angle plate, the air inlet box is arranged on the upper wall of the weight increasing cylinder, and the conical diffusion and tapered drawing gathering quality-increasing mechanism is arranged in the weight increasing cylinder. The invention belongs to the technical field of film preparation, and particularly relates to a filtering device for process residual gas for atomic layer deposition equipment; the invention provides a filtering device of process residual gas for an atomic layer deposition device, which can perform electric weight increasing filtering on fine powder and can separate solid gas through self-regulating pressure.
Description
Technical Field
The invention belongs to the technical field of film preparation, and particularly relates to a filtering device for process residual gas for atomic layer deposition equipment.
Background
Atomic layer deposition equipment is carrying out the coating operation back to the powder, and the inside residual gas of reaction vessel discharges, and often contains the wearing and tearing volume that the powder appears when the coating operation among the residual gas, and these powder wearing and tearing volume are comparatively tiny, lead to current filter screen to be difficult to carry out the filtering to the powder, and tiny powder adopts the less filter screen in hole, when meetting the great powder of particle diameter, very easily takes place blocking phenomenon.
Disclosure of Invention
Aiming at the situation and overcoming the defects of the prior art, the scheme provides the filtering equipment for the process residual gas for the atomic layer deposition equipment, aiming at the problem that the powder with smaller particle size in the residual gas is difficult to filter, the invention enables the powder to be mutually adsorbed under the intervention of the electrostatic flow guide net through the arranged conical gathering structure, converts the powder with smaller particle size into the powder with larger particle size, is convenient for better filtering, meanwhile, the solid gas is divided and dispersed through the unilateral pressure of the arranged mixture, and the powder impurities contained in the residual gas are adsorbed and stored under the viscous action of the liquid which is difficult to evaporate, so that the powder is effectively prevented from being adsorbed on the inner wall of the box body, the solid gas is convenient to be better separated and treated, and the technical problem that the smaller particles contained in the residual gas which is difficult to solve in the prior art can be discharged out of the treatment box along with the gas flow is solved;
the invention provides a filtering device of process residual gas for an atomic layer deposition device, which can perform electric weight increasing filtering on fine powder and can separate solid gas through self-regulating pressure.
The technical scheme adopted by the scheme is as follows: the utility model provides a filtration equipment of atomic layer deposition is process residual gas for equipment, including protruding scute, setting tank, weight increase section of thick bamboo, inlet box, support frame, toper diffusion screwdriver draw in and increase a matter mechanism and pressure self-modulation no loss adsorption device, protruding scute upper wall is located to the setting tank, the protruding scute upper wall of protruding scute both sides is located to the support frame symmetry, one side that protruding scute was kept away from to the support frame is located to the weight increase section of thick bamboo upper wall, the weight increase section of thick bamboo upper wall is located to the inlet box, toper diffusion screwdriver draws in and increases matter mechanism and locates inside the weight increase section of thick bamboo, pressure self-modulation no loss adsorption device locates inside the setting tank, toper diffusion screwdriver draws in and increases a matter mechanism and draws in the coupling mechanism including diffusion contact mechanism, medium attachment mechanism and draw in, diffusion contact mechanism locates weight increase section of thick bamboo top inner wall, medium attachment mechanism locates weight increase section of thick bamboo middle part inner wall, draw in coupling mechanism and locate weight increase section of thick bamboo bottom inner wall, pressure self-modulation no loss adsorption device includes emission mechanism and pressure regulation circulation type adsorption device, the setting tank inner wall is located to pressure increase section of thick bamboo side wall.
