JPH09297149A - Probe positioning mechanism - Google Patents
Probe positioning mechanismInfo
- Publication number
- JPH09297149A JPH09297149A JP11374396A JP11374396A JPH09297149A JP H09297149 A JPH09297149 A JP H09297149A JP 11374396 A JP11374396 A JP 11374396A JP 11374396 A JP11374396 A JP 11374396A JP H09297149 A JPH09297149 A JP H09297149A
- Authority
- JP
- Japan
- Prior art keywords
- holder
- probe
- spring member
- positioning mechanism
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、原子間力顕微鏡等
に代表される探針を使用し、測定物表面を走査してその
表面状態を測定する表面状態測定機の探針位置決め機構
に関し、より詳しくは、測定物の表面形状を走査する探
針を変位検出センサに対し位置調整し保持する探針位置
決め機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe positioning mechanism for a surface condition measuring machine which uses a probe typified by an atomic force microscope or the like and scans the surface of a measurement object to measure its surface condition. More specifically, the present invention relates to a probe positioning mechanism that adjusts the position of a probe that scans the surface shape of a measurement object with respect to a displacement detection sensor and holds the probe.
【０００２】[0002]
【従来の技術】この種の探針位置決め機構としては、特
開平５−２２７９４８号公報に開示されているものがあ
り、この従来例を図８を参照して説明する。2. Description of the Related Art As a probe positioning mechanism of this type, there is one disclosed in Japanese Patent Laid-Open No. 5-227948, and a conventional example will be described with reference to FIG.
【０００３】従来の表面状態測定機の探針位置決め機構
は、図８に示すように、変位検出センサ１０８からのレ
ーザ光スポットが、測定物１０３を走査する探針１０２
を保持するバネ部材１０１上で集光し反射するようにホ
ルダ１０４を位置決めして保持している。In the conventional probe positioning mechanism of the surface condition measuring machine, as shown in FIG. 8, the laser beam spot from the displacement detecting sensor 108 scans the object 103 to be measured 102.
The holder 104 is positioned and held so that the light is condensed and reflected on the spring member 101 for holding.
【０００４】即ち、探針位置決め機構は、前記バネ部材
１０１を支持する磁性体のホルダ１０４と、磁力により
前記ホルダ１０４をＸ方向、Ｙ方向に移動可能な状態で
支持する永久磁石１０５と、永久磁石１０５のＺ方向の
位置調整をする圧電素子１０６と、前記バネ部材１０１
のＸ方向、Ｙ方向の位置調整を行うＸ−Ｙ位置調整機構
１０７とにより構成され、前記ホルダ１０４は、Ｘ−Ｙ
位置調整機構１０７によりクランプされて永久磁石１０
５上をＸ方向、Ｙ方向に移動することで位置決めを行う
ようになっている。That is, the probe positioning mechanism includes a magnetic holder 104 for supporting the spring member 101, a permanent magnet 105 for movably supporting the holder 104 in the X and Y directions, and a permanent magnet. The piezoelectric element 106 for adjusting the position of the magnet 105 in the Z direction, and the spring member 101.
And an X-Y position adjusting mechanism 107 that adjusts the position in the X and Y directions.
The permanent magnet 10 is clamped by the position adjusting mechanism 107.
Positioning is performed by moving the upper part 5 in the X and Y directions.
【０００５】[0005]
【発明が解決しようとする課題】上述した従来技術にお
ける探針位置決め機構では、Ｚ方向の調整に関しては圧
電素子１０６を用いているため、調整範囲が狭くなり形
状の異なったバネ部材１０１の位置決めを行うことがで
きないという課題がある。In the above-described conventional probe positioning mechanism, since the piezoelectric element 106 is used for the adjustment in the Z direction, the adjustment range is narrowed and the spring member 101 having a different shape is positioned. There is a problem that cannot be done.
【０００６】また、Ｘ方向に対しては回転調整が出来な
いため、探針１０２の測定物表面に対しての接触角が調
整できず、測定物表面の接触角が測定結果に大きく影響
する摩擦力測定等の測定では精度の良い測定ができない
という課題がある。Further, since the rotation cannot be adjusted in the X direction, the contact angle of the probe 102 with respect to the surface of the object to be measured cannot be adjusted, and the contact angle of the surface of the object to be measured greatly affects the friction. There is a problem that accurate measurement cannot be performed in measurement such as force measurement.
