JPH0815541B2 - Leak method of valve with control function and decompression chamber - Google Patents
Leak method of valve with control function and decompression chamberInfo
- Publication number
- JPH0815541B2 JPH0815541B2 JP63156584A JP15658488A JPH0815541B2 JP H0815541 B2 JPH0815541 B2 JP H0815541B2 JP 63156584 A JP63156584 A JP 63156584A JP 15658488 A JP15658488 A JP 15658488A JP H0815541 B2 JPH0815541 B2 JP H0815541B2
- Authority
- JP
- Japan
- Prior art keywords
- decompression chamber
- gas
- valve
- inflow
- control function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/002—Component parts of these vessels not mentioned in B01J3/004, B01J3/006, B01J3/02 - B01J3/08; Measures taken in conjunction with the process to be carried out, e.g. safety measures
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Lift Valve (AREA)
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
Description
【発明の詳細な説明】 〔概 要〕 減圧状態の減圧室に気体を流入して大気圧にする機器
及び減圧室のリーク方法に関し、減圧室に流入させる流
入気体の流入速度を減速し、減圧室の室内圧が大気圧に
到達するまでの流入に要する時間を短縮させて、減圧室
内のパーティクルの浮遊を防止することが可能な制御機
能付きバルブ及び減圧室のリーク方法の提供を目的と
し、 流入気体の入口及び出口を備えた流路と、この流路に
おける流入気体の流入量を規制する弁体と、供給される
駆動気体と内蔵する弾性体の加勢力との圧力差によりこ
の弁体の開放状態を制御する手段とを具備するように構
成する。DETAILED DESCRIPTION OF THE INVENTION [Overview] The present invention relates to a device for inflowing a gas into a decompressed chamber in a decompressed state to bring it to atmospheric pressure and a leak method for the decompressed chamber. For the purpose of providing a valve with a control function capable of preventing the particles from floating in the decompression chamber and a method of leaking the decompression chamber, by shortening the time required for the inflow of the chamber to reach the atmospheric pressure. A flow path having an inlet and an outlet for inflow gas, a valve body that regulates the inflow amount of the inflow gas in this flow path, and this valve body due to the pressure difference between the driving gas supplied and the biasing force of the elastic body contained therein. And means for controlling the open state of the.
本発明は、真空を利用する装置に係り、特に減圧状態
の減圧室に気体を流入して大気圧にする機器及び減圧室
のリーク方法に関するものである。The present invention relates to an apparatus that utilizes a vacuum, and more particularly to a device that causes a gas to flow into a depressurized chamber in a depressurized state to bring it to atmospheric pressure and a leak method for the depressurized chamber.
近年、真空を利用する装置において、減圧状態の減圧
室に気体を流入して大気圧にする場合に、この減圧室に
流入する気体により減圧室内のパーティクルが室内に浮
遊し、この減圧室内で処理した製品の表面に付着し、製
品の品質を劣化させる障害が発生している。In recent years, in a device utilizing a vacuum, when a gas is introduced into a decompression chamber in a decompressed state to reach atmospheric pressure, the gas flowing into the decompression chamber causes particles in the decompression chamber to float inside the chamber, and the particles are processed in the decompression chamber. There is a failure that adheres to the surface of the produced product and deteriorates the quality of the product.
以上のような状況から減圧室に流入する気体により減
圧室内のパーティクルが室内に浮遊しないように、減圧
室に気体を流入させることが可能な機器及び方法が要望
されている。Under the circumstances as described above, there is a demand for an apparatus and a method capable of allowing gas to flow into the decompression chamber so that particles in the decompression chamber do not float inside the chamber due to the gas flowing into the decompression chamber.
従来の減圧室に気体を流入させるのに用いる機器及び
方法について第３図〜第４図及び第６図により説明す
る。A conventional device and method used for introducing gas into a decompression chamber will be described with reference to FIGS. 3 to 4 and 6.
第６図は従来の真空を用いる装置の減圧室のリーク方
法を説明する図である。FIG. 6 is a diagram for explaining a leak method in a decompression chamber of a conventional apparatus using vacuum.
図において、減圧状態にある減圧室10を大気圧にする
場合は、排気側のバルブ１を閉じて気体流入側にバルブ
19を駆動エアにより開くと、非常に圧力の高い流入気体
が減圧室10内に流入する。In the figure, when the decompression chamber 10 in the depressurized state is brought to atmospheric pressure, the valve 1 on the exhaust side is closed and the valve on the gas inflow side is closed.
When 19 is opened by driving air, an inflow gas having a very high pressure flows into the decompression chamber 10.