As a further preferred option of the scheme, the diffusion contact mechanism comprises air inlets, air inlet pipes, a positive conical plate and diffusion ports, wherein a plurality of groups of the air inlets are formed in the side wall of the air inlet box, the air inlet pipes are communicated and arranged between the air inlet box and the weight increasing barrel, the positive conical plate is arranged on the inner wall of the top of the weight increasing barrel, and a plurality of groups of the diffusion ports are formed in the upper wall of the positive conical plate; the medium attachment mechanism comprises an electrostatic plate, an electrostatic generator and an electrostatic flow guide net, the electrostatic plate is arranged on the side wall of the weight increasing cylinder, the electrostatic generator is arranged on one side, away from the weight increasing cylinder, of the electrostatic plate, the electrostatic flow guide net is arranged on the inner wall of the weight increasing cylinder below the positive conical plate, and a power end of the electrostatic generator penetrates through the side wall of the weight increasing cylinder and is connected with the electrostatic flow guide net; the collecting combination mechanism comprises an inverted cone plate, a collecting opening and an air outlet pipe, the inverted cone plate is arranged on the inner wall of the weight increasing cylinder below the static current conducting net, the collecting opening is arranged on the bottom wall of the inverted cone plate, and the air outlet pipe is communicated between the settling tank and the weight increasing cylinder; the residual gas discharge pipe of a plurality of equipment is connected to inside the air inlet, residual gas enters into inside the air inlet box through the air inlet, the residual gas of air inlet box inside enters into inside a weight increase section of thick bamboo through the intake pipe, residual gas diffuses under the effect of positive conical plate, residual gas after the diffusion descends through the diffusion mouth through static conductance flow net, static generator makes static flow net surface subsidiary have static through the power end, under the effect of air current, residual gas carries the static ion when passing through static conductance flow net, the residual gas that carries the static ion falls down on the back taper plate, residual gas enters into inside the outlet duct through drawing in the mouth, residual gas falls down on the back taper plate, the back taper plate gathers together residual gas, make the powder that carries the static ion carry out the mutual adsorption, thereby increase the weight of powder in the residual gas, residual gas enters into the inside the setting tank through the outlet duct and deposits.
Preferably, the pressure regulating and discharging mechanism comprises clamping blocks, guide columns, pressure plates, pressure columns and springs, wherein the clamping blocks are symmetrically arranged on the inner walls of two sides of the settling box, the guide blocks are symmetrically arranged on the upper walls of two ends of the convex angle plate, the guide columns are symmetrically arranged on one side, far away from the inner wall of the settling box, of the clamping blocks, the guide columns are oppositely arranged, the pressure plates are slidably arranged between the guide columns, the pressure columns penetrate through the settling box, the clamping blocks are arranged between the guide blocks and the pressure plates, the pressure columns are slidably arranged on the guide blocks, and the springs are arranged between the support frame and the guide columns; the circulating adsorption mechanism comprises a vegetable oil storage cylinder, a filter box, a filter screen, an oil pump, an oil pumping pipe, a filter pipe, an oil return pipe, an exhaust port and a dust filter screen, wherein the vegetable oil storage cylinder is arranged on the bottom wall of the settling tank, the vegetable oil storage cylinder is a cavity with an opening at the upper end, the filter box is arranged on one side, away from the electrostatic generator, of the weight increasing cylinder, the filter screen is arranged on the inner wall of the filter box, the oil pump is arranged on the bottom wall of the filter box, the oil pumping pipe is communicated between the power input end of the oil pump and the vegetable oil storage cylinder, the filter pipe is communicated between the power output end of the oil pump and the filter box, the oil return pipe is communicated between the filter box and one side, away from the oil pumping pipe, of the vegetable oil storage cylinder, the exhaust port is arranged on the upper wall of the settling tank, and the dust filter screen is arranged on the inner wall of the exhaust port; residual gas enters into the inside back of settling tank and applies pressure to the pressure plate, the pressure plate receives behind the pressure along the guide post slip drive pressure post and extrudees the spring, spring deformation shortens, the spring extrudees the pressure boost to the inside gas of settling tank through reverse elasticity, the inside gas of settling tank is discharged after the gas vent filters through the dirt filtrating net after the pressure boost, powder among the residual gas is because weight increase, and can not change the advancing direction of powder when pressurizeing gas, the powder sinks inside the vegetable oil storage section of thick bamboo, the inside vegetable oil of vegetable oil storage section of thick bamboo adsorbs the powder, under the difficult volatile characteristic of evaporation of vegetable oil, avoided the powder to adsorb the appearance of settling tank inner wall condition along with the diffusion of liquid, improve the treatment effeciency of powder among the residual gas.