【０００７】さらに、ホルダ１０４を永久磁石１０５で
保持しているため、探針１０２が磁性化し、測定物表面
の磁気力を測定することができないという課題もある。Further, since the holder 104 is held by the permanent magnet 105, the probe 102 is magnetized and there is a problem that the magnetic force on the surface of the object to be measured cannot be measured.
【０００８】本発明は、上記課題に鑑みてなされたもの
であり、形状の異なったバネ部材の取り付けが可能であ
り、測定物表面に対し探針の接触角を調整でき、さら
に、磁気力の測定をも可能な探針位置決め機構を提供す
ることを目的とする。The present invention has been made in view of the above problems. It is possible to attach spring members having different shapes, the contact angle of the probe with respect to the surface of the object to be measured can be adjusted, and the magnetic force It is an object of the present invention to provide a probe positioning mechanism capable of measuring.
【０００９】[0009]
【課題を解決するための手段】請求項１記載の探針位置
決め機構では、図１に示すように、探針２はバネ部材３
の自由端に測定物１に対向して支持し、また、バネ部材
３の固定端はホルダ４で支持している。さらに、前記バ
ネ部材３の変位を検出する変位検出センサ７をこのバネ
部材３の上部に配置し、支持部６で保持している。この
支持部６は、中間ホルダ５を永久磁石８を用いて保持
し、かつ、その保持面でＺ方向に移動可能な状態に保持
している。前記中間ホルダ５は、その下面でホルダ４を
永久磁石９を用い、その保持面でＸ方向及びＹ方向に移
動可能な状態で保持している。In a probe positioning mechanism according to a first aspect of the present invention, as shown in FIG.
The free end of the spring member 3 is supported so as to face the object to be measured 1, and the fixed end of the spring member 3 is supported by the holder 4. Further, a displacement detection sensor 7 for detecting the displacement of the spring member 3 is arranged above the spring member 3 and held by the supporting portion 6. The supporting portion 6 holds the intermediate holder 5 by using the permanent magnet 8 and also holds the intermediate holder 5 in a movable state in the Z direction on its holding surface. The lower surface of the intermediate holder 5 uses a permanent magnet 9 to hold the holder 4 in a movable state in the X and Y directions on its holding surface.
【００１０】請求項２記載の探針位置決め機構では、探
針２をバネ部材３の自由端に測定物１に対向して支持
し、バネ部材３の固定端をホルダ４で支持する。前記バ
ネ部材３の変位を検出する変位検出センサ７をバネ部材
３の上部に配置し、支持部６で保持する。この支持部６
は、中間ホルダ５を磁石８で保持し、かつ、その保持面
でＺ方向に移動でき、かつ、Ｚ方向を軸に回転できる状
態としている。前記中間ホルダ５は、ホルダ４を磁石９
で保持し、その保持面でＸ方向に移動し、かつ、Ｘ方向
を軸に回転できる状態で保持している。In the probe positioning mechanism according to the second aspect, the probe 2 is supported by the free end of the spring member 3 so as to face the object to be measured 1, and the fixed end of the spring member 3 is supported by the holder 4. A displacement detection sensor 7 for detecting the displacement of the spring member 3 is arranged above the spring member 3 and is held by the support portion 6. This support 6
The intermediate holder 5 is held by the magnet 8 and can be moved in the Z direction by its holding surface and can be rotated about the Z direction. The intermediate holder 5 includes a holder 9 and a magnet 9
It is held in such a state that it can be moved in the X direction on its holding surface and can rotate about the X direction as an axis.
【００１１】請求項３記載の探針位置決め機構では、探
針２をバネ部材３の自由端に測定物１に対向して支持
し、その固定端をホルダ４で支持している。さらに、前
記バネ部材３の変位を検出する変位検出センサ７を、バ
ネ部材３の上方に配置している。ホルダ４は磁力により
保持され、バネ部材３は、探針２の固定部を非磁性部材
により形成したホルダ４に固定している。In the probe positioning mechanism of the third aspect, the probe 2 is supported by the free end of the spring member 3 so as to face the object to be measured 1, and the fixed end thereof is supported by the holder 4. Further, a displacement detection sensor 7 for detecting the displacement of the spring member 3 is arranged above the spring member 3. The holder 4 is held by magnetic force, and the spring member 3 fixes the fixed portion of the probe 2 to the holder 4 formed of a non-magnetic member.