このようにして気体を減圧室10内に流入すると、第４
図に点線で示すように、非常に大きな流速で流入気体が
減圧室10に流入し、第３図に点線で示すように、減圧室
10の室内圧が急激に上昇して真空度が低下し、減圧室10
内の多量のパーティクルが浮遊し、減圧室10内の処理済
の製品の表面に付着し、製品の品質を劣化させ、製品歩
留りを低下させている。When the gas thus flows into the decompression chamber 10, the fourth
The inflowing gas flows into the decompression chamber 10 at a very high flow rate as shown by the dotted line in the figure, and as shown by the dotted line in FIG.
The room pressure of 10 suddenly rises and the degree of vacuum decreases,
A large amount of particles in the inside float and adhere to the surface of the processed product in the decompression chamber 10, deteriorating the quality of the product and reducing the product yield.
このような状態になるのを防止する方法として、第６
図に示すように流入気体の最大流量を制限するために流
量の微量調整が可能なニードルバルブ20をバルブ19の近
傍に設け、減圧室10内に流入する気体の流入を絞るとい
う方法、或いは更にフィルタ21を設けて流入を絞るとい
う方法を採用している。As a method of preventing such a state,
As shown in the figure, in order to limit the maximum flow rate of the inflowing gas, a needle valve 20 capable of minute adjustment of the flow rate is provided in the vicinity of the valve 19, and a method of restricting the inflow of gas flowing into the decompression chamber 10, or further The method of providing the filter 21 and restricting the inflow is adopted.
この場合は、第４図に一点鎖線にて示すような小さな
流速で流入するが、減圧室10の室内圧を大気圧にするた
めには第３図に一点鎖線にて示すように長時間が必要で
ある。In this case, the gas flows in at a low flow velocity as shown by the alternate long and short dash line in FIG. 4, but it takes a long time as shown by the alternate long and short dash line in FIG. is necessary.
以上説明の従来の減圧室に気体を流入させるのに用い
る機器及び方法ににおいては、気体の流量が絞られてい
ない場合には、第４図の点線で示す流速の曲線の時間が
０に近い時点で、減圧室に流入する流入気体の流速が急
激に早くなるので、減圧室内のパーティクルが室内に浮
遊し、この減圧室内で処理した製品の表面に付着すると
いう問題点があり、減圧室内のパーティクルが浮遊しな
いように流入気体の流量を非常に小さく設定して減圧室
への流体の流入を行う場合には、流速は第４図の一点鎖
線で示す曲線のように推移し、減圧室内圧を大気圧にす
るのに第３図に一点鎖線にて示すように非常に長時間を
必要とし、実用に供することが出来ないという問題があ
り、流入側のバルブにパルスモータを用いた電動式バル
ブが採用される場合があるが、コスト或いは設置に要す
るスペース等に問題があり、既存設備への導入が困難で
あるという問題点があった。In the conventional apparatus and method used for flowing gas into the decompression chamber described above, the time of the flow velocity curve shown by the dotted line in FIG. 4 is close to 0 when the gas flow rate is not restricted. At this point, the flow velocity of the inflowing gas that flows into the decompression chamber is rapidly increased, so that particles in the decompression chamber float in the chamber and adhere to the surface of the product processed in the decompression chamber. When the flow rate of the inflowing gas is set to a very small value so that the particles do not float and the fluid flows into the decompression chamber, the flow velocity changes as shown by the chain line in FIG. As shown by the alternate long and short dash line in FIG. 3, it takes a very long time to bring the pressure to atmospheric pressure, and there is a problem that it cannot be put to practical use. When valves are adopted There is, but there is a problem with the space, such as required for cost or installation, there is a problem that it is difficult to introduce to the existing facilities.
本発明は以上のような状況から減圧室に流入させる流
入気体の流入速度を減速し、減圧室内のパーティクルの
浮遊を防止するとともに、大気圧に到達する時間を短縮
させることが可能な制御機能付きバルブ及び減圧室のリ
ーク方法の提供を目的としたものである。The present invention has a control function capable of reducing the inflow velocity of the inflowing gas flowing into the decompression chamber, preventing particles from floating in the decompression chamber, and shortening the time to reach the atmospheric pressure in the above situation. The purpose of the present invention is to provide a leak method for valves and decompression chambers.
本発明の制御機能付きバルブは、流入気体の入口及び
出口を備えた流路と、この流路における該流入気体の流
入量を規制する弁体と、供給される駆動気体と内蔵する
弾性体の加勢力との圧力差により該弁体の開放状態を制
御する手段とを具備するように構成する。The valve with a control function of the present invention includes a flow path having an inlet and an outlet for inflow gas, a valve body for regulating the inflow amount of the inflow gas in the flow path, and a drive gas to be supplied and an elastic body incorporated therein. And a means for controlling the open state of the valve body by the pressure difference from the biasing force.