Specifically, the weight increasing cylinder side wall is provided with a controller, and the controller is respectively electrically connected with the static generator and the oil pump.
The beneficial effect who adopts above-mentioned structure this scheme to gain is as follows:
compared with the prior art, the scheme adopts a mode of firstly diffusing and then gathering residual gas under the intervention of the static current conducting net through the arranged positive and negative cone structure, so that the weight of powder in the residual gas is increased, the gas and the solid are conveniently separated, and the probability of the powder entering the air is reduced;
secondly, the viscous adsorption capacity of the non-volatile liquid is adopted to adsorb the heavy sinking powder, so that the load pressure of the filter structure is reduced, the replacement frequency of the filter structure is reduced, the operation duration of the equipment is prolonged, and the adsorption capacity of the liquid is ensured under the arrangement of a circulating filtering mechanism;
secondly, the pressure of the gas in the settling tank is increased by the aid of the offsetting acting force, and the intervention of air draft power is avoided, so that the interior of the settling tank is only driven by the gas and does not interfere with the sinking of the powder, and the powder in residual gas is removed;
finally, under the mutual matching of the furling combination mechanism and the circulation type adsorption mechanism, the adsorption of the powder contained in the residual gas is realized, and the problem that fine powder generated by the abrasion of the powder enters the outside air to cause pollution when the powder is coated is effectively avoided.
Drawings
FIG. 1 is a schematic view of the overall structure of the present embodiment;
FIG. 2 is a perspective view of the present solution;
FIG. 3 is an exploded view of the present scenario;
FIG. 4 is an oblique view of FIG. 3;
FIG. 5 is a front view of the present scenario;
FIG. 6 is a rear view of the present scenario;
FIG. 7 is a left side view of the present scenario;
FIG. 8 is a right side view of the present scenario;
FIG. 9 isbase:Sub>A partial sectional view A-A of FIG. 5;
FIG. 10 is a sectional view of portion B-B of FIG. 5;
fig. 11 is an enlarged view of a portion a of fig. 4.
The device comprises a convex angle plate 1, a convex angle plate 2, a settling tank 3, a weight increasing cylinder 4, an air inlet tank 5, a support frame 6, a conical diffusion-to-diffusion mass-increasing mechanism 7, a diffusion contact mechanism 8, an air inlet 9, an air inlet pipe 10, a forward conical plate 11, a diffusion port 12, a medium attachment mechanism 13, an electrostatic plate 14, an electrostatic generator 15, an electrostatic conduction flow net 16, a gathering combination mechanism 17, a reverse conical plate 18, a gathering port 19, an air outlet pipe 20, a pressure self-adjusting non-loss adsorption mechanism 21, a pressure adjusting discharge mechanism 22, a clamping block 23, a guide block 24, a guide column 25, a pressure plate 26, a pressure column 27, a spring 28, a circulating adsorption mechanism 29, a vegetable oil storage cylinder 30, a filter tank 31, a filter screen 32, an oil pump 33, an oil pumping pipe 34, a filter pipe 35, an oil return pipe 36, an air outlet, a 37, a dust filter screen 38 and a controller.
The accompanying drawings are included to provide a further understanding of the present solution and are incorporated in and constitute a part of this specification, illustrate embodiments of the solution and together with the description serve to explain the principles of the solution and not to limit the solution.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments; all other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present disclosure without any creative effort belong to the protection scope of the present disclosure.
In the description of the present solution, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present solution.