【００１２】原子間力顕微鏡等に代表される探針を使用
し、測定物１の表面を走査し表面状態を測定する表面状
態測定機では、測定物１の表面形状を走査する探針２の
変位を検出するため、変位検出センサ７に対向して探針
２を取り付けているバネ部材３を位置決めする必要があ
る。In a surface condition measuring machine that uses a probe typified by an atomic force microscope or the like to scan the surface of the object to be measured 1 to measure the surface condition, a probe 2 for scanning the surface shape of the object 1 to be measured is used. In order to detect the displacement, it is necessary to position the spring member 3 to which the probe 2 is attached so as to face the displacement detection sensor 7.
【００１３】請求項１記載の探針位置決め機構では、バ
ネ部材３を支持しているホルダ４を中間ホルダ５で磁石
９を用いて磁性的に保持しているため、ホルダ４に対し
Ｘ方向及びＹ方向に一定量の力を与えることにより、ホ
ルダ４の位置を調整し位置決めすることができる。In the probe positioning mechanism according to the first aspect, since the holder 4 supporting the spring member 3 is magnetically held by the intermediate holder 5 by using the magnet 9, the holder 4 can be moved in the X direction and in the X direction. By applying a certain amount of force in the Y direction, the position of the holder 4 can be adjusted and positioned.
【００１４】さらに、前記支持部６で磁石８を用いて磁
性的にＺ方向に移動可能な状態で保持されている中間ホ
ルダ５に対し、Ｚ方向に一定量の力を与えることによ
り、この中間ホルダ５をＺ方向に移動させ、前記ホルダ
４に保持されているバネ部材３をＺ方向に調整し位置決
めを行うことができる。Further, by applying a certain amount of force in the Z direction to the intermediate holder 5 which is magnetically held in the support section 6 by the magnet 8 so as to be magnetically movable in the Z direction. The holder 5 can be moved in the Z direction, and the spring member 3 held by the holder 4 can be adjusted in the Z direction for positioning.
【００１５】この結果、変位検出センサ７に対し探針２
を取り付けているバネ部材３をＸ方向、Ｙ方向及びＺ方
向に位置決めすることができる。As a result, the probe 2 is
The spring member 3 to which is attached can be positioned in the X direction, the Y direction, and the Z direction.
【００１６】請求項２記載の探針位置決め機構では、バ
ネ部材３を支持しているホルダ４を中間ホルダ５により
Ｘ方向及びＸ方向を軸に回転できるように磁性的に保持
しているので、Ｘ方向を軸に回転する方向に一定量の力
を与えることにより、探針２のＸ方向の位置と測定物１
に対する探針２の接触角を調整し位置決めすることがで
きる。In the probe positioning mechanism according to the second aspect of the invention, the holder 4 supporting the spring member 3 is magnetically held by the intermediate holder 5 so as to be rotatable about the X direction and the X direction. By applying a certain amount of force in the direction of rotation about the X direction, the position of the probe 2 in the X direction and the measured object 1
The contact angle of the probe 2 with respect to can be adjusted and positioned.
【００１７】さらに支持部６でＺ方向及びＺ方向を軸に
して回転できるよう磁性的に保持されている中間ホルダ
５に対して一定量の力を与えることにより、この中間ホ
ルダ５をＺ方向及びＺ方向を軸にして回転する方向に変
位させ、ホルダ４に保持されているバネ部材３をＺ方向
及びＹ方向に調整し位置決めを行うことができる。Further, by applying a certain amount of force to the intermediate holder 5 which is magnetically held by the support portion 6 so that it can rotate about the Z direction and the Z direction, the intermediate holder 5 is moved in the Z direction and The spring member 3 held by the holder 4 can be displaced in the direction of rotation about the Z direction as an axis to adjust the position in the Z direction and the Y direction for positioning.
【００１８】このようにして、変位検出センサ７に対
し、探針２を取り付けてあるバネ部材３を位置決めする
とともに、測定物１に対し探針２の接触角を正確に位置
決めすることができる。In this way, the spring member 3 to which the probe 2 is attached can be positioned with respect to the displacement detection sensor 7, and the contact angle of the probe 2 with respect to the object to be measured 1 can be accurately positioned.
【００１９】請求項３記載の探針位置決め機構では、ホ
ルダ４のバネ部材固定部を非磁性体で形成しているの
で、ホルダ４が中間ホルダ５により磁性的に保持されて
いても、バネ部材３及び探針２の磁化を防ぐことができ
る。In the probe positioning mechanism according to the third aspect, since the spring member fixing portion of the holder 4 is formed of a non-magnetic material, even if the holder 4 is magnetically held by the intermediate holder 5, the spring member is held. Magnetization of the probe 3 and the probe 2 can be prevented.