本発明の減圧室のリーク方法は、制御機能付きバルブ
によりこの弁体の開放状態を制御し、この減圧室への流
入気体の流入速度を制御するように構成する。The leak method of the decompression chamber of the present invention is configured such that the valve with a control function controls the open state of the valve body to control the inflow velocity of the inflow gas into the decompression chamber.
流入気体によりパーティクルが浮遊するか否かを決め
るのは、パーティクルの付着力をρ，流入気体の圧力を
p,パーティクルと気体分子との衝突確立をλとすると、
ρ＞ｐλの条件を満足する場合には、パーティクルの浮
遊が発生しない。Whether or not the particles float due to the inflow gas is determined by the particle adhesion force ρ and the inflow gas pressure.
Let p, the probability of collision between particles and gas molecules be λ,
When the condition of ρ> pλ is satisfied, particles do not float.
この条件を流入気体の流入開始時より流入完了まで持
続させることが必要である。It is necessary to maintain this condition from the start of the inflow of the inflow gas to the completion of the inflow.
即ち、減圧室の室内圧が低く、パーティクルと気体分
子との衝突確率λが大きな間は流入気体の流入速度を減
速しておき、減圧室の室内圧が高くなるに従ってパーテ
ィクルと気体分子との衝突確率λが小さくなれば、流入
気体の流量を多くして減圧室の室内圧を高くしてもパー
ティクルの浮遊は生じない。That is, while the pressure inside the decompression chamber is low and the collision probability λ between particles and gas molecules is large, the inflow velocity of the inflowing gas is decelerated, and as the pressure inside the decompression chamber increases, the particles collide with gas molecules. If the probability λ decreases, the particles do not float even if the flow rate of the inflowing gas is increased to increase the pressure inside the decompression chamber.
本発明においては、第１図或いは第５図に示すような
制御機能付きバルブを用いるので、減圧室のリークに際
してその弁体の動作を流入気体の流入速度を減速するよ
うに制御し、その弁体の開放状態を上記の条件に適合す
るように行うので、減圧室への流入気体の流速は第４図
に実線にて示すように推移し、減圧室の室内圧は第３図
に実線にて示すように推移する。In the present invention, since the valve with a control function as shown in FIG. 1 or 5 is used, the operation of the valve body is controlled so as to reduce the inflow velocity of the inflowing gas when the decompression chamber leaks, and the valve is controlled. Since the open state of the body is adapted to the above condition, the flow velocity of the gas flowing into the decompression chamber changes as shown by the solid line in FIG. 4, and the pressure inside the decompression chamber changes to the solid line in FIG. Changes as shown.
このように減圧室への流入気体の流入速度を減速する
ことにより、減圧室の室内圧を制御することができ、減
圧室内におけるパーティクルの浮遊を防止することが可
能となる。By decelerating the inflow velocity of the inflowing gas into the decompression chamber in this way, it is possible to control the indoor pressure of the decompression chamber and prevent particles from floating in the decompression chamber.
以下第１図〜第４図について本発明の一実施例を、第
５図について本発明の他の実施例を説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 to 4, and another embodiment of the present invention will be described with reference to FIG.
第１図は本発明による一実施例の制御機能付きバルブ
の構造を示す図であり、第２図は本発明による一実施例
の減圧室のリーク方法を説明する図である。FIG. 1 is a diagram showing a structure of a valve with a control function according to an embodiment of the present invention, and FIG. 2 is a diagram for explaining a leak method of a decompression chamber according to an embodiment of the present invention.
第１図および第２図において、駆動エアが供給されて
いない場合には、弁体２はスプリング５の圧力により弁
座１に押しつけられてこの制御機能付きバルブは流入気
体が減圧室10に流入しないように遮断している。In FIG. 1 and FIG. 2, when the driving air is not supplied, the valve body 2 is pressed against the valve seat 1 by the pressure of the spring 5, and the valve with the control function allows the inflow gas to flow into the decompression chamber 10. It is shut off so as not to.
減圧室10に流入気体を流入させようとする場合には、
まず三方切換弁９に通電して作動させ、駆動エアをニー
ドルバルブ７を通してシリンダ３のスプリング５を収容
していないピストン４の下部の部分に流入させる。When trying to make the inflow gas flow into the decompression chamber 10,
First, the three-way switching valve 9 is energized to operate, and drive air is flown through the needle valve 7 into the lower portion of the piston 4 that does not house the spring 5 of the cylinder 3.