As shown in fig. 1-11, the filtration equipment of the process residual gas for the atomic layer deposition equipment that this scheme provided, including protruding scute 1, settling tank 2, weight increase section of thick bamboo 3, inlet box 4, support frame 5, toper diffusion change toper draw in and increase matter mechanism 6 and pressure self-modulation type no loss adsorption apparatus structure 20, settling tank 2 locates protruding scute 1 upper wall, the protruding scute 1 upper wall of protruding scute 1 both sides is located to support frame 5 symmetry, one side of protruding scute 1 is kept away from to weight increase section of thick bamboo 3, inlet box 4 locates weight increase section of thick bamboo 3 upper wall, toper diffusion change awl draw in and increase matter mechanism 6 and locate inside weight increase section of thick bamboo 3, pressure self-modulation type no loss adsorption apparatus structure 20 locates inside settling tank 2, toper diffusion change awl shape increase matter mechanism 6 includes diffusion contact mechanism 7, medium attachment mechanism 12 and draws in binding mechanism 16, diffusion contact mechanism 7 locates weight increase section of thick bamboo 3 top inner wall, medium attachment mechanism 12 locates weight increase section of thick bamboo 3 middle part inner wall, draw in binding mechanism 16 and locate weight increase section of thick bamboo 3 inner wall, self-adjusting adsorption apparatus structure 16, pressure change in and draw in and discharge mechanism 21 and pressure increase circulation mechanism 28 and pressure increase section of thick bamboo inner wall.
The diffusion contact mechanism 7 comprises air inlets 8, air inlet pipes 9, a positive conical plate 10 and diffusion ports 11, wherein multiple groups of the air inlets 8 are formed in the side wall of the air inlet box 4, the air inlet pipes 9 are communicated between the air inlet box 4 and the weight increasing cylinder 3, the positive conical plate 10 is formed in the inner wall of the top of the weight increasing cylinder 3, and multiple groups of the diffusion ports 11 are formed in the upper wall of the positive conical plate 10; the medium attachment mechanism 12 comprises an electrostatic plate 13, an electrostatic generator 14 and an electrostatic flow guiding net 15, wherein the electrostatic plate 13 is arranged on the side wall of the weight increasing cylinder 3, the electrostatic generator 14 is arranged on one side of the electrostatic plate 13 far away from the weight increasing cylinder 3, the electrostatic flow guiding net 15 is arranged on the inner wall of the weight increasing cylinder 3 below the positive conical plate 10, and the power end of the electrostatic generator 14 penetrates through the side wall of the weight increasing cylinder 3 and is connected with the electrostatic flow guiding net 15; the furling combination mechanism 16 comprises an inverted cone plate 17, a furling opening 18 and an air outlet pipe 19, wherein the inverted cone plate 17 is arranged on the inner wall of the weight increasing cylinder 3 below the static current conducting net 15, the furling opening 18 is arranged on the bottom wall of the inverted cone plate 17, and the air outlet pipe 19 is communicated between the settling tank 2 and the weight increasing cylinder 3; the residual gas discharge pipe of a plurality of equipment is connected to inside the air inlet 8, residual gas enters into inside the air inlet box 4 through the air inlet 8, residual gas inside the air inlet box 4 enters into inside the weight increasing cylinder 3 through the air inlet pipe 9, residual gas diffuses under the effect of the positive conical plate 10, residual gas after diffusion descends through the diffusion port 11 and passes through the static current conducting net 15, the static generator 14 makes the static current conducting net 15 surface have static electricity attached through the power end, under the effect of air current, residual gas carries with static ions when passing through the static current conducting net 15, residual gas carrying with static ions falls onto the back-taper plate 17, residual gas enters into inside the air outlet pipe 19 through the furling port 18, residual gas falls onto the back-taper plate 17, the back-taper plate 17 gathers together residual gas, powder carrying with static ions is adsorbed to each other, thereby increase the weight of powder in the residual gas, residual gas enters into inside the settling chamber 2 through the air outlet pipe 19 and is precipitated.
The pressure regulating and discharging mechanism 21 comprises clamping blocks 22, guide blocks 23, guide columns 24, a pressure plate 25, pressure columns 26 and springs 27, wherein the clamping blocks 22 are symmetrically arranged on the inner walls of two sides of the settling tank 2, the guide blocks 23 are symmetrically arranged on the upper walls of two ends of the convex angle plate 1, the guide columns 24 are symmetrically arranged on one sides, far away from the inner wall of the settling tank 2, of the clamping blocks 22, the guide columns 24 are oppositely arranged, the pressure plate 25 is arranged between the guide columns 24 in a sliding mode, the pressure columns 26 penetrate through the settling tank 2, the clamping blocks 22 are arranged between the guide blocks 23 and the pressure plate 25, the pressure columns 26 are arranged on the guide blocks 23 in a sliding mode, and the springs 27 are arranged between the support frame 5 and the guide columns 24; the circulating adsorption mechanism 28 comprises a vegetable oil storage cylinder 29, a filter box 30, a filter screen 31, an oil pump 32, an oil pumping pipe 33, a filter pipe 34, an oil return pipe 35, an air outlet 36 and a dust filter screen 37, wherein the vegetable oil storage cylinder 29 is arranged on the bottom wall of the sedimentation box 2, the vegetable oil storage cylinder 29 is a cavity with an upper end opened, the filter box 30 is arranged on one side of the weight increasing cylinder 3 away from the electrostatic generator 14, the filter screen 31 is arranged on the inner wall of the filter box 30, the oil pump 32 is arranged on the bottom wall of the filter box 30, the oil pumping pipe 33 is communicated between the power input end of the oil pump 32 and the vegetable oil storage cylinder 29, the filter pipe 34 is communicated between the power output end of the oil pump 32 and the filter box 30, the oil return pipe 35 is communicated between the filter box 30 and one side of the vegetable oil storage cylinder 29 away from the oil pumping pipe 33, the air outlet 36 is arranged on the upper wall of the sedimentation box 2, and the dust filter screen 37 is arranged on the inner wall of the air outlet 36; residual gas enters into 2 inside back of setting tank and applies pressure to pressure plate 25, pressure plate 25 receives behind the pressure along guide post 24 slip drive pressure post 26 and extrudes spring 27, spring 27 deformation shortens, spring 27 extrudes the pressure boost through reverse elasticity to 2 inside gaseous of setting tank, 2 inside gaseous of setting tank is discharged after the pressure boost through gas vent 36 filtration through filter dust screen 37, the powder among the residual gas is because weight increases, and can not change the advancing direction of powder when pressurizeing gas, the powder sinks inside vegetable oil storage cylinder 29, the inside vegetable oil of vegetable oil storage cylinder 29 adsorbs the powder, under the difficult volatile characteristic of evaporation of vegetable oil, avoided the powder to adsorb the appearance of the 2 inner wall condition of setting tank along with the diffusion of liquid, improve the treatment effeciency of powder among the residual gas.
The side wall of the weight increasing cylinder 3 is provided with a controller 38, and the controller 38 is electrically connected with the static generator 14 and the oil pump 32 respectively.
When the weight increasing cylinder is used specifically, in the first embodiment, the residual gas discharging pipelines of a plurality of devices are connected to the inside of the gas inlet 8, the residual gas enters the inside of the gas inlet box 4 through the gas inlet 8, and the residual gas inside the gas inlet box 4 enters the inside of the weight increasing cylinder 3 through the gas inlet pipe 9.
Specifically, residual gas is diffused under the action of the positive conical plate 10, the diffused residual gas descends through the diffusion port 11 and passes through the static current conducting net 15, the controller 38 controls the static generator 14 to be started, the static generator 14 generates static electricity through the power end, the static electricity is conducted onto the static current conducting net 15, static electricity is attached to the surface of the static current conducting net 15, the residual gas carries static ions when passing through the static current conducting net 15 under the action of airflow, the residual gas carrying the static ions falls onto the reverse conical plate 17, the residual gas enters the gas outlet pipe 19 through the furling port 18, the residual gas falls onto the reverse conical plate 17, the reverse conical plate 17 gathers the residual gas, powder carrying the static ions is adsorbed mutually, the weight of the powder in the residual gas is increased, and the residual gas enters the settling tank 2 through the gas outlet pipe 19 to be settled.
In the second embodiment, based on the above embodiment, after the residual gas enters the inside of the settling tank 2, pressure is applied to the pressure plate 25, the pressure plate 25 slides along the guide post 24 to drive the pressure post 26 to press the spring 27, the spring 27 deforms and shortens, the spring 27 presses and pressurizes the gas inside the settling tank 2 through reverse elasticity, the gas inside the settling tank 2 is discharged after being pressurized through the exhaust port 36 and the dust filter 37, the weight of the powder in the residual gas is increased, the advancing direction of the powder cannot be changed when the gas is pressurized, the powder sinks into the vegetable oil storage cylinder 29, the vegetable oil inside the vegetable oil storage cylinder 29 adsorbs the powder, under the characteristic that the vegetable oil is not easy to evaporate and volatilize, the phenomenon that the powder is adsorbed to the inner wall of the settling tank 2 along with the diffusion of the liquid is avoided, and the treatment efficiency of the powder in the residual gas is improved;
in order to avoid saturation of the adsorption capacity of the vegetable oil in the vegetable oil storage cylinder 29, the oil pump 32 pumps the powdered vegetable oil in the vegetable oil storage cylinder 29 through the oil pumping pipe 33, the vegetable oil enters the filter box 30 through the filter pipe 34, the filter screen 31 filters the vegetable oil in the filter box 30, and the filtered vegetable oil flows back to the vegetable oil storage cylinder 29 through the oil return pipe 35, so that the vegetable oil is recycled; repeating the above operation when using next time.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present solution have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the solution, the scope of which is defined in the appended claims and their equivalents.
The present solution and its embodiments have been described above, but the description is not limited thereto, and what is shown in the drawings is only one of the embodiments of the present solution, and the actual structure is not limited thereto. In summary, those skilled in the art should appreciate that they can readily use the present disclosure without inventive faculty to devise similar arrangements and embodiments without departing from the spirit and scope of the present disclosure.
Claims (10)
1. The utility model provides an atomic layer deposition is filtration equipment of process residual gas for equipment, includes protruding scute (1), setting tank (2), weight increase section of thick bamboo (3), inlet box (4) and support frame (5), its characterized in that: still draw in and increase a matter mechanism (6) and pressure self modulation type and do not have loss adsorption apparatus structure (20) including toper diffusion screwdriver shape, protruding scute (1) upper wall is located in setting up bin (2), protruding scute (1) upper wall of (1) both sides is located to support frame (5) symmetry, one side that protruding scute (1) was kept away from in support frame (5) is located to weight increase section of thick bamboo (3), weight increase section of thick bamboo (3) upper wall is located in case (4) of admitting air, toper diffusion screwdriver draws in and increases matter mechanism (6) and locates inside weight increase section of thick bamboo (3), pressure self modulation type does not have loss adsorption apparatus structure (20) and locates setting up bin (2) inside, toper diffusion screwdriver shape draws in and increases matter mechanism (6) and includes diffusion contact mechanism (7), medium attachment mechanism (12) and draws in combination mechanism (16), weight increase section of thick bamboo (3) top inner wall is located to diffusion contact mechanism (7), weight increase section of thick bamboo (3) inner wall is located to medium attachment mechanism (12), draw in combination mechanism (16) and increase section of thick bamboo (3) bottom.
2. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 1, wherein: pressure self-modulation type does not have loss adsorption element (20) and includes pressure regulating emission mechanism (21) and circulation type adsorption element (28), settling tank (2) inner wall is located in pressure regulating emission mechanism (21), weight increase section of thick bamboo (3) lateral wall is located in circulation type adsorption element (28).
3. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 2, wherein: diffusion contact mechanism (7) include air inlet (8), intake pipe (9), just taper plate (10) and diffusion mouth (11), air inlet (8) multiunit is located intake box (4) lateral wall, intake pipe (9) intercommunication is located between intake box (4) and the weight increase section of thick bamboo (3), a weight increase section of thick bamboo (3) top inner wall is located in just taper plate (10), just taper plate (10) upper wall is located to diffusion mouth (11) multiunit.
4. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 3, wherein: the medium attachment mechanism (12) comprises an electrostatic plate (13), an electrostatic generator (14) and an electrostatic flow guide net (15), wherein the electrostatic plate (13) is arranged on the side wall of the weight increasing cylinder (3), the electrostatic generator (14) is arranged on one side, away from the weight increasing cylinder (3), of the electrostatic plate (13), the electrostatic flow guide net (15) is arranged on the inner wall of the weight increasing cylinder (3) below the positive conical plate (10), and a power end of the electrostatic generator (14) penetrates through the side wall of the weight increasing cylinder (3) and is connected with the electrostatic flow guide net (15).
5. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 4, wherein: the collecting and combining mechanism (16) comprises an inverted cone plate (17), a collecting opening (18) and an air outlet pipe (19), the inverted cone plate (17) is arranged on the inner wall of the weight increasing barrel (3) below the static current conducting net (15), the collecting opening (18) is arranged on the bottom wall of the inverted cone plate (17), and the air outlet pipe (19) is communicated between the settling tank (2) and the weight increasing barrel (3).
6. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 5, wherein: pressure regulating emission (21) include grip block (22), guide block (23), guide post (24), pressure plate (25), pressure column (26) and spring (27), inner wall in setting tank (2) both sides is located to grip block (22) symmetry, wall on protruding scute (1) both ends is located to guide block (23) symmetry.
7. The apparatus according to claim 6, wherein the apparatus comprises: guide post (24) symmetry is located grip block (22) and is kept away from one side of setting tank (2) inner wall, guide post (24) set up relatively, pressure plate (25) slide and locate between guide post (24), pressure column (26) run through setting tank (2), grip block (22) and locate between guide block (23) and pressure plate (25), pressure column (26) slide and locate on guide block (23), spring (27) are located between support frame (5) and guide post (24).
8. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 7, wherein: circulation type adsorption equipment constructs (28) and includes vegetable oil storage tube (29), rose box (30), filter screen (31), oil pump (32), oil pumping pipe (33), filter tube (34), oil return pipe (35), gas vent (36) and strain dirt net (37), settling chamber (2) diapire is located in vegetable oil storage tube (29), vegetable oil storage tube (29) are upper end open-ended cavity.
9. The apparatus for filtering the process residue gas for an atomic layer deposition apparatus according to claim 8, wherein: the filter box (30) is arranged on one side, far away from the electrostatic generator (14), of the weight increasing barrel (3), the filter screen (31) is arranged on the inner wall of the filter box (30), the oil pump (32) is arranged on the bottom wall of the filter box (30), and the oil pumping pipe (33) is communicated with and arranged between the power input end of the oil pump (32) and the vegetable oil storage barrel (29).
10. The apparatus according to claim 9, wherein the apparatus comprises: the filter tube (34) is communicated with and arranged between the power output end of the oil pump (32) and the filter box (30), the oil return tube (35) is communicated with and arranged between one side of the filter box (30) and one side of the vegetable oil storage cylinder (29) far away from the oil pumping tube (33), the exhaust port (36) is arranged on the upper wall of the sedimentation box (2), and the dust filter screen (37) is arranged on the inner wall of the exhaust port (36).
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