【００２０】[0020]
【発明の実施の形態】以下に本発明の実施の形態を詳細
に説明する。Embodiments of the present invention will be described below in detail.
【００２１】（実施の形態１） （構成）図２は本発明の実地の形態１の探針位置決め機
構を示すものであり、この探針位置決め機構は、Ｌ字状
のベース１０の底片部上には、測定物１をＸ方向、Ｙ方
向に移動させる圧電素子等で構成したＸ−Ｙステージ１
９を設け、さらに、ベース１０の側片部にはアーム部１
２を圧電素子１１を介して支持している。(Embodiment 1) (Structure) FIG. 2 shows a probe positioning mechanism according to a practical embodiment 1 of the present invention. This probe positioning mechanism is on the bottom piece of the L-shaped base 10. Includes an XY stage 1 composed of a piezoelectric element or the like for moving the measurement object 1 in the X and Y directions.
9 is provided, and the arm 1 is provided on the side piece of the base 10.
2 is supported via the piezoelectric element 11.
【００２２】また、バネ部材３の自由端に、探針２を、
測定物１の測定面に対し対向するように配置している。
前記バネ部材３及び探針２は、窒化シリコン等の部材を
半導体製造プロセスを使用して加工したものである。The probe 2 is attached to the free end of the spring member 3.
The measurement object 1 is arranged so as to face the measurement surface.
The spring member 3 and the probe 2 are formed by processing a member such as silicon nitride using a semiconductor manufacturing process.
【００２３】また、前記バネ部材３及び探針２は、数μ
ｍ乃至数百μｍ厚の薄い燐青銅の薄片等からなる弾性体
の端部に、先端を加工して尖鋭化したダイヤモンドを固
定して形成することもできる。Further, the spring member 3 and the probe 2 are several μ
It can also be formed by fixing a diamond having a sharpened tip processed to the end of an elastic body made of a thin piece of phosphor bronze having a thickness of m to several hundreds of μm.
【００２４】変位センサ７は、前記バネ部材３の変位を
検出するように、このバネ部材３の上部に位置する配置
でアーム部１２により支持する。また、圧電素子１３
は、アーム部１２により支持し、この圧電素子１３に支
持部１４をＺ方向に微動できるよう取り付けている。The displacement sensor 7 is supported by the arm portion 12 so as to detect the displacement of the spring member 3 so as to be located above the spring member 3. Also, the piezoelectric element 13
Is supported by the arm portion 12, and the support portion 14 is attached to the piezoelectric element 13 so that the support portion 14 can be slightly moved in the Z direction.
【００２５】前記支持部１４は、図２のＡ−Ａ断面図と
して図３に示すように、Ｌ字状に形成され、その２面に
永久磁石１６ａ、１６ｂが取り付けられて、永久磁石１
６ａ、１６ｂにより中間ホルダ１５を磁性的に（磁力に
より）保持している。As shown in FIG. 3 which is a sectional view taken along the line AA of FIG. 2, the supporting portion 14 is formed in an L shape, and permanent magnets 16a and 16b are attached to two surfaces of the supporting portion 14 to form the permanent magnet 1.
The intermediate holder 15 is magnetically (by magnetic force) held by 6a and 16b.
【００２６】さらに、前記中間ホルダ１５の底片部に
は、永久磁石２４が取り付けられており、この永久磁石
２４により、前記バネ部材３の固定端を保持するホルダ
２２を磁性的（磁力）に保持している。前記ホルダ１
８、中間ホルダ１５、支持部１４は、鉄等の磁性材料で
構成している。Further, a permanent magnet 24 is attached to the bottom piece of the intermediate holder 15, and the permanent magnet 24 holds the holder 22 holding the fixed end of the spring member 3 magnetically (magnetic force). are doing. The holder 1
8, the intermediate holder 15, and the support portion 14 are made of a magnetic material such as iron.
【００２７】（作用）本実施の形態１において、Ｘ−Ｙ
ステージ１９は、測定物１をＸ方向、Ｙ方向に動作さ
せ、表面状態を測定する時、表面を探針２に対し走査す
る作用をする。表面状態を検出するには測定物１の表面
より探針２に働く力をバネ部材３の変位量として検出す
るため、変位検出センサ７の検出範囲に入るようにバネ
部材３を位置決めする必要がある。(Operation) In the first embodiment, XY
The stage 19 acts to scan the surface of the probe 2 when the object 1 is moved in the X and Y directions and the surface state is measured. In order to detect the surface state, the force acting on the probe 2 from the surface of the object to be measured 1 is detected as the displacement amount of the spring member 3. Therefore, it is necessary to position the spring member 3 within the detection range of the displacement detection sensor 7. is there.
【００２８】前記ホルダ１８は、中間ホルダ１５により
１面で磁性的に保持されているため、Ｘ方向、Ｙ方向に
一定量の力を加えることにより、保持面上を自由に移動
可能であり、また、中間ホルダ１５は支持部１４により
２面で保持されているため、Ｚ方向に一定量の力を加え
ることにより、容易にＺ方向に移動可能となる。Since the holder 18 is magnetically held on one surface by the intermediate holder 15, it can be freely moved on the holding surface by applying a certain amount of force in the X and Y directions. Further, since the intermediate holder 15 is held on the two surfaces by the support portion 14, it can be easily moved in the Z direction by applying a certain amount of force in the Z direction.
【００２９】従って、ホルダ１８及び中間ホルダ１５に
力を与え調整することにより、バネ部材３の位置決めを
行うことができる。尚、本実施の形態１における位置調
整可能な各部材は、例えば、５軸調整ステージ等により
外部から力を加えて調整し、変位検出センサ７の検出出
力を基に又は目視により位置決めする。Therefore, the spring member 3 can be positioned by applying a force to the holder 18 and the intermediate holder 15 for adjustment. It should be noted that each position-adjustable member in the first embodiment is adjusted by applying a force from the outside by, for example, a 5-axis adjustment stage or the like, and is positioned based on the detection output of the displacement detection sensor 7 or visually.
【００３０】前記圧電素子１１は、変位検出センサ７の
検出出力が一定になるよう、アーム部１２、圧電素子１
３、支持部１４、中間ホルダ１５、ホルダ１８を介して
探針２を上下動させ、探針２が、測定物１の表面を走査
するように制御し、測定物１の表面の状態を検出する。
また、前記圧電素子１３は、支持部１４、中間ホルダ１
５、ホルダ１８を介して探針２を更に微動させて調整
し、変位検出センサ７の出力のゼロ調整を正確に行うも
のである。The piezoelectric element 11 includes the arm portion 12 and the piezoelectric element 1 so that the detection output of the displacement detection sensor 7 becomes constant.
3, the probe 2 is moved up and down via the support portion 14, the intermediate holder 15, and the holder 18, and the probe 2 is controlled to scan the surface of the measurement object 1 to detect the state of the surface of the measurement object 1. To do.
Further, the piezoelectric element 13 includes a support portion 14 and an intermediate holder 1
5, the probe 2 is further finely moved through the holder 18 for adjustment, and the zero adjustment of the output of the displacement detection sensor 7 is accurately performed.
【００３１】（効果）本実施の形態１によれば、前記中
間ホルダ１５の保持面を２面で構成したことにより、調
整時の探針２のＺ方向への真直度が向上し、Ｚ方向調整
が容易となる。また、支持部１４の中間ホルダ１５に対
する保持力は、中間ホルダ１５のホルダ１８に対する保
持力より強いため、ホルダ１８の調整時にＺ方向の調整
がずれてしまうことを防止できる。(Effect) According to the first embodiment, since the holding surface of the intermediate holder 15 is composed of two surfaces, the straightness of the probe 2 in the Z direction at the time of adjustment is improved, and the Z direction is improved. Adjustment becomes easy. Further, since the holding force of the support portion 14 with respect to the intermediate holder 15 is stronger than the holding force of the intermediate holder 15 with respect to the holder 18, it is possible to prevent the adjustment in the Z direction from being deviated when the holder 18 is adjusted.
【００３２】（実施の形態２）図４乃至図６は、本発明
の実施の形態２を示すものであり、実施の形態１の場合
と同一部材には同一符号を付し、その詳細な説明を省略
する。図４は実施の形態２の探針位置決め機構の正面
図、図５は図４のＢ−Ｂ断面図、図６は図４のＣ−Ｃ断
面図である。(Embodiment 2) FIGS. 4 to 6 show Embodiment 2 of the present invention. The same members as those in Embodiment 1 are designated by the same reference numerals, and detailed description thereof will be given. Is omitted. 4 is a front view of the probe positioning mechanism according to the second embodiment, FIG. 5 is a sectional view taken along line BB of FIG. 4, and FIG. 6 is a sectional view taken along line CC of FIG.
【００３３】（構成）本実施の形態２の探針位置決め機
構は、基本的には実施の形態１の探針位置決め機構と同
様な構成であるが、図５に示すように、前記支持部１４
の代りに一方の側面が凹面状に形成された支持部２０を
使用し、この支持部２０の一方の側面に嵌め着けた永久
磁石２３により、前記凹面状の部分に対応する形状の円
柱状面を有する中間ホルダ２１を磁性的に保持してい
る。(Structure) The probe positioning mechanism of the second embodiment basically has the same structure as the probe positioning mechanism of the first embodiment, but as shown in FIG.
Instead of the above, a supporting portion 20 having one side surface formed in a concave shape is used, and a permanent magnet 23 fitted to one side surface of the supporting portion 20 is used to form a cylindrical surface having a shape corresponding to the concave portion. Holds the intermediate holder 21 magnetically.
【００３４】同様に、図６に示すように、前記中間ホル
ダ１５の代りに、底片部の下面側が凹面状に形成された
Ｌ字状の中間ホルダ２１を使用し、中間ホルダ２１の底
片部の下面側に嵌め着けた永久磁石２４により、前記凹
面状の部分に対応する形状の円柱状面を有するホルダ２
２を磁性的に保持しているSimilarly, as shown in FIG. 6, instead of the intermediate holder 15, an L-shaped intermediate holder 21 whose bottom surface is concave is used. The holder 2 having a cylindrical surface having a shape corresponding to the concave portion by the permanent magnet 24 fitted on the lower surface side.
Holds 2 magnetically
【００３５】前記ホルダ１８、中間ホルダ１５、支持部
１４は、鉄等の磁性材料で形成している。この他の構成
は、実施の形態１の場合と同様である。The holder 18, the intermediate holder 15, and the support portion 14 are made of a magnetic material such as iron. Other configurations are the same as those in the first embodiment.
【００３６】（作用）本実施の形態２によれば、前記ホ
ルダ２２を中間ホルダ２１の凹面状の部分で永久磁石２
３により磁性的に保持しているため、Ｘ方向及びＸ方向
を軸とする回転方向に一定量の力を加えることにより、
Ｘ方向及び測定物１の表面に対する探針２の接触角を調
整することが可能となる。(Operation) According to the second embodiment, the holder 22 is formed by the concave portion of the intermediate holder 21 into the permanent magnet 2.
Since it is magnetically held by 3, by applying a certain amount of force in the X direction and the rotation direction around the X direction,
It is possible to adjust the contact angle of the probe 2 with respect to the X direction and the surface of the measured object 1.
【００３７】また、中間ホルダ２１は凹面状の部分にお
いて永久磁石２４によりホルダ２２を磁性的に保持して
いるため、Ｚ方向及びＺ方向を軸とする回転方向に一定
量の力を加えることにより、容易にバネ部材３をＺ方向
及びＹ方向に移動調整できる。Further, since the holder 22 is magnetically held by the permanent magnet 24 in the concave portion of the intermediate holder 21, it is possible to apply a certain amount of force in the Z direction and the rotational direction about the Z direction. The spring member 3 can be easily moved and adjusted in the Z direction and the Y direction.
【００３８】従って、前記ホルダ２２及び中間ホルダ２
１に回転及びスライドする力を与え調整することによ
り、バネ部材３の位置決め及び探針２の測定物１の表面
に対する接触角の調整を行うことができる。Therefore, the holder 22 and the intermediate holder 2
By applying a rotating and sliding force to 1 for adjustment, the spring member 3 can be positioned and the contact angle of the probe 2 with respect to the surface of the measurement object 1 can be adjusted.
【００３９】（効果）本実施の形態２によれば、支持部
２０と中間ホルダ２１の保持面及び中間ホルダ２１とホ
ルダ２２の保持面が凹面状の面であるため、これらの間
の接触面積の増加による剛性の向上を図れる。(Effects) According to the second embodiment, since the holding surfaces of the support portion 20 and the intermediate holder 21 and the holding surfaces of the intermediate holder 21 and the holder 22 are concave surfaces, the contact area between them is small. The rigidity can be improved by increasing
【００４０】（実施の形態３） （構成）図６は、本発明の実施の形態３を示すものであ
り、ホルダー３０とバネ部材３との支持構造以外は実施
の形態１と同様であるため、その説明を省略する。(Third Embodiment) (Structure) FIG. 6 shows a third embodiment of the present invention, which is the same as the first embodiment except for the support structure of the holder 30 and the spring member 3. , The description is omitted.