この駆動エアの圧力は徐々に高くなりピストン４を押
し上げる。このピストン４の動作に伴いピストン４に連
結されている弁体２も徐々に押し上げられて弁座１から
離れ、その間に隙間が生じる。The pressure of this driving air gradually increases and pushes up the piston 4. With the operation of the piston 4, the valve body 2 connected to the piston 4 is also gradually pushed up and separated from the valve seat 1, and a gap is formed therebetween.
このように弁体２と弁座１の隙間が徐々に変化するの
で、流入気体の減圧室10への良好な流入が可能となる。Since the gap between the valve element 2 and the valve seat 1 gradually changes in this manner, the inflow gas can be favorably introduced into the decompression chamber 10.
流入気体の流入を停止する場合は、三方切換弁９への
通電を停止すると、シリンダ３のピストン４の下部に供
給されていた駆動エアは直ちに逆止弁８を通って三方切
換弁９の排気口から排出される。When the inflow of the inflowing gas is stopped, when the energization of the three-way switching valve 9 is stopped, the drive air supplied to the lower portion of the piston 4 of the cylinder 3 immediately passes through the check valve 8 and is exhausted from the three-way switching valve 9. Exhausted from the mouth.
このように弁座１と弁体２の隙間が徐々に大きくなる
と、減圧室10の室内圧は第３図に実線にて示すように変
化し、流入気体の流速は第４図に実線にて示すように変
化する。When the gap between the valve seat 1 and the valve body 2 gradually increases in this way, the internal pressure of the decompression chamber 10 changes as shown by the solid line in FIG. 3, and the flow velocity of the inflow gas is shown by the solid line in FIG. It changes as shown.
第３図に時間の経過に伴う減圧室10の室内圧の変化を
示している。FIG. 3 shows a change in the internal pressure of the decompression chamber 10 with the passage of time.
本発明による一実施例の減圧室10の室内圧は第３図に
実線にて示すようになり、流入する流入気体に何ら対策
を講じない点線にて示す場合と、減圧室10の室内圧が大
気圧に到達する時間はほぼ同じであるが、流入気体の流
入の初期の室内圧の上昇が非常に緩やかである。The pressure inside the decompression chamber 10 according to one embodiment of the present invention is shown by the solid line in FIG. 3, and the pressure inside the decompression chamber 10 is the same as the case where it is indicated by the dotted line where no measures are taken against the inflowing gas. Although the time to reach the atmospheric pressure is almost the same, the rise in the room pressure in the initial stage of the inflow of the inflow gas is very slow.
したがって、第４図に示す本発明による一実施例の減
圧室10内に流入する実線にて示す流入気体の総量は、流
入する流入気体に何ら対策を講じない点線にて示す場合
或いは流入する流入気体の流量を絞った一点鎖線にて示
す場合の総量と同量であるが、本発明による一実施例の
実線の場合はリークに要する時間の等しい点線の場合と
比較すると、流入気体の流入の初期の流速が非常に小さ
いので、減圧室10内のパーティクルを浮遊させることが
なくなる。Therefore, the total amount of the inflowing gas shown by the solid line in FIG. 4 in the decompression chamber 10 according to the present invention is shown by the dotted line in which no measures are taken to the inflowing gas or the inflowing inflow. Although it is the same as the total amount in the case where the flow rate of gas is narrowed down and indicated by a dashed-dotted line, in the case of the solid line of one embodiment according to the present invention, the inflow of inflow gas is Since the initial flow velocity is very low, particles in the decompression chamber 10 will not be suspended.
第５図に本発明による他の実施例の制御機能付きバル
ブの構造図を示す。FIG. 5 shows a structural diagram of a valve with control function of another embodiment according to the present invention.
この実施例は上記の一実施例の弁体２の油圧制御器６
の軸に接続し、弁体２の動作に制御を加えて更に弁体２
が円滑に移動するようにしている。In this embodiment, the hydraulic controller 6 for the valve body 2 of the above-described embodiment is used.
Connected to the shaft of the valve body 2 to control the operation of the valve body 2
I try to move smoothly.