【００４１】実施の形態３においては、探針２はバネ部
材３の自由端に配置され、バネ部材３はその固定端を導
電部材３３で支持し、この導電部材３３を非磁性体であ
るアルミ材３１を介してホルダ３０により支持するもの
である。In the third embodiment, the probe 2 is arranged at the free end of the spring member 3, the spring member 3 has its fixed end supported by the conductive member 33, and the conductive member 33 is made of a non-magnetic material such as aluminum. It is supported by the holder 30 via the material 31.
【００４２】（作用）実施の形態３においては、前記ホ
ルダ３０は永久磁石３２で磁化されるため、バネ部材３
１に磁化の影響が及ばないように非磁性体であるアルミ
材３１で磁気遮断する。磁気遮断したアルミ材３１に導
電部材３３を取り付けアース（接地）に接続することに
よりバネ部材３１の電位をアース電位とすることで、静
電気の影響を除去できる。(Operation) In the third embodiment, since the holder 30 is magnetized by the permanent magnet 32, the spring member 3 is used.
In order to prevent 1 from being affected by the magnetization, magnetic isolation is performed by an aluminum material 31 which is a non-magnetic material. By attaching the conductive member 33 to the magnetically shielded aluminum material 31 and connecting it to the ground (ground) to set the potential of the spring member 31 to the ground potential, the influence of static electricity can be removed.
【００４３】（効果）実施の形態３によれば、アルミ材
３１により磁気遮断を行い、さらに、導電部材３３を使
用してバネ部材３の電位をアース電位とすることで、静
電荷による影響を取り除くことができ、高精度に測定物
１の面状態を測定できる。(Effects) According to the third embodiment, the aluminum material 31 is used for magnetic isolation, and the conductive member 33 is used to set the potential of the spring member 3 to the ground potential. It can be removed, and the surface condition of the measurement object 1 can be measured with high accuracy.
【００４４】[0044]
【発明の効果】請求項１記載の発明によれば、形状の異
なったバネ部材の取り付けが可能な探針位置決め機構を
提供することができる。According to the first aspect of the invention, it is possible to provide a probe positioning mechanism capable of attaching spring members having different shapes.
【００４５】請求項２記載の発明によれば、測定物表面
に対し探針の接触角を調整できる探針位置決め機構を提
供することができる。According to the second aspect of the invention, it is possible to provide a probe positioning mechanism capable of adjusting the contact angle of the probe with respect to the surface of the object to be measured.
【００４６】請求項３記載の発明によれば、探針を磁気
より遮断することができ、探針の磁化が防止されて、磁
気力の測定を可能とする探針位置決め機構を提供するこ
とができる。According to the third aspect of the present invention, it is possible to provide a probe positioning mechanism that can shield the probe from magnetism, prevent magnetization of the probe, and enable measurement of magnetic force. it can.
【図１】本発明の探針位置決め機構の概念図である。FIG. 1 is a conceptual diagram of a probe positioning mechanism of the present invention.
【図２】実施の形態１の探針位置決め機構の正面図であ
る。FIG. 2 is a front view of the probe positioning mechanism according to the first embodiment.
【図３】図２のＡ−Ａ断面図である。FIG. 3 is a sectional view taken along line AA of FIG. 2;
【図４】実施の形態２の探針位置決め機構の正面図であ
る。FIG. 4 is a front view of a probe positioning mechanism according to a second embodiment.
【図５】図４のＢ−Ｂ断面図である。FIG. 5 is a sectional view taken along line BB of FIG. 4;
【図６】図４のＣ−Ｃ断面図である。FIG. 6 is a sectional view taken along line CC of FIG. 4;
【図７】実施の形態２の探針位置決め機構の一部を示す
図である。FIG. 7 is a diagram showing a part of a probe positioning mechanism according to a second embodiment.
【図８】従来例の概略図である。FIG. 8 is a schematic diagram of a conventional example.
１ 測定物 ２ 探針 ３ バネ部材 ４ ホルダ ５ 中間ホルダ ６ 支持部 ７ 変位検出センサ ８ 永久磁石 １０ ベース １１ 圧電素子 １２ アーム部 １３ 圧電素子 １４ 支持部 １５ 中間ホルダ １６ 永久磁石 １７ 永久磁石 １８ ホルダ １９ Ｘ−Ｙステージ 1 Measured Object 2 Probe 3 Spring Member 4 Holder 5 Intermediate Holder 6 Supporting Part 7 Displacement Detection Sensor 8 Permanent Magnet 10 Base 11 Piezoelectric Element 12 Arm Part 13 Piezoelectric Element 14 Supporting Part 15 Intermediate Holder 16 Permanent Magnet 17 Permanent Magnet 18 Holder 19 XY stage
Claims (3)
針と、前記探針の変位を検出する変位検出センサとを有
し、前記変位検出センサに対して前記バネ部材の位置を
調整し保持する探針位置決め機構において、 前記バネ部材を保持するホルダと、前記ホルダを磁力に
より保持し、かつ、保持面で前記ホルダがＸ方向及びＹ
方向に移動可能な状態で支持する中間ホルダと、この中
間ホルダを磁力により保持し、かつ、保持面でＺ方向に
移動可能な状態で支持する支持部とを有することを特徴
とする探針位置決め機構。1. A probe having one end fixed by a spring member and a displacement detection sensor for detecting displacement of the probe, wherein a position of the spring member is adjusted with respect to the displacement detection sensor. In a holding probe positioning mechanism for holding, a holder for holding the spring member, the holder is held by magnetic force, and the holding surface holds the holder in the X direction and the Y direction.
Positioning of a probe characterized by having an intermediate holder that supports the intermediate holder in a movable state in a direction and a support portion that holds the intermediate holder by magnetic force and that supports the intermediate surface in a movable state in the Z direction. mechanism.
針と、前記探針の変位を検出する変位検出センサとを有
し、前記変位検出センサに対して前記バネ部材の位置を
調整し保持する探針位置決め機構において、 前記バネ部材を保持するホルダと、前記ホルダを磁力に
より保持するとともに、保持面で前記ホルダがＸ方向に
移動可能でかつＸ方向を軸に回転可能な状態で支持する
中間ホルダと、この中間ホルダを磁力により保持すると
ともに、保持面でＺ方向に移動可能な状態でかつＸ方向
を軸に回転可能な状態で支持する支持部とを有すること
を特徴とする探針位置決め機構。2. A probe having one end fixed by a spring member and a displacement detection sensor for detecting displacement of the probe, and adjusting the position of the spring member with respect to the displacement detection sensor. In a holding probe positioning mechanism, a holder that holds the spring member and a magnetic force that holds the holder are supported by a holding surface so that the holder is movable in the X direction and rotatable about the X direction. And a supporting portion for holding the intermediate holder by magnetic force and supporting the movable surface in the Z direction on the holding surface and in the state of being rotatable about the X direction as an axis. Needle positioning mechanism.
針と、前記探針の変位を検出する変位検出センサとを有
し、前記変位検出センサに対して前記バネ部材の位置を
調整し保持する探針位置決め機構において、 前記ホルダのバネ部材固定部を非磁性体で構成したこと
を特徴とする探針位置決め機構。3. A probe having one end supported by a spring member, and a displacement detection sensor for detecting displacement of the probe, wherein the position of the spring member is adjusted with respect to the displacement detection sensor. A probe positioning mechanism for holding the probe, wherein the spring member fixing portion of the holder is made of a non-magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11374396A JPH09297149A (en) | 1996-05-08 | 1996-05-08 | Probe positioning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11374396A JPH09297149A (en) | 1996-05-08 | 1996-05-08 | Probe positioning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09297149A true JPH09297149A (en) | 1997-11-18 |
Family
ID=14620007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11374396A Withdrawn JPH09297149A (en) | 1996-05-08 | 1996-05-08 | Probe positioning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09297149A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100432618C (en) * | 2006-11-21 | 2008-11-12 | 贵州大学 | Two-dimensional displacement sensor and applied large-measuring range surface figure measuring device |
| JP2016099128A (en) * | 2014-11-18 | 2016-05-30 | 株式会社東京精密 | Measurement device |
-
1996
- 1996-05-08 JP JP11374396A patent/JPH09297149A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100432618C (en) * | 2006-11-21 | 2008-11-12 | 贵州大学 | Two-dimensional displacement sensor and applied large-measuring range surface figure measuring device |
| JP2016099128A (en) * | 2014-11-18 | 2016-05-30 | 株式会社東京精密 | Measurement device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
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