以上の説明から明らかなように本発明によれば簡単な
構造の制御機能付きバルブを、減圧室に流入させる流入
気体の配管に接続して配設するので、減圧室の室内圧を
急激に上昇させないようにすることができ、流入の初期
の流入気体の流速が低いにもかかわらず、初期の流入気
体の流速が高い場合と同じ短時間に流入気体を減圧室に
流入させることが可能となり、減圧室内部でのパーティ
クルの浮遊を防止することが可能となる等の利点があ
り、著しい経済的及び、信頼性向上の効果が期待できる
工業的には極めて有用なものである。As is apparent from the above description, according to the present invention, the valve with a control function having a simple structure is connected to the pipe of the inflowing gas to be introduced into the decompression chamber, so that the pressure inside the decompression chamber rises rapidly. It is possible to prevent the inflow gas to flow into the decompression chamber in the same short time as when the initial inflow gas flow speed is high, even though the inflow gas flow speed in the initial inflow is low, There is an advantage that particles can be prevented from floating inside the decompression chamber, and it is industrially very useful because it can be expected to have a significant economic and reliability improvement effect.
第１図は本発明による一実施例の制御機能付きバルブの
構造を示す側断面図、 第２図は本発明による一実施例の減圧室のリーク方法を
説明する図、 第３図は減圧室の室内圧の推移を示す図、 第４図は流入する流入気体の流速の推移を示す図、 第５図は本発明による他の実施例の自己機能付きバルブ
の構造を示す側断面図、 第６図は従来の減圧室のリーク方法を説明する図、 である。 図において、 １は弁座、 ２は弁体、 ３はシリンダ、 ４はピストン、 ５はスプリング、 ６は油圧制御器、 ７はニードルバルブ、 ８は逆止弁、 ９は三方切換弁、 10は減圧室、 を示す。FIG. 1 is a side sectional view showing a structure of a valve with a control function according to an embodiment of the present invention, FIG. 2 is a view for explaining a leak method of a decompression chamber according to an embodiment of the present invention, and FIG. 3 is a decompression chamber. Showing changes in the indoor pressure of the valve, FIG. 4 shows changes in the flow velocity of the inflowing gas, and FIG. 5 is a side sectional view showing the structure of a self-functioning valve according to another embodiment of the present invention. FIG. 6 is a diagram for explaining a conventional leak method in a decompression chamber. In the figure, 1 is a valve seat, 2 is a valve body, 3 is a cylinder, 4 is a piston, 5 is a spring, 6 is a hydraulic controller, 7 is a needle valve, 8 is a check valve, 9 is a three-way switching valve, and 10 is Decompression chamber ,.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中村 優 福島県会津若松市門田町工業団地４番地 株式会社富士通東北エレクトロニクス内 (56)参考文献 特開 昭61−6472（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yu Nakamura Inventor, Yutaka Nakamura, Fukushima Prefecture Aizuwakamatsu City No. 4 Kadota-cho Industrial Park No. 4 (56) References JP 616472 (JP, A)
Claims (2)
差により該弁体の開放状態を制御する手段と、 を具備することを特徴とする制御機能付きバルブ。1. A flow path having an inlet and an outlet of an inflow gas, a valve body for restricting an inflow amount of the inflow gas in the flow path, a driving gas to be supplied, and a biasing force of an elastic body incorporated therein. A valve with a control function, comprising: a means for controlling an open state of the valve body by a pressure difference.
前記弁体の開放状態を制御し、前記減圧室への前記流入
気体の流入速度を制御することを特徴とする減圧室のリ
ーク方法。2. A method of leaking a decompression chamber, wherein the valve with a control function according to claim 1 controls an open state of the valve body to control an inflow velocity of the inflow gas into the decompression chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63156584A JPH0815541B2 (en) | 1988-06-24 | 1988-06-24 | Leak method of valve with control function and decompression chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63156584A JPH0815541B2 (en) | 1988-06-24 | 1988-06-24 | Leak method of valve with control function and decompression chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH026834A JPH026834A (en) | 1990-01-11 |
| JPH0815541B2 true JPH0815541B2 (en) | 1996-02-21 |
Family
ID=15630960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63156584A Expired - Fee Related JPH0815541B2 (en) | 1988-06-24 | 1988-06-24 | Leak method of valve with control function and decompression chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0815541B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002361118A (en) * | 2001-06-12 | 2002-12-17 | Rita System Kk | Flow rate regulation valve for supplying coating |
| JP4923969B2 (en) | 2006-11-16 | 2012-04-25 | トヨタ自動車株式会社 | Fuel cell system |
| JP5040411B2 (en) | 2007-04-18 | 2012-10-03 | トヨタ自動車株式会社 | Fuel cell system |
| US8769971B2 (en) | 2008-01-25 | 2014-07-08 | Alliance For Sustainable Energy, Llc | Indirect evaporative cooler using membrane-contained, liquid desiccant for dehumidification |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616472A (en) * | 1984-06-20 | 1986-01-13 | Hitachi Ltd | Leak apparatus |
-
1988
- 1988-06-24 JP JP63156584A patent/JPH0815541B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH026834A (en) | 1990-